JPS63132144A - Inspecting machine - Google Patents

Abstract

PURPOSE:To improve the operation rate of an inspecting machine by carrying a body to be inspected which is held in a cassette in case a body to be inspected is absence in a holding means used for a body to be inspected which is carried from outside. CONSTITUTION:It is checked whether an external mask substrate processing line is held on a mask substrate holding base 10 or not and when a mask substrate is held, a chucking unit 26 moves to hold the mask substrate on a receiving base 10 and move it to a mask substrate carrying-in/out holding base 20. When an inspection stage 48 is ready, the unit 26 is moved toward the stage 48 and the chucked mask substrate is mounted on a mask substrate receiving base 50. When there is no mask substrate on the holding base 10, the mask substrate is taken out of the cassette 18 by the holding base 20. Consequently, the idle time on the inspecting machine side due to the for waiting supply for the mask substrate from the mask substrate processing line is shortened, and the operation rate of the mask substrate inspecting machine is improved.

Description

[Detailed Description of the Invention] [Field of Application in Industry-1-] The present invention relates to an inspection machine that inspects an object to be inspected, and particularly relates to (a) a mask used in a photolithography process of a one-conductor integrated circuit; This invention relates to a mask substrate inspection machine that inspects defects such as pinholes and foreign matter adhesion on substrates (mask blanks).

[Prior Art] In a conventional mask substrate inspection machine, a large number of mask substrates to be inspected are supplied in a cassette (container), and the mask substrates are sequentially taken out from the cassette to a stand. From there, it is transported to the inspection stage by the transport mechanism and inspected.

[Problems to be Solved] Such a mask substrate inspection machine is basically intended to be used for medium-sized inspection, and does not take into account use in connection with a mask substrate processing line.

Of course, it would also be possible to arrange such a mask substrate inspection machine at the final stage of the mask substrate processing line and supply the mask substrates from the mask substrate processing line to a table for taking out the mask substrates.

However, conventional mask substrate inspection machines have only one mask substrate supply system as described above, and the inspection operation and the mask J are asynchronous with the loading of the mask substrate from the plate processing line. When used in a substrate processing line, there are 7 qualities that limit the speed at which mask substrates are carried in from the mask processing line to prevent overflow of mask substrates. There's a problem.

``Object of the Invention'' Therefore, an object of the present invention is to solve such conventional problems and to provide an inspection machine suitable for use by being incorporated into a mask substrate processing line. .

[Means for Solving the Problems] The present invention includes a first holding means for holding an object to be inspected such as a mask substrate carried in from the outside, and a first holding means for holding an object to be inspected such as a mask substrate brought in from the outside, and a first holding means for holding an object to be inspected such as a mask substrate brought in from the outside. The above object is achieved by comprising a second holding means for holding the object and a transport means for transporting the object to be inspected held in the first or second four holding stages to the inspection stage. It is.

[0 River] As described above, since the inspection machine of the present invention has two inspection object supply systems, the mask substrate (Mf inspection object) is supplied from the mask substrate processing line to the first holding stage of the one system. ) can be carried in and used by incorporating it into a mask substrate processing line.

Then, while waiting for the supply of mask substrates from the plate processing line, the mask substrates supplied from the cassette to the second holding means can be transferred to the JoL inspection stage, reducing the idle time of the inspection machine. I can do it.

Furthermore, even if trouble occurs in the mask substrate processing line, mask substrates can be supplied from the cassette and inspected.

In this manner, the inspection machine of the present invention can be used by being incorporated into a mask substrate processing line, and moreover, the operating rate can be increased by -1.

Furthermore, since the MlE material can be supplied from a cassette, it can also be used with medium-sized material as in the conventional method.

[Embodiment Code] An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic plan view showing a simplified embodiment of a mask substrate inspection machine according to the present invention.

In this figure, reference numeral 10 denotes a mask substrate holding stand (first holding means) for mounting and holding a mask substrate supplied from the outside (for example, a mask substrate processing line). A sensor 12 for detecting the presence or absence of a mask substrate is provided in association with the mask substrate holding stand 10.

Reference numeral 14 denotes an elevator, and a cassette 18 containing mask substrates is placed and fixed on the elevator stand 16.

20 is a mask substrate loading/unloading holding stand (second holding means). This mask substrate loading and unloading holding table 20 has a 1-1 skill for moving back and forth and raising and lowering (the driving mechanism for this is not shown), and takes out the mask substrate from the cassette 18 and holds it there by its own movement. or store the held mask substrate in the cassette 18.

A sensor 22 for detecting the presence or absence of a mask substrate is provided in connection with the mask J board loading/unloading holding table 20.

In addition, the mask substrate 11 is placed in the holding table 20 as a stationary stand, and the mask substrate is held in a cassette by another movable member.
The mask substrate may be pushed out from the cassette 18 and placed on the stand, or the mask substrate on the stand may be pushed into the cassette 18.

Further, the mask substrate holding stand 10 and the mask substrate loading/unloading holding stand 20 may be modified to have a structure in which a mask substrate carried in from the outside or a mask substrate in the cassette 18 is held between the claws. good.

Next, the loading side transport mechanism for transporting the mask substrate held on the mask substrate holding stand 10 or the mask substrate loading/unloading stand 20 to the inspection stage will be described.

26 is a chunking unit of this transport mechanism. This chunking unit 26 has a pair of arms 28.30
, a drive unit 32 for opening/closing and lowering it yI';
and a slide base 34 to which a drive unit 32 is attached.

A pair of rollers are provided at the ends of each of these arms 28.30, and by lowering and closing the arms 28.30, the rollers are moved to the edges of opposite corners of the mask substrate. They are engaged to sandwich the mask substrate.

The slide table 34 is guided by a pair of guide shafts 36 arranged in parallel below and can slide left and right.

38 is a motor for moving the chucking unit 26 left and right. A wire 44 is connected between a pulley 40 driven by this motor 38 and a rotatable pulley 42.
is hung, and this is connected to the slide stand 34.

Now, 48 is a scanning stage, a mask substrate holder for holding the mask substrate is a stand 50, and an optical part (not shown in the figure) for optically detecting defects in the mask substrate is 1'. .

In this optical section, the mask substrate holder scans the −L plane of the mask substrate held on the stand 50 with a laser beam, converts the scattered light in an oblique direction into an electrical signal using a photomultiplier, etc. It detects foreign matter adhesion, scratches, etc. on the mask substrate 1, and also converts the transmitted light to the surface of the mask substrate into an electrical signal using a photomultiplier, etc., and detects pinholes in the mask substrate from that signal. It is something.

Incidentally, the mask substrate holder holder 50 has 11 parts for the scanning.
It is possible to move backward i1 and to move up and down for focusing between the optical section and the mask substrate.

Next, parts related to the inspected mask substrate will be explained. 5
Reference numerals 4, 58, and 58 are elevators, and cassettes 66°, 68, and 70 for storing inspected mask substrates are placed and fixed on the respective elevator stands 80, 82, and 64.

At the back of each elevator 54, 56, 58, there is a relay stand 72.
, 74.78 are arranged. Each relay stand 72.74.
78 has the ability to move up and down 1-4f, but the drive mechanism for this is not shown in the figure.

On both sides of each relay stand 72, 74, 76, rollers 78 capable of simultaneous rotation + iJ are arranged in rows as shown. Each roller 78
is a conical roller whose diameter gradually decreases toward the tip (inner end in the figure).

In relation to each relay stand 72, 74.78, push fittings 80, 82.84 which are movable back and forth are arranged. Those drive mechanisms are omitted in the figure.

Next, a transport mechanism for carrying out the inspected mask substrate from the inspection stage 48 will be explained.

90 is a chucking unit similar to the chucking unit 26 of the carry-in side transport mechanism. This chucking unit 90 is also guided by the guide shaft 36 and can slide left and right.

92 is a motor for moving the chucking unit 90 left and right. A wire 9 is connected between a pulley 94 driven by this motor 92 and a rotatable pulley 96.
8 is connected to the chucking unit 90.

In addition, means for detecting that the cassette 18 is empty or has become a groove bar, the cassette ee, es.

There is a means for detecting when 70 is full, but it is not shown in the figure.

Reference numeral 99 denotes a control section for controlling the operations of the respective sections. Detection signals from the sensors 12 and 22, mask substrate carry-in request signals from the mask substrate processing line, and the like are input to this control section 99. In addition, the control unit 99 issues a signal such as 11 prohibition of carrying into the mask substrate processing line.

Next, the operation of this mask substrate inspection machine will be explained.

Note that the operations described below are merely examples, and other operations are of course possible.

FIG. 2 is a schematic flowchart for explaining operations related to the carry-in side conveyance mechanism, and in the following explanation,
Please refer to this as appropriate.

First, it is checked whether a mask substrate carried in from an external mask substrate processing line is placed and held on the mask substrate holding table 10 (step 100).

If the mask substrate is held, step 102
The following actions are performed. Chucking unit 26 (located at the position of the mask substrate loading/unloading holder 20, arm 28.3
0 is in the open state, Ljl is moved to the position shown in FIG. Ml 1) is held between arms 28.30. As it is, the arm 28.
It is moved to the 0 position.

The mask substrate holder of the inspection stage 36 is checked to see if there is no mask substrate on the stand 50, the unloading chucking unit 90 is not in the position of the inspection stage 48, and whether the mask substrate can be loaded (ready state). Stage 108)
.

If it is in the ready state, the process proceeds to step 110. First, the chucking unit 26 is moved toward the inspection stage 48, and the mask substrate holder is stopped at the position of the table 50. Arm 28°30 is lowered,
The mask substrate sandwiched between the mask substrate holder and the mask substrate holder is the stand 5.
0, and the mask substrate holder is held on the stand 50 by negative pressure suction. Arms 28.30 are then opened and forced further.

Next, the chucking unit 26 is returned to the position of the mask substrate loading/unloading holder 20 (step 112).

On the other hand, if the mask substrate is not on the mask substrate holding stand 104 in step 100, it is checked whether there is a mask substrate on the mask substrate loading/unloading holding stand 20 (step 10).
4).

If there is a mask substrate on the mask substrate loading/unloading holder 20,
The mask substrate is chucked by the chucking unit 26 (Step 106L, and the process proceeds to Step 108. If the inspection stage 48 is in a ready state, the mask substrate is carried into the mask substrate holder 50 (Step 110).
).

If there is no mask substrate in step 104, it is checked whether the cassette 18 is empty (step 103). If a mask substrate is stored in the cassette 18, the mask substrate is removed by the mask substrate loading/unloading holder 20 (step 105).

To explain this taking-out operation, the mask substrate loading/unloading holding table 20 is lowered, advanced rl'iI, and enters the lower side of the mask substrate to be taken out in the cassette 99. Next, the mask substrate loading/unloading holding table 20 is raised and retreated to the position shown in FIG. 1 with the mask substrate held thereon. The elevator 14 lowers the cassette 18 by one slot.

When the mask substrate is taken out and held on the mask substrate loading/unloading holder 20 in this manner, the mask substrate is chucked by the chucking unit 26 (step 10B), and the process proceeds to step 108.

On the other hand, if the cassette 18 is empty, an alarm is issued requesting the operator to replace the cassette (step 107).
, return to step 100.

As is clear from the explanation below, the mask substrate holding stand 1
Mask substrates supplied externally at 0 are preferentially loaded into the inspection step 48 . Then, the mask substrate holding stand 1
If there is no mask substrate in cassette 18, a mask substrate supplied from cassette 18 is loaded.

Therefore, idle time on the inspection machine side due to waiting for supply of mask substrates from a mask substrate processing line that operates asynchronously with the inspection operation is reduced, and the operating rate of the mask substrate inspection machine is decreased by -L.

Now, in step 108, if the inspection stage 48 is not in the ready state (in the case of the busy state), it is checked whether the mask substrate has been carried into the mask substrate holding table 10 (step 114). Step 1 while there is no mask substrate
The check at 08.114 is repeated, and the inspection stage 48 is kept in the chaffed state until the inspection stage 48 becomes ready.

On the other hand, if it is determined on the stage 114 that there is a mask substrate, it is checked whether there is a request to carry in the next mask substrate from the mask substrate processing line (step 116). When this carry-in request is made, the mask substrate will be carried into the mask substrate holding stand 10 within a certain period of time, so it is necessary to move the mask substrate on the mask substrate holding stand 10L by then.

Therefore, if it is determined in step 116 that there is a mask substrate loading position, it is checked whether there is a mask substrate on the mask substrate loading/unloading holding table 20 (step 118).

If there is no mask substrate there, the operation of step 120 is performed. First, arm 2 of the chucking unit 26
8.30 is lowered to F, and the mask substrate held there is placed on the mask substrate loading/unloading holder 20. Arms 28, 30 are then opened and then raised.

After that, the process returns to step 100, and the mask substrate holding stand 10
．． The negative mask substrate is chaffed by the chucking unit 26, and it becomes possible to receive the mask substrate from the mask substrate processing line.

If it is determined in step 118 that a mask substrate is present, the process proceeds to step 122 and subsequent steps.

First, the cassette 18 is checked to see if it is a slotted rod (step 122).

If the cassette 18 is not a grooved rod, the operation of storing the mask substrate into the cassette 18 of the mask substrate loading/unloading holder 20'' is performed (step 124).

To explain this storage operation, the cassette 18 is raised by one slot by the elevator 14,
A slot in which no mask substrate is stored is positioned at the mask substrate loading/unloading height.

Thereafter, the mask substrate loading/unloading holder 20 moves forward in a raised state, and the mask substrate thereon is pushed into the corresponding slot of the cassette 18. After this pushing is completed, the mask substrate loading/unloading holding table 20 is lowered and retreated to the position shown in FIG. 1, and at that position it is turned L. The cassette 18 is lowered by one slot.

When the mask substrate is stored in this way, it is determined whether the inspection stage 48 is in a ready state or not (step 12).
6) If it is busy, the mask substrate held by the chucking unit 26 will be transferred to the mask substrate loading/unloading holder 2.
0 (step 120) and returns to step 100.

In this way, when the inspection step 48 is busy while the mask substrate is being chucked in the chucking unit 26, and it becomes necessary to move the mask substrate from the mask substrate holding stand 10, the chucking unit 26 The mask substrate being held is once transferred to the mask substrate loading/unloading holder 20.

In other words, the mask substrate is buffered.

At that time, if there is already a mask substrate in the mask substrate loading/unloading holder 20, the mask substrate is placed in the cassette 1.
After storing in 8 (this is also buffering of mask substrate)
, the mask substrate is placed on the mask substrate loading/unloading holder 20 from the chucking unit 26.

Because of this buffering function, troubles with the inspection stage 48, troubles with the transport mechanism on the unloading side, and problems with the cassettes ee, es, 7 for storing inspected mask substrates are avoided.
Even if there is a wait for unloading of inspected mask substrates due to replacement of zeros, etc., this can be handled without interrupting the operation of the mask substrate processing line.

Furthermore, as is clear from the explanation up to this point, if the mask substrate is not supplied to the mask substrate holding stand 10, the cassette 1
The mask substrates supplied from stage 8 are continuously passed through inspection stage 4.
8. In other words, this mask substrate inspection machine can be used alone.

Note that if it is determined in step 122 that the cassette 18 is a grooved bar and there are no empty slots, the cassette 18 needs to be replaced. Therefore, in this case, a notification is issued to the operator, and the mask substrate processing line is notified that the mask substrate is prohibited (step 128). The mask substrate inspection machine then stops operating and waits for operator intervention (step 130).

Next, operations related to carrying out the inspected mask substrate will be explained. When the inspection of the mask substrate on the inspection stage 48 is completed, the chucking unit 90 moves to the position of the mask stand 50 and chucks the mask substrate.

Next, the chucking unit 90 moves to the position of the relay stand 72 if the inspection result of the mask substrate is "Run",
A mask substrate is placed on the relay stand 72.

At this time, since the relay table 72 is at -1:hlL/, the mask substrate is supported by the relay table 72 and does not contact the rollers 78 on both sides. Note that the front and rear ends of the L surface of the relay stand 72 are formed into step surfaces, and only the edge portions of the front and rear ends of the mask substrate are in contact with the step surfaces.

The relay table 72 on which the mask substrate is placed is lowered, and the mask substrate is placed on rollers 78 on both sides.

Here, since the roller 78 has the above-described shape, only the edge portions on both sides of the mask substrate come into contact with the roller 78.

Next, the pusher 80 moves forward while pushing the rear end of the mask substrate, and the mask substrate is sent through the rollers 781- and finally stored in the cassette 66.

After this storage, the push-in fitting is retracted to the position 1 in the figure, and the elevator 60 is operated to lower or move the cassette 66 by one slot.

If the inspection result of the mask board that has been inspected is "good",
The mask substrate is carried to relay table 74, and then stored in cassette 68 by a similar operation. Further, mask substrates with a "defective" inspection result are stored in the cassette 70 in the same manner.

If any of the cassettes 88, 68, 70 becomes a structure, to notify its replacement? A T-sign is issued.

In this embodiment, three cassettes are provided for storing inspected mask substrates, but if the evaluation stages of mask substrates are to be classified more finely, additional cassettes may be provided. Furthermore, more cassettes than the number of evaluation stages may be provided (thereby, the operation stop 1- for cassette replacement may be avoided).

1.8. - Although this invention has been described in detail in connection with the embodiments, this invention can be implemented with various modifications within the scope of the gist thereof.

Furthermore, the present invention can be applied to similar inspection machines for inspecting objects to be inspected other than mask substrates.

[Effects of the Invention] As is clear from the above description, according to the present invention, a first holding means for holding an object to be inspected such as a mask substrate carried in from the outside, and a first holding means for holding an object to be inspected such as a mask substrate carried in from the outside, The mask substrate processing line includes a second holding means for holding an object to be inspected, and a conveyance means for conveying the object to be inspected held by the first or second holding means to an inspection stage. It is possible to create an inspection machine that can be incorporated and used at high operating rates, and can also be used independently.

[Brief explanation of the drawing]

FIG. 1 is a schematic plan view showing a simplified mechanical configuration of a mask substrate inspection machine according to the present invention, and FIG. 2 is a schematic flowchart for explaining an example of the operation of the mask substrate inspection machine. 10...Mask substrate holding stand, 18...Cassette, 2
0...Mask substrate loading/unloading holding stand, 26...Chucking unit, 48...Inspection stage. Figure 2

Claims (2)

[Claims] (1) In an inspection machine that inspects objects to be inspected such as mask substrates, there is a first holding means for holding the objects to be inspected brought in from the outside, and a first holding means for holding the objects to be inspected supplied from a cassette. a second holding means of the first or second holding means;
1. An inspection machine comprising: a conveyance means for conveying an inspection object plate held by the holding means to an inspection stage. (2) The inspection machine according to claim 1, wherein the inspection object held by the first holding means is preferentially transported to the inspection stage.