JPS6236834A - Resin sealing device and method - Google Patents
Resin sealing device and methodInfo
- Publication number
- JPS6236834A JPS6236834A JP17645885A JP17645885A JPS6236834A JP S6236834 A JPS6236834 A JP S6236834A JP 17645885 A JP17645885 A JP 17645885A JP 17645885 A JP17645885 A JP 17645885A JP S6236834 A JPS6236834 A JP S6236834A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- force
- mold
- adhesive material
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 72
- 239000011347 resin Substances 0.000 title claims abstract description 72
- 238000007789 sealing Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims description 12
- 239000000853 adhesive Substances 0.000 claims abstract description 22
- 230000001070 adhesive effect Effects 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 22
- 239000004033 plastic Substances 0.000 abstract description 5
- 239000004640 Melamine resin Substances 0.000 abstract description 3
- 229920000877 Melamine resin Polymers 0.000 abstract description 3
- 230000033001 locomotion Effects 0.000 abstract description 2
- 230000001360 synchronised effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000012771 pancakes Nutrition 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
Description
【発明の詳細な説明】
($l1ll要〕
プラスチックテープまたはアルミニウム(A7り箔等を
用いて、樹脂成形時に発生する樹脂バリを自動的に除去
する樹脂封止装置および方法である。DETAILED DESCRIPTION OF THE INVENTION (Requires $11) A resin sealing device and method that automatically removes resin burrs generated during resin molding using plastic tape or aluminum (A7 foil, etc.).
本発明は樹脂封止装置および方法に関するもので、さら
に詳しく言えばリードフレームの樹脂封止工程の後に樹
脂封止装置の上型と下型に付着した樹脂バリを自動的に
除去する手段とその方法に関するものである。The present invention relates to a resin sealing device and method, and more specifically, the present invention relates to a resin sealing device and method, and more specifically, a means for automatically removing resin burrs attached to the upper and lower molds of the resin sealing device after the resin sealing process of a lead frame, and its method. It is about the method.
集積回路が形成された半導体チップを樹脂封止してなる
プラスチックICパッケージを製造するには次の工程に
よる。The following steps are used to manufacture a plastic IC package in which a semiconductor chip on which an integrated circuit is formed is sealed with resin.
グイステージ、インナーリード、外リードから成るリー
ドフレームのグイステージにICが形成された半導体チ
ップを接着し、半導体チップの電極とインナーリードと
をワイヤボンディングにより接続しくワイヤ付け)、ワ
イヤ付けの完了したリードフレームを第4図に示される
如(樹脂封止装置にセントする。A semiconductor chip with an IC formed thereon is bonded to the lead frame's lead stage, which consists of a lead stage, inner leads, and outer leads, and the electrodes of the semiconductor chip and inner leads are connected by wire bonding (wire attachment), and the wire attachment is completed. Place the lead frame in the resin sealing device as shown in FIG.
第4図は樹脂封止装置の下型11の平面図で、図におい
て、12はカル、13はランナー、14はゲート、15
はキャビティ、20はリードフレームを示す。リードフ
レーム20のグイステージがキャビティ15内に位置す
る如く配置してリードフレーム2oをセットすることに
よって第1工程は終る。FIG. 4 is a plan view of the lower mold 11 of the resin sealing device. In the figure, 12 is a cull, 13 is a runner, 14 is a gate, and 15
indicates a cavity, and 20 indicates a lead frame. The first step is completed by arranging the lead frame 20 so that the guide stage is located inside the cavity 15 and setting the lead frame 2o.
第2工程では、第5図の断面図に示される如く型締めと
樹脂注入をなす。なお同図において、16は上型、21
は前記した半導体チップ、22はワイヤ、23は封止樹
脂を示す。樹脂はランナー13、ゲート14を通ってキ
ャビティ15内に注入され、しかる後に硬化するもので
ある。エア・ヘント25は樹脂注入時キャビティ15の
空気を外に出す逃げ口である。In the second step, as shown in the sectional view of FIG. 5, mold clamping and resin injection are performed. In the figure, 16 is the upper mold, 21
22 represents the aforementioned semiconductor chip, 22 represents a wire, and 23 represents a sealing resin. The resin is injected into the cavity 15 through the runner 13 and gate 14, and then hardened. The air vent 25 is an escape port for letting air out of the cavity 15 during resin injection.
第3工程では第6図に示される如く上型と下型を開き(
型開け)、封止の終ったリードフレーム20を取り出す
。以上のモールディングサイクルは約170℃程度の温
度で行われ、2〜3分内に完了する。In the third step, open the upper and lower molds as shown in Figure 6 (
(open the mold) and take out the sealed lead frame 20. The above molding cycle is performed at a temperature of about 170° C. and is completed within 2 to 3 minutes.
(発明が解決しようとする問題点〕
型開けし、封止したリードフレームを除去した後におい
て、樹脂フラッシュ(IIlli)とも呼称される樹脂
バリ24が、第6図に太い黒線で示す如く上型と下型の
表面に付着することがあり、かかる樹脂バリはリードフ
レームの表面にも付着する。その原因は、上型と下型の
第5図に示すギャップt1〜t1はリードフレームの厚
さを基準に設定されるのであるが、リードフレームはそ
の厚さにバラツキがあり、前記した基準厚さに必ずしも
合致せず、上型と下型およびリードフレームの相互間に
微小ギャップが発生するからである。(Problems to be Solved by the Invention) After opening the mold and removing the sealed lead frame, resin burr 24, also called resin flash (IIlli), appears on the top as shown by the thick black line in FIG. Resin burrs may adhere to the surfaces of the mold and lower mold, and such resin burrs also adhere to the surface of the lead frame.The reason for this is that the gap t1 to t1 shown in FIG. 5 between the upper mold and the lower mold is due to the thickness of the lead frame. However, lead frames vary in their thickness and do not necessarily match the standard thickness mentioned above, resulting in a small gap between the upper and lower molds and the lead frame. It is from.
従来は、かかる樹脂バリをメラミン樹脂を用いるクリー
ニングで除去してきたが、それには3〜6時間の時間を
必要とする。または、冷空気の吹き付けや植物毛のブラ
シで除去していたが、樹脂バリを完全に除去することは
難しく、除去された樹脂バリが静電気を帯電しているた
めリードフレームや金型に付着する問題がある。従って
、樹脂封止装置を自動化で直接運転するときに自動化の
障害となる問題がある。Conventionally, such resin burrs have been removed by cleaning using melamine resin, but this requires 3 to 6 hours. Alternatively, resin burrs were removed by blowing cold air or brushing with plant hair, but it is difficult to completely remove resin burrs, and the removed resin burrs are charged with static electricity, so they adhere to lead frames and molds. There's a problem. Therefore, when directly operating the resin sealing apparatus by automation, there is a problem that becomes an obstacle to automation.
他方、リードフレームに付着した樹脂バリについては、
メ・7キ前にそれを除去しなければならない問題がある
。現在ではリードフレームはグイステージとインナーリ
ードとを前以ってメッキしておき、樹脂封止後に外リー
ドだけをメッキする工程が一般的であるが、このメッキ
前に樹脂バリを除去しなければならず、それはかなり時
間と労力を要する作業である。On the other hand, regarding resin burrs attached to the lead frame,
There is a problem that must be removed before Me.7. Nowadays, the common process for lead frames is to plate the guide stage and inner leads in advance, and then plate only the outer leads after resin sealing, but the resin burrs must be removed before this plating. However, it is a task that requires considerable time and effort.
本発明はこのような点に浅みて創作されたもので、プラ
スチックICパンケージ等の成形時に発生する樹脂バリ
を自動的に除去する装置と方法を提供することを目的と
する。The present invention was created in light of these points, and it is an object of the present invention to provide an apparatus and method for automatically removing resin burrs generated during molding of plastic IC pancakes and the like.
c問題点を解決するための手段〕
第1図と第2図は本発明実施例の断面図、第3図は本発
明の他の実施例の断面図である。c. Means for Solving Problems] FIGS. 1 and 2 are cross-sectional views of an embodiment of the present invention, and FIG. 3 is a cross-sectional view of another embodiment of the present invention.
第1図と第2図において、半導体チップ等の電子デバイ
スの搭載されたリードフレーム20を樹脂封止装置の下
型IIにセントし、型締め、樹脂注入をなし、型開けを
なし封止が完了したリードフレーム20を除去した後に
樹脂バリ除去テープを挿入し、再度型締めを行って後に
型開けをなすことによって、上型16と下型11の表面
に付着した樹脂バリ24を除去するためのものであり、
そのためには、樹脂バリ除去テープ17を供給するロー
ル18等からなる手段19を設けて樹脂バリ除去テープ
17を自動的に給送するものであり、該テープ17はそ
の両面上に接着性材料層17aを設け、また場合によっ
てはスルーホール17bを形成して接着性材料層17a
と該テープ17との密着性を高める。In Figures 1 and 2, a lead frame 20 on which an electronic device such as a semiconductor chip is mounted is inserted into the lower mold II of the resin sealing machine, the mold is clamped, resin is injected, the mold is opened, and the sealing is completed. After removing the completed lead frame 20, a resin burr removal tape is inserted, the mold is clamped again, and the mold is opened afterward to remove the resin burr 24 attached to the surfaces of the upper mold 16 and the lower mold 11. It belongs to
To this end, a means 19 consisting of a roll 18 or the like for supplying the resin burr removing tape 17 is provided to automatically feed the resin burr removing tape 17, and the tape 17 has adhesive material layers on both sides thereof. 17a and, in some cases, through holes 17b are formed to form the adhesive material layer 17a.
and the tape 17 is improved.
前記した実施例においては、接着性材料層17aの樹脂
バリとの密着度が、樹脂バリと上型・下型との密着度よ
りも大なるものを選ぶことにより、上型・下型に付着し
た樹脂バリを効率良く除去するもので、該テープ17と
接着性材料層との密着度を高めるために、該テープ17
にスルーホール17bを形成し、接着性材料層がテープ
から剥がれることのないようにするものである。In the above-mentioned embodiment, the adhesive material layer 17a is selected to have a higher degree of adhesion with the resin burr than the degree of adhesion between the resin burr and the upper mold and the lower mold, so that the adhesive material layer 17a is not adhered to the upper mold and the lower mold. The tape 17 is used to efficiently remove resin burrs that have been removed, and to increase the degree of adhesion between the tape 17 and the adhesive material layer.
A through hole 17b is formed in the tape to prevent the adhesive material layer from peeling off from the tape.
以下、図面を参照して本発明の実施例を詳細に説明する
。Embodiments of the present invention will be described in detail below with reference to the drawings.
第1図を参照すると、本発明においては同図(alに示
される樹脂バリ除去テープ17(以下単に除去テープと
いう)を用いる。除去テープ17はその両面に接着性材
料層17aを設けたものであり、除去テープは樹脂材料
例えば耐熱性のあるポリエステル、強質紙またはアルミ
箔等で作り、接着性材料層17aには例えばメラミン樹
脂等を用いる。Referring to FIG. 1, in the present invention, a resin burr removal tape 17 (hereinafter simply referred to as removal tape) shown in FIG. The removal tape is made of a resin material, such as heat-resistant polyester, strong paper, or aluminum foil, and the adhesive material layer 17a is made of, for example, melamine resin.
第1図(blを参照すると、従来例の第3工程すなわち
型開け、封止完了リードフレーム除去が終った後に、上
型16と下型11とが離れたままの状態で、除去テープ
17を上型と下型の間に配置する。Referring to FIG. 1 (bl), after the third step of the conventional example, that is, mold opening, sealing, and removal of the lead frame, the removal tape 17 is applied while the upper mold 16 and the lower mold 11 remain separated. Place it between the upper and lower molds.
次に、第1図(C1に示される如く型締めによって上型
16と下型11とを互いに接触させる。このとき、除去
テープの接着性材料層17aは樹脂バリと強固に接触す
る。Next, as shown in FIG. 1 (C1), the upper mold 16 and the lower mold 11 are brought into contact with each other by clamping. At this time, the adhesive material layer 17a of the removal tape firmly contacts the resin burr.
次いで第1図(dlに示される如く型開けをなして上型
16と下型11とを離す。接着性材料層1.7aは、そ
れと樹脂ハリ24との間の密着度が、上型・下型と樹脂
バリ24との間の密着度よりも大なるものを選んである
から、型開けのとき、樹脂バリ24は上型・下型から離
れ、除去テープの接着性材料層に接着した状態にある、
すなわち樹脂バリ24は除去テープ側に移植される。次
いで除去テープ17を上型、下型の間から外し、前記し
た樹脂封止工程を再開する。Next, as shown in FIG. 1 (dl), the mold is opened and the upper mold 16 and the lower mold 11 are separated. Since the degree of adhesion between the lower mold and the resin burr 24 is selected to be greater than that between the lower mold and the resin burr 24, when the mold is opened, the resin burr 24 separates from the upper mold and the lower mold and adheres to the adhesive material layer of the removal tape. in a state,
That is, the resin burr 24 is transplanted to the removal tape side. Next, the removal tape 17 is removed from between the upper mold and the lower mold, and the resin sealing process described above is restarted.
除去テープ17を上型16と下型11の間に給送するに
は、第2図に示されるローラ18等からなる除去テープ
供給手段19を用い、ローラ18の回転を上型・下型の
動きに同期させると、樹脂バリの除去作業が樹脂封止装
置の操作と共に自動化されうる。In order to feed the removal tape 17 between the upper mold 16 and the lower mold 11, a removal tape supply means 19 consisting of a roller 18 shown in FIG. By synchronizing the movement, the resin burr removal work can be automated along with the operation of the resin sealing device.
またはローラからなる手段に代えて、シート状の除去テ
ープを自動的に供給する手段を設けてもよい。なお第2
図において、10はプレスを示す。Alternatively, instead of the roller means, means for automatically supplying a sheet-like removal tape may be provided. Furthermore, the second
In the figure, 10 indicates a press.
本発明の他の実施例においては、除去テープ17と接着
性材料1i17aとの密着性を高め接着性材料層17a
が剥がれることを防止するために、例えば直径が数十μ
mから数百μmのスルーホール17bを設けると、とな
り合うスルーホール17bの間の接着性材料層が剥げか
かっても、その傾向はスルーホールで断続され、接着性
材料層が除去テープと共に一体的であることが保障され
る。In another embodiment of the present invention, the adhesion between the removal tape 17 and the adhesive material 1i17a is increased, and the adhesive material layer 17a is
For example, in order to prevent the film from peeling off,
When through holes 17b with a diameter of several hundred μm are provided, even if the adhesive material layer between adjacent through holes 17b begins to peel off, this tendency is interrupted by the through hole, and the adhesive material layer is integrated with the removal tape. It is guaranteed that
また、さらに他の実施例として、耐熱性のプラスチック
フィルムまたは強質紙等を基材とする除去テープ17の
両面に接着剤でアルミニウム箔を接着したものを用いる
ことも有効である。この場合、アルミニウム箔の可塑性
を利用するものであり、接着剤が金型に付着する問題が
起らない。なお、この場合においても除去テープにスル
ーホールを設けてもよい。Furthermore, as another embodiment, it is also effective to use a removal tape 17 whose base material is a heat-resistant plastic film or strong paper, with aluminum foil adhered to both sides with an adhesive. In this case, the plasticity of aluminum foil is utilized, and the problem of adhesive adhering to the mold does not occur. In this case as well, through holes may be provided in the removal tape.
一つの使用例においては、樹脂バリの除去に従来3〜6
時間を要したのに比べ、2〜3分の樹脂封止工程の各サ
イクルの後に除去テープを挿入し除去するまで数秒から
数十秒の時間で足り、しかも除去テープを用いる樹脂バ
リの除去は樹脂封止装置の操作に同期して完全に自動化
されうるものであった。In one example of use, conventional 3 to 6
Compared to the conventional method, it only takes a few seconds to several tens of seconds to insert and remove the removal tape after each cycle of the 2-3 minute resin sealing process, and the removal of resin burrs using the removal tape is much easier. It could be completely automated in synchronization with the operation of the resin sealing device.
以上述べてきたように、本発明によれば、樹脂封止装置
における樹脂バリの上型・下型からの除去が自動的に確
実になされ、その結果リードフレームに樹脂バリが付着
することも防止され、プラスチックICパッケージ製造
歩留りの向上に効果大である。なお、本発明の適用範囲
は上記の場合に限定されるものではな(、トランスファ
ーモールディング装置の場合にも及ぶものである。As described above, according to the present invention, resin burrs in the resin sealing device are automatically and reliably removed from the upper and lower molds, and as a result, resin burrs are prevented from adhering to the lead frame. This is highly effective in improving the manufacturing yield of plastic IC packages. Note that the scope of application of the present invention is not limited to the above case (it also extends to the case of transfer molding equipment).
第1図(alないしTdlは本発明実施例の断面図、第
2図は除去テープ供給装置の断面図、第3図は除去テー
プの変型例の断面図、第4図は樹脂封止装置の下型とリ
ードフレームの配置を示す平面図、
第5図は従来例の断面図、
第6図は従来例の問題点を示す断面図である。
第1図ないし第6図において、
10はプレス、
11は下型、
12はカル、
13はランナー、
14はゲート、
15はキャビティ、
16は上型、
17は除去テープ、
17aは接着性材料層、
17bはスルーホール、
17cは窓開は部分、
18はローラ、
19は除去テープ供給手段、
20はリードフレーム、
21は半導体チップ、
22はワイヤ、
23は封止樹脂、
24は樹脂バリである。
#iミイか・1tAp?I几・召・:
第6図
り斤、−f鉾追図Figure 1 (al to Tdl is a sectional view of the embodiment of the present invention, Figure 2 is a sectional view of a removal tape supply device, Figure 3 is a sectional view of a modified example of the removal tape, and Figure 4 is a sectional view of a resin sealing device. FIG. 5 is a sectional view of the conventional example, and FIG. 6 is a sectional view showing the problems of the conventional example. In FIGS. 1 to 6, 10 is a press. , 11 is the lower mold, 12 is the cull, 13 is the runner, 14 is the gate, 15 is the cavity, 16 is the upper mold, 17 is the removal tape, 17a is the adhesive material layer, 17b is the through hole, 17c is the window opening part , 18 is a roller, 19 is a removal tape supply means, 20 is a lead frame, 21 is a semiconductor chip, 22 is a wire, 23 is a sealing resin, and 24 is a resin burr.・: No. 6 tsurikou, -f hokooizu
Claims (2)
含み、上型(16)と下型の間で電子デバイスの搭載さ
れたリードフレーム(20)を樹脂封止する装置におい
て、 両面に接着性材料層(17a)が形成された樹脂バリ除
去テープ(17)を、上型(16)と下型(11)の間
にそれらの操作と同期して自動的に供給する樹脂バリ除
去テープ供給手段(19)を設けてなることを特徴とす
る樹脂封止装置。(1) A device that includes an upper mold (16), a lower mold (11), and a press (10), and resin-seals a lead frame (20) on which an electronic device is mounted between the upper mold (16) and the lower mold. In this step, a resin burr removal tape (17) having an adhesive material layer (17a) formed on both sides is automatically fed between the upper mold (16) and the lower mold (11) in synchronization with the operation thereof. A resin sealing device comprising a resin burr removal tape supply means (19).
)を樹脂封止装置の下型(11)上に配置する工程、 上型(16)と下型(11)の型を締め樹脂(23)を
注入する工程、 上型(16)、下型(11)の型開けをなし封止された
リードフレーム(20)を除去する工程、樹脂バリ除去
テープ(17)を上型(16)と下型(11)の間に配
置する工程、 上型(16)と下型(11)の型締めをなす工程、およ
び 上型(16)と下型(11)を型開けする工程からなる
周期を繰り返すことを特徴とする樹脂封止方法。(2) Lead frame (20
) on the lower mold (11) of the resin sealing device, a step of tightening the upper mold (16) and the lower mold (11) and injecting the resin (23), the upper mold (16), the lower mold Step (11) of opening the mold and removing the sealed lead frame (20), placing the resin burr removal tape (17) between the upper mold (16) and the lower mold (11), the upper mold A resin sealing method characterized by repeating a cycle consisting of a step of clamping (16) and a lower mold (11), and a step of opening the upper mold (16) and the lower mold (11).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17645885A JPS6236834A (en) | 1985-08-10 | 1985-08-10 | Resin sealing device and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17645885A JPS6236834A (en) | 1985-08-10 | 1985-08-10 | Resin sealing device and method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6236834A true JPS6236834A (en) | 1987-02-17 |
Family
ID=16014048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17645885A Pending JPS6236834A (en) | 1985-08-10 | 1985-08-10 | Resin sealing device and method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6236834A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6473731A (en) * | 1987-09-16 | 1989-03-20 | Rohm Co Ltd | Manufacture of molding part in electronic component |
KR19980044247A (en) * | 1996-12-06 | 1998-09-05 | 황인길 | Molding method of semiconductor package |
KR100533756B1 (en) * | 2000-06-12 | 2005-12-06 | 앰코 테크놀로지 코리아 주식회사 | Mold for semiconductor package |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55137914A (en) * | 1979-04-13 | 1980-10-28 | Mitsubishi Electric Corp | Cleaning method for semiconductor producing device |
-
1985
- 1985-08-10 JP JP17645885A patent/JPS6236834A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55137914A (en) * | 1979-04-13 | 1980-10-28 | Mitsubishi Electric Corp | Cleaning method for semiconductor producing device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6473731A (en) * | 1987-09-16 | 1989-03-20 | Rohm Co Ltd | Manufacture of molding part in electronic component |
KR19980044247A (en) * | 1996-12-06 | 1998-09-05 | 황인길 | Molding method of semiconductor package |
KR100533756B1 (en) * | 2000-06-12 | 2005-12-06 | 앰코 테크놀로지 코리아 주식회사 | Mold for semiconductor package |
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