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JPS6262252A - Pin position detector - Google Patents

Pin position detector

Info

Publication number
JPS6262252A
JPS6262252A JP60202371A JP20237185A JPS6262252A JP S6262252 A JPS6262252 A JP S6262252A JP 60202371 A JP60202371 A JP 60202371A JP 20237185 A JP20237185 A JP 20237185A JP S6262252 A JPS6262252 A JP S6262252A
Authority
JP
Japan
Prior art keywords
pin
laser
position detection
image
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60202371A
Other languages
Japanese (ja)
Other versions
JPH052163B2 (en
Inventor
Kenichi Matsumura
謙一 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60202371A priority Critical patent/JPS6262252A/en
Publication of JPS6262252A publication Critical patent/JPS6262252A/en
Publication of JPH052163B2 publication Critical patent/JPH052163B2/ja
Granted legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

PURPOSE:To enable highly accurate detection of a pin position with a relatively simple construction, by a method wherein a pin is irradiated with a slit laser light along the length thereof and at the right angle thereto and the reflected light and the scattered light are received to pick up an image of the pin along the length thereof to perform an arithmetic processing of the image. CONSTITUTION:The tip of a pin 2 arranged on an IC package 1 held with an IC adsorber 3 is irradiated with a slit light B3 which is formed through an expander comprising a convex lens 10 and a collimator 11 and a cylindrical lens 12 from a laser beam B1 from a He-Ne laser 9. The reflected light and the scattered light are taken with a camera 6 through a lens 4 and a close-up link 5. The image screen is displayed on a monitor 7, processed by an image processing section 8; thus, the pin position is detected at a high accuracy.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はピン位置検出装置に関し、特にピンを他部材に
挿入するに際し有効なピンの曲9等の欠陥の検出が容易
なピン位置検出装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pin position detection device, and particularly to a pin position detection device that can easily detect defects such as curved pin 9, which is effective when inserting a pin into another member. Regarding.

〔従来の技術〕[Conventional technology]

一般にICパ、ケージやリレー等のピンを他部材のピン
穴位置に挿入するにはピン先端位置に−差が少なく正し
いピン先端位置を維持することが特にピンの挿入を自動
化する上で重要である。
Generally, when inserting pins from IC devices, cages, relays, etc. into pin holes in other parts, it is important to maintain the correct pin tip position with little difference in the pin tip position, especially when automating pin insertion. be.

従来、この種ICパッケージやリレー等のピンに)の曲
)の検出を行なうには、第3図に示すように、IC吸着
器3で保持されたICパ、ケージ1のピンの先端部を側
方から互いに直交位置に配設したカメラ6X、6Yにて
撮像し、その撮像画像をそれぞれモニタ7Xと7Yにて
観察するか、又は画像処理装置8による画像処理によっ
て判断1位置検出を行なっていた6即ち、ピンの配列お
よびピン先端位置が全て正常であればモニター7X、7
Y画面上では一列ビン画像として認められる。例えばモ
ニター7X上ではX方向に配列された各ビン画像75は
、Y方向に完全に重畳しているため1本にしか見えない
。一方、モニター7Y上では、ピンの少なくとも一本の
先端部74が曲がっていると図のように他のピン73と
識別できることになる。
Conventionally, in order to detect the bending of the pins of this kind of IC packages, relays, etc., as shown in FIG. Images are taken from the sides with cameras 6X and 6Y arranged orthogonal to each other, and the images are observed on monitors 7X and 7Y, respectively, or judgment 1 position is detected by image processing by the image processing device 8. In other words, if the pin arrangement and pin tip position are all normal, monitors 7X and 7
On the Y screen, it is recognized as a single row bin image. For example, on the monitor 7X, the bin images 75 arranged in the X direction are completely overlapped in the Y direction, so that only one bin image 75 is visible. On the other hand, on the monitor 7Y, if at least one of the pins has a bent tip 74, it can be distinguished from other pins 73 as shown in the figure.

これに対して、第4図に示すようにピンの配列面(IC
パッケージ面)に対向してカメラ6を配置することによ
シ、上記第3図に示す如き装置の欠点を解決する装置も
提案されている。
On the other hand, as shown in Figure 4, the pin arrangement surface (IC
A device has also been proposed which solves the drawbacks of the device shown in FIG. 3 by arranging the camera 6 to face the package surface.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、前者の装置では撮像方向に並んだピン先端の曲
がシは識別できるもののどのピンに曲がシが生じている
かの識別は困難であった。また撮像手段としてのカメラ
は2台必要であるため構成が複雑化し、コスト面でも不
利であった。
However, with the former device, although it is possible to identify curves at the tips of pins arranged in the imaging direction, it is difficult to identify which pin has a curve. In addition, since two cameras are required as imaging means, the configuration becomes complicated and it is disadvantageous in terms of cost.

また、後者の装置においても、ピン画像と背景画像(I
Cパッケージ面画像)との識別が一般にコントラスト比
がそれ程良好でないことに起因して困難であった。
Also, in the latter device, a pin image and a background image (I
C package surface image) was difficult to distinguish because the contrast ratio was generally not very good.

〔問題点を解決するだめの手段〕[Failure to solve the problem]

本発明は、ピンを保持する保持部と、前記ピンの長さ方
向と直角方向からスリットレーザ光を前記ピンに照射す
るレーザ光源部と、前記ピンからの前記レーザ光の反射
光、散乱光を受光し前記ピンの長さ方向から見たピン画
像を撮像する撮像部と、前記ピン画像からビン位置を判
定演算する画像処理部とを備えて成ることを特徴とする
ビン位置検出装置である。
The present invention includes a holding part that holds a pin, a laser light source part that irradiates the pin with a slit laser beam from a direction perpendicular to the length direction of the pin, and a laser light source that irradiates the pin with reflected light and scattered light from the pin. This is a bin position detection device characterized by comprising: an imaging unit that receives light and captures a pin image viewed from the length direction of the pin; and an image processing unit that determines and calculates a bin position from the pin image.

〔実施例〕〔Example〕

以下本発明の実施例について図面を参照しながら説明す
る。
Embodiments of the present invention will be described below with reference to the drawings.

第1図は本発明になるピン位置検出装置の一基本例を示
す図である。IC吸着器3で保持されたICパッケージ
9上に配設されたピン2の先端部にはスリットビーム光
が照射される。即ち、He−Neレーザ9からのレーザ
ビーム光B、は、例えば凸レンズ10とコリメータ11
から構成されるエキスパンダーでビーム径が拡大された
後(ビーム光B2)1円柱レンズ12にてスリット光(
扇形光)B3が発生され、このスリット光B3がピン2
の先端部に照射される。こうして照射されたピン先端部
からの反射光、散乱光は、レンズ4.接写リンク5を介
してカメラ6に入射され、その撮像画面がモニター3に
て表示されるとともに、画像信号が画像処理部8にてビ
ン位置検出のための画像処理が為される。スリット光B
3の厚さはエキスパンダーで定められ、ピンの先端を含
む成る厚さに設5一 定される。本発明ではピン2の先端部分でレーザスリッ
ト光B3が効率的に反射、散乱され、この反射、散乱光
がピン2の真下に配置され、焦点深度をピン2の先端を
中心にして狭い範囲になるように調整されたカメラ6に
て撮像される。従って、ICパッケージの表面からの反
射光は画像信号としては無視でき、ピン画像だけがきわ
めて高コントラストで得られるので、ピン位置判定のた
めの画像処理やモニタ7上でのピン位置検出が視覚的に
も容易に行なえる。ここで、ピン位置算定のためにはピ
ン画像信号を基にしてその重心位置をビビン位置基準点
とすることが高精度化を計る上で有効である。また、ス
リットレーザ光B3の照射域以外の部分を第1図に示す
ように外光蔽光板13で覆うことによってよシコントラ
スト比の高い高精度なビン位置検出が可能となる。
FIG. 1 is a diagram showing a basic example of a pin position detection device according to the present invention. The tip of the pin 2 placed on the IC package 9 held by the IC suction device 3 is irradiated with slit beam light. That is, the laser beam B from the He-Ne laser 9 is transmitted through the convex lens 10 and the collimator 11, for example.
After the beam diameter is expanded by an expander consisting of (beam light B2), a slit light (
A fan-shaped light) B3 is generated, and this slit light B3
The tip of the beam is irradiated. The reflected light and scattered light from the tip of the pin irradiated in this way is transmitted to the lens 4. The image signal is inputted to the camera 6 via the close-up link 5, and the captured screen is displayed on the monitor 3, and the image signal is subjected to image processing for detecting the bin position in the image processing section 8. Slit light B
The thickness of the pin 3 is determined by the expander and is set to a thickness including the tip of the pin. In the present invention, the laser slit light B3 is efficiently reflected and scattered at the tip of the pin 2, and this reflected and scattered light is placed directly below the pin 2, and the depth of focus is narrowed around the tip of the pin 2. The image is captured by the camera 6 which is adjusted so that Therefore, the reflected light from the surface of the IC package can be ignored as an image signal, and only the pin image can be obtained with extremely high contrast, so image processing for pin position determination and pin position detection on the monitor 7 can be done visually. It can also be done easily. Here, in order to calculate the pin position, it is effective to use the center of gravity position as the bibin position reference point based on the pin image signal in order to improve accuracy. In addition, by covering the portion other than the irradiation area of the slit laser beam B3 with an external light shielding plate 13 as shown in FIG. 1, highly accurate bin position detection with a high contrast ratio becomes possible.

第2図(5)と(B)は本発明の他の実施例を示し、ピ
ンの曲がシによる位置検出精度の劣化を防止するととも
に、ピン曲がシ位置の検出をも可能とする例を示す。
Figures 2 (5) and (B) show other embodiments of the present invention, in which deterioration in position detection accuracy due to pin curvature is prevented, and the position of pin curvature can also be detected. shows.

6一 この実施例では、2個のHe−Neレーザ9a、9bか
らのレーザ光をポリゴンミラー12m、12bにてスリ
ット化してスリット光Baa 、 Bsbを互いに反対
側からICパッケージ1上のピ/2の先端部分に照射し
、ピン2からの反射光、散乱光を、レンズ4.接写リン
ク5を介してカメ26にて撮毬する。一方向からのスリ
ット光の照射を行なう場合、ピンが照射方間に拍i寮曲
がっていると、ピンの曲がシ部のカメラ側部分(背面部
)はスリット光が照射されずその部分からの反射光強度
は小さい値となるためコントラストが小さくなシ、轟該
ビンの曲がシの検出が困難となる。本実施例では互いに
反対方向からピン先端部を照射しているので、ピンがど
の方向に曲がっていようとも常にピン先端部からの反射
光はカメラにて受光され、このような問題が生じない。
6- In this embodiment, the laser beams from the two He-Ne lasers 9a and 9b are slitted by polygon mirrors 12m and 12b, and the slit beams Baa and Bsb are applied to pin/2 pins on the IC package 1 from opposite sides. The reflected light and scattered light from the pin 2 are irradiated onto the tip of the lens 4. A photograph is taken with the camera 26 via the close-up link 5. When irradiating slit light from one direction, if the pin is bent in the irradiation direction, the slit light will not be irradiated on the camera side part (back part) of the bent part of the pin, and the slit light will not be irradiated from that part. Since the intensity of the reflected light is small, it becomes difficult to detect songs with low contrast. In this embodiment, since the pin tips are irradiated from opposite directions, the reflected light from the pin tips is always received by the camera no matter which direction the pin is bent, and this problem does not occur.

また、第2図(B)に示すように、ピン2の上下位置は
2軸テーブル14にて調整可能であるので、スリットビ
ーム光の照射領域をピンの根元部近辺から先端部分に至
るまで徐々に移動させてやればピンの各高さ位置に応じ
た曲がル状況が簡単に得られる。
Furthermore, as shown in FIG. 2(B), since the vertical position of the pin 2 can be adjusted using the two-axis table 14, the irradiation area of the slit beam light can be gradually adjusted from the vicinity of the base of the pin to the tip. If you move it to the position, you can easily obtain the bending situation corresponding to each height position of the pin.

尚、スリットビーム光を得るためにはガルバノミラ−を
用いることも勿論可能である。また、カメラにスリット
レーザ光の波長を有する光のみ通す色フィルターや干渉
フィルターを取9付けることによシ外来光の影譬を除去
し、よシ高精度なピン位置の検出を可能にすることもで
きる。
Incidentally, it is of course possible to use a galvanometer mirror to obtain the slit beam light. Furthermore, by attaching a color filter or an interference filter to the camera that allows only light having the wavelength of the slit laser beam to pass through, shadows caused by extraneous light can be removed, making it possible to detect pin positions with high precision. You can also do it.

〔発明の効果〕〔Effect of the invention〕

本発明は以上説明したように、比較的簡単な構成でピン
位置の高精度な検出が可能となシ、ピンの自動挿入装置
等に用いるとその効果はきわめて大きい。
As described above, the present invention enables highly accurate detection of pin positions with a relatively simple configuration, and is extremely effective when used in automatic pin insertion devices and the like.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明によるピン位置検出装置の基本構成図、
第2図(5)と(B)は本発明の一実施例を示す要部構
成図、第3図と第4図は従来のピン位置検出装置の構成
図である。 1・・・・・・ICパッケージ、2・・・・・・ピン、
3・・・・・・IC吸着器、4・・・・・・レンズ、5
・・・・・・接写リンク、6,6X。 6Y・・・・・・カメラ、7,7X、7Y・・・・・・
モニター、8・・・・・・画像処理部、9・・・・・・
He−Neレーザ、10・・・・・・凸レンズ、11・
・・・・・コリメータ、12・・・・・・円柱レンズ、
12M、12b・・・・・・ボリゴンミ9−113・・
・・・・外光蔽光板、14・・・・・・2軸テーブル。 、゛・・−
FIG. 1 is a basic configuration diagram of a pin position detection device according to the present invention;
FIGS. 2(5) and 2(B) are main part configuration diagrams showing an embodiment of the present invention, and FIGS. 3 and 4 are configuration diagrams of a conventional pin position detection device. 1...IC package, 2...pin,
3...IC adsorption device, 4...lens, 5
・・・・・・Close-up link, 6,6X. 6Y... Camera, 7, 7X, 7Y...
Monitor, 8... Image processing section, 9...
He-Ne laser, 10...Convex lens, 11.
...Collimator, 12...Cylindrical lens,
12M, 12b...Borigonmi 9-113...
...External light shielding plate, 14...2-axis table. ,゛・・−

Claims (6)

【特許請求の範囲】[Claims] (1)ピンを保持する保持部と、前記ピンの長さ方向と
直角方向からスリットレーザ光を前記ピンに照射するレ
ーザ光源部と、前記ピンからの前記レーザ光の反射光、
散乱光を受光し前記ピンの長さ方向から見たピン画像を
撮像する撮像部と、前記ピン画像からピン位置を判定演
算する画像処理部とを備えて成ることを特徴とするピン
位置検出装置。
(1) a holding part that holds the pin; a laser light source part that irradiates the pin with a slit laser beam from a direction perpendicular to the length direction of the pin; and reflected light of the laser beam from the pin;
A pin position detection device comprising: an imaging unit that receives scattered light and captures a pin image viewed from the length direction of the pin; and an image processing unit that determines and calculates a pin position from the pin image. .
(2)特許請求の範囲第(1)項において、前記レーザ
光源部は円柱レンズ、ガルバノミラー又はポリゴンミラ
ーを備え、前記スリットレーザ光を発生させていること
を特徴とするピン位置検出装置。
(2) The pin position detection device according to claim (1), wherein the laser light source section includes a cylindrical lens, a galvano mirror, or a polygon mirror, and generates the slit laser beam.
(3)特許請求の範囲第1項において、前記レーザ光源
部は、2つのスリット光レーザ光を発生させ、各々直交
する方向から前記レーザ光を前記ピンに照射させる手段
を備えることを特徴とするピン位置検出装置。
(3) In claim 1, the laser light source section is characterized by comprising means for generating two slit laser beams and irradiating the pin with the laser beams from directions perpendicular to each other. Pin position detection device.
(4)特許請求の範囲第1項のおいて、前記保持部と前
記レーザ光源部の少なくとも一方は前記ピンの長さ方向
に移動可能であることを特徴とするピン位置検出装置。
(4) The pin position detection device according to claim 1, wherein at least one of the holding section and the laser light source section is movable in the length direction of the pin.
(5)特許請求の範囲第1項において、前記レーザ光源
部はレーザ光径を所定値に拡大するエキスパンダーを備
えることを特徴とするピン位置検出装置。
(5) The pin position detection device according to claim 1, wherein the laser light source section includes an expander that expands the diameter of the laser beam to a predetermined value.
(6)特許請求の範囲第1項において前記保持部および
前記ピンの前記レーザ光の照射部以外部分には蔽光板が
設けられていることを特徴とするピン位置検出装置。
(6) The pin position detection device according to claim 1, wherein a light shielding plate is provided in a portion of the holding portion and the pin other than the laser beam irradiation portion.
JP60202371A 1985-09-11 1985-09-11 Pin position detector Granted JPS6262252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60202371A JPS6262252A (en) 1985-09-11 1985-09-11 Pin position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60202371A JPS6262252A (en) 1985-09-11 1985-09-11 Pin position detector

Publications (2)

Publication Number Publication Date
JPS6262252A true JPS6262252A (en) 1987-03-18
JPH052163B2 JPH052163B2 (en) 1993-01-11

Family

ID=16456390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60202371A Granted JPS6262252A (en) 1985-09-11 1985-09-11 Pin position detector

Country Status (1)

Country Link
JP (1) JPS6262252A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297541A (en) * 1988-05-25 1989-11-30 Matsushita Electric Ind Co Ltd Inspecting device for electronic parts
US6755367B2 (en) 2002-04-02 2004-06-29 International Business Machines Corporation Sensing position of pin on tape inside cartridge shell

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297541A (en) * 1988-05-25 1989-11-30 Matsushita Electric Ind Co Ltd Inspecting device for electronic parts
US6755367B2 (en) 2002-04-02 2004-06-29 International Business Machines Corporation Sensing position of pin on tape inside cartridge shell

Also Published As

Publication number Publication date
JPH052163B2 (en) 1993-01-11

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