JPS62184447U - - Google Patents
Info
- Publication number
- JPS62184447U JPS62184447U JP7181286U JP7181286U JPS62184447U JP S62184447 U JPS62184447 U JP S62184447U JP 7181286 U JP7181286 U JP 7181286U JP 7181286 U JP7181286 U JP 7181286U JP S62184447 U JPS62184447 U JP S62184447U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- case
- introduction path
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図ないし第５図は本考案の実施例に係り、
第１図は本考案の実施例を示す半導体圧力センサ
ーの断面図であり、第２図は第一の変形例を示す
半導体圧力センサーの断面図であり、第３図は第
二の変形例を示す半導体圧力センサーの断面図で
あり、第４図は本考案の半導体圧力センサーを使
用した電子腕時計の平面図、第５図は第４図にお
けるＢ―Ｂ断面図である。第６図ないし第８図は
従来例に係るものであり、第６図は従来例を示す
半導体圧力センサーの断面図であり、第７図はシ
リコンダイヤフラム等の拡大断面図であり、第８
図はシリコン基板に形成されているホイーストン
ブリツジ回路図である。
５……キヤン、１２，１５，１６……半導体圧
力センサー、１３……防水性繊維膜、４ｂ……シ
リコンダイヤフラム。
1 to 5 relate to embodiments of the present invention,
FIG. 1 is a sectional view of a semiconductor pressure sensor showing an embodiment of the present invention, FIG. 2 is a sectional view of a semiconductor pressure sensor showing a first modification, and FIG. 3 is a sectional view of a semiconductor pressure sensor showing a second modification. FIG. 4 is a plan view of an electronic wristwatch using the semiconductor pressure sensor of the present invention, and FIG. 5 is a sectional view taken along line BB in FIG. 4. 6 to 8 are related to conventional examples, FIG. 6 is a cross-sectional view of a semiconductor pressure sensor showing the conventional example, FIG. 7 is an enlarged cross-sectional view of a silicon diaphragm, etc., and FIG.
The figure is a Wheatstone bridge circuit diagram formed on a silicon substrate. 5... Can, 12, 15, 16... Semiconductor pressure sensor, 13... Waterproof fiber membrane, 4b... Silicon diaphragm.
Claims (1)
ヤフラムを内部に収納し前記ダイヤフラムへ圧力
を導入する圧力導入路が設けられたケースと、こ
のケースの前記圧力導入路に取り付けられた防水
性繊維膜とを備えてなる圧力センサー。 A diaphragm that detects external pressure, a case that accommodates the diaphragm and is provided with a pressure introduction path that introduces pressure to the diaphragm, and a waterproof fiber membrane attached to the pressure introduction path of the case. pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7181286U JPS62184447U (en) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7181286U JPS62184447U (en) | 1986-05-15 | 1986-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184447U true JPS62184447U (en) | 1987-11-24 |
Family
ID=30914704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7181286U Pending JPS62184447U (en) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184447U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001165799A (en) * | 1999-10-28 | 2001-06-22 | Motorola Inc | Component of physical sensor |
-
1986
- 1986-05-15 JP JP7181286U patent/JPS62184447U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001165799A (en) * | 1999-10-28 | 2001-06-22 | Motorola Inc | Component of physical sensor |
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