JPS6242430A - Bonding head - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] [Industrial application field]

The invention relates to a bonding head of a wire bonding machine'3 device for bonding a wire A7 to an electronic or electrical component, such as a so-called bump contact surface.

[Particularly related to mechanical devices for ultrasonic coupling.] [Conventional technology]

For example, a mechanical device such as No. 1 above is disclosed in West German patent application No.
, P 33 43 73g, which comprises a bonding head with a bonding tool attached to an ultrasonic transducer, which, when the bonding tip of the bonding tool is placed, is activated during operation of the mechanical device. , pressing an electrically conductive wire against the contact surface of an electrical or electronic component. The wire is taken from a suitable wire supply, for example a spool. The mechanical device may also include a wire clamp, with which the wire being removed from the spool can be clamped. The wire clamp is generally movable back and forth in the direction in which the wire is fed to properly position the free end of the wire as it is removed from the reel after the joining operation is completed. In many previously known machines, the wire reel is
It is mounted on top of the bonding head transducer,
The wire then removed from the spool passes through a hole in the transducer and some holes in the coupling tool to reach a position between the coupling tip and the contact surface. This arrangement was not entirely satisfactory. [Problem to be Solved by the Invention] If the coupling terminal area on the electrical or electronic component is
It is practically impossible with the proposed configuration to change the inclination of the wedge and/or the basic settings of the transducer. This is because the wire feed is through a transducer. If the transducer and the wire spool have to be adjusted according to the change in wedge inclination, this makes the overall construction rather expensive. Also, the proposed configuration can only accommodate the relatively small size 7111 reel of the bonding head. This is because there is very little space available on the 7117 reel above the bonding head. In reality, no space is left for a wire tension sensor.

[Means to solve the problem]

The object of the present invention is to provide 12
The objective is to provide a bonding head that is superior to the solutions proposed, in particular the transducer and/or
Alternatively, the inclination of the wedge with respect to the transducer can also be easily varied, which is particularly important for the installation of larger size wire reels, especially for thicker wires (>100μ1T).
If the MW of the reel in I) is given, then . This object is solved in a surprisingly simple way by the feature that, with respect to the wedge part, the wire spool is adapted to be mounted on the side of the bonding head facing the transducer. This makes the overall configuration even more compact. The transducer and wedge can be set to basic I: and varied in slope, regardless of wire feed. In particular, the arrangement according to the invention provides a rotational bonding
The head is suitable for the conventional microscope 1 observation.
No matter what, I can't give it to you. With a stationary bonding head, microscopic observation must be performed obliquely from the front or from the side. This can also be done relatively easily. In the configuration according to the present invention, the wire winding frame and w)7 tightening t
It is also readily possible to arrange a wire tension sensor between the web means or the wedge controlling the reel drive. In the area in which the wire spool is arranged according to the invention:
-ffi large size wire reel, e.g. 50Il
There is sufficient space for a wire spool with an outer diameter of 1 m to 70 mm and a length of 25 IllI1 or more. Placing such a wire A-15 frame on top of the transducer is not possible with conventional bonding heads due to their very compact construction. Especially when using such a large size wire reel,
This is not possible due to the fact that 1 is sent through the converter. This type of wire feeding does not allow for significant lateral movement of the wire. A special constructional advantage is also the guiding means associated with the wire spool, which is funnel-shaped or has a wire exit end passing through the center of the wire spool and towards the wedge. It is in the form of a small guide tube with a As mentioned above, the need for a wire to pass through a hole in the transducer has been eliminated, but typically the wire is guided to the bonding tip by passing through a small hole in the lower portion of the iJ3 coupling tool. Therefore, the angle at which the wire is fed to the bonding tip could not be easily and simply changed. It is therefore further proposed to adjustably mount the wire guide of the bonding head, which guide is adjacent to the inlet end through which the wire from the reel passes and to the bonding tip of the bonding tool. It has an outlet end that is located in the same direction. This guide is mounted in such a way that the angle at which the wire is fed to the coupling tip can be adjusted. Using the bonding head according to the invention, it is therefore possible to avoid passing the wire through the guide hole of the bonding tool.
A wire can be fed to the coupling tip of the coupling tool. Therefore, by adjusting the position of the guide, the angle at which the wire is fed to the coupling tip can be varied. In a preferred bonding head according to the present invention, the bonding tip is provided with a narrow groove which restricts lateral movement of the wire during the bonding operation. Of course, where necessary, the bonding head according to the invention can be equipped with a wire feeding device by which the wire is actively fed from the wire spool, for example by rotating the wire spool. Where a wire feeder is provided, a wire tensioner as described above may be conveniently placed between the wire spool and the wire clamp, thereby controlling the speed of the wire feeder. can do. However, it has been found that wire feeding devices are not essential for many types of wire. Because the wire is not routed through the transducer or coupling device itself, use a larger diameter wire than previously used, e.g., up to about 12 mils in diameter. be able to.

【Example】

The following describes one bonding machine embodying the present invention, to be understood with reference to the accompanying drawings.
A detailed description of the head will be given below. However, this head
It will be appreciated that the description has been chosen to illustrate the invention by way of example. 1 shows a wire bonding machine embodying the invention for bonding wires to contact surfaces of electronic or electrical components, such as chips. The illustrated machine includes a frame 12 and a bonding head that is arranged to rotate about an axis 36 . The electrical components to which the wires are coupled are supported on the support 15. Means, not shown, are provided for adjusting the relative position of the frame 12 and the support 15, and the coupling tip, or coupling tip 19, of the coupling tool 18 is provided for adjusting the relative position of the frame 12 and the support 15. The bonding tip 19 can be aligned and pressed against its position on the component to effect the bond during operation of the mechanical device. The bonding head 10 GJ is conveniently mounted on a member of < 36 to move the component supported by the support 15 towards or away from the coupling chip 19. The bonding tip 19 is arranged on an axis 36 at right angles to the plane providing support for the support 15, on which support surface the components to which the wires are bonded are supported. The bonding head 10 comprises transducer means 16;
The part of the transducer means remote from the axis 36 is attached to the frame 12 of the bonding head 10. The coupling device 18 is mounted on the transducer means 16 so that the coupling depth 19 lies approximately on the axis 36. The reel 22 of the wire 20 is rotated around the frame 1.
It is attached to the bracket 13 of No. 2. Also attached to the bracket 13 is a guide collar 56. The position of the guide collar can be adjusted on the bracket 13 in the direction of the arrow 58 according to the angle at which it is desired to feed the wire 20 to one of the coupling tips of the coupling tool 18. The machine shown is equipped with a guide collar 56, which merely provides an auxiliary guide for the wire 20, if the reel 22
It can be omitted if it is not powered to feed the wires from the wire. Where the spool 22 is powered, a suitable sensor (not shown in FIG. 1) is connected to the machine to sense the tension in the wire 20 and thus to limit the drive of the spool 22. provided in the device. A guide 60 for the wire 20 is adjustably mounted on the frame 12 and includes an annular member 62 (ie a capillary tube) through which the wire 20 is fed to the coupling tip 19 . Member 62 has a passageway 66 (see FIG. 4) extending therethrough through which wire 20 from spool 22 passes from the inlet end of member G2. Passage 6G
The majority of the diameter is significantly larger than the maximum diameter of the wire for which the annular member 62 is suitable. Outlet end G of annular member 62
The outlet end portion 68 of the passageway 6G, which is open to the
It is a reduced diameter that is only slightly larger than the largest wire diameter adapted for use in the special member 62 (eg, up to about 0.3 mm in diameter). Thus, the angle at which the wife 20 emerges from the member G2 is dictated by the angle of the outlet end portion 68 of the passageway with respect to the axis 36. Arm 70, as shown by arrow 72,
It is mounted for rotational movement about a pivot 74 which is fixed to a member of the frame 12. This arm can be tightened in any angular position, at which point it can be tightened by screws (not shown) on the pivot 74.
is adjusted around. At the outer end portion of the arm remote from the pivot 74, the clamping bush 76 is rotatably mounted on the shaft. The annular member G2 is slidably received in a passage extending through the pusher core 6 perpendicular to the axis of rotation of the shaft of the bushing. A screw 78 tightens the annular member 62 to the back of the bushing 16 at a predetermined position, and a screw (not shown) tightens the shaft of the bushing 76 on the arm 70. By loosening the screw tightening the shaft of bushing 7G in arm 70 and the screw tightening arm 70 to pivot 74, the screws are further removed so that member 62 can be driven into the passageway of bushing 76. By loosening 78, arm 70 and bushing 7G can be rotated as shown by arrows 72.80. The inclination of member 62 with respect to axis 36 is thus adjusted such that the wire passing through member 62 is routed to coupling tip 19 at the desired angle, and during rotational adjustment, member 62 itself is adjusted. slides into the passageway of the bushing 7G so that the outlet end 64 remains adjacent to the coupling tip 19. Once the guide member 62 is adjusted to the desired position, the various tightening screws move the arm 70. to its adjusted position. It is rotated to secure the bushing 76 and guide member 62. A wire fastener 24 is mounted to a portion of the frame 12 for pivoting movement about an axis 28 (see double arrow 30) to tighten the wire during a wire bonding operation, similar to a conventional wire bonding operation. Move slightly. Y) 7 fastener 24 is
Jaws 26 of fastener 24 just above the inlet end of member θ2
It is installed in The jaw part 2G has a wider tightening area (indicated by a dotted line in the drawing) than usual, and the wire 20 is attached to the jaw part 2G over the entire fourth part of the angle adjustment where the guide part 6o can be angled. can still be tightened by (
(See Figure 6). A knife portion 82 is mounted adjacent the coupling tool 18 on the opposite side of the coupling tool relative to the guide portion 60 to cut the wire at the appropriate location after the coupling operation. The knife part 82 is
A solenoid (not shown) is actuated in a manner previously known in wire bonding machinery. The use of knife portion 82 to cut the wire after bonding is necessary where thicker wires are used. However, where the mechanical device is operated to perform wire bonding operations using thin wires, the wires may be eroded and torn apart by pulling the wires through wire fasteners 24 (wire (as is well known in coupling machinery). As can be seen from FIGS. 2 and 3 of the accompanying drawings, the coupling tip 19 has a shallow groove 84. It is effective to prevent wires from escaping laterally from beneath the bonding tip 19 during bonding during operation of the mechanical device. The lower portion of the coupling tool 18 and the exit end 64 of the annular member 62 are tapered such that the exit ITl end θ4 can be positioned very closely adjacent the coupling tip 19. FIG. 5 is a view of the lower end portion of a coupling device for use in a mechanical device such as that described in connection with FIG. 6; The illustrated guide passage 86 is disposed in the lower end portion of the coupling device, so that the wire can be guided through the coupling section 8 of the coupling device.
The angle sent to 8 is fixed. As previously mentioned, the adjustable guide 60 guides the coupling depth 1 of the coupling tool 18.
The angle of the wire fed into 9 can be adjusted over a considerable range according to the joining operation to be performed. The bonding head 10 shown in FIG. 6 is very similar to the bonding head of FIG. A sonic transducer 16 and an electrical connection terminal area (not shown) of an electrical or electronic component while arranged on the ultrasonic transducer 16 and being ultrasonically excited thereby. Wire 20 such as a tying tool or wedge portion 18 that presses conductive wire 20
With the wire spool 22 to be unwound and the tail of the wire 22 placed in its proper position after the completion of each joining operation, it is possible to reciprocate in the wire feed direction 2 as already described above in connection with FIG. Wire tightening is provided with means 24 and the like. but,
In addition, the wire tightening means 24 and the drive stage therefor as well as the first knife part 82 are both ultrasonically excitable coupling device 18 and transducer 1.
It can be said that the device is arranged so that the vibration is isolated with respect to 6. However, in other cases, wire tightening [
The pull means 24 is preferably movable upwardly and downwardly with the bonding wipe 18 to prevent bonding of the wires near the wire feed side of the bonding tool 18. Supplementary information to the above explanation can be found in the first West German patent application No. P 33 43
See 738,6. As can be seen in FIG. 6, the wire spool 22 is attached to the bonding head 10 or its frame 1 on the side opposite the transducer 16 as seen with respect to the bonding tool 18.
2. This winding frame 22 is attached to the bonding head 10 so as to be rotatably driven. The inclination of the coupling device 18 with respect to the transducer 16 and thus the coupling terminal area of the component (not shown) and/or the basic setting of the transducer 16 can be varied or adjusted within a large range (see the embodiments described above). flexible and virtually independent of wire feed. The upward and downward movement of coupling tool 18
This occurs by pivoting the transducer 16 about the axis 14 in the direction of the double arrow E1732. Coupling device or wedge 18. Converter 1θ. The wire clamping means 24 and the wire 7 feeding means define approximately a common plane. The pivot axis 14 is almost like that! ! It is growing directly. This plane holds the pivot axis 28 of the wire clamping means 24. In this plane,
A wire tension sensor 34 is provided, which will be described in detail below. This sensor is connected to the wire reel 22
and the wire clamping means 24 and is used to control the rotational drive of the life frame 22. The embodiment shown in FIG. Bonding of
It is the head. The axis of rotation of this bonding head 10 is indicated by a dot 36 in FIG. 6 (see FIG. 1). This axis extends approximately perpendicular to the contact area of the components to be joined and passes through the joining tool 18, as already described in connection with FIG. The wire spool 22, which is also mounted for rotation about an axis 38 extending generally parallel to the pivot axis 14.28, is associated with this 3! I! The opening 4 in the upper ridge of the log 2 facing the wire spool 22 has a wire guiding member in the form of a circular ridge 40.
2 extends substantially across the entire width of the life pick frame 22 (see FIG. 8). Another embodiment of the wire guide member is a narrow wire guide tube 44.
This wire guide tube passes through the center of the spring frame 22 and has a wire insertion funnel 4 disposed at the -4 of the spring frame 22.
6 and a wire deflection portion joined on opposite sides, and a joining tool? i, i.e. in the form of a deflection tube 48 directed towards the wedge 18 (see FIG. 7). In this embodiment, the bobbin 22 is preferably mounted to the bonding head 10 for rotation about an axis 50 that extends generally parallel to the axis of rotation 36 of the rotary bonding head 1o. For this purpose, a further bobbin receiver 52 is arranged in the bobbin area of the bonding head 10 . In FIGS. 1 to 8, the bobbin drive was not shown. In this regard, conventional means are relevant and have been omitted in order to facilitate an understanding of the basic principles of the invention. In FIG. 6, the reciprocating movement of the upper clamping jaw 26 (FIG. 6) is indicated by double arrow 54. The joining tip of the joining tool 18 facing the joining area of the components to be joined is configured, for example, in the manner described above. Adjustable guide 60 for wire 20 is not shown in FIG. This guide portion 60 can be added if appropriate.

[Brief explanation of drawings]

FIG. 1 is a diagram in side view, partially cut away, of a first embodiment of a life bonding machine showing a bonding head embodying the invention. FIG. 2 is a side view showing the coupling tip of the coupling tool of the head. FIG. 3 is a front view of the coupling tip of the coupling tool. FIG. 4 is a sectional view of the guide portion of the bonding head. FIG. 5 is a side view of a coupling tip of a prior art coupling tool. FIG. 6 is a partially cut away side view diagram of a second embodiment of a wire bonding machine showing a bonding head embodying the present invention. FIG. 7 is a schematic side view showing the arrangement of the wire spools of the bonding head on an enlarged scale, which arrangement is a variation of FIG. FIG. 8 is a partial view of the bonding head taken along line 1--2 of FIG. 6, showing the wire reel and associated wire feeding means. 10-0. Bonding head, 14.28... Shaft, 15... Support part, 16... Ultrasonic transducer, 18.
...Binding tool, 19...Binding depth, 20-0. Wire, 22... Wire supply unit, 24... Wire tightening means, 34... Wire tensioner, 36... Rotating shaft, 40... Guide funnel, 42° Mouth of funnel.
48... Deflection tube, 60... Guide portion, 64... Outlet end, 70... Arm, Z... Wire feeding direction. Patent Applicant Dinabert Delfotec Niss A Patent Attorney Nobu Kobashi Jundo Patent Attorney Susumu Murai FIG, 2 FIG, 3
FIG, 4 FIG, 5F
IG, 6 FIG, 7 FIG, 8 Procedural amendment & (shu) ■(July 2z, 1986, 1986 Patent Application No. '127117 2, Title of invention Bonding head 3, Amendment) Patent applicant address: Switzerland, Zeher-2416 Les Brenetzschannauger 2 Name: Dinabert Delfotec Niss Aer Nationality: Switzerland 4, Agent: 163 Nishi-Shinjuku, Shinjuku-ku, Tokyo 1-25 No. 1 correction.

Claims (1)

Claims: 1) A bonding head, in particular a bonding head for ultrasonically coupling a wire (20) to a contact surface of an electronic or electrical component, comprising an ultrasonic transducer (16);
and a wire supply (22) from which the wire (20) is unwound;
and optionally comprises wire clamping means (24) for placing the wire tail in position after completion of the coupling operation, said clamping means being connected to the wire supply (22) and the coupling tool (18).
In the bonding head, the bonding tool (
18), the wire supply section (22) is connected to the transducer (
16) A bonding head characterized in that it is attached to a side of the bonding head (10) opposite to the bonding head (10). 2) characterized in that the basic setting of the inclination of the coupling device (18) with respect to the contact surface of the transducer (16) and/or the components to be coupled is respectively variable or adjustable; A bonding head according to claim 1. 3) The wire supply section (22) is a wire reel mounted on the bonding head (10) so as to be rotatably driven. Bonding head as described in section. 4) The wire (20) has an associated wire tension sensor (34) for controlling the rotational drive of the wire spool (22). The bonding head according to any one of Item 3. 5) said bonding head is configured as a rotating head, the axis of rotation (36) extending approximately perpendicular to the contact surface of the components to be bonded, and preferably, respectively;
The coupling tool (18) or its coupling tip (19)
Claim 1, characterized in that it extends through
The bonding head according to any one of items 1 to 4. 6) the transducer (16), the coupling device (18), the wire tightening means (24) and the wire feeding means are arranged substantially in the same plane, and the transducer (16)
and said bonding head (24) such that said wire clamping means (24) are each pivotable about an axis (14 and 28, respectively) extending substantially perpendicular to said plane.
10) The bonding head according to any one of claims 2 to 5, wherein the bonding head is attached to a bonding head. 7) Wire guiding means, preferably in the form of a flat guiding funnel (40), are associated with said wire spool (22) and located at the mouth (42) of said funnel facing the wire spool (22).
7. Bonding head according to any one of claims 1 to 6, characterized in that the wire spool (22) extends substantially across the entire width of the wire spool (22). 8) wire guide means in the form of a wire guide tube extending through the center of said spool (22);
In connection with 2), said guide tube has a wire insertion funnel (46) on one side thereof and a wire deflection portion extending from the opposite side, in particular a deflection tube (4) directed towards said coupling device (18).
8) A bonding head according to any one of claims 1 to 6, characterized in that it comprises a wire deflection part in the form of 8). 9) Cutting means (8) for cutting the wire (20)
2) the coupling tool (18) facing the wire feeding side;
, where the wire (20) after each joining operation is secured by said wire clamping means (24) to a joining tool (with its tail facing the wire feeding side) 18) so that it is almost flush with the side of
9. A bonding head according to any one of claims 1 to 8, characterized in that it is retractable up to at least such an extension. 10) A bonding head according to any one of claims 1 to 9, characterized in that the tightening path of the wire tightening means (24) is adjustable. 11) A wire (
A guide (60) having an inlet end through which the wire (20) passes and an outlet end (84) adjacent to the coupling tip (19) of the coupling device (18);
is a guide mounted in such a way that the angle at which the coupling tip (19) is fed can be adjusted. bonding head. 12) the guide (60) is mounted for angular movement about a first adjustment axis of the arm (70) and for movement in a direction perpendicular to the first adjustment axis; The arm (70) itself is also mounted for angular movement about a second adjustment axis (74) parallel to the first adjustment axis, thereby aligning the outlet end (64) with the coupling tip (19). 12. Bonding head according to claim 11, characterized in that the angle of the guide (60) is adjusted while maintaining it in a predetermined position adjacent to ). 13) The winding frame (22) and wire tightening means (24)
The wire (20) is mounted in the middle of the feed direction (Z
) has an auxiliary guide for aligning the wire (20) fed from the reel (22) with the entrance end of the guide (60) by an auxiliary guide (56) adjustably mounted on the side of the spool (22). Claim 11 or 1 characterized in that
3. The bonding head according to any one of Item 2. 14) with a support (15) for the component to which the wire (20) is coupled, which support (15) extends towards the coupling tip in a direction parallel to the axis 36 on which the coupling tip (19) lies; The connecting tip (19) is mounted for movement towards and away from the mechanical device, so that the coupling tip (19) presses the wire (20) against the contact surface of the component when the mechanical device is actuated. A mechanical device comprising a bonding head according to any one of claims 1 to 13.