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JPS625627Y2 - - Google Patents

Info

Publication number
JPS625627Y2
JPS625627Y2 JP1980188732U JP18873280U JPS625627Y2 JP S625627 Y2 JPS625627 Y2 JP S625627Y2 JP 1980188732 U JP1980188732 U JP 1980188732U JP 18873280 U JP18873280 U JP 18873280U JP S625627 Y2 JPS625627 Y2 JP S625627Y2
Authority
JP
Japan
Prior art keywords
vacuum
test object
leak detector
leak
vacuum valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980188732U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57112230U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980188732U priority Critical patent/JPS625627Y2/ja
Publication of JPS57112230U publication Critical patent/JPS57112230U/ja
Application granted granted Critical
Publication of JPS625627Y2 publication Critical patent/JPS625627Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP1980188732U 1980-12-27 1980-12-27 Expired JPS625627Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980188732U JPS625627Y2 (fr) 1980-12-27 1980-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980188732U JPS625627Y2 (fr) 1980-12-27 1980-12-27

Publications (2)

Publication Number Publication Date
JPS57112230U JPS57112230U (fr) 1982-07-12
JPS625627Y2 true JPS625627Y2 (fr) 1987-02-09

Family

ID=29992498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980188732U Expired JPS625627Y2 (fr) 1980-12-27 1980-12-27

Country Status (1)

Country Link
JP (1) JPS625627Y2 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337585A (en) * 1976-09-21 1978-04-06 Nippon Oxygen Co Ltd Air separation method by adsorption

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337585A (en) * 1976-09-21 1978-04-06 Nippon Oxygen Co Ltd Air separation method by adsorption

Also Published As

Publication number Publication date
JPS57112230U (fr) 1982-07-12

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