JPS62267465A - Method for detecting contamination of surface of molten metal in deposition chamber of continuous vacuum deposition apparatus - Google Patents
Method for detecting contamination of surface of molten metal in deposition chamber of continuous vacuum deposition apparatusInfo
- Publication number
- JPS62267465A JPS62267465A JP11055086A JP11055086A JPS62267465A JP S62267465 A JPS62267465 A JP S62267465A JP 11055086 A JP11055086 A JP 11055086A JP 11055086 A JP11055086 A JP 11055086A JP S62267465 A JPS62267465 A JP S62267465A
- Authority
- JP
- Japan
- Prior art keywords
- molten metal
- deposition chamber
- metal
- opening degree
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims abstract description 47
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 47
- 238000011109 contamination Methods 0.000 title claims abstract description 17
- 238000000151 deposition Methods 0.000 title claims description 9
- 238000000034 method Methods 0.000 title claims description 6
- 238000001771 vacuum deposition Methods 0.000 title abstract description 3
- 230000008021 deposition Effects 0.000 title description 7
- 238000007740 vapor deposition Methods 0.000 claims description 13
- 229910000831 Steel Inorganic materials 0.000 claims description 12
- 239000010959 steel Substances 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 description 20
- 230000008020 evaporation Effects 0.000 description 20
- 230000007423 decrease Effects 0.000 description 11
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は帯鋼に金属皮膜を連続的に真空蒸着する装置の
蒸着室内における溶融金属表面の汚れを検出する方法に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for detecting contamination on the surface of molten metal in a deposition chamber of an apparatus for continuously vacuum depositing a metal film on a steel strip.
第5図の縦断面図にその一部分を示すような従来の連続
真空蒸着装置において、溶解槽8で溶解された例えば亜
鉛のような溶融金属11aは、はぼ真空に排気された蒸
着室1との気圧差によって、スノーケル7と介して蒸着
槽3へ吸い上げられ、メインヒータ6の加熱制御による
温度の調節とシャッタ4の開度制御とにより、帯鋼10
への所定の目付量(単位面積あたりの蒸着量)に見合っ
た蒸発量に調節される。In a conventional continuous vacuum deposition apparatus, a part of which is shown in the longitudinal cross-sectional view of FIG. Due to the pressure difference, the steel strip 10 is sucked up to the vapor deposition tank 3 via the snorkel 7, and the temperature is adjusted by the heating control of the main heater 6 and the opening degree of the shutter 4 is controlled.
The amount of evaporation is adjusted to match the predetermined basis weight (deposition amount per unit area).
適温に加熱されて蒸着室1へ連続的に送入される帯@1
0は、巻付ロール?へ巻掛けられて通板する際に、蒸発
槽5から蒸発した金属蒸気が、チャンネル2を経てその
表面に到達し、帯鋼10の温度が金属蒸気の凝固温度よ
り低いのでその表面に凝固し、蒸着される。Band @ 1 heated to an appropriate temperature and continuously fed into the deposition chamber 1
Is 0 a winding roll? When the steel strip is wound around the steel strip and passed through, the metal vapor evaporated from the evaporation tank 5 reaches the surface of the steel strip through the channel 2, and since the temperature of the steel strip 10 is lower than the solidification temperature of the metal vapor, it solidifies on the surface. , deposited.
この間に、溶融金1d11bの表面で真空中の微琶の酸
素による金属酸化物や溶解槽8で生成される金属化合物
及びその他の不純物が溶融金lfJ 11 aと共に蒸
発槽3へ吸い上げられ、メインヒータ6で加熱されて蒸
発するに従ってこれらが次第に溶融金属11bの表面を
覆ってゆき、蒸発量の減少すなわち目付量の不足になる
。During this time, metal oxides caused by a small amount of oxygen in vacuum on the surface of the molten gold 1d11b, metal compounds generated in the melting tank 8, and other impurities are sucked up to the evaporation tank 3 together with the molten gold lfJ 11a, and the main heater As they are heated and evaporated in step 6, they gradually cover the surface of the molten metal 11b, resulting in a decrease in the amount of evaporation, that is, an insufficient basis weight.
そこで従来は、一定の時間が経過すると、溶解槽8を上
方へ持ち上げて蒸発N5の尋融金属11bの表面を二点
鎖線で示すように一時的に上昇させ、掻取器5によって
表面の汚れ物質を除去していた。Conventionally, after a certain period of time has elapsed, the melting tank 8 is lifted upwards to temporarily raise the surface of the evaporated N5 melting metal 11b as shown by the two-dot chain line, and the scraper 5 removes dirt on the surface. substance was removed.
しかるに、蒸着室内の溶融金属表面に汚れが溜る速度は
一定でなく、また、オペレータの勘に頼る方法では、そ
の除去作業が遅れたときには汚れが溜りすぎ、その表面
を覆って蒸発面積の減少になると共にメインヒータ6か
らの輻射熱の吸収不良による温度の低下が伴って蒸発量
が減少して蒸着被膜の膜厚が不足したり、汚れの一因で
ある金属化合物の微粒子が金属蒸気と共に帯5A10の
表面に到達して付着し、その表面性状の低下を来たす等
の不具合点があった。However, the rate at which dirt accumulates on the surface of the molten metal in the evaporation chamber is not constant, and with methods that rely on the operator's intuition, if removal work is delayed, too much dirt accumulates and covers the surface, reducing the evaporation area. At the same time, the temperature decreases due to poor absorption of radiant heat from the main heater 6, and the amount of evaporation decreases, resulting in insufficient thickness of the deposited film, and fine particles of the metal compound, which is a cause of contamination, are mixed with the metal vapor. There were problems such as reaching the surface and adhering to it, causing deterioration of the surface quality.
また、汚れが少ないにもかかわらず、その除去作業を行
うこともあるので、溶解槽8の上下動及び掻取器5の稼
動等、無駄々操作を行なっていた。Furthermore, even though there is little dirt, removal work is sometimes performed, so operations such as moving the dissolving tank 8 up and down and operating the scraper 5 are wasted.
本発明はこのような不具合点を解消するために提案され
たもので、蒸着室内における溶融金属表面の汚れを常時
検出し、一定の値に達するとその汚れを除去することに
より、安定した高品質の金属蒸着被膜を得ると共に、作
業効率を向上させる汚れ検出方法を提供することを目的
とする。The present invention was proposed to solve these problems, and by constantly detecting contamination on the surface of molten metal in the deposition chamber and removing the contamination when it reaches a certain value, stable high quality can be achieved. It is an object of the present invention to provide a dirt detection method that improves work efficiency while obtaining a metal vapor-deposited film.
本発明は、上記目的を達成するために、蒸着室内におけ
る溶融金属表面の汚れを検出するファクターとして、蒸
着室出口の金属被膜の膜厚と蒸着室内の溶融金属の温度
とシャッタ開度とと選定し、これらの変化を検知して上
記金蝙表面の汚れを検出する方法である。すなわち、本
発明は、帯鋼を蒸着室内へ通板させ、その表面に金属を
連続的に蒸着して金属被膜を形成するに際し、前記蒸着
室の出口で検出した前記金属被膜の膜厚と、前記蒸着室
内の溶融金属の温度とシャッタ開度とから算出される係
数の変化によって前記溶融金くの表面の汚れ度合を検出
することを特徴とする溶融金属表面の汚れ検出方法であ
る。In order to achieve the above object, the present invention selects the thickness of the metal coating at the outlet of the vapor deposition chamber, the temperature of the molten metal in the vapor deposition chamber, and the shutter opening degree as factors for detecting contamination on the surface of the molten metal in the vapor deposition chamber. This method detects these changes to detect dirt on the surface of the goldfly. That is, in the present invention, when a steel strip is passed through a vapor deposition chamber and a metal is continuously vapor deposited on the surface thereof to form a metal coating, the thickness of the metal coating detected at the exit of the vapor deposition chamber, The method for detecting contamination on the surface of molten metal is characterized in that the degree of contamination on the surface of the molten metal is detected based on a change in a coefficient calculated from the temperature of the molten metal in the vapor deposition chamber and the shutter opening degree.
本発明の詳細な説明すると、帯鋼に蒸着する目付口すな
わち金属被膜の厚さは、ライン速度が一定であれば蒸着
室内の溶融金属の温度とシャッタ開度に比例し、本来は
その係数は1であるが、本発明では、前記溶融金属の表
面が汚れるにしたがって蒸発面積が低下して前記係数の
値が低減することを利用し、これによってその汚れ度合
を検出するものである。To explain the present invention in detail, if the line speed is constant, the thickness of the metal coating deposited on the steel strip is proportional to the temperature of the molten metal in the deposition chamber and the shutter opening, and originally the coefficient is However, in the present invention, as the surface of the molten metal becomes dirty, the evaporation area decreases and the value of the coefficient decreases, which is used to detect the degree of contamination.
以下本発明を第1図および第2図に基づいて詳細に説明
する。第1図は本発明の実施例である汚れ検出方法に好
適な連続真空蒸着装置の要部を示す縦断面図であり、第
2図は、各種膜厚寸法すなわち各種の所要蒸発量へ〜G
4 (単位時間あたりの蒸発量f/分)に対する溶;独
金属の温度T (℃)とシャッタ開度El (S)との
関係を示すグラフである。The present invention will be explained in detail below with reference to FIGS. 1 and 2. FIG. 1 is a vertical sectional view showing the main parts of a continuous vacuum evaporation apparatus suitable for the dirt detection method according to the embodiment of the present invention, and FIG. 2 shows various film thickness dimensions, that is, various required evaporation amounts.
4 is a graph showing the relationship between melt temperature T (° C.) and shutter opening El (S) versus (evaporation amount f/min per unit time).
第1図に示すように、蒸着室1の出口に配設された膜厚
検出器12によって、通板する帯鋼10の表面に蒸着さ
れた金属被膜の膜厚が検出され、膜厚計15に表示され
る。また、蒸発槽5に装設された熱電対14によって溶
融金属111)の表面附近の温度Tが検出され、温度計
15に表示される。なお、第1図において、16はシャ
ッタ開度計である。As shown in FIG. 1, a film thickness detector 12 disposed at the outlet of the vapor deposition chamber 1 detects the film thickness of the metal coating deposited on the surface of the steel strip 10 to be passed. will be displayed. Furthermore, the temperature T near the surface of the molten metal 111) is detected by a thermocouple 14 installed in the evaporation tank 5 and displayed on a thermometer 15. In addition, in FIG. 1, 16 is a shutter opening degree meter.
ところで、単位面積あたりの蒸着量である、いわゆる目
付量Qは、実測値である膜厚によって算出される。この
目付量Qと帯鋼10の板幅Wと所定のライン速度LSと
から、下記算式により単位時間あたりの所要蒸発量Gを
算出し、更に実σI11の温度Tからシャッタ開度Sを
算出する。By the way, the so-called basis weight Q, which is the amount of vapor deposition per unit area, is calculated based on the film thickness, which is an actually measured value. From this weight Q, the plate width W of the steel strip 10, and the predetermined line speed LS, the required evaporation amount G per unit time is calculated using the following formula, and the shutter opening degree S is further calculated from the temperature T of the actual σI11. .
cJ−T、+5XWXQ @−−−− (1)式S
−f (G、T、K) ・・・・・(2)式〔上
記(2)式中のKはシャッタ開度係数である。〕
上記の(2)式により、シャッタ開度係数Kが一定であ
れば、第2図に示すグラフにより各種の膜厚寸法すなわ
ち所要蒸発量へ〜G4における、溶融金属11bの温度
Tによるシャッタ開度Sが求められる。ところが、溶融
金属111)の表面に汚れが増加してくるとその蒸発能
力が低下し、最初は1であったシャッタ開度係数Kが時
間経過と共に例えばα9.(18,117のように徐々
に低下する。cJ-T, +5XWXQ @---- (1) Formula S
-f (G, T, K)...Equation (2) [K in the above equation (2) is the shutter opening coefficient. ] According to the above equation (2), if the shutter opening degree coefficient K is constant, the shutter opening depending on the temperature T of the molten metal 11b at G4 is determined by the graph shown in FIG. Degree S is required. However, as dirt increases on the surface of the molten metal 111), its evaporation ability decreases, and the shutter opening coefficient K, which was initially 1, becomes, for example, α9. (It gradually decreases like 18,117.
実測した膜厚から算出された目付量Qによってシャッタ
開度S及び温度Tが制御され、所要の蒸発量Gが保持さ
れているので、このシャッタ開度Sと温度Tとを検出し
、上記(2)式から逆算された下記の(3)式によって
、シャッタ開度係数Kを算出する。Since the shutter opening S and temperature T are controlled by the basis weight Q calculated from the actually measured film thickness and the required evaporation amount G is maintained, the shutter opening S and temperature T are detected and the above ( The shutter opening degree coefficient K is calculated by the following equation (3) which is calculated backward from equation 2).
K −f(S、G、T) ・・・・・(3)式このシ
ャッタ開度係数にの低下によって溶融金属111)の表
面の汚れを検出し、例えばα7のような数値に低下すれ
ば掻取器5によって汚れ物質を除去すると共に、上昇さ
れていたシャッタ開度Sは、目付量Qすなわち蒸発量G
の増大にともなって下降され、所要の蒸発量Gが保持さ
れる。K - f (S, G, T) ... Equation (3) If contamination on the surface of the molten metal 111) is detected by this decrease in the shutter opening coefficient, and if it decreases to a value such as α7, then While the dirt substances are removed by the scraper 5, the shutter opening degree S, which has been increased, is increased by the area weight Q, that is, the evaporation amount G.
is lowered as the amount of evaporation G increases, and the required amount of evaporation G is maintained.
本発明は、以上詳記したように、帯鋼に蒸着する金属被
膜の膜厚と、蒸着室内の溶融金属の温度と、シャッタ開
度を検出し、これらの値によって係数を算出することに
より、前記溶融金属表面の汚れ具合を正確に検出できる
効果が生ずるものでロシ、この検出によって、適時にそ
の汚れを除去することが可能であり、その結果、金属被
膜の表面性状の劣化及び膜厚の減少を防止できるという
顕著な効果を奏するものである。As detailed above, the present invention detects the thickness of the metal coating deposited on the steel strip, the temperature of the molten metal in the deposition chamber, and the shutter opening degree, and calculates the coefficient based on these values. This has the effect of accurately detecting the degree of contamination on the surface of the molten metal. Through this detection, it is possible to remove the contamination in a timely manner, and as a result, it is possible to prevent deterioration of the surface quality of the metal coating and decrease of the film thickness. This has the remarkable effect of preventing the decrease.
第1図は本発明の実施例である汚れ検出方法に好適な連
続真空蒸着装置の要部を示す縦Wr面図であり、@2図
は各種の所要蒸発1t()i〜G4(単位時間あたシの
蒸発量27分)に対する溶融金属の温度? (℃)とシ
ャッタ開度S(チ)との関係を系すグラフである。第3
図は従来の連続真空蒸着装置の要部を示す縦断面図であ
る。
1・・・蒸着室 9 ・・・巻付ロール2 ・・・
チャンネル 10・・・帯鋼3・・・蒸発槽
11a、11b・・・溶融金属4・・・シャッタ 1
2・・・膜厚検出器5・・・掻取器 15・・・膜
厚計6 県・・ メインヒータ 14 ・・−熱電
対7 ・1スノーケル 15ト■温度計8 日・溶
融槽 16■−シャッタ開度計復代理人 内
1) 明
復代理人 萩 原 亮 −
復代理人 安 西 駕 夫Fig. 1 is a longitudinal plane view showing the main parts of a continuous vacuum evaporation apparatus suitable for the contamination detection method which is an embodiment of the present invention, and Fig. 2 shows various required evaporations 1t()i to G4 (unit time Temperature of molten metal relative to the amount of evaporation (27 minutes)? It is a graph showing the relationship between (° C.) and shutter opening degree S (chi). Third
The figure is a longitudinal sectional view showing the main parts of a conventional continuous vacuum evaporation apparatus. 1... Vapor deposition chamber 9... Winding roll 2...
Channel 10...Strip 3...Evaporation tank
11a, 11b... Molten metal 4... Shutter 1
2...Film thickness detector 5...Scraper 15...Film thickness meter 6 Prefecture...Main heater 14...-Thermocouple 7 ・1 snorkel 15 ■Thermometer 8 days・Melting tank 16■ - Shutter opening meter sub-agent
1) Meifuku agent Ryo Hagiwara − Sub-agent Takao Anzai
Claims (1)
蒸着して金属被膜を形成するに際し、前記蒸着室の出口
で検出した前記金属被膜の膜厚と、前記蒸着室内の溶融
金属の温度と、シャッタ開度とから算出される係数の変
化によつて前記溶融金属の表面の汚れ度合を検出するこ
とを特徴とする溶融金属表面の汚れ検出方法。When passing a steel strip into a vapor deposition chamber and continuously vapor depositing metal on its surface to form a metal coating, the thickness of the metal coating detected at the exit of the vapor deposition chamber and the molten metal in the vapor deposition chamber are measured. A method for detecting contamination on a molten metal surface, characterized in that the degree of contamination on the surface of the molten metal is detected based on a change in a coefficient calculated from the temperature of the molten metal and the shutter opening degree.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11055086A JPS62267465A (en) | 1986-05-16 | 1986-05-16 | Method for detecting contamination of surface of molten metal in deposition chamber of continuous vacuum deposition apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11055086A JPS62267465A (en) | 1986-05-16 | 1986-05-16 | Method for detecting contamination of surface of molten metal in deposition chamber of continuous vacuum deposition apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62267465A true JPS62267465A (en) | 1987-11-20 |
Family
ID=14538665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11055086A Pending JPS62267465A (en) | 1986-05-16 | 1986-05-16 | Method for detecting contamination of surface of molten metal in deposition chamber of continuous vacuum deposition apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62267465A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008231454A (en) * | 2007-03-16 | 2008-10-02 | Matsushita Electric Ind Co Ltd | Vacuum vapor-deposition apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60251273A (en) * | 1984-05-28 | 1985-12-11 | Mitsubishi Heavy Ind Ltd | Method for controlling extent of evaporation in vacuum depositing apparatus |
-
1986
- 1986-05-16 JP JP11055086A patent/JPS62267465A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60251273A (en) * | 1984-05-28 | 1985-12-11 | Mitsubishi Heavy Ind Ltd | Method for controlling extent of evaporation in vacuum depositing apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008231454A (en) * | 2007-03-16 | 2008-10-02 | Matsushita Electric Ind Co Ltd | Vacuum vapor-deposition apparatus |
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