JPS6223448B2 - - Google Patents
Info
- Publication number
- JPS6223448B2 JPS6223448B2 JP59200899A JP20089984A JPS6223448B2 JP S6223448 B2 JPS6223448 B2 JP S6223448B2 JP 59200899 A JP59200899 A JP 59200899A JP 20089984 A JP20089984 A JP 20089984A JP S6223448 B2 JPS6223448 B2 JP S6223448B2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- etching
- aluminum foil
- electrode
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011888 foil Substances 0.000 claims description 48
- 238000005530 etching Methods 0.000 claims description 47
- 229910052782 aluminium Inorganic materials 0.000 claims description 42
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 42
- 238000005406 washing Methods 0.000 claims description 22
- 238000004140 cleaning Methods 0.000 claims description 21
- 239000003990 capacitor Substances 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000010953 base metal Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052703 rhodium Inorganic materials 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 238000005868 electrolysis reaction Methods 0.000 description 11
- 239000007788 liquid Substances 0.000 description 9
- 239000012535 impurity Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 239000000460 chlorine Substances 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- -1 chlorine ions Chemical class 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
［発明の技術分野］
この発明は電解コンデンサ用電極箔として使用
するアルミ箔のエツチング装置に関する。
［発明の技術的背景とその問題点］
電解コンデンサ用電極箔として使用されるアル
ミ箔をエツチングしたエツチド箔の表面には不純
物やイオンが付着しており、この不純物等がエツ
チド箔の表面状態を変質させたり、陽極酸化皮膜
を生成したときのばらつきとしてあらわれたりす
るため、エツチング後に除去することが不可欠で
あつた。この除去手段としてエツチド箔を負極、
カーボンを陽極として例えば硼酸５重量％水溶液
（液温60℃）中で1A／ｄm2の電流密度で１分間の
電解を行うと、この電気分解によつて生じる水素
によつてエツチド箔に付着する不純物やイオンを
除去できることが知られている。しかしながらこ
の電解分解を継続すると、発生する水素によつて
電解用電極として使用したカーボンが分解してエ
ツチング液中に拡散するので、カーボンが早期に
崩壊するとともに洗浄液が汚損して使用不能とな
る問題点があつた。またカーボンの代替としてア
ルミニウム、白金、ニツケルなども使用してみた
が、これら金属の場合も溶解現象を生じて実質的
には使用できず、前述のカーボンの場合と同様の
傾向を示す問題点があつた。
［発明の目的］
この発明の目的は、エツチド箔に付着する不純
物などを除去する洗浄槽に陽極を課電しても長寿
命の電解用電極を用いることにより、エツチド箔
表面を清浄にできる電解コンデンサ用アルミ箔の
エツチング装置を得ることである。
［発明の概要］
この発明になる電解コンデンサ用アルミ箔のエ
ツチング装置は、アルミ箔を陽極、電解用電極を
負極として電源に接続された少なくとも１槽のエ
ツチング槽と、該エツチング槽の後に配された第
１の水洗槽と、該水洗槽の後に配されアルミ箔を
負極、電解用電極を陽極として電源に接続された
洗浄槽と、該洗浄槽の後に配された第２の水洗槽
とからなり、前記洗浄槽の電解用電極がTi、
Ta、Nbの中の１種からなる基体金属にRu、Ir、
Pd、Rh、Ta、Nb、Ｖの中の１種または２種以上
からなる化合物を焼成コーテイングした酸化物を
形成したものからなることを特徴とするものであ
る。
［発明の実施例］
実施例 １
第１図に示すように、電源１の陽極をコンタク
トローラー２に接続され、負極をエツチング槽３
中のエツチング電極４，５，６に接続する。該エ
ツチング槽３には前記コンタクトローラー２に接
して走行するアルミ箔７がガイドローラー８を経
て液中ローラー９で反転し上昇してエツチング槽
３を出、ガイドローラー８に達するが、該エツチ
ング槽３中には例えば塩酸3.5重量％水溶液（液
温60℃）のエツチング液１０が入れられている。
したがつて、エツチング槽３中においては陽極を
課電されたアルミ箔７と負極を課電されたエツチ
ング電極４，５間および５，６間において電気分
解がおこり、アルミ箔７はエツチングされる。前
記のようにしてエツチングされたアルミ箔７には
エツチング液１０に含まれている成分、例えば塩
素イオンや電気分解によつて生じたアルミの残滓
などが付着していて、そのまま走行させると、該
エツチング槽３の後に配された洗浄槽などに持込
み、洗浄液組成を変化させるので、これを防止す
るためエツチング槽３の後に第１の水洗槽１１を
設ける。該第１の水洗槽１１中には純水１２およ
び水中ローラー１３が配され、アルミ箔７はガイ
ドローラー８から水洗槽１１に入り、純水１２中
を走行し水中ローラー１３で反転して上昇する。
しかしながら、この水洗槽１１ではアルミ箔７が
純水１２中を走行するだけなので、アルミ箔７表
面に付着した不純物などは除去できるが、エツチ
ングによりアルミ箔７に形成されたピツトの中の
塩素イオンなどまで除去できないため、該水洗槽
１１の後に配した洗浄槽１４でこの目的を達す
る。すなわち、該洗浄槽１４には電源１５の陽極
に接続した電解用電極１６，１７，１８と、例え
ば硼酸５重量％水溶液（液温60℃）からなる洗浄
液１９が入つており、前記電源１５の負極は前記
コンタクトローラー２に接続されている。したが
つて、アルミ箔７の走行によつて洗浄槽１４にお
いては電解用電極１６，１７，１８を陽極、アル
ミ箔７を負極とした電気分解が生じ水素を発生す
る。このとき電解用電極１６，１７，１８は
Ti、Ta、Nbの中の１種を基体金属とし、該基体
金属にRu、Ir、Pd、Rh、Ta、Nb、Ｖの１種ま
たは２種以上からなる化合物を焼成コーテイング
した酸化物を形成したものを使用するが、本実施
例では基体金属にTi、酸化物はRuを用いて形成
したものを使用した。したがつて、この洗浄槽１
４における課電は前記エツチング槽３と対比する
と逆電を課すことになるが、電解用電極１６，１
７，１８の溶解は見られず、またこの電気分解に
よつて発生した水素は、エツチングされたアルミ
箔７のエツチングピツト内や表面に付着している
塩素イオンや残滓等の不純物を除去する作用を果
たすので、不純物などを除去したアルミ箔７を第
２の水洗槽２０へ送り込むことができる。この第
２の水洗槽２０では前記アルミ箔７に付着した洗
浄液１９の除去を行うもので、前述の第１の水洗
槽１１の場合と同じ構成を有するものである。
前記洗浄槽１４において、電流密度1A／ｄm2
−１分間の電気分解を行つたときの電解用電極１
６，１７，１８の寿命と、第２の水洗槽２０から
出た状態のアルミ箔７に付着している塩素イオン
量は表のとおりである。なお従来例は洗浄槽の電
解用電極としてアルミニウム板を使用した場合で
あり、その他の条件は本発明と同じである。
[Technical Field of the Invention] The present invention relates to an etching device for aluminum foil used as electrode foil for electrolytic capacitors. [Technical background of the invention and its problems] Impurities and ions adhere to the surface of etched aluminum foil used as electrode foil for electrolytic capacitors, and these impurities affect the surface condition of the etched foil. It has been essential to remove it after etching because it can cause deterioration or appear as variations when an anodic oxide film is formed. As a means of removing this, etched foil is used as a negative electrode.
For example, when electrolysis is carried out for 1 minute at a current density of 1 A/dm 2 in a 5% by weight boric acid aqueous solution (liquid temperature 60°C) using carbon as an anode, the hydrogen produced by this electrolysis will adhere to the etched foil. It is known to be able to remove impurities and ions. However, if this electrolytic decomposition is continued, the carbon used as the electrolytic electrode will be decomposed by the generated hydrogen and diffused into the etching solution, causing the carbon to disintegrate early and the cleaning solution to become contaminated and become unusable. The point was hot. Aluminum, platinum, nickel, etc. have also been used as substitutes for carbon, but these metals also cause dissolution phenomena and are virtually unusable, with problems similar to those of carbon. It was hot. [Objective of the Invention] The object of the present invention is to provide an electrolytic solution that can clean the etched foil surface by using an electrolytic electrode that has a long life even when the anode is energized in a cleaning tank that removes impurities adhering to the etched foil. The object of the present invention is to obtain an etching device for aluminum foil for capacitors. [Summary of the Invention] The etching apparatus for aluminum foil for electrolytic capacitors according to the present invention includes at least one etching tank connected to a power source with the aluminum foil as an anode and an electrolytic electrode as a negative electrode, and an etching tank disposed after the etching tank. a first rinsing tank arranged after the rinsing tank, a rinsing tank connected to a power source with aluminum foil as a negative electrode and an electrolytic electrode as an anode, and a second rinsing tank arranged after the rinsing tank. Therefore, the electrolytic electrode of the cleaning tank is Ti,
Ru, Ir,
It is characterized by being made of an oxide formed by baking and coating a compound consisting of one or more of Pd, Rh, Ta, Nb, and V. [Embodiments of the invention] Example 1 As shown in FIG. 1, the anode of a power source 1 was connected to a contact roller 2, and the negative electrode was connected to an etching tank 3
Connect to etching electrodes 4, 5, and 6 inside. In the etching tank 3, the aluminum foil 7 running in contact with the contact roller 2 passes through the guide roller 8, is reversed by the submerged roller 9, rises, exits the etching tank 3, and reaches the guide roller 8. An etching solution 10, for example, a 3.5% by weight aqueous solution of hydrochloric acid (liquid temperature: 60° C.) is placed in the etching solution 3.
Therefore, in the etching tank 3, electrolysis occurs between the aluminum foil 7 charged with an anode and the etching electrodes 4 and 5 and between the etching electrodes 5 and 6 charged with a negative electrode, and the aluminum foil 7 is etched. . The aluminum foil 7 etched as described above has components contained in the etching solution 10 attached to it, such as chlorine ions and aluminum residue generated by electrolysis, and if the aluminum foil 7 is run as it is, the components contained in the etching solution 10 will be attached. Since the composition of the cleaning solution is changed by bringing it into a cleaning tank placed after the etching tank 3, a first rinsing tank 11 is provided after the etching tank 3 to prevent this. Pure water 12 and submersible rollers 13 are arranged in the first washing tank 11, and the aluminum foil 7 enters the washing tank 11 from the guide roller 8, runs in the pure water 12, is reversed by the submersible rollers 13, and rises. do.
However, in this washing tank 11, the aluminum foil 7 only runs through the pure water 12, so impurities adhering to the surface of the aluminum foil 7 can be removed, but chlorine ions in the pits formed on the aluminum foil 7 due to etching can be removed. Since it is not possible to remove even the above particles, the cleaning tank 14 disposed after the washing tank 11 achieves this purpose. That is, the cleaning tank 14 contains electrolytic electrodes 16, 17, and 18 connected to the anode of the power source 15, and a cleaning liquid 19 made of, for example, a 5% by weight aqueous solution of boric acid (liquid temperature: 60° C.). The negative electrode is connected to the contact roller 2. Therefore, as the aluminum foil 7 travels, electrolysis occurs in the cleaning tank 14 with the electrolytic electrodes 16, 17, and 18 as the anode and the aluminum foil 7 as the negative electrode, generating hydrogen. At this time, the electrolytic electrodes 16, 17, 18 are
An oxide is formed by using one of Ti, Ta, and Nb as a base metal and coating the base metal with a compound consisting of one or more of Ru, Ir, Pd, Rh, Ta, Nb, and V by firing. However, in this example, the base metal was Ti and the oxide was Ru. Therefore, this cleaning tank 1
When compared with the etching bath 3, the charging in the electrolytic electrodes 16 and 1 imposes a reverse electric charge.
No dissolution of 7 and 18 was observed, and the hydrogen generated by this electrolysis had the effect of removing impurities such as chlorine ions and residue adhering to the etching pit and surface of the etched aluminum foil 7. Therefore, the aluminum foil 7 from which impurities have been removed can be sent to the second washing tank 20. This second washing tank 20 is for removing the cleaning liquid 19 adhering to the aluminum foil 7, and has the same configuration as the first washing tank 11 described above. In the cleaning tank 14, the current density is 1A/dm 2
-Electrolysis electrode 1 when performing electrolysis for 1 minute
The lifespans of aluminum foils 6, 17, and 18 and the amount of chlorine ions attached to the aluminum foil 7 when it comes out of the second washing tank 20 are shown in the table. Note that the conventional example is a case where an aluminum plate is used as an electrode for electrolysis in a cleaning tank, and other conditions are the same as those of the present invention.
【表】
上表から明らかなように、本発明の場合には従
来例に比して電解用電極の寿命が30倍にものび、
かつアルミ箔に付着する塩素イオン量も電極の寿
命時において従来と同程度であるから、その寿命
に達するまでの時間中も低く抑えることができる
特長がある。また従来の場合には電解用電極の交
換頻度が高いため稼働率の低下を招く欠点もある
が、本発明では交換頻度も極端に少なくなるの
で、この点も解消できる。
実施例 ２
前記実施例１でアルミ箔７への課電方式として
コンタクトローラー２を用いた場合について述べ
たが、この方式の場合、コンタクトローラー２と
アルミ箔７との接触状態は、コンタクトローラー
２自体の酸化や、いろいろな物質の付着などによ
つて変化し、時には接触不良によつてまたは過電
流などによつてスパークを生じ、アルミ箔７が汚
損される場合がある。またコンタクトローラー２
とアルミ箔７との接触状態からスパークなどを考
慮しなければならず、電流密度を大きくとれない
などの問題点もある。実施例２ではこの点を解消
できる課電方式を使用したエツチング装置につい
て述べる。
第２図に示すように第１図の第１の水洗槽１１
と洗浄槽１４との間に給電槽および水洗槽を挿入
した構成からなるものである。すなわち、電源２
１の負極はエツチング槽２２のエツチング電極２
３，２４，２５に接続され、陽極は前記エツチン
グ槽２２の後に配された第１の水洗槽２６の後に
設置された給電槽２７の給電電極２８，２９，３
０に接続されている。該給電槽２７には、例えば
硫酸５重量％水溶液のごとき高伝導度を有する給
電液３１が入つており、アルミ箔３２は前記給電
電極２８，２９間または２９，３０間を走行する
ことにより給電液３１を介して給電され、エツチ
ング槽２２中でアルミ箔３２を陽極、前記エツチ
ング電極２３，２４および２４，２５を負極とし
たエツチングが行われる。なお３３は給電槽用水
洗槽、３４は洗浄槽、３５は第２の水洗槽であ
り、それぞれの作用は実施例１の場合と同様であ
る。この給電方式においては、接触面積も大きく
アルミ箔３２のスパークや発熱もないので電流密
度を大きくすることができる特長がある。この給
電電極２８，２９，３０は従来のように電源の負
極を接続された電極用電極とは異なり陽極を接続
されるので、前記洗浄槽１４の場合と同様カーボ
ン、ニツケル、アルミニウム、ステンレスなどで
は崩壊または溶解して短期間で使用不能となるの
で、前記実施例１と同じものを使用することが肝
要である。
この実施例の結果も電極用電極の寿命、塩素イ
オン量とも実施例１の場合と同様の結果を得た
が、コンタクトローラーを使用しないため、電流
密度を大きくできる特徴を有するものである。
なお実施例１、２ともエツチング槽が１槽の場
合について述べたが、必要に応じ２槽以上を用い
てもよいし、エツチング槽の間に水洗槽を挿入し
てもよい。
［発明の効果］
この発明になるエツチング装置によれば、洗浄
槽に陽極を課電しても長寿命の電解用電極を用い
ることにより、清浄なエツチド箔を提供すること
ができるとともに、給電槽を用いることによつて
電流密度を大きくできるエツチング装置を得るこ
とができる。[Table] As is clear from the above table, in the case of the present invention, the life of the electrolytic electrode is 30 times longer than that of the conventional example.
In addition, since the amount of chlorine ions adhering to the aluminum foil remains at the same level as conventional electrodes during the life of the electrode, it has the advantage of being able to be kept low until the end of the life of the electrode. Furthermore, in the conventional case, there is a drawback that the frequency of replacing the electrolytic electrodes is high, leading to a decrease in the operating rate, but in the present invention, the frequency of replacement is extremely reduced, so this problem can also be solved. Example 2 In Example 1, a case was described in which the contact roller 2 was used as a method of applying electricity to the aluminum foil 7. In this method, the contact state between the contact roller 2 and the aluminum foil 7 is different from that of the contact roller 2. The aluminum foil 7 may change due to its own oxidation or adhesion of various substances, and sometimes sparks may be generated due to poor contact or overcurrent, and the aluminum foil 7 may be contaminated. Also contact roller 2
Sparks and the like must be taken into consideration due to the contact state between the aluminum foil 7 and the aluminum foil 7, and there are also problems such as the inability to maintain a large current density. Embodiment 2 will describe an etching apparatus using a charging method that can solve this problem. As shown in FIG. 2, the first washing tank 11 in FIG.
It consists of a structure in which a power supply tank and a washing tank are inserted between the washing tank 14 and the washing tank 14. That is, power supply 2
The negative electrode of No. 1 is the etching electrode 2 of the etching tank 22.
3, 24, 25, and the anode is connected to the power supply electrodes 28, 29, 3 of a power supply tank 27 installed after the first washing tank 26 located after the etching tank 22.
Connected to 0. The power supply tank 27 contains a power supply liquid 31 having high conductivity, such as a 5% by weight aqueous solution of sulfuric acid, and the aluminum foil 32 supplies power by running between the power supply electrodes 28 and 29 or between 29 and 30. Electricity is supplied through the liquid 31, and etching is performed in an etching bath 22 using the aluminum foil 32 as an anode and the etching electrodes 23, 24 and 24, 25 as negative electrodes. Note that 33 is a washing tank for the power supply tank, 34 is a washing tank, and 35 is a second washing tank, and their respective functions are the same as in the first embodiment. This power supply method has the advantage that the current density can be increased because the contact area is large and there is no spark or heat generated by the aluminum foil 32. The power supply electrodes 28, 29, 30 are connected to the anode, unlike the conventional electrodes connected to the negative pole of the power supply, so they are made of carbon, nickel, aluminum, stainless steel, etc., as in the case of the cleaning tank 14. It is important to use the same material as in Example 1 because it disintegrates or dissolves and becomes unusable in a short period of time. The results of this example were similar to those of Example 1 in terms of the life of the electrode and the amount of chlorine ions, but since no contact roller was used, the current density could be increased. Although both Embodiments 1 and 2 have been described with one etching tank, two or more etching tanks may be used if necessary, or a rinsing tank may be inserted between the etching tanks. [Effects of the Invention] According to the etching device of the present invention, by using an electrode for electrolysis that has a long life even when the anode is energized in the cleaning tank, it is possible to provide a clean etched foil, and it is also possible to provide a clean etched foil. By using this, an etching device capable of increasing current density can be obtained.
図面はいずれも本発明の実施例を示し、第１図
はエツチング装置の構成を示す断面図、第２図は
給電槽を用いたエツチング装置の構成を示す断面
図である。
１，１５……電源、２……コンタクトローラ
ー、３……エツチング槽、４，５，６……エツチ
ング電極、７……アルミ箔、８……ガイドローラ
ー、９……液中ローラー、１０……エツチング
液、１１……第１の水洗槽、１２……純水、１３
……水中ローラー、１４……洗浄、１６，１７，
１８……電解用電極、１９……洗浄液、２０……
第２の水洗槽、２７……給電槽、２８，２９，３
０……給電電極、３１……給電槽用水洗槽。
The drawings all show embodiments of the present invention; FIG. 1 is a sectional view showing the structure of an etching apparatus, and FIG. 2 is a sectional view showing the structure of an etching apparatus using a power supply tank. 1, 15... Power source, 2... Contact roller, 3... Etching bath, 4, 5, 6... Etching electrode, 7... Aluminum foil, 8... Guide roller, 9... Submerged roller, 10... ...Etching liquid, 11...First washing tank, 12...Pure water, 13
...Underwater roller, 14...Cleaning, 16,17,
18...electrode for electrolysis, 19...cleaning liquid, 20...
Second washing tank, 27... Power supply tank, 28, 29, 3
0...Power supply electrode, 31...Washing tank for power supply tank.
Claims (1)
て電源に接続された少なくとも１槽のエツチング
槽と、該エツチング槽の後に配された第１の水洗
槽と、該水洗槽の後に配されアルミ箔を負極、電
極用電極を陽極として電源に接続された洗浄槽
と、該洗浄槽の後に配された第２の水洗槽とから
なり、前記洗浄槽の電解用電極がTi、Ta、Nbの
中の１種からなる基体金属にRu、Ir、Pd、Rh、
Ta、Nb、Ｖの中の１種または２種以上からなる
化合物を焼成コーテイングした酸化物を形成した
ものからなることを特徴とする電解コンデンサ用
アルミ箔のエツチング装置。 ２ 洗浄槽に電源の負極に接続されたコンタクト
ローラーを設置しアルミ箔を接触させたことを特
徴とする特許請求の範囲第１項記載の電解コンデ
ンサ用アルミ箔のエツチング装置。 ３ 第１の水洗槽と洗浄槽の間に電源の負極に接
続されTi、Ta、Nbの中の１種からなる基体金属
にRu、Ir、Pd、Rh、Ta、Nb、Ｖの中の１種ま
たは２種以上からなる化合物を焼成コーテイング
した酸化物を形成したものからなる給電電極を有
する給電槽および該給電槽の後に水洗槽を配した
ことを特徴とする特許請求の範囲第１項記載の電
解コンデンサ用アルミ箔のエツチング装置。[Scope of Claims] 1. At least one etching tank connected to a power source with aluminum foil as an anode and an etching electrode as a negative electrode, a first rinsing tank disposed after the etching tank, and a first rinsing tank after the rinsing tank. It consists of a cleaning tank connected to a power source with an aluminum foil as a negative electrode and an electrode as an anode, and a second washing tank placed after the cleaning tank. , Ru, Ir, Pd, Rh,
1. An etching device for aluminum foil for electrolytic capacitors, characterized in that it is made of an oxide formed by baking a compound of one or more of Ta, Nb, and V. 2. An apparatus for etching aluminum foil for an electrolytic capacitor according to claim 1, characterized in that a contact roller connected to the negative electrode of a power source is installed in the cleaning tank and brought into contact with the aluminum foil. 3 Connected to the negative electrode of the power supply between the first washing tank and the cleaning tank, one of Ru, Ir, Pd, Rh, Ta, Nb, and V is connected to the base metal made of one of Ti, Ta, and Nb. Claim 1, characterized in that the power supply tank has a power supply electrode made of an oxide formed by firing and coating a species or a compound consisting of two or more kinds, and a water washing tank is arranged after the power supply tank. Etching equipment for aluminum foil for electrolytic capacitors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59200899A JPS6178117A (en) | 1984-09-25 | 1984-09-25 | Aluminum etching apparatus for electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59200899A JPS6178117A (en) | 1984-09-25 | 1984-09-25 | Aluminum etching apparatus for electrolytic capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6178117A JPS6178117A (en) | 1986-04-21 |
| JPS6223448B2 true JPS6223448B2 (en) | 1987-05-22 |
Family
ID=16432101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59200899A Granted JPS6178117A (en) | 1984-09-25 | 1984-09-25 | Aluminum etching apparatus for electrolytic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178117A (en) |
-
1984
- 1984-09-25 JP JP59200899A patent/JPS6178117A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6178117A (en) | 1986-04-21 |
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