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JPS62228134A - Ultra-microhardness test method - Google Patents

Ultra-microhardness test method

Info

Publication number
JPS62228134A
JPS62228134A JP7192086A JP7192086A JPS62228134A JP S62228134 A JPS62228134 A JP S62228134A JP 7192086 A JP7192086 A JP 7192086A JP 7192086 A JP7192086 A JP 7192086A JP S62228134 A JPS62228134 A JP S62228134A
Authority
JP
Japan
Prior art keywords
specimen
adhesive
indenter
ultra
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7192086A
Other languages
Japanese (ja)
Other versions
JPH0588775B2 (en
Inventor
Yasunori Yamamoto
山本 靖則
Hiroharu Yamada
山田 弘治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP7192086A priority Critical patent/JPS62228134A/en
Publication of JPS62228134A publication Critical patent/JPS62228134A/en
Publication of JPH0588775B2 publication Critical patent/JPH0588775B2/ja
Granted legal-status Critical Current

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  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

PURPOSE:To enable the testing of a material easy to deform, by adhering the specimen of a magnetic tape or a rubber material to a specimen stand by an adhesive and, after the solidification of the adhesive, pushing an indenter in said specimen. CONSTITUTION:A specimen 2 is fixed onto a specimen stand 5 formed by applying mirror surface finish to a glass plate or a thin steel plate by an adhesive 3 and an indenter 1 is subsequently pushed in the specimen 5. That is, the adhesive 3 is applied to the surface of the specimen stand 5 or the back surface of the specimen 2 to adhere the specimen 2 to the specimen stand 5 and solidified to fix the specimen 2 before the indenter 1 is allowed to fall to be pushed in the specimen 2. In this case, the relation of load-push-in depth is shown by a drawing and escape due to an air layer experienced heretofore is eliminated and accurate measurement is performed. By this method, the testing of a material easy to deform such as a rubber material which has been impossible to measure heretofore can be performed.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、超微小硬度試験方法に関する。[Detailed description of the invention] [Industrial application fields] The present invention relates to an ultra-microhardness testing method.

[従来技術] 磁気テープ等の極薄材やゴム等の材料の硬度測定は、被
試験体表面の金属蒸着膜や半導体基板上の絶縁膜等の薄
膜の硬度を測定する超微小硬度計を用いて行なわれてい
る。
[Prior art] The hardness of ultra-thin materials such as magnetic tape and materials such as rubber is measured using an ultra-micro hardness meter that measures the hardness of thin films such as metal evaporated films on the surface of test objects and insulating films on semiconductor substrates. It is carried out using

し発明が解決しようとする問題点] しかしながら、超微小硬度計により磁気テープやゴムな
どを試験する際、第4図(a)に示すように、磁気テー
プ7と試料台8との間に間隙(空気層)9が生じやすく
、この間隙によって測定誤差が生じるという問題点があ
った。すなわち、このような間隙9が存在すると圧子に
よる押込過程の際、第5図に示すように間隙9がなくな
るまで圧子の押込深さが急激に増加するので、荷重と圧
子の押込み深さを計測の対象とする試験において大きな
測定誤差を生じるのである。また、同図(a)に示すよ
うに、ゴム10等の変形しやすい試料では圧子の押し込
み時に弾性によって横方向に逃げ、場合によっては全く
測定できなくなるという問題点もおった。
[Problems to be Solved by the Invention] However, when testing magnetic tape, rubber, etc. using an ultra-microhardness tester, as shown in FIG. There was a problem in that gaps (air layers) 9 were likely to occur, and these gaps caused measurement errors. In other words, if such a gap 9 exists, during the indentation process with the indenter, the indentation depth of the indenter will rapidly increase until the gap 9 disappears, as shown in Figure 5, so it is difficult to measure the load and the indentation depth. This results in large measurement errors in the targeted tests. In addition, as shown in FIG. 5A, in the case of a easily deformable sample such as the rubber 10, when the indenter is pushed in, the indenter escapes laterally due to its elasticity, and in some cases, there is a problem in that it becomes impossible to measure at all.

そこで本発明は、これら磁気テープ等の試料をも超微小
硬度計により正確に測定できるような超微小硬度試験方
法を提供することを目的とする。
Therefore, an object of the present invention is to provide an ultra-microhardness testing method that enables accurate measurement of samples such as these magnetic tapes using an ultra-micro hardness meter.

[問題点を解決するための手段] 上記問題点を解決するために、本発明は次のような構成
を採用した。
[Means for Solving the Problems] In order to solve the above problems, the present invention employs the following configuration.

すなわち、本発明にかかる超微小硬度試験方法は、磁気
テープやゴム材等の試料を接着剤を用いて試料台上に付
着させ、該接着剤を固化させた後、圧子による押込みを
行なうことを特徴とする特徴とする。
That is, the ultra-microhardness testing method according to the present invention involves attaching a sample such as a magnetic tape or a rubber material onto a sample stage using an adhesive, and after solidifying the adhesive, indentation is performed using an indenter. The characteristics are as follows.

[作用] 接着剤が固化し試料が試料台に固定されるのを持って圧
子の押込みを行なうので、試料と試料台との間に空気層
が生じることがなく、試料の横方向への逃げも生じない
[Operation] The indenter is pressed in after the adhesive has solidified and the sample is fixed on the sample stand, so there is no air space between the sample and the sample stand, and the sample does not escape in the lateral direction. will not occur.

[実施例] 第1図は、本発明を実施して行なう硬度試験を説明する
図であり、ガラス板やスチールの薄板を鏡面仕上げした
試料台5上に試料2を接着剤3により固定してから圧子
1の押し込みを行なう。すなわち、第2図に示すように
、試料台5の表面若しくは試料2の裏面に接着剤3を塗
布しく同図(イ))、試料2を試料台5上に付着させ接
着剤3が固化するのを待ち(同図(ロ))、試料2が固
定されてから圧子1を降ろして押込みを行なう(同図(
ハ))。
[Example] Fig. 1 is a diagram illustrating a hardness test carried out by implementing the present invention, in which a sample 2 is fixed with an adhesive 3 on a sample table 5 made of a glass plate or a thin steel plate with a mirror finish. The indenter 1 is pressed in from. That is, as shown in FIG. 2, the adhesive 3 is applied to the front surface of the sample stage 5 or the back surface of the sample 2 (FIG. 2(A)), and the sample 2 is attached onto the sample stage 5, and the adhesive 3 is solidified. Wait until sample 2 is fixed (see figure (b)), then lower indenter 1 and perform indentation (see figure (b)).
Ha)).

第3図は、本発明を実施して得られた荷重−押込み深さ
特性を示す図で、従来のように空気層等による逃げがな
く正確な計測が行なわれることを示す。
FIG. 3 is a diagram showing the load-indentation depth characteristics obtained by implementing the present invention, and shows that accurate measurements are performed without escape due to air layers etc. as in the conventional case.

接着剤としては、固化したときに超微小硬度試験負荷圧
に耐える硬度を有するものを使用する必要があり、たと
えば、アロンアルファ若しくはブリット(いずれも商品
名)を使用する。
It is necessary to use an adhesive that has a hardness that can withstand the ultra-microhardness test load pressure when solidified, such as Aron Alpha or Brit (both trade names).

[発明の効果] 上記説明から明らかなように、本発明の超微小硬度試験
方法によれば、従来計測が不可能であったゴム材等の変
形しやすい試料の試験を行なうことができるとともに、
磁気テープ等の極薄材の試験をより正確に行なうことが
できるようになった。
[Effects of the Invention] As is clear from the above description, according to the ultra-microhardness testing method of the present invention, it is possible to test easily deformable samples such as rubber materials, which were previously impossible to measure. ,
It has become possible to more accurately test ultra-thin materials such as magnetic tape.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明を実施して行なう超微小硬度試験を説明
する図、第2図(イ)(ロ)(ハ)は本発明を実施する
手順を示す図である。第3図は本発明を実施して得られ
た荷重−押込み深さ特性を示す図、第4図(a)、(b
)は従来法の欠点を説明する図、第5図は従来法による
荷重−押込み深さ特性を示す図である。
FIG. 1 is a diagram illustrating an ultra-microhardness test conducted by implementing the present invention, and FIGS. 2 (a), (b), and (c) are diagrams showing the procedure for implementing the present invention. Figure 3 is a diagram showing the load-indentation depth characteristics obtained by implementing the present invention, and Figures 4 (a) and (b).
) is a diagram explaining the drawbacks of the conventional method, and FIG. 5 is a diagram showing the load-indentation depth characteristics according to the conventional method.

Claims (1)

【特許請求の範囲】[Claims] (1)磁気テープやゴム材等の試料を接着剤を用いて試
料台上に付着させ、該接着剤を固化させた後、圧子によ
る押込みを行なうことを特徴とする超微小硬度試験方法
(1) An ultra-microhardness testing method characterized by attaching a sample such as magnetic tape or rubber material onto a sample stage using an adhesive, and after solidifying the adhesive, indentation is performed using an indenter.
JP7192086A 1986-03-29 1986-03-29 Ultra-microhardness test method Granted JPS62228134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7192086A JPS62228134A (en) 1986-03-29 1986-03-29 Ultra-microhardness test method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7192086A JPS62228134A (en) 1986-03-29 1986-03-29 Ultra-microhardness test method

Publications (2)

Publication Number Publication Date
JPS62228134A true JPS62228134A (en) 1987-10-07
JPH0588775B2 JPH0588775B2 (en) 1993-12-24

Family

ID=13474449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7192086A Granted JPS62228134A (en) 1986-03-29 1986-03-29 Ultra-microhardness test method

Country Status (1)

Country Link
JP (1) JPS62228134A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013115146A1 (en) * 2012-02-03 2013-08-08 日東電工株式会社 Sample fixing member for nano indenter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013115146A1 (en) * 2012-02-03 2013-08-08 日東電工株式会社 Sample fixing member for nano indenter
JP2013160589A (en) * 2012-02-03 2013-08-19 Nitto Denko Corp Sample fixing member for nano indenter

Also Published As

Publication number Publication date
JPH0588775B2 (en) 1993-12-24

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