JPS6221067U - - Google Patents
Info
- Publication number
- JPS6221067U JPS6221067U JP11117285U JP11117285U JPS6221067U JP S6221067 U JPS6221067 U JP S6221067U JP 11117285 U JP11117285 U JP 11117285U JP 11117285 U JP11117285 U JP 11117285U JP S6221067 U JPS6221067 U JP S6221067U
- Authority
- JP
- Japan
- Prior art keywords
- peephole
- evaporator
- evaporation source
- reflector
- adhering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の縦断面図である。
１……反射板、２……しやへい板、３……蒸着
源、４……のぞき窓、５……試料、６……蒸着器
チエンバ、７……視点、８……視点７からのぞい
たとき見える範囲、９……しやへい板２よりしや
へいされる範囲。
FIG. 1 is a longitudinal sectional view of the present invention. 1...Reflection plate, 2...Shipping plate, 3...Vapor deposition source, 4...Peephole, 5...Sample, 6...Vapor deposition chamber, 7...Viewpoint, 8...Peek from viewpoint 7 9...The range that is hidden from the shield board 2.
Claims (1)
に導くための反射板と、蒸着源からの蒸着物がの
ぞき窓に付着するのをさえぎるためのしやへい板
をもつた蒸着器用のぞき窓。 A peephole for a evaporator that has a reflector to once reflect the image of the evaporation source in the evaporator and guide it to the peephole, and a shield plate to block the deposition material from the evaporation source from adhering to the peephole. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11117285U JPS6221067U (en) | 1985-07-19 | 1985-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11117285U JPS6221067U (en) | 1985-07-19 | 1985-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221067U true JPS6221067U (en) | 1987-02-07 |
Family
ID=30990847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11117285U Pending JPS6221067U (en) | 1985-07-19 | 1985-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221067U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0266021U (en) * | 1988-11-07 | 1990-05-18 |
-
1985
- 1985-07-19 JP JP11117285U patent/JPS6221067U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0266021U (en) * | 1988-11-07 | 1990-05-18 |