JPS62134432A - clean room - Google Patents

Abstract

PURPOSE:To keep a device part area in positive pressure and a passage part area under negative pressure thereby to increase the clean degree of the device part area by providing smoothing plates for smoothing the air flow from an air feed portion to a ceiling exhaust portion on the side thereof making contact with an air feed portion. CONSTITUTION:The interior of the room is divided into a device part portion A, a working area B, and a passage area C, and an air feed portion 26 is provided on the ceiling of the device part area A, Further, a ceiling exhaust portion 25 is provided on the passage area C. Smoothing plates 36 are provided on the side of the ceiling exhaust portion 25 making contact with the air feed portion so that the flow line of clean air flowing from the air feed portion 26 to the ceiling exhaust portion 25 is smoothly formed. Thus, the device part area A is kept under positive pressure, and the passage area C and a utility chamber are kept under negative pressure so that it is possible to keep the device part area at a desired clean degree. In place of the smoothing plate 36, a part of an exhaust port of the air feed portion may be directed toward the ceiling exhaust side.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a lean room, which is necessary in the field of manufacturing ultra-LSIs, ICs, etc., when it is desired to maintain an ultra-clean manufacturing environment.

"Prior Art" In general, there is a large amount of dust in the manufacturing process of semiconductor devices, especially in the pre-process of forming circuit elements on semiconductor wafers.
The cleanliness of the working atmosphere is directly linked to product yield. For this reason, in order to achieve a high level of cleanliness in the working atmosphere of this type of semiconductor device, a clean room is used.For example, as shown in FIG. 4, a clean room is known.

In the figure, reference numeral I( is a clean room, and the entire room is divided by an outer partition wall 1 at 7.

There is a worker area 2 in the center of this compartment, high cleanliness areas 3 on both sides of it, and equipment maintenance areas 4 on both sides.
．． 1, each with 41 configurations, especially in the high cleanliness area 3.
．． 3 has an internal partition wall 5.5 disposed on the outside thereof and a screen 6.6 disposed on the inside thereof to provide a device maintenance area and 1.・Divided into 1 and worker area 2. In addition, the inner partition wall 5.5 and the screen 6.6 have their lower ends lower than the position where workpieces are processed on the equipment 8 installed on the floor 7 in the high-clearance area 3.3. A suspended structure is formed in such a way that it can be extended, and a gap is formed between the floors 7 and 3 below.

A high performance filter 9.9 is installed on the ceiling of each of the high cleanliness ranges 3.3, and is connected to the duct 10 at the upper part. On the other hand, a pre-filter 11 is installed on the ceiling of the worker area 2, and the pre-filter 11 is installed in the equipment maintenance area 1. 117I high performance f by providing +2,
1:3 in the figure is the work window installed on the screen 6.
Niiro work 41,1 is carried out through this work window I3 to the device 8.
Operate it.

According to this configuration, clean air flows downward from the high-performance filter 9.9 as shown by the arrow, filling the high-cleanliness area 3.3 and cleaning this area. Clean air: Yoyofurora device 8 and inner bulkhead 5
and screen 6 through 1311-] 41. They flow into the equipment maintenance area, 1.4, and operator area 2, respectively. Also,
A portion flows into the worker area 2 through the work window 13. The air in the device maintenance area 1 flows in two directions, is sucked into the pre-filter 12, and then directly returns to the high-performance filter 9 and circulates as described above. On the other hand, the air from the worker area 2 flows upward 3 from the pre-filter II through the duct IO and returns to the high-performance filter 9, where it is circulated as described above.

Therefore, in this clean room K, high cleanliness areas 3 and 3 have positive pressure, while work area 2 and equipment maintenance area 4
．．・1 is pressure proof, which makes it possible to maintain the high cleanliness area 3.3 to the desired level of cleanliness, and to prevent air from being drawn in from the worker area 2 to stably maintain the high cleanliness 1y. , and high-performance filter 9.9 in high cleanliness range 3.
．． It will be set on 3! Y, it is possible to reduce the initial cost of the equipment, and it is possible to obtain many effects such as being able to reduce the running cost of electricity by reducing the amount of air supplied.

However, in the 07 IA Hoto clean room (in this case, it was decided that a screen should be installed between the center and the worker area to achieve a high-clearance area). This allows the operator to operate the device through a screen, which is separated by a high space between the clean area and the operator area, which improves operability, accuracy and speed. It was found that it was difficult to perform close work, and that the screens were an obstacle and restricted the actions of the workers.

The present invention has been made in view of the above problems, so it prevents air from being drawn in from Meijo to stably maintain high cleanliness.
In addition, by reducing the air supply amount and reducing the running cost of electricity, it also reduces the initial cost of equipment, and further improves the operability of the equipment. The purpose is to provide a clean room where equipment can move easily.

"Means for Solving the Problems" In order to solve the problems mentioned above, the present invention provides a high-quality indoor interior.
It can be divided into the equipment area which requires high speed, the working area adjacent to this equipment area where workers work, and the passage area adjacent to this working area where workers pass. An air supply section for blowing out clean air is installed at the top of the device area, and furthermore, an air supply section for blowing out clean air is installed in the second section of the passage section, which is adjacent to the air supply section, and clean air is blown out from the air supply section. Otsuki to make people aware of clean air - In a clean room equipped with an exhaust section, on the side of the ceiling exhaust section that is in contact with the air supply section, streamlines of the in-clean air flowing from the air supply section to the ceiling exhaust section are formed smoothly. As shown in FIG. 2, a part of the discharge port on the ceiling exhaust part side of the air supply part provided with a rectifying plate or i is oriented toward the ceiling exhaust part.

``Function - Since a ceiling exhaust section is provided on the ceiling of the passageway area, a portion of the clean air flowing from the air supply section toward the floor will flow from the equipment area through the working area to the passageway area. An air flow having a large velocity component in the direction is formed to prevent dust from entering the equipment area from the working area and the passage area.

In addition, in the ceiling area, clean air flows smoothly from the air supply section to the ceiling exhaust section, so there is no eddying of the air, which prevents particles in the air from spreading, and the flow of clean air from the air supply section to the ceiling exhaust section. It is smoothly sucked into the ceiling exhaust section without invading the room.

``Example'' The present invention will be described in detail below with reference to FIGS. 1 to 3. FIG. 1 shows a first embodiment of the invention, FIG. 2 shows a second embodiment of the invention, and FIG. 3 shows a third embodiment of the invention.

r in Figure 1, mark s21 < : ma clean le 120
．． 21 is the ceiling board, 22:j is the floor board, and the top is ``'j''
A ceiling plate 23 is installed on the ceiling within 1 inch between l''2 l and the floor slab 22, and a ceiling plate 23 is installed at the top of the ceiling plate 23 (not shown). Second air supply ducts 24 and 271 are arranged to blow air from the ceiling.At the bottom of the ceiling section 23, there is a ceiling exhaust section 25 in the center; So both sides (C on the lower side! 1
G) Adjacent to the air supply chamber 26°2 is the air supply chamber.
6 is provided. This air supply chamber 26°26 is
U provided in the lower part of the air supply chamber 26.2G, respectively communicating with the upper air supply tact 24.2.1.
L PA filter (or HE PA filter) 27
, 27 to communicate with the space below.

On the other hand, a floor part 28 having an opening above the floor slab 22 is installed in the floor part of the room, and an underfloor free access floor 28a is formed between them. moreover,
The interior of the room is divided into a work room 30 and a utility room 31.31 by partition plates 29.29 erected between both sides of the air supply chamber 26.degree. 26 and the floor 28.

Near the bottom of the partition plate 29.29, LSI manufacturing equipment ξ32, 32 is arranged, and at the lower end of the partition plate 29, a partition plate exhaust port 33.33 is formed. If the manufacturing equipment 32 protrudes into the utility room 31 for a long time, provide a louver on the partition plate 29 near where it touches the top of the manufacturing equipment 32, and if the manufacturing equipment 32 fits into the work room 30, install a louver in the partition plate 29 that contacts the top of the floor 28. By providing a louver on the partition plate 29 near the slot, a partition intake/exhaust port 33 is formed.

The space of the work room 30 includes equipment areas A, A above the manufacturing equipment 32, and a space where the worker 34 is located in the manufacturing equipment 32.
work area B, where the worker 32 works while standing in front of the work room 30; and a passage area C, where the worker 34 passes through approximately the center of the work room 30.
The air supply chamber 26.26
are located above the equipment areas A, A, and the ceiling exhaust section 25 is located above the passage area C.

Further, in the air supply chamber 26.26, an air conditioner 35.35 with a built-in fan is installed on the side of the utility room 31.31, and on both sides of the lower part of the air exhaust section 25,
The rectifier plates 36, 3 are arranged so that streamlines of air flowing from the air supply chamber 26.2G to the ceiling exhaust section 25 are formed smoothly.
6 is fixed to the side surface of the air supply chamber 26.26 (6) Inside the rectifying plate 36.36 is an equipment lighting fixture 37 that illuminates the equipment area A and the working area B. 37 and passageway lighting fixtures 38 and 38 are arranged to illuminate the passageway area C.Furthermore, in the ceiling exhaust section 25, a louver 39 is installed between rectifier plates 36 and 36, and a louver 39 is installed above it. An exhaust fan 40.40 is installed in the air supply chamber 26.

On the other hand, the floor portion 28 has a hole floor 41. made of grating or punching metal as an opening.・11. ... is installed, a concrete fixed floor 42.12. =12.

Next, the operation of the one-component clean room I mentioned above will be explained.

-4゛, Cool air sent from the main air space 1 through the air supply ducts 24 and 24 is supplied to the left G air supply channels 2G and 26 provided in the sky JP. Air supply chamber 26.2
The air supplied to G is purified by passing through the ULPA filter 27, 27 and blown into the working chamber 30. The blown clean air mainly passes through the flow path of the three salivary condyles and is again blown into the air supply chambers 26 and 26.

First, the first flow path (2) is such that the clean air blown out from the air supply chamber 26 hits the top surface of the manufacturing device 32, passes through the partition plate exhaust port 33, reaches the utility room 31, and then passes through the partition plate exhaust port 33 to reach the utility chamber 31, and then The return air flows through the air conditioner 35 and into the supply air chamber 26. Next, after the clean air blown out from the air supply chamber 26 hits the upper surface of the manufacturing equipment 32, the second flow path (2) passes from the perforated floor 41 to the underfloor free access floor 28a so as to wrap around the worker 31. The flow path passes through the utility chamber 31, passes through the air chamber 35, and then flows to the air supply chamber 26. Furthermore, the 39th flow path is
The clean air blown out from the air supply chamber 26 does not hit the AA building device 32, passes through the upper part of the working area I3, flows mainly around the head of the worker 34, etc., and flows into the passage area C.
Pass through the top of the sky) From the togarari 39 to the sky
5 and then return air to the supply air chamber 26 by the exhaust fan 110. [5. If exhaust to the outside is required, please install the filtration device (not shown) or inside the clean room (-, if the air flowing through the flow path 2) is installed inside the device. After being drawn in and passing through the equipment, it is exhausted out of the building through an exhaust duct (not shown).

Here, the area where we want to maintain the cleanest environment (this is the equipment area A, which includes the top surface of the manufacturing equipment 32, that is, the loading and unloading parts of wafer cassettes). By blowing air, it is necessary to directly remove dust from the equipment area A and to prevent dust from entering due to air entrainment from the working area B and the passage area C. In particular, it is necessary to If product area A and aisle area C are separated by ceilings, lighting fixtures, hanging walls, etc., vortices are likely to occur above the workbench, and dust from workers can enter these vortices. In this case, it takes time to eliminate the dust, and there is a high possibility that this dust will enter the equipment area as the worker moves or works, so it is necessary to prevent the generation of the vortex.

In this embodiment, in order to satisfy the above conditions, clean air is supplied to the equipment area through flow path ■■,
Prevention of dust intrusion from working area B and passage area C 11
:, is performed by clean air flowing through the flow path ■■. In particular, the clean air flowing through the flow path has an airflow shape that has a large horizontal velocity component, heading from the equipment area A through the working area B to the passage area C. Therefore, it is possible to almost completely prevent dust from entering from the working area B and the passage area C. Furthermore, in the ceiling part, a rectifying plate 36, 36 is installed in the ceiling exhaust part 25 so that streamlines of clean air flowing from the ceiling exhaust part 25 through the channel Because it is formed smoothly, there are no air vortices near the ceiling surface, and fine particles in the air are smoothly sucked into the ceiling exhaust section without being diffused or entering the equipment area A. To go.

In addition, the required cleanliness of super clean rooms, such as partially laminar flow clean rooms, is Class 10 (target particle size - 18 m or more) for the equipment area, C for the passage area.
The clean air flowing out from the equipment area A is of class 100 (target particle size = 0°1 μm or more), and the clean air flowing out from the equipment area A is higher in purity than the clean air in the passage area C. The passage area C can be cleaned using the cleaning agent.

In addition, in this embodiment, when the amount of clean air supplied to the work chamber 30 is 10 m3/min, the ratio of the exhaust gas m flowing through the three types of flow paths and exhausted is as follows: ■Flow path ■: It is desirable that the ratio is -1:4:5.

Therefore, in this clean room K, the equipment area A, which is a high cleanliness area, is under positive pressure, while the passage area C and the utility room 31 are attached, thereby shifting the equipment area A to the desired cleanliness level. Second, it is possible to prevent air from being drawn in from the working area B and the passage area C, thereby eliminating the intrusion of dust and stably maintaining a high level of cleanliness. In addition, since the air supply chambers 26 and 26 in the air supply section are only provided at the top of the device areas Δ and A, clean air is not blown out from the entire surface of the ceiling, reducing the amount of air blowing (this In this example, approximately 30%), and since the U L P A filter 27 only needs to be provided in the supply chamber 26, 26, the running cost of electric power such as the drive power of the fan can be reduced. Reduce the initial cost of equipment.

Furthermore, since the work room 30 is not separated by a screen or the like into the device area A, the work area B, or the passage area C, the worker 34 is not restricted in his or her movements within the work room 30. At the same time, the operability on the manufacturing device 32 can be improved, and detailed work can be performed accurately and quickly.

Top f2, the air supplied to the work chamber 30 is 3 (・■ order,)
Since a 4" hole can be drawn from the flow path, the floor part 28.)
It is not necessary to make the entire surface a perforated floor 11, but it is necessary to provide a slight opening just below the area B of the passage area C and the notification device 32.32. Directly below is solid゛、z・
Is it possible to make him 42 years old? As a result, during work 31, by walking on the fixed floor 12 in the passage area C,
By separating the fixed bed 12 of the passage area C and the fixed bed 112 of the mounting equipment 32, 32, vibrations generated during walking can be suppressed, and vibrations can be reduced.
．． 32) It is possible to cause discomfort to workers 3 and 1 when walking on a fully grating floor.

Next, the second embodiment will be explained using FIG.

In FIG. 2, the same components as those in the first real blood example shown in FIG. 1 are designated by the same reference numerals, and their explanations will be omitted.

In this second embodiment, the ceiling portion is configured as follows so that the clean air flowing near the ceiling flows from the supply air outlet 26, 26 to the ceiling exhaust section 25 without creating any vortices. The other configurations are the same as those of the first embodiment.

The outlet on the ceiling exhaust part 25 side of the air supply chamber 26.26 is gradually bent toward the ceiling exhaust part 25 to form a curved surface, and the ULPA filter 27.27 is aligned to match the shape of the outlet. It has a partially curved shape. Furthermore, the louvers 39 provided at the lower part of the ceiling exhaust part 25 are arranged and formed in a chevron shape upward so that both sides of the louvers 39 are gently continuous with the curved surfaces of the discharge ports of the air supply chambers 26, 26.

With this configuration, the air supply chamber 26.2
The clean air blown out from the flow path ■■ is blown out in a vertical airflow toward the manufacturing equipment 32. The air is exhausted laterally toward the ceiling exhaust section 25 in a short-circuit manner, and as it moves away from the ceiling exhaust section 25, it is blown out in an oblique direction so as to wrap around the head of the worker 34. Furthermore, does it flow through the flow path ■■? ? In the working area B, the purified air has an airflow shape that has a large lateral velocity component that travels from the device area A through the working area B to the passage area C. It is possible to almost completely prevent dust from entering from the region B and the first passage region C.

In addition, a lighting fixture 38 that illuminates the passage area C is connected to the ceiling exhaust part 3.
The air flow inside the work room 40 is improved by placing lighting fixtures 37°37 on the ceiling plate 23 in the work room 40, respectively, on the back of the partition plates 29 and 29C) so as not to illuminate the equipment area 4. It is possible to obtain the necessary clarity without disturbing the situation. Furthermore, by making the collar 39 of the ceiling exhaust part 25 an exhaust port with a transparent damper, it has the function of a louver.
Is it possible to uniformly and brightly illuminate the passage area C?

Therefore, in this second embodiment, in addition to having the same structure and effect as the first embodiment, there is no air vortex at all on the ceiling surface, and the device is more completely It is possible to maintain a high cleanliness level of 7 (C) in area A.

Next, a third embodiment will be described using FIG.

In FIG. 3, the same components as those in the embodiment shown in FIG. 1 and FIG. 2 are denoted by the same reference numerals, and the explanation thereof will be omitted.

In this third embodiment, the floor section 28 having the opening is removed to eliminate the underfloor free access floor 28a, and the floor slab 22 is removed.
is the floor part, and the work room 10 is provided directly above it. Regarding the pond's t:i liE,
This is the same as the second embodiment.

In the clean room K configured as described above,
Clean air blown out from the air supply chamber 26.26,
As in the second embodiment, t? j Clean air is in the device area, A
The airflow has a large velocity component in the lateral direction from the working area B to the passage area C, and has an airflow shape.
As a result, after the intrusion of dust from the working area B and the passage area C is almost completely prevented, the manufacturing equipment 32.3
Pass under 2 and reach utility room 31.31.
Then, the return air is returned to the air supply chambers 2G, 2G via empty, ]l[935, 35.

Therefore, this third embodiment has the same functions and effects as the second embodiment of Section 1111, and!
! A-Building equipment 32. Work efficiency is improved because the equipment, piping, ducts, etc. to be installed are installed on the same floor as the manufacturing equipment. It is possible to obtain the 21J results, such as being able to reduce the construction cost of the floor, and completely eliminating the discomfort of walking for workers.

"Effects of the Invention" As explained above, the present invention provides an air supply unit that blows clean air to the top 1F of the equipment area when a room is divided into an equipment area, a working area, and a passage area. established,
Furthermore, in a clean room in which a ceiling exhaust section is provided adjacent to the air supply section in the upper part of the passage area, the clean air flows from the air supply section to the ceiling exhaust section on the side of the ceiling exhaust section that is in contact with the air supply section. In order to form smooth streamlines, a rectifying plate may be provided, or a portion of the discharge port on the ceiling exhaust side of the air supply section may be directed toward the ceiling exhaust section. The equipment area, which is the cleanliness area, becomes under positive pressure, while the passage area and the utility room become pressure-proof, thereby making it possible to achieve the desired cleanliness in the equipment area;
In addition, it is necessary to prevent air from being drawn in from the working area and the passage area, eliminate the ingress of dust, and maintain a stable high level of cleanliness. Since the ULPA filter is installed only at the top of the area and clean air is not blown out from the entire surface of the Amakawa area, the number of air outlets can be reduced.In addition, since the ULPA filter only needs to be installed in the supply chamber, It is possible to reduce the running cost of J (driving power, etc.) and reduce the initial cost of equipment.

Furthermore, in the present invention, since the equipment area is not separated from the work area or the passage area by a screen or the like, the operator is not restricted in his or her movements within the work room, and is not restricted from working on the manufacturing equipment. Operability can be improved and detailed work can be performed accurately and quickly.

[Brief explanation of drawings]

1 to 3 show embodiments of the present invention, FIG. 1 shows the first embodiment and is a side sectional view of the clean room, and FIG. 2 shows the second embodiment and shows the side of the clean room. The sectional view, FIG. 3, shows a third embodiment and is a side sectional view of a clean room, and FIG. 1 shows a conventional technique, and is a side sectional view of a clean room.

Claims (2)

[Claims] (1) Inside the room, there is an equipment area that requires high cleanliness, a working area adjacent to this equipment area where workers work, and a passage area adjacent to this working area where workers pass. An air supply section for blowing out clean air is provided on the ceiling of the device area, and an air supply section is provided adjacent to the air supply section at the upper part of the passage section area to return the clean air blown out from the air supply section. In a clean room equipped with a ceiling exhaust section, a rectifier plate is installed on the side of the ceiling exhaust section in contact with the air supply section so that streamlines of the clean air flowing from the air supply section to the ceiling exhaust section are formed smoothly. A clean room characterized by the following: (2) Inside the room, there is an equipment area that requires high cleanliness, a working area adjacent to this equipment area where workers work, and a passage area adjacent to this working area where workers pass. An air supply section for blowing out clean air is provided on the ceiling of the device area, and an air supply section is provided adjacent to the air supply section at the upper part of the passage section area to return the clean air blown out from the air supply section. 1. A clean room provided with a ceiling exhaust section for causing air to flow, wherein a part of the discharge port on the ceiling exhaust section side of the air supply section is directed toward the ceiling exhaust section side.