JPS6227285A - Conveyor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to a conveyance device in a dust-free environment such as a clean room, and particularly to a conveyance device that can protect objects to be conveyed from dust generated when opening and closing an entrance/exit door. It is related to.

[Conventional technology]

FIGS. 1, 4, and 5 are explanatory diagrams of a conventional lifting device for transporting semiconductor components between floors. In the figure, (1) is a hoistway installed between the first and second floors, (2) is a guide rail installed vertically within the hoistway (1), and (3) is a lift table. , the guide roller (3a) is moved up and down while rolling along the guide rail (2).

(4) is a hoisting machine, (5) is a tin rocket rotationally driven by the hoisting machine (4), (6) is a chain that is wound around the sprocket (5) and raises and lowers the lifting table (3), ( 7) is a balance weight, (8) and (8a) are entrance doors arranged in the hoistway (1) corresponding to each floor, and (8)
b) is the door guide part, (9) and (9a) are the air cylinders that open and close each entrance/exit door, ``A'' is the blower, ``α'' is the air pipe, (6)
) is an exhaust pipe, 0 pier is an air supply duct formed over the entire height of the hoistway (1), α→ is an air filter provided over the entire height of the hoistway (1), and the elevator to which the air supply pipe Ql) is connected An air supply duct (to) is formed between the passage (1) and the side wall of the passage (1). C1→ is a semiconductor to be transported, and (II3 is dust).

Next, the operation of the conveying device configured as described above will be explained. Inside the hoistway (1), air from the blower 01 is introduced into the air duct α■ via the air pipe <11), filtered by the air filter A4, and clean air is blown into the exhaust pipe (2). The air is returned to the blower αa through the air, creating a dust-free environment with a cleanliness level of 100, for example. and,
When transporting the semiconductor α9, which is an object to be transported, for example, from the second floor, which is a clean room, to the first floor, first, the elevating table (3) is brought to a stop facing the entrance door (8) on the second floor, and then The air cylinder (9) is contracted to
Open the entrance door (8) along the guide roller (3a),
Immediately move the transported object, the semiconductor α→, to the lifting table (3)
The air cylinder (9) is extended to close the entrance/exit door (8), and the hoist (4) is driven to lower the lifting table (3). Next, when the elevating table (3) stops facing the entrance door (8a) on the first floor, the air cylinder (9a) is contracted and the entrance door (8a) is stopped.
a) is opened to take out the semiconductor (to) from the lifting table (3), and then the air cylinder (9a) is extended and the entrance/exit door (8a) is closed. On the other hand, covered! When transporting semiconductors, which are general goods, from the first floor to the second floor, they are transported in a similar manner.

[Problem that the invention seeks to solve]

In a conventional conveying device as described above, an entrance door (8).

(8a) is opened and closed when the hoisting machine (4) starts and arrives at the lifting table (3).
As shown in the figure, dust (lG) generated from the guide rail (6a) of the door is scattered, and the air introduced into the air duct (G) from the air pipe αη passes through the air filter o4 in an almost horizontal air flow. and passes through the hoistway (1) to the exhaust pipe (towards)
There was a risk that the refluxed dust 06 would blow onto the semiconductor α0 placed on the lifting table (3), and the dust a0 would adhere to the semiconductor 05.

This invention was made to solve the above-mentioned conventional problems, and its purpose is to prevent dust generated when opening and closing an entrance/exit door from adhering to semiconductors, which are objects to be transported. shall be.

[Means for solving problems]

The conveyance device according to the present invention introduces clean air from one side of the conveyance path through an air filter, and creates a dust-free environment by suctioning and exhausting from the side of the capacity. The door is opened and closed when the moving table that transports the object is at a certain distance from the entrance door, and the object is protected from the scattering of dust generated near the door guide part of the entrance door when the door is opened and closed. It is designed to be protected.

[Effect]

In the conveyance device according to the present invention, the inside of the conveyance path is made into a dust-free environment, the timing for closing the entrance/exit door is set after the moving table has moved a predetermined distance, and the timing for opening the entrance/exit door is set after the moving table moves to a predetermined stop position. When the movable table reaches the distance and stops once, the dust generated by opening and closing the entrance door is removed from the hoistway by the horizontal airflow blown out from the air filter, and then the once stopped movable table is opened. The object to be transported on the movable table is transported to a scheduled stop position opposite to the entrance/exit door, avoiding the dust generated by opening/closing the entrance/exit door.

[Embodiments of the invention]

FIG. 1 is a front sectional view of a lifting device to which this invention is applied;
FIG. 2 is an explanatory diagram of the operation when the entrance/exit door is closed, and FIG. 3 is an explanatory diagram of the operation when the entrance/exit door is opened. In the figure, (1) ~ α
Q is the same as that shown in the conventional example.

Next, the operation of the lifting device configured as described above will be explained. As explained in the conventional example, the hoistway (1) installed between the first and second floors, both of which are clean rooms, is blown out from the air filter α→ installed over the entire height of the hoistway (1). The clean horizontal air flow creates a dust-free environment.

When transporting the semiconductor αQ, which is the object to be transported, from the second floor to the first floor, the elevating table (3) is stopped facing the entrance door (8) on the second floor, and the air cylinder (9) is contracted. and open the entrance/exit door (8). At this time, the door guide (8
b) Dust q0 generated from the surroundings is smeared by the clean horizontal air flow blown out from the air filter a◆ and exhausted to the exhaust fC11.
) are excluded. After this elimination time, the semiconductor C1υ is transferred from the entrance onto the lifting table (3) and the hoisting machine (4
) to lower the elevating table (3) toward the first floor. As shown in FIG.
When the air cylinder (9) is lowered by the distance from the position 3), the air cylinder (9) is extended and the entrance/exit door (8) is closed. The dust αQ generated at this time moves to the exhaust pipe O side by the horizontal airflow, but at this point the semiconductor (G) on the lifting table (3) has descended by the distance, so the dust αQ is moved to the side of the exhaust pipe O by the horizontal airflow. Airborne dust (not exposed to IQ).

Next, when transporting the semiconductor αG, which is an object to be transported, from the first floor to the second floor, as shown in FIG. Conveyance path (1)
When it reaches a position a distance h' from the planned position of the elevating table (3) shown by a chain line opposite to the entrance door (8) on the second floor, the elevating table (3) temporarily stops there. After stopping, the air cylinder (9) is retracted to open the entrance/exit door (8), but the dust αQ generated at this time is removed by the horizontal airflow, and the elevating table (3), which is temporarily stopped, is
Transfer path (1) without affecting the semiconductor α9 above.
It crosses the inside and is discharged from the exhaust pipe (6). Then, after a period of time for the generated dust (IQ) to be removed, the elevating table (3) is raised again and the entrance/exit door is opened.
8), and the semiconductor (to) on the lifting table (3) is carried out. Further, the opening/closing of the entrance/exit door (8a) on the first floor is performed in the same manner.

In the above embodiments, the object to be transported is described as a semiconductor, but the present invention is not limited to semiconductors, and the same effect can be achieved as long as the object to be transported has poor quality or reliability due to dust adhesion.

Further, in the above embodiments, the conveyance device was described as a lifting device, but the present invention can be applied to any type of conveyance device as long as it is disposed between clean rooms and has an entrance/exit door.

〔Effect of the invention〕

As explained above, in this invention, since the moving table opens and closes the door at a certain distance from the entrance/exit door, the dust generated when the entrance/exit door is opened and closed does not adhere to the transported object. This has the effect of preventing deterioration of the quality of conveyed objects and low reliability due to dust adhesion.

[Brief explanation of drawings]

FIG. 1 is a front sectional view of a lifting device to which the present invention is applied, FIG. 2 is an explanatory diagram of the operation of the invention when the doorway is closed, FIG. 6 is an explanatory diagram of the operation of the invention when the doorway is open, and FIG. FIG. 5 is an explanatory diagram of the operation when opening and closing the conventional entrance/exit door. In the figure, (1) is the hoistway, (3) is the hoisting table, (
8). (8a) is an entrance door, (8b) is a door guide part, and (9). (9a) is an air cylinder, u4 is an air filter, α is a semiconductor which is a general object, and α*Ua is dust. In the drawings, the same reference numerals indicate the same or corresponding parts. Agent: Patent Attorney Tadashi Sato Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] In a conveyance device in a dust-free environment such as a clean room, clean air is introduced into the conveyance path from one side wall through an air filter and exhausted from the other side wall to create a dust-free environment. The entrance/exit door is opened/closed when the movable table that transports the object is located a certain distance away from the entrance/exit door, and is protected from the scattering of dust generated near the door guide section of the entrance/exit door as it is opened/closed. A conveying device characterized by being able to protect conveyed objects.