JPS62172035U - - Google Patents
Info
- Publication number
- JPS62172035U JPS62172035U JP4916686U JP4916686U JPS62172035U JP S62172035 U JPS62172035 U JP S62172035U JP 4916686 U JP4916686 U JP 4916686U JP 4916686 U JP4916686 U JP 4916686U JP S62172035 U JPS62172035 U JP S62172035U
- Authority
- JP
- Japan
- Prior art keywords
- spraying
- nozzle
- application
- supplying
- organic chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Weting (AREA)
Description
第１図は、本考案の塗布装置を示す構成図であ
り、第２図は、従来例の塗布ノズルと、有機溶剤
ノズルとの配置関係を示したものである。
１１……塗布ノズル、１２……電磁弁、１３…
…薬品ボトル、１４……加圧ポンプ、１５……電
磁弁、１６……ガスボンベ、１７……被処理物、
２１……フオトレジスト残留ゲル物、２２……有
機溶剤噴射ノズル、２３……有機溶剤。
FIG. 1 is a block diagram showing the coating apparatus of the present invention, and FIG. 2 shows the arrangement relationship between a conventional coating nozzle and an organic solvent nozzle. 11... Application nozzle, 12... Solenoid valve, 13...
... Chemical bottle, 14 ... Pressure pump, 15 ... Solenoid valve, 16 ... Gas cylinder, 17 ... Processing object,
21...Photoresist residual gel, 22...Organic solvent injection nozzle, 23...Organic solvent.
Claims (1)
する手段と、洗浄液もしくは洗浄気体を該ノズル
内へ供給する手段と、両手段を切り替える手段と
を少なくとも備えたことを特徴とする有機薬品の
塗布又は散布をする装置。 Application or spraying of an organic chemical, characterized in that it comprises at least a means for supplying an organic chemical into a nozzle for application or spraying, a means for supplying a cleaning liquid or a cleaning gas into the nozzle, and a means for switching between the two means. A device for spraying.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4916686U JPS62172035U (en) | 1986-04-02 | 1986-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4916686U JPS62172035U (en) | 1986-04-02 | 1986-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62172035U true JPS62172035U (en) | 1987-10-31 |
Family
ID=30871364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4916686U Pending JPS62172035U (en) | 1986-04-02 | 1986-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172035U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311098A (en) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | Resist dispensing apparatus, resist coating apparatus using the same, and resist coating method |
-
1986
- 1986-04-02 JP JP4916686U patent/JPS62172035U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311098A (en) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | Resist dispensing apparatus, resist coating apparatus using the same, and resist coating method |