JPS6226175B2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a method for removing foreign matter such as dust attached to thin plate-shaped materials such as semiconductor wafers and glass masks used in wafer manufacturing processes. Regarding cleaning equipment.

[Prior art]

A conventional glass mask cleaning device has a main part shown in cross-section in FIG. 1. 1 is a glass mask used for pattern formation in the manufacturing process of semiconductor wafers, 2 is a high-pressure water spray nozzle, and high-pressure water 3 is supplied and injected onto the surface of the glass mask to clean the surface. .

In the above conventional device, high pressure water 2 has approximately 100
Pure water at atmospheric pressure is supplied and injected from the approximately 100 μm hole at the tip of the spray nozzle 2, and is sprayed onto the glass mask 1 which is rotating at approximately 3000 rpm. It moves in a direction to remove dirt attached to the surface.

In the above-mentioned conventional apparatus, a corona discharge occurs due to the spraying of high-pressure water, and the tip of the metal thin film pattern formed on the surface of the glass mask 1 is removed, which limits the number of times the mask can be cleaned. It was hot.

Another example of the conventional glass mask cleaning device is shown in FIG. 2 as a sectional view of the main parts. 4 is a brush,
The brush contacts the surface of the glass mask 1 that is being rotated at high speed, moves in the radial direction from the center position of the glass mask 1, and injects pure water supplied from the outside as a lubricant into the center or tip of the brush. Then, dirt adhering to the surface of the glass mask 1 is removed.

In the conventional device shown in FIG. 2, since the brush 4 is in contact with the surface of the glass mask 1, the brush 4
This has disadvantages in that dirt and the like may instead adhere to the glass mask 1, and furthermore, the vapor-deposited metal film may peel off at the lift-off correction location of the metal thin film pattern of the glass mask 1.

[Summary of the invention]

This invention was made in order to eliminate the drawbacks of the above-mentioned conventional devices, and the guide body has a cylindrical shape and has countless small gaps communicating from the inner diameter side to the outer diameter side. The thin plate material is fitted and fixed to the shaft, and at least one side of the thin plate material is placed on the outer diameter of the guide body with a small gap, and the pure water to be supplied into the tubular shaft is guided by rotating the guide body at high speed by the tubular shaft. It is an object of the present invention to provide a cleaning device for a thin plate-shaped material, which sprays water onto the surface of the thin plate-shaped material and reliably removes dirt without damaging the surface of the thin plate-shaped material.

[Embodiments of the invention]

FIG. 3 is a longitudinal cross-sectional view showing a main part of a glass mask cleaning apparatus according to an embodiment of the present invention. 10
are a pair of tubular shafts arranged vertically in parallel, each having a large number of small holes 11 around the upper side, and is rotated at high speed by a lower driving device (not shown). 12 is the tubular shaft 1
The lid 13 that closes the upper end of 0 is a pair of sponge bodies having a cylindrical shape and communicating from the inner diameter side to the outer diameter side with countless spongy gaps, each of which is fitted and fixed to the tubular shaft 10. There is. A glass mask 1 is placed between both sponge bodies 13 with a small gap (approximately 1 mm) between them.

The sponge body 13 fixed to the tubular shaft 10 is shown in a partially cut away perspective view in FIG. tubular shaft 10
is made of a metal material or a synthetic resin material such as Teflon material, and is provided with a large number of small holes 11 each having a diameter of approximately 5 mm. Ultrapure water 14 is supplied to the tubular shaft 10 from below, flows into the sponge body 13 through the small holes 11, and is ejected from the outer diameter side in both directions.

The cleaning action of the apparatus of the above embodiment is as follows. Both tubular shafts 10 are rotated at a high speed of about 3000 rpm to rotate each sponge body 13. As a result, ultrapure water 14 is ejected from the outer diameter part of the sponge body 13 rotating at high speed due to centrifugal force, and the glass mask 1 moves in parallel relative to both sponge bodies 13.
Wash away any dirt that has adhered to both sides.

In this way, the pure water 14 uniformly hits the entire surface of the glass mask 1, so there is no scratching of the pattern due to corona discharge, unlike conventional high-pressure water spraying. Since there is no contact with the mask 1, phenomena such as redeposition of dirt and peeling of the thin metal film do not occur. According to the results of actual use, the cleaning effect is the same as that of the conventional device shown in Fig.
lifespan has been extended.

In the above embodiment, the glass mask 1 is used as the thin plate-like material to be cleaned, but the mask may be made of other materials. It can also be applied to cases where

Further, in the above embodiment, a case was explained in which ultrapure water was used as the cleaning liquid, but pure water or a cleaning liquid suitable for the target thin plate material may be used.

Further, in the above embodiment, a case was shown in which both sides of the glass mask 1 are cleaned at the same time, but if only one side is required, an apparatus may be used in which the sponge body 13 is disposed only on one side.

Furthermore, in the above embodiment, the sponge body 13 is used as the cylindrical guide body having countless small gaps communicating from the inner diameter side to the outer diameter side, but the invention is not limited to this, and for example, a cylindrical brush may be used. It's okay.

〔Effect of the invention〕

As described above, according to the present invention, a cylindrical guide body having countless small gaps communicating from the inner diameter side to the outer diameter side is fitted into a tubular shaft having a large number of small holes, and the surface of the thin plate material is In contrast, the outer circumferential surface of the guide body is arranged with a small gap, the guide body is rotated at high speed by a tubular shaft, and the cleaning liquid is supplied into the tubular shaft and sprayed from the outer circumference of the guide body to wash away the thin plate material surface. Therefore, dirt can be removed without damaging the surface of the thin plate-like material, and in the case of glass masks, the useful life can be extended.

[Brief explanation of the drawing]

FIG. 1 is a front sectional view of the main parts of a conventional glass mask cleaning device, FIG. 2 is a front sectional view of the main parts of another conventional glass mask cleaning device, and FIG. 3 is the invention. FIG. 4 is a longitudinal sectional view of a main part of a glass mask cleaning device according to an embodiment of the present invention, and FIG. 4 is a partially cutaway perspective view of the sponge body shown in FIG. In the figure, 1... a glass mask forming a thin plate-like material, 10... a tubular shaft, 11... a small hole, 13... a sponge body forming a guide, 14... pure water forming a cleaning liquid. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Scope of Claims] 1. A tubular shaft having a large number of small holes in the circumference, which is rotated at high speed and radiates the cleaning liquid supplied inside from each of the small holes, and a cylindrical shaft with numerous small holes. A gap is formed and they communicate with each other from the inner diameter side to the outer diameter side, and are fitted and fixed to the outer circumference of the tubular shaft and rotated at high speed, allowing the cleaning liquid from each small hole of the tubular shaft to flow through the outer diameter side. It is equipped with a guide body that spouts out like rain from the side, and a thin plate-like material is arranged parallel to the outer diameter of the guide body with a small gap, and the thin plate-like material is moved parallel to the guide body so that the surface A cleaning device for thin plate-shaped materials, which is configured to wash off dirt with the jetting cleaning liquid. 2 A pair of guide bodies fixed to a tubular shaft are arranged in parallel with a space between the outer diameters of both guide bodies,
Cleaning of a thin plate material according to claim 1, characterized in that the thin plate material is arranged in parallel with a small gap on both sides between these guide bodies, and both sides are cleaned at the same time. Device. 3. The thin plate material cleaning device according to claim 1 or 2, wherein the guide body is made of a sponge body. 4. The thin plate material cleaning device according to claim 1 or 2, wherein the guide body is a brush body. 5. A cleaning device for a thin plate material according to any one of claims 1 to 4, wherein the thin plate material is made of a glass mask, and pure water is used as the cleaning liquid. 6. A cleaning device for a thin plate material according to any one of claims 1 to 4, characterized in that the thin plate material is made of a semiconductor wafer, and pure water is used as the cleaning liquid.