JPS62110469A - X-y linear motor - Google Patents

Abstract

PURPOSE:To move a magnet or four coils to required positions on a plane with a simple and small size structure by arranging the four magnets in two columns by two rows so as to face the magnet. CONSTITUTION:Four coils 21-24 are arranged in two columns by two rows so as to face a magnet 20 and the magnet 20 or the four coils 21-24 are supported by supporting means 25, 26a, 26b, 27a, 27b and 28 so as to be able to be moved. The magnet 20 or the four coils 21-24 can be moved to required positions on a plane by applying predetermined current to the coils 21-24.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is an X-Y table suitable for use in, for example, an X-Y table.
Regarding Y linear motor.

[Summary of the invention]

The present invention is suitable for use in, for example, an X-Y table.
In a linear motor, 411M facing the magnet
coils are arranged in 2 rows and 21 columns, and magnets or 4
By providing a supporting means that can move the 4 coils, the structure is simple, and by combining the directions of the currents flowing through the 4 (M) coils, the magnet or the 4 coils can be moved to a desired position on the plane. so that it can be moved to
This allows miniaturization and improved responsiveness.

[Conventional technology]

Conventionally, an XY linear motor such as the one shown in FIG. 5 has been proposed as an XY linear motor suitable for use in an XY table.

The X-Y linear motor (not shown in Fig. 5) uses two linear motors (1) and (3), and one linear motor (
The movable table (2) of 1) is attached to the other motor (3).
is fixed such that its longitudinal direction is perpendicular to the longitudinal direction of one of the near motors (+1).

Note that (4) is a movable table for the other glue motor (3).

In this case, one linear motor +1) is
As shown in the figure, there is a casing (5) with an opening in cross section, and a casing (5) with an opening in the cross section.
1, which is slidably attached to the upper surface opening (6) of 1 in the longitudinal direction of the casing, that is, in the direction of arrows a and b shown in FIG.
1I moving table (2), a yoke (10) having a center yoke (7) and a side yoke (81 (91) provided in the housing (51), and a side yoke (81 (9) of this yoke (10)). Coils (11) (1'2) wound in the same winding direction, and nJ movable table 2.
) and arranged so that the north poles face each other with the center yoke (7) in between.
(14). In the linear motor (1) configured in this way, a clockwise current is passed through one coil (11) as shown by arrow C in FIG. 6, and a current is passed through the other coil (12) as shown by arrow d. By passing a counterclockwise current, a force F is generated according to the so-called Fleming's left hand rule, which causes the magnet to
(13) According to (14), the movable table (2) can be driven by the force F in the direction of arrow a shown in FIG. Also, one and the other coil (11)
(12) By setting the current direction to flow in the opposite direction, movement can be made in the direction of the arrow shown in FIG. The other linear motor (3) is constructed in the same manner as the one linear motor (11), and is capable of moving its movable table (4) in the directions of arrows 0 and f.

Such one and the other linear motors (1) and (3)
In a conventional X-Y linear motor configured by Figure 8 shows the origin of the x-y plane (
0, 0) so that the center of one linear motor (11) coincides with the center of one linear motor (11) so that the center of the movable table (2) of one linear motor (1) can move on the X axis in the directions of arrows a and b.

In this case, the other linear motor (3) is fixed to the movable table (2) of one linear motor (+1) so as to be perpendicular to its longitudinal direction and the longitudinal direction of one linear motor (1). Move the movable table (4) of the glue motor (3) in a direction parallel to the Y axis, that is, arrow C.
and f directions. Therefore, move the movable table (2) of the near motor +11 to the Y axis -h.
At the same time, the 6J moving table (4) of the other linear motor (3) is moved parallel to the Y axis to the desired position (x, o).

y).

(Problems to be Solved by the Invention) However, in the conventional x-Y linear motor, the structure is complicated due to the use of two linear motors (11 (31), and there are disadvantages in that it cannot be miniaturized. In addition, one linear motor (11) must drive the other linear motor (3), and since the fi load is large, there is an inconvenience that one motor is required for responsiveness.

In view of the above, an object of the present invention is to provide an X-Y linear motor that has a simple structure, can be miniaturized, and can provide quick response.

[Failure to solve the problem]

As shown in FIGS. 1 and 2, the X-Y linear motor according to the present invention has 41 coils (21) (22) (23) (24) facing the magnet (20).
are arranged in 2 rows and 2 columns, and magnets (20) or '
4 (W coil (21) (22) (23)
(24) is movable supporting means (25)
(26a) (26b) (27a) (27
b) (2B) is provided.

[Effect]

According to the present invention, there are four magnets facing the magnet (20).
coils (21) (22) (23) (2
4) are arranged in 2 rows and 2 columns, so the magnet l-(2
The magnetic flux due to 0) is 4 coils (21) (22)
(23) Interlink (24). Therefore, 4 (I
M coil (21) (22) (23) (24)
By passing current through the magnet (20) and the four coils (21), (22), (23), and (24), a thrust force is generated in the plane direction.
21) By changing the direction of the current flowing in (22), (23), and (24), the direction of the 'ζ thrust can be changed. In the present invention, the magnet (20) or the 41-hard coil (21) (22) (
23) Support means (24) movable
5) (26a) (26b) (27a)
(27b) (28) are provided, so the thrust generated by passing a predetermined current through the coils (21) (22) (23) (24) is used to generate the magnet (20) or the 41-wire coil (21) ( 22)(2
3) (24) can be moved to a desired position on the plane.

〔Example〕

Hereinafter, one embodiment of the xy linear motor of the present invention will be described with reference to FIGS. 1 to 4.

In FIG. 1, (25) indicates a coil fixing member made of iron, and on this coil fixing member (25) are first, second, third and fourth yokes (29) (30) of the same shape.
) Arrange (31) and (32) in 2 rows and 2 columns. In this case, such as No. 1. The heads (29a) (30a) (31a) and (
32a) into a square and the body (29b)
(30b) (31b) and (32b) are made into cylindrical shapes. Also, in this case, yoke (29) (30
) (31) (32) head (29a) (30
a) A gap is provided between (31a) and (32a) at such a distance that leakage magnetic flux will not occur.

Also, the first, second, third and fourth yokes (29) (30
) The first, second, third and fourth coils (21) having the same winding direction and the same number of turns in (31) and (32), respectively.
(22) Attach (23) and (24).

In addition, the coil fixing member (25) is attached to the guide roller support shaft (
26a ) (26b ) are provided, and the guide roller (
27a) (27b), and a second guide roller (27a)
) (27b) can be rotated in the directions of arrows g and h and slidable in the directions of arrows j and k.

In addition, guide rollers (27a) (27b) ]-
A steel iiJ moving table (28) is arranged on the yoke (29), and the N and S poles are magnetized in the thickness direction at the center of the lower surface of the rotating table (28). 3
0) (31) A square plate magnet (20) larger than the center-to-center pressure mt of (32) is attached to the yoke (29).
(30) (31) Fix so that the side opposite to (32) becomes the N pole. In this case, the plate magnet (20)
and yoke (29) (30) (31) (32
) and the plate magnet 1-(2).
0) moves, it can be assumed that the magnetic flux density B due to the plate magnet (20) in this gap does not change.

In the X-Y linear motor of this example configured in this way, as shown in FIG.
2), coil fixing member (25), support shaft (26a)
(26b), guide roller (27a) (27
b) and the movable table (28), a loop of magnetic flux is formed that returns to the S pole of the plate magnet (20).

In this example, we set the Y axis and the X-Y plane represented by the Y axis as shown in Figure 3, and set the plate-shaped magnet) (20
) is on this X-Y plane (x.

y), the respective yokes (29) (3
0) Each magnetic flux φ1. passing through (31) and (32).
Connect φ2φ3 and φ→ to the plate magnet (20) and the yoke (
29) (30) (31) When the magnetic flux density in the air gap with (32) is determined as B, it becomes as follows.

Therefore, each yoke (2!D (30) (
31) and (32) magnetic flux φl, φn, φj and aφ2 aφ2 aφ3 aφ3 aφ4 aφ4a
x, ay, ax, ay + ax, a
When we find y, we get:

In this way, each yoke (29) (30) (31
) and (32), the magnetic flux φ1. φ2. φ3 and φ
Shizuku ax, ay, ax.

Therefore, each coil (21) (22) (23)
and (24) the current IL+ 12+ 13+ 1
4, the plate-shaped magnet (20) will be connected to each coil (
21) (22) From (23) and (24), the thrust force in the X-axis direction and Y-axis direction ptx・FL as shown in the following formula
3'・F2X・F2F・F3X・F3F・F
Receive 4X + F 43/. In addition, in the following formula, N
is the number of turns of each coil (21), (22), (23) and (24).

Here, the root magnet l-(25) is attached to each coil (21).
) (22) (23) X received from (24)
The total thrust force in the axial direction F and the total thrust force Fy in the Y-axis direction
When calculating, F x = F 1x + F 2X + F 3X
+ F 4X! =NB (-(-il +iz -i3+i4)+y
(-it +i2 +13-i4))...(1) F y = F ty + F 23F + F 1F
+F4Fβ=NB ((it +12-i3-it)+x
(-it +i2+1a-i4))...(2) It becomes.

Each coil (21) (22) (23)
(24) Current L L + ' 2+ 1
3 + i The absolute value of 4 is equal, i.e. lil 1=
li21=li31=li→ 1=i(A), third
In the figure, the case where the current does not flow clockwise is set as a positive direction, and the case where the current flows counterclockwise is set as a negative direction, and tt l 12
Let us find the magnitude and direction of thrust F when the current direction of + t31 14 is changed.

First, 11=-i, then 2=i, ii=-i.

When i, = i, equations (1) and (2) become, and the root magnet (20) only receives a stopping thrust parallel to the X axis, so the root magnet (20) is Move in the positive direction parallel to the X axis.

Also 11-i, i2 = -i, i3 = i, i4
When =-i, equations (1) and (2) become,
Since the plate magnet I- (20) only receives a negative thrust parallel to the X axis, the root magnet (20) moves in the negative direction parallel to the X axis.

Also ix = i + iz = i + 13 = -it
When i→=-1, equations (1) and (2) become, and the plate magnet (20) only receives a stopping thrust parallel to the Y axis, so the plate magnet (20) is Y
Move in the direction of IF parallel to the axis.

Also 11-1+ 12 = 1, 13 = 1+ 1
When 4=i, equations (11 and (21) become, and the plate magnet 1-(20) only receives a negative thrust parallel to the Y axis, so the plate magnet (20) becomes Move in the negative direction parallel to the Y axis.

In this way, in this example, four coils (21)
(22) (23) By combining the directions of the current flowing in (24), the plate magnet (20)
Regardless of its position on the X-Y plane, this plate-shaped magnet)
(20) can be moved in the X-axis direction and the Y-axis direction, so it can be applied to an X-Y table, etc.

The diagram shown in FIG. 4 is based on the above-mentioned coil (21) (2).
2) The relationship between the direction of the current i flowing through (23) and (24) and the magnitude and direction of the thrust that the plate magnet l-(20) receives is summarized.

According to this embodiment, the yoke (29) (30) (31) (
32) to the coil (21) (22) (23)
(24), place the plate magnet (20) on the movable table (28), and place the coils (21) and (22) on the movable table (28).
(23) By combining the directions of the currents flowing in (24), the 1J motion table (28) can be moved to a desired position, making it possible to create an X-Y linear motor with an extremely simple structure and miniaturization. There is an advantage in being able to

In addition, as shown in Fig. 5 conventional example, one-sided linear motor (1)
Since there is no need to move the other linear motor (3), there is an advantage that the r+J rotary table (28) can be moved with a small load and quick response.

In the above embodiment, °ζ is the yoke (29) (30
)(31) As described above using (32),
The present invention is not limited to the above-mentioned embodiment, but the yoke (29)
It is easy to understand that the present invention can also be applied without using (30), (31), and (32), and that the same effects as described above can be obtained in this case as well.

In addition, in this example, a case is described in which a plate magnet (20) is arranged on a movable table (28), and coils (21) (22) (23) (24) are arranged on a coil fixing member (25). However, instead of this, coils (21) (22) (23) are placed on the movable table (28).
(24) and a plate magnet (20) on the coil fixing member (25), it is easy to understand that the same effects as described above can be obtained in this case as well.

Further, the present invention is not limited to the above-described embodiments, and it goes without saying that various other configurations may be adopted without departing from the gist of the present invention.

〔Effect of the invention〕

According to the present invention, four coils are arranged in two rows and two columns facing the magnet, and a support means that allows the magnet or the four coils to be moved is provided, and the current flowing through the four coils is By combining the directions of the magnets or the four coils, the magnet or the four coils can be moved to a desired position on the plane, making it possible to simplify the structure, reduce the size, and improve responsiveness. There is profit.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing an embodiment of the X-Y linear motor of the present invention, FIG. 2 is a sectional view taken along the line AA' in FIG. 1, and FIGS. 3 and 4 are lines used to explain the present invention. Figure 5 shows the conventional X
- A perspective view of the Y linear motor, Figure 6 is B of Figure 5 -
FIG. 7 is a sectional view taken along line C--C' in FIG. 6, and FIG. 8 is a diagram for explaining the example shown in FIG. (20) is a plate magnet, (21) (22)
(23) and (24) are each a coil, (25) is a coil fixing member, (26a) and (26b) are each a support shaft for a guide roller, (27a) and (27b) are each a guide roller, (28) is a movable table, (29) (30
) (31) and (32) are coke, respectively. Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] An X-Y linear motor, characterized in that four coils are arranged in two rows and two columns facing a magnet, and a supporting means is provided to move the magnet or the four coils.