JPS62188873A - High speed valve - Google Patents

Abstract

PURPOSE:To make the valve body actuate at higher speed by providing an expansion member which instantaneously expands or contracts and one end of which is connected to a valve body and making the mass of weight larger than that of the valve body to the degree where the valve body can be moved with the connected weight as the basis. CONSTITUTION:A valve seat 3 having a gas discharging port 2 is provided at one end of a valve chamber 1 and a valve body 4 is forced to the valve chamber 1 side by a spring 6. A piezoelectric element stem 7 and a weight are provided at the flange 5 side end part of the valve body 4. The mass of the weight 8 is made far larger as compared with the mass of the valve body 4. Accordingly when the spring 6 is expanded or contracted instantaneously, the valve body operates instantaneously in the direction for opening the valve body with the weight as the basis to open the valve and thereafter operates in the direction instantaneously closing the valve in the spring direction. For this reason, the valve body can be operated at high speed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to high-speed valves, particularly ion implanters, photo-CVD devices, and plasma X-ray devices.

Other equipment in the conductor manufacturing process.

In various X-ray sources, etc., gas is instantaneously introduced into the reaction chamber.

This invention relates to a high-speed valve that is suitable for introducing into an X-ray generation chamber or the like and injecting gas for a predetermined short period of time.

[Prior Art] As a high-speed valve used in an ion implantation device, a photo-CVD device, a plasma X-ray device, etc., a magnetic valve as shown in FIG. 5 is used.

In this magnetic valve, the hammer 50 is accelerated by the magnetic coil 51 to pull the valve body 52 [- to introduce gas], and the gas injected from the gas outlet L154.
It is sent to

Here, 55 is a hammer return spring;
6 is a valve return spring that biases the valve body 52 in the closing direction, and 57 is an O-ring provided on the valve body 56.

In particular, gas plasma
As for radiation sources, for example, one in which gas is injected in pulses between coaxial electrodes in a vacuum using a high-speed valve is known.

In addition, in various reaction chambers, it is necessary to inject a reaction gas or an inert purge gas into the reaction chamber at high speed.

[Problems to be solved] However, in the case of high-speed valves such as the above-mentioned magnetic valve, even if the opening operation time is fast, the opening time is several 15 times.
When the gas is injected in a 1<)-less manner and at a high speed, this is not sufficient, and a valve that operates at a higher speed is desired.

In addition, magnetic valves such as those mentioned above must have a strong structure because of the impact generated by the hammer, and depending on the way the structure is designed, they may not be durable. be.

[Object of the Invention] The present invention is intended to meet such technical demands and eliminate the above-mentioned drawbacks, and aims to provide a high-speed valve that is faster and more durable.

[Means for Solving the Problems] In order to achieve such an object, the means for the high-speed valve of the present invention includes a valve body, a valve seat, and a telescoping member whose one end is connected to the valve body. , which has a weight coupled to the other end of the telescoping member and a spring that presses the valve body against the valve seat, and when the telescoping member extends or contracts, the inertia of the weight and the valve disc and the spring The valve body moves in the above-mentioned direction of expansion or contraction for a time determined by the relationship of forces, separates from the valve seat and opens the valve, and then the valve body is pressed against the valve seat by the spring and the valve closes. It is something.

[Function] With this configuration, when the telescopic member momentarily expands or contracts, the valve body momentarily operates in the direction of opening with the weight side as a reference, the valve opens, and then the spring The valve immediately operates in the direction of closing.

As a result, the opening response speed can be increased according to the expansion/contraction speed of the expandable member, and a high-speed valve that operates faster can be realized.

[Example 1] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

Fig. 1 is a sectional view of one embodiment of a high-speed valve to which the present invention is applied, Fig. 2 is a sectional view of another embodiment, and Fig. 3 is a plasma X-ray source as seen in Fig. 1. FIG. 4 is an explanatory diagram of the case where the high-speed valve shown in FIG. 1 is used in the optical CVD apparatus.

In FIG. 1, numeral 10 is an extension-release type high-speed valve whose actuating portion is extended to open the valve, and l is a valve chamber sealed by its cylindrical casing 9. A valve seat 3 having a gas discharge port 2 is provided at one end of the valve chamber 1, and a valve body 4 formed of a cylindrical body with a head disc is pressed into contact with the valve seat 3. There is.

This pressure contact of the valve body 4 is achieved by a compressed spring 6 interposed between the inner wall surface of the valve seat 3 and a flange portion 5 formed at the rear of the valve body 4, which causes the valve body 4 to move toward the valve chamber 1 side. This is done by being energized. That is, the spring 6 pulls the valve body 4 from the outside toward the valve chamber I and presses it against the valve seat 3. As a result, the gas discharge port 2 formed by the valve seat 4 is normally closed by the valve body 4.

A laminated piezoelectric element r-valve stem 7 is integrally connected to the end of the valve body 4 on the flange 5 side, and an end of the piezoelectric element r-valve rod 7 on the opposite side to the valve body 4 is connected. A cylindrical weight 8 with one end closed is fixed to the piezoelectric element rod 7 so as to cover the end thereof.

On the other hand, the valve chamber 1 is provided with an opening (not shown) on its side surface, etc., and this J old-1 communicates with a gas supply source, so that a predetermined gas is supplied to the valve chamber 1, and a predetermined gas is supplied to the valve chamber 1. A configuration is adopted in which pressured gas fills here.

Here, as the gas introduced into the valve chamber l, for example, He+Ar is used as a discharge gas in a plasma X-ray apparatus, etc., and A as an inert gas is used in a photo-CVD apparatus.
A gas such as r r N 2 is used as a purge gas to remove dust and the like.

Now, the mass of the weight 8 is much larger than the mass of the valve body 4, and is five times the weight of the valve body.
The two largest values are selected.

Next, the operation will be explained. When a voltage is applied to the piezoelectric element valve stem 7, the piezoelectric element valve stem 7 rapidly expands. In the case of a laminated piezoelectric element, the length of the elongation depends on the number of laminated layers and the length thereof, but in the case of the one used here, for example, an elongation speed of 30 microns can be obtained in 30 μsec.

Here, the mass of the valve body 4 is Mb, and the mass of the weight 8 is Mo
Then, the valve body 4 and the valve body 8 move according to the law of conservation of motion &. Therefore, from the relationship Mb<Mo, the moving distance is calculated as follows: the object force of mass Mb is the mass t Mo
larger than the object. In particular, if 1 Mbc: x Mo, the movement (movement) between them mostly acts on the object with mass Mb.

Therefore, when the piezoelectric element valve rod 7 is expanded under the conditions of Mb x Mo, the stretching force acts on the forward movement of the valve body 4, and the valve body 4 is moved by the spring with respect to the weight 8. It moves outward against the force of 6. Then, the valve body 4 separates outward from the valve seat 3, and the gas discharge port 2 is instantaneously closed.

As a result, gas is instantaneously released from the gas outlet 2 at high speed. Even if the piezoelectric element valve rod 7 is in an expanded state, the force of the spring 6 pulls the valve body 4 back toward the valve seat 3, and the gas discharge port 2 is closed by the valve body 4.

Thereafter, the state of the piezoelectric element valve stem 7 is contracted and returned to its original initial state. Even with this contraction, the closed state of the gas υ1 outlet 2 by the valve body 4 does not change.

Here, the valve body 4 opens the gas outlet 2 (the operating speed is mainly determined by the stretching force of the piezoelectric element valve stem 7 and the quality of the valve body 4.
b, and the time during which the gas outlet 2 is kept open is mainly determined by the force of the spring 6 and the quality of the weight 8, mMo.
It is determined by

As a result, the speed of elongation of the piezoelectric element valve stem 7 can be several μsec to several tens of μsec if the piezoelectric element described above is used, although it depends on the laminated state and applied voltage. The time it takes to close can be set from a high speed of several tens of microseconds to several hundred microseconds, or even several seconds.

Therefore, the radial velocity of the gas can be adjusted by the extension speed of the piezoelectric element valve rod 7, the force of the spring 6, and the quality mMo of the weight 8, and this can be adjusted from several tens of microseconds to
The time can be selected from several hundreds of microseconds to several 11 seconds.

By the way, by adopting a structure in which the valve body 4 is pressed against the valve seat 3 from the outside to the inside by the spring 6 as in this embodiment, even if the high-speed valve 10 is worn out after being used for a long period of time, the spring Constantly automatically adjusted by the power of 6,
It is pressed against the valve seat 3. That is, there is an advantage that the operating conditions for the valve do not change. therefore,
Can withstand repeated use over long periods of time.

Further, since the valve body is biased by the spring 6, the valve can be attached in any direction, and there is an advantage that the valve can be attached directionally.

Note that an O-ring may be interposed between the valve seat 3 and the valve body 4, and in this case, the O-ring may be attached to either one.

Based on the following, when the weight of the valve body 5 and the weight 8 and the biasing force of the spring 6 are selected, the range is from several tens of μsec to several +7 rμ
Gas can be generated in a pulsed manner for sec or several mm5 ec, and the response speed until its release is as follows:
The speed can be increased to about sec.

The outflow velocity of the gas itself in this case is determined by the difference between the pressure in the valve chamber 1 and the outside. By doing so, it is possible to emit high-speed gas.

FIG. 2 shows another embodiment, in which the high-speed valve 10a is
It is a contraction-open type in which the actuating part contracts and the valve opens. The valve body 4a is arranged inside with respect to the valve seat 3a,
Pressed against the valve seat 3a by a compression spring 6a interposed between the weight 8a and the inner wall 1b of the valve chamber 1a, the gas discharge 112a
Adopt a configuration that blocks the

Here, 7a is a piezoelectric element valve stem, which corresponds to the piezoelectric element valve stem 7 in FIG. 1, but differs in that it contracts when a voltage is applied. Note that 9a is a cylindrical housing that forms the valve chamber 1a.

Next, the operation will be explained. When a voltage is applied to the piezoelectric element valve stem 7a, the piezoelectric element valve stem 7a rapidly contracts.

Then, as in the case of FIG. 1, the mass of the valve body 4a is Mb
If the mass of the weight 8a is MO and Mb〈〈Mo, then the contraction movement between the valve body 4a and the weight 8a mostly acts on the valve body 4, which is an object of quality Ji1Mb. do.

Therefore, as in the case of FIG. 1, the piezoelectric element valve rod 7a
When contracted, the contraction force acts on the backward movement of the valve body 4a, and the valve body 4a moves inward against the force of the spring 6a, with the weight 8a as a reference, and the valve body 4a touches the valve seat. 3a inwardly, and the gas exhaust 1-12a is opened.

As a result, gas is instantaneously released from the gas outlet 2a. Thereafter, even if the piezoelectric element valve rod 7a is in a contracted state, the valve body 4a is pushed back toward the valve seat 3a by the force of the spring 6a, and the gas discharge port 2a is closed by the valve body 4a.

The operating speed at which the valve body 4a opens the gas outlet 2a is the same as in the case of FIG. 2a
The time during which the spring 6a is held open is mainly determined by the length of time the spring 6a
is determined by the force and the quality ffiMo of the weight 8a.

In this case, the opening operation time of the gas exhaust port 2a and the time from opening to closing are almost the same as in the case of FIG. 1.

Figure 3 shows the high-speed valve 1 shown in Figure 1 in the plasma X-ray source.
FIG. 2 is a cross-sectional view when using 0.

Around the gas injection electrode section 20, high speed valves 1o, to
, to, . - Gas chamber 23
The gas which is filled with droplets passes through a slit 21 formed in a cylindrical shape in the gas injection electrode section 20 and is injected as a cylindrical gas. As a result, gas is instantaneously injected toward the counter electrode section 24 . At the same time, a high-speed switch between these electrodes is closed to cause a pulse discharge between the gas injection electrode section 20 and the counter electrode section 24.

The gas injected into a cylinder is rapidly compressed by the magnetic field of the discharge current generated by this discharge, causing it to reach a high temperature.

A high-density plasma is formed for a short time, and electromagnetic waves containing soft X-rays are emitted from the emission port 25 from this plasma.

FIG. 4 is a sectional view when the high-speed valve 10 shown in FIG. 1 is used in an optical CV l) device.

By the way, in optical CVD equipment, laser light is used.

Although a window is provided to receive ultraviolet rays, there is a drawback that a film is formed on the inside of this window as well. In order to prevent this, the inside of the window is purged with an inert gas. This high-speed valve is used to periodically inject this purge gas at high speed to prevent film formation on the inside of the window.

Furthermore, in devices with windows on the lower side, dust such as flakes may fall and accumulate on the windows. Therefore, even in such a case, the high-speed valve is used to blow high-speed gas onto the window to blow away dust such as flakes.

In FIG. 4, reference numeral 30 denotes a reaction chamber, and windows 31.
It has 32. The upper window 31 is a wafer mounting table 33
The lower window 32 is a window that transmits light from an infrared heating source 35 in order to heat the wafer 34 placed on the wafer 34. This is a window for transmitting light from the ultraviolet light source 36.

On the left side wall of the reaction chamber 30 seen on the left side of the drawing, a reaction gas (for example, S t Hq + 021 or S i Hq + PH3+02), an inert gas (
For example, a nozzle 38.
39 is provided, and a nozzle 40 is provided at the lowest stage thereof. This nozzle 40 has high-speed valves 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, 10, . ... is connected, and the high-speed valve to, to, to, ... is,
They are arranged in a line in the direction perpendicular to the plane of the paper and inject a purge gas (for example, an inert gas such as Ar or N2).

Here, injection plates 41, 42, 43 each having a plurality of linear slits at predetermined intervals are installed in front of the nozzles 38, 39 and the nozzle 40 that generates high-speed gas, and these injection plates 41, 42. The gas injected from 43 flows inside the reaction chamber 30 in a layered state from the left side to the right side, passes through slit plates 41a, 42a + 43a arranged at corresponding positions on the opposite side, and then passes through the υto air 44.
The air is evacuated by a pump.

Therefore, the reaction gas injected from the nozzle 38 (reaction chamber 3
0 [− side solid line arrow) forms a gas flow space adjacent to the surface of the wafer 34, and is excited by the laser beam 37 irradiated from the direction perpendicular to the plane of the paper and the light from the ultraviolet light source 36. As a result, a film formation reaction occurs on or near the wafer surface, and a predetermined film is formed on the surface of the wafer 34.

On the other hand, inert gas injected from the nozzle 39 (reaction chamber 3
The dotted line arrow in the center of 0) serves to separate the lower high-speed gas and the reaction gas, producing a flow intermediate between the flow of the reaction gas and the average flow velocity of the high-speed gas.

In addition, the high-speed purge gas (dotted line arrow below the reaction chamber 30) injected from the nozzle 40 is periodically passed through the high-speed valve 10.
The group is driven to inject pulsed gas at high speed at predetermined time intervals, and a high-speed gas flow space is periodically formed on the back side of the window 32 (on the inside of the reaction chamber 30). As a result, dust such as flakes accumulated on the inside of the window 32 is blown away and transported to the exhaust port 44, and a film forming reaction inside the window 32 is also prevented.

On the other hand, a purge passage 45 is also formed between the window 31 and the wafer mounting table 33, and a nozzle 46 coupled to the high-speed valve 10 is also connected thereto. Then, in the same manner as described above, purge gas is introduced to remove dirt from the inner surface of the window 31. This purge gas then flows into the reaction chamber 30 through this passage 45 and is exhausted from the exhaust port 34.

Note that 47 is a shutter that blocks ultraviolet light,
It is guided by a guide frame 48 and moves forward and backward by a plunger 49. These constitute a shutter mechanism for the ultraviolet light source 36.

As explained above, as a high-speed valve, plasma
The mode of use is explained using a radiation source and a photo-CVD device (d) as an example, but this high-speed valve is not only applicable to each device of such a conductor process, but also can be used as an instantaneous valve. It can be applied to various devices. In a high-speed valve, the mass of the weight, which is a standard for the mass of the valve, is determined by the conditions of the device in which the valve is used, and the springing force for closing the valve body is determined.

In the example, an example is given in which a piezoelectric element-r is used to expand or contract to operate a valve. is not limited to piezoelectric elements, for example, magnetostrictive elements can also be used.

Furthermore, in the examples, an example is given in which gas is injected into the valve chamber of a high-speed valve, but the substance to be injected may be a liquid, and any fluid with relatively low viscosity may be used. It's okay.

[Effects of the Invention As can be understood from the explanation below, the present invention comprises a valve body, a valve seat, an extensible member that is connected at one end to the valve body and that expands and contracts instantaneously, and The elastic member has a weight connected to the other end and a spring that presses the valve body against the valve seat. Since the body quality is larger than 1.1, when the elastic member momentarily expands or contracts, the valve body momentarily operates in the direction of opening based on the weight side, the valve opens, and then , the valve immediately operates in the direction of closing due to the action of the spring.

As a result, the opening response speed can be increased according to the expansion/contraction speed of the expandable member, and a high-speed valve that operates faster can be realized.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of one embodiment of a high-speed valve to which the present invention is applied, FIG. 2 is a cross-sectional view of another embodiment, and FIG.
An explanatory diagram when the high-speed valve shown in Figure 1 is used as a plasma X-ray source, Figure 4 is an explanatory diagram when the high-speed valve shown in Figure 1 is used in an optical CV I) device, and Figure 5 is an explanatory diagram when the high-speed valve shown in Figure 1 is used in the optical CV I) device. , is an explanatory diagram of a conventional magnetic valve. 1.1a...Valve chamber, 2,2a...Gas exhaust "1.3
．． 3a... Valve seat, 4, 4a... Valve body, 5... Flange RL8, 6a... Compression spring, 7.7a... Piezoelectric element valve stem, EL8a... Weight. Figure 1

Claims (5)

[Claims] (1) A valve body, a valve seat, an instantaneously expandable telescopic member whose one end is connected to the valve body, a weight connected to the other end of the telescoping member, and a valve body that connects the valve body to the valve seat. 1. A high-speed valve, comprising a spring that presses and biases the valve, and the mass of the weight is larger than the mass of the valve body to such an extent that the valve body can move based on the weight. (2) The high-speed valve according to claim 1, wherein the expandable member expands and contracts in the direction in which the valve body is connected in response to the application of voltage or current. (3) The high-speed valve according to claim 1 or 2, wherein the expandable member is a piezoelectric element. (4) The high-speed valve according to any one of claims 1 to 3, wherein the expandable member is a magnetostrictive element. (5) The extensible member is a laminated piezoelectric element, and the mass of the weight is more than five times the mass of the valve body, and when the piezoelectric element expands, the valve body moves in the direction of opening. A high-speed valve according to any one of claims 1 to 3, characterized in that: