JPS62264461A - Production of metallic mold for information signal recording carrier - Google Patents

Abstract

PURPOSE:To improve wear resistance by providing a hard film to a resist master disk recorded with information signals and integrally providing an electroless plating film and electrolytic plating film on the surface thereof, then stripping the part of the double-layered structure from the resist master disk. CONSTITUTION:The hard film 5 consisting of titanium nitride or titanium carbide is directly provided on the surface side formed with pits 3 of the resist master disk 4 recorded with the information signals as the pits 3 on the photoresist film 2 on a glass substrate 1 and is subjected to electroless nickel plating by which the electroless nickel plating film 6 is integrally provided on the hard film 5. Electrolytic plating added with sulfamic acid is thereafter executed to integrally provide the electrolytic nickel plating film 7. The part of a metallic mold 8 for an information signal recording carrier having the three-layered structure consisting of the electrolytic nickel plating film 7, the electroless nickel plating film 6 and the hard film 5 is stripped from the master disk 4 by which the metallic mold 8 for the information signal recording carrier is obtd. The metallic mold having the excellent wear resistance and durability is thus obtd.

Description

[Detailed description of the invention] [Industrial application field]

The present invention relates to a method for manufacturing a mold for an information signal recording carrier used when molding information signal recording carriers such as video discs or compact discs by compression or injection.

[Conventional technique 14: i and its problems] Conventionally, as described in, for example, Japanese Patent Application Laid-Open No. 57-64308, information signals are transmitted using an optical signal method or a mechanical method: L! A stamper is obtained from the recorded master through the usual process, and a mold is provided on the recording carrier 1 of the t11 report 9, which contains an ion-blating film such as TiN or TiC on the side 1d of the stamper. However, when this information signal recording carrier mold is made thicker, the information formed on the stamper becomes thicker. The shape of the nozzle was changed by 6 degrees, and the thickness of the ion plate was 17 degrees. Since the information signal recording mold molded using the above method does not accurately mark the information signal, it is not possible to provide an ion brazing film (TIC or TiN shade) on the surface layer of the stamper. I can't come. In other words, T
5 of ion blating fh'8 membrane such as iC or TiN
7S is the limit of about 500 people without electricity. However, if the thickness of the ion blating film on the stamper surface 71 is not too electroless by about 500 people, then this ion blating 7 skin? Even if the hardness of the I model is about 2000 to 2500 on the Vickers hardness and is not super hard, as the number of times E is molded increases, the surface wear gradually increases. The drawback is that the degree of improvement in durability is not that great. In other words, if we try to improve the durability of the wooden mold for information recording in the above-mentioned information recording mold, the information will become inaccurate. If we try to ensure the accuracy of recorded information, we are destined to have poor durability. In addition, as mentioned above, a mother is obtained through the usual process from a source in which information signals are recorded by an optical (S-type) method or a camera method. - [Kaku\men AI left N1
-P or Ni-83 gold electroless coating film is provided, and a nickel electrolytic coating film is integrally installed on this electroless plated crotch. ￥ plating; two-layer t with model, 1, 7 included part from mother +!'I; Although it is true that the recorded information is accurate, the hardness of the electroless plating film on the k-plane is only about 500 to 800 on the Vickers hardness, which means that it has poor abrasion resistance and is poor in terms of durability. There are many problems. τProblem f!: Means for solving the problem] The present invention does not overcome the above problems by 7%.
Temporary - L, 7 Ruji resist original 11 (this) A hard film is provided by a dry coating method, an electroless metal coating A is integrally applied on the surface of this hard coating, and further this electroless metal coating is applied. The electrolytic plated film 3 was integrally provided on the surface of the plate, and then the part of the multilayer structure formed integrally with the hard film, electroless plated film, and electrolytic plated film was removed from the original lens plate described in 11A.7i' 3.Providing method 3 for manufacturing molds for information signal recording carriers
be.

[Embodiment r] 11] [1] (a) to (e) are process diagrams of an embodiment of the method for manufacturing a mold for an information signal recording carrier according to the present invention. First, as shown in 1st LI (a), an information signal is recorded as a focus 3 due to a change in geometrical shape on a film 11 and a resist film 2 provided on a glass substrate 1 using a normal photoresist technique. i) Prepare the resist master disc. Next, as shown in FIG.
Dry spacing of Suba/Tawang hats (Depending on the size), the hardness is about 2,000 to 2,500, and a hard coating is applied for about 2,000 hours for 5 minutes. Note that the thickness of this hard coating 5 will be determined in later steps.)
When forming an information signal recording mold using a wooden mold for information recording, it is sufficient to have sufficient abrasion resistance, and a non-electrostatic strength of approximately 1500 to 2000 is sufficient.・Next, as shown in the same figure (c), a step in which sensitization treatment, catalyst treatment, and 7-increasing B treatment were performed on the surface of the hard YT film 5, for example, water accumulation treatment; ; Apply electroless ffif coating using a spray method using thorium as a reducing agent, and approximately 1000 electroless coatings 6 are integrally formed on the hard film S. In addition, the thickness of IN6 is 15 g of electrolytic plating in the next process tJ).
Because it can give ), about 500 to 1000
If there is no electricity, then P). At that stage, as shown in the same figure (J), sulfa mic acid f!
:Added'. Ii. ! i'+'Metsukii a careful eden i] ¥ 7<Tsuki 3 lines, p'. :,: n'l
'Nickelmets A--a predetermined f block on the film 6, i.e. 11'
i::l! + J'E recorder 1 The specified thickness as the Honkawa mold.
9;
) ``,8m'' nickel plated j7, Denden 8T Nink! Lemeneau V. Membrane 6 and stone; I! Cord. Thirty-seven layers consisting of five membranes, one shank structure, 11 reports f,; issue record 11! 8 parts of the body money, register π alliance, 1 to 1,! After one step, the information signal is transferred to the recording carrier 1 and the upper mold 83. It accurately corresponds to bit 3, which is an information signal, and even if the thickness of the six bits, especially the hard coating 5, increases, bit 9 will not be affected and its accuracy will not change at all. Therefore, with this information, high-quality recorded information can be obtained. Moreover, the hard coating 5 on the surface of the mold 8 for information signal recording carrier
Since the thickness of the information signal recording carrier mold S can be increased, the wear resistance and durability of the mold S for the information signal recording carrier are extremely good. That is, this information signal recording carrier mold 8 according to the present invention
A hard coating 5 of TiN or TiC with high hardness is applied to the surface of the bit 3 of the cyst master disk 4 by the Q-type plating method.
3 directly, and this hard coating is divided into 5 parts, and the resist master 4 to III 21 is basically constructed. Bit 9, that is, the unevenness is the resist original ff
Bit 3 of 14, that is, the concavity and convexity exactly match,
Moreover, this accuracy is such that the hard coating 5's P and -mi are -barring functions, and are not 9ro due to j7. Furthermore, 2pr) means that the thickness of the film 5 is jγ
By making the metal mold 8 smaller, the wear resistance of the information signal recording carrier mold 8 can be improved, and the durability can also be improved. Incidentally, the money slip for the information 9f2 f2 symbol record carrier that has been used since f; As a result of using the above example, i+T)ur=1? of the recording carrier mold. His life improved to about 21 or more. Furthermore, the mold S for the carrier of the information communication symbol 51 constructed as described above is not necessarily composed of only a hard penetrating skin model made by the dry method. 't II Bow Record for Takigawa + ('73's abrasion resistance and parts that do not have much impact and do not have much impact, were treated using the electrolytic Menoni X- method.
Since it is only necessary to provide a deplating film f to a predetermined thickness, there is no need to make the hard 'r' 83
The reason why the electroless nickel plating film 6 was provided by the electrolytic plating method before the electrolytic nickel plating film 7 was provided by the electrolytic plating method was because the electrolytic nickel plating film 6 was provided on the hard coating 5. This is because it is only possible to provide an electrolytic plated film by direct electrolytic plating.

【effect】

The vJ manufacturing method of the mold for information signal recording carrier according to the present invention is w
A hard film is formed by dry plating on the resist master recording information signals in the resist layer on the plate, and electrolytic coating 1 and 3 are integrally applied to the surface of this hard film, and further, the surface of this electroless plated film is The hard coating on the casing is made of (electrolytic 7
Part 3 of the layer structure is to be peeled off from the master disc, so the information rz number symbol bearer (+, f: r telegraph recording water) which is molded in the entire mold for 1°; Therefore, the information section can be reproduced accurately, and the surface layer in the information recorder (S. 5) is li! 1. Since it is made of high-strength material f1, the mold for the record carrier in the information section has high abrasion resistance and is superior in durability.
The lifespan is approximately 21Δ compared to the previous model.Also, this mold for the 1,7I signal record carrier is not constructed using only the 屹 type METSU VI element, but the electroless method, X wide and - By using 8 different plating methods, a predetermined 117
The present invention has a mold for an information signal recording carrier which has a good oil chamber and can be manufactured at low cost. - Page 1-1 1) Brief explanation No. 101 (a) to re) are an example of a method for manufacturing a mold for a record carrier according to the present invention. . 1 glass substrate, 2...) strained film, 3 bi-1
・, 1 ・Resist master disc, 5 hard τT skin model, 61 prefecture-07 nickel 2 Kuno V film, 7 ;: dissolved nickel 7
ku so X, 1, S 71) Shin
5. Note 11 (Mold for this book, a) Bi/
Go to 1.

Claims (1)

[Claims] A hard film is formed by dry plating on the resist master recording information signals on the resist layer on the substrate, an electroless plating film is integrally formed on the surface of this hard film, and then electrolytic plating is applied to the surface of this electroless plating film. For use in an information signal recording carrier, characterized in that a plating film is integrally provided, and then a multilayer structure integrally constituted by the hard film, electroless plating film, and electrolytic plating film is peeled off from the resist master disc. Mold manufacturing method.