JPS62212159A - Preparation of ink jet head - Google Patents
Preparation of ink jet headInfo
- Publication number
- JPS62212159A JPS62212159A JP5613086A JP5613086A JPS62212159A JP S62212159 A JPS62212159 A JP S62212159A JP 5613086 A JP5613086 A JP 5613086A JP 5613086 A JP5613086 A JP 5613086A JP S62212159 A JPS62212159 A JP S62212159A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- adhesive
- diaphragm
- inkjet head
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims description 18
- 230000001070 adhesive effect Effects 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000013013 elastic material Substances 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 6
- 229920006332 epoxy adhesive Polymers 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000006023 eutectic alloy Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- -1 industrial solder Chemical class 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1618—Fixing the piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、インクジェット記録装置のうち、インクオン
デマンド型インクジェットヘッドの製造方法に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an ink-on-demand type inkjet head of an inkjet recording apparatus.
従来、振動板と圧電素子を接合して成るインクジェット
ヘッドを製造する場合、半田合金などの共晶合金を用い
て高温に加熱して接合したり、工ざキシ系の接着剤を用
いて長時間高温で加熱して接合していた。Conventionally, when manufacturing an inkjet head made by bonding a diaphragm and a piezoelectric element, the bonding process is performed by heating to high temperatures using a eutectic alloy such as a solder alloy, or by using a tactile adhesive for a long period of time. They were joined by heating at high temperatures.
工業用ハンダなどの金属の共晶合金を用いて接合する場
合、圧電素子と被接合物の熱膨張係数に大差があり、接
合時に高温に保った後室温まで冷却すると、圧電素子に
非常に大きな残留応力がかかるために、゛接合後に圧電
素子が破損したり、電気信号印加時に、圧電素子の変形
により破損することが多かった。When bonding using a eutectic alloy of metals such as industrial solder, there is a large difference in the coefficient of thermal expansion of the piezoelectric element and the material to be bonded. Due to the residual stress, the piezoelectric element is often damaged after bonding, or due to deformation of the piezoelectric element when an electric signal is applied.
またエポキシ系接着剤を用いて接合する場合、接着剤自
体は絶縁物であるため、圧電素子の下側電極面と振動板
との1!気的接続を確実にするためには、圧TrL素子
表面の晦少な凹凸の凸部が振動板表面に接触するように
接着層の厚みを充分薄くすることが心安である。接着層
の厚みは5〜10μm程度が適当であり、これより薄い
と未接着部分が生じやすくなり、一方これより厚いと電
気的接続が不安定になる。一般にエポキシ系接着剤は高
粘度であるために、接着層の厚みを前記のように薄く、
均一にすることがむずかしく、電気信号印加時の圧電素
子の変形による振動板の振動が不安定であるため各ノズ
ルの特性が大きく異なり、印字孔れを起こすことがあっ
た。またエポキシ系接着剤を硬化させるためには、長時
rlfl高温に加熱する必蟹があり、加熱することによ
って一時的に軟化したエポキシ樹脂14が、図3.αの
ようにはみ出し、絶縁層を形成することにより、電気的
に導通が取れなくなるといった不良が多かった。さらに
加熱によりヘッド自体を傷めることも多かった〔問題点
を解決するための手段〕
本発明は、こうした欠点を除去したもので、圧電素子下
面と振動板との接着および電気的接続を確実に行ない、
製造工程を安定化し、さらに信頼性の高いインクジェッ
トヘッドを提供することにある。Furthermore, when bonding is performed using an epoxy adhesive, since the adhesive itself is an insulator, the 1! In order to ensure the electrical connection, it is safe to make the thickness of the adhesive layer sufficiently thin so that the slightly uneven convex portions on the surface of the pressure TrL element come into contact with the surface of the diaphragm. The appropriate thickness of the adhesive layer is about 5 to 10 μm; if it is thinner than this, unbonded parts are likely to occur, while if it is thicker than this, the electrical connection will become unstable. Generally, epoxy adhesives have a high viscosity, so the thickness of the adhesive layer is made thin as described above.
It is difficult to achieve uniformity, and the vibration of the diaphragm due to the deformation of the piezoelectric element when an electric signal is applied is unstable, so the characteristics of each nozzle differ greatly, which may cause printing holes. In addition, in order to harden the epoxy adhesive, it is necessary to heat it to a high temperature for a long time, and the epoxy resin 14, which is temporarily softened by heating, is heated as shown in Figure 3. There were many defects in which electrical continuity could not be established due to protrusion like α and the formation of an insulating layer. Furthermore, the head itself was often damaged due to heating. [Means for solving the problem] The present invention eliminates these drawbacks, and ensures reliable adhesion and electrical connection between the bottom surface of the piezoelectric element and the diaphragm. ,
The aim is to stabilize the manufacturing process and provide an even more reliable inkjet head.
本発明のインクジェットヘッドの圧電素子部分の断面図
を第1図に示す。流路に対応する溝を形成したプラスチ
ック製の基板1と同材質でできた基板2を溶着してイン
ク流路3及びノズル4が形成される。基板2と金属振動
板8は接着剤9を介して接着され、その上に圧電素子7
が接着されている。ここで圧電素子7に電気信号を与え
ると、基板2を通して圧力室5に圧力が加わり、ノズル
4先端からインク滴6が噴射される。A cross-sectional view of the piezoelectric element portion of the inkjet head of the present invention is shown in FIG. An ink flow path 3 and a nozzle 4 are formed by welding a plastic substrate 1 having grooves corresponding to the flow path and a substrate 2 made of the same material. The substrate 2 and the metal diaphragm 8 are bonded together via an adhesive 9, and a piezoelectric element 7 is placed thereon.
is glued. When an electric signal is applied to the piezoelectric element 7, pressure is applied to the pressure chamber 5 through the substrate 2, and an ink droplet 6 is ejected from the tip of the nozzle 4.
本発明の特徴は、圧電素子7と金属振動板8を嫌気性接
着剤10によって接着している点にあり、その工程を第
2図を用いて説明する。The feature of the present invention is that the piezoelectric element 7 and the metal diaphragm 8 are bonded together using an anaerobic adhesive 10, and the process will be explained using FIG. 2.
該接着剤10にはLOOTLTK社製の358(粘度2
000 、 C,P、S、ショアD75)を使用した。The adhesive 10 is 358 manufactured by LOOTLTK (viscosity 2
000, C, P, S, Shore D75) was used.
まず第2図(α)のように真空ピンセット12によって
チャックされた、大きさが長さ4聴×巾2mX厚さくL
lmmの圧電素子7に、あらかじめ嫌気性接着剤10が
充分浸透したスポンジ状の含浸材13から転写方式によ
り塗布する。First, as shown in Fig. 2 (α), it was chucked by vacuum tweezers 12, and the size was 4 cm long x 2 m wide x 3 mm thick.
A sponge-like impregnated material 13 sufficiently permeated with the anaerobic adhesive 10 is coated onto the 1 mm piezoelectric element 7 by a transfer method.
第2図(h)のように均一に該接着剤が塗布された圧電
素子7を金属振動板8上の所定の位置に重λ
ね合せ、軽く押える。該接着剤10は嫌気性の自己反応
型であることより、空気が遮断された部分だけが、約2
〜3秒で硬化し接着が完了する。また硬化が接合部だけ
で起こるため、該接着剤10が余分にはみ出しても簡単
な洗浄で除去でき、圧電素子7上面に絶縁層を形成する
恐れは全くない。この接着部の接着強度をL字ノ1クリ
テスト、せん断接着力測定により調べたが、いずれも圧
電素子7が破壊し、接着部には異状が認められなかった
。またヘッドの耐久性を調べた結果、従来のように圧i
t累子7と金属振動板とをエポキシ系接着剤で接着する
方式に比較しても優れていることがわかった。さらに、
水性または油性インクが万一付着することがありても、
該接着剤10はインクによって侵されることもなく、信
頼性も十分ある東のであるー
他の実施例として、基板1および2の材質が高弾性部材
、例えばガラス、セラミックなどの場合、基板1.2を
溶着してインク流路を形成し、その上に薄膜電極を蒸着
した後、流路中の圧力室に対応する基板2上に嫌気性接
着剤な〔実施例1〕と同様な方法で塗布した圧電素子を
接着する。As shown in FIG. 2(h), the piezoelectric element 7 uniformly coated with the adhesive is stacked at a predetermined position on the metal diaphragm 8 and lightly pressed. Since the adhesive 10 is anaerobic and self-reacting, only the portion where air is blocked has a
It hardens and completes adhesion in ~3 seconds. Further, since curing occurs only at the joint, even if the adhesive 10 protrudes excessively, it can be removed by simple cleaning, and there is no fear of forming an insulating layer on the top surface of the piezoelectric element 7. The adhesive strength of this bonded portion was examined by an L-shaped crimp test and a shear adhesive force measurement, but in both cases, the piezoelectric element 7 was destroyed and no abnormality was observed in the bonded portion. In addition, as a result of examining the durability of the head, we found that
It was found that this method is superior to the method of bonding the t-shirt 7 and the metal diaphragm with an epoxy adhesive. moreover,
In the unlikely event that water-based or oil-based ink sticks,
The adhesive 10 is not attacked by ink and has sufficient reliability. In another embodiment, when the material of the substrates 1 and 2 is a highly elastic material such as glass or ceramic, 2 is welded to form an ink flow path, and a thin film electrode is deposited on the ink flow path, and then an anaerobic adhesive is applied to the substrate 2 corresponding to the pressure chamber in the flow path in the same manner as in [Example 1]. Glue the applied piezoelectric element.
さらに他の実施側として、該接着剤10の代りに紫外線
硬化を嫌気性接着剤を用いることも可能であり、接着時
に生じる余分なはみ出しを紫外線を照射することにより
、効果的に硬化させることができる。Furthermore, as another implementation side, it is also possible to use an anaerobic adhesive that is cured by ultraviolet light instead of the adhesive 10, and by irradiating the excess protrusion that occurs during bonding with ultraviolet light, it can be effectively cured. can.
以上述べたように本発明によれば、圧′F!L素子と振
動板を接合する場合、嫌気性接着剤を用いることにより
、〔発明が解決しようとする問題点〕の項に記載の問題
点が全て解決され、印字特性の安定したヘッドができる
。特に圧電素子と振動板との接着にエポキシ系接着剤を
使用していた場合に比べて、圧電素子と振動板及び圧電
素子と配線基板との電気的接続タ:P実になされるため
、製造工掻上でそれにかかわる不良発生がなくなり、非
常に高い信頼性が得られるようになる利点がある。As described above, according to the present invention, the pressure 'F! When joining the L element and the diaphragm, by using an anaerobic adhesive, all of the problems described in the section [Problems to be solved by the invention] can be solved, and a head with stable printing characteristics can be produced. In particular, compared to the case where an epoxy adhesive was used to bond the piezoelectric element and the diaphragm, the electrical connections between the piezoelectric element and the diaphragm, and between the piezoelectric element and the wiring board are made more easily. This has the advantage of eliminating the occurrence of defects related to scraping and providing extremely high reliability.
また一般に嫌気性接着剤は粘度が低いために、定量塗布
が容易で完全自動化が可能であり、しかも瞬時に接着固
定ができるために製造工程の合理化が簡単に行なえ、製
造コストの低減をはかれる。Furthermore, since anaerobic adhesives generally have a low viscosity, they can be easily applied in fixed quantities and can be fully automated, and they can be adhesively fixed instantly, making it easy to streamline the manufacturing process and reduce manufacturing costs.
第1図は本発明の製造方法によって製造されたインクジ
ェットヘッドの圧電素子付近の断面図。
第2図(α)〜(C)は本発明のインクジェットヘッド
の圧M1素子の接着工程の説明図。
第3図は、従来のインクジェットヘッドの圧電素子付近
の断面図。
以 上
出願人 セイコーエプソン株式会社
9躊着制
第1図
10嫌灸鯛l@
((Z)
(b)
(C)
第2図FIG. 1 is a sectional view of the vicinity of a piezoelectric element of an inkjet head manufactured by the manufacturing method of the present invention. FIGS. 2(α) to (C) are explanatory diagrams of the bonding process of the pressure M1 element of the inkjet head of the present invention. FIG. 3 is a cross-sectional view of the vicinity of a piezoelectric element of a conventional inkjet head. Applicant: Seiko Epson Co., Ltd. 9-term entry system Figure 1 10 Moxibustion-resistant sea bream @ ((Z) (b) (C) Figure 2
Claims (1)
2基板を溶着することにより流路を形成し、高弾性部材
より成る振動板を積層し、該振動板上の圧力室に対応し
た位置に配置された圧電素子から成るインクジェットヘ
ッドにおいて、該振動板と該圧電素子の接合に嫌気性接
着剤を用いたことを特徴とするインクジェットヘッドの
製造方法。A flow path is formed by welding a first substrate integrally molded with a groove to become an ink flow path and a second substrate, and a diaphragm made of a highly elastic material is laminated to correspond to the pressure chamber on the diaphragm. 1. A method of manufacturing an inkjet head, characterized in that an anaerobic adhesive is used to bond the diaphragm and the piezoelectric element in the inkjet head comprising a piezoelectric element disposed at a position.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5613086A JPS62212159A (en) | 1986-03-14 | 1986-03-14 | Preparation of ink jet head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5613086A JPS62212159A (en) | 1986-03-14 | 1986-03-14 | Preparation of ink jet head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62212159A true JPS62212159A (en) | 1987-09-18 |
Family
ID=13018490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5613086A Pending JPS62212159A (en) | 1986-03-14 | 1986-03-14 | Preparation of ink jet head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62212159A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6361152B1 (en) | 1998-05-14 | 2002-03-26 | Nec Corporation | Ink jet head and method of fabrication thereof |
-
1986
- 1986-03-14 JP JP5613086A patent/JPS62212159A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6361152B1 (en) | 1998-05-14 | 2002-03-26 | Nec Corporation | Ink jet head and method of fabrication thereof |
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