JPS62107408A - Magnetic head core - Google Patents
Magnetic head coreInfo
- Publication number
- JPS62107408A JPS62107408A JP24542485A JP24542485A JPS62107408A JP S62107408 A JPS62107408 A JP S62107408A JP 24542485 A JP24542485 A JP 24542485A JP 24542485 A JP24542485 A JP 24542485A JP S62107408 A JPS62107408 A JP S62107408A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- oxide film
- oxide
- film layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 40
- 239000010408 film Substances 0.000 claims abstract description 29
- 239000011521 glass Substances 0.000 claims abstract description 23
- 230000003647 oxidation Effects 0.000 claims abstract description 21
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 230000001590 oxidative effect Effects 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000000696 magnetic material Substances 0.000 claims description 7
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 4
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 abstract description 4
- 239000001301 oxygen Substances 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 abstract description 2
- 239000007769 metal material Substances 0.000 abstract 2
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
「技術分野」
本発明は、酸化物磁性体からなる一対のハーフコアの突
き合わせ而に金属磁性薄膜を付着させ、この金属磁性薄
膜間に磁気ギャップを形成する磁気ヘッドコアに関し、
特に金属磁性薄膜を付着させる薄膜付着面と磁気ギャッ
プとが傾斜しているタイプの磁気ヘッドコアの改良に関
する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a magnetic head core in which a metal magnetic thin film is attached between a pair of half cores made of an oxide magnetic material, and a magnetic gap is formed between the metal magnetic thin films.
In particular, the present invention relates to an improvement in a magnetic head core of the type in which the thin film adhesion surface on which a metal magnetic thin film is attached and the magnetic gap are inclined.
「従来技術およびその問題点」
金1.J1磁性薄膜と磁気ギャップとが傾斜しているタ
イプの磁気ヘッドコアは、特開昭80−32107号で
提案されている。第3図はその模式斜視図で。“Prior art and its problems” Gold 1. A magnetic head core of the type in which the J1 magnetic thin film and the magnetic gap are inclined is proposed in Japanese Patent Laid-Open No. 80-32107. Figure 3 is a schematic perspective view.
フェライト等の酸化物磁性体からなる一対のハーフコア
11の突き合わせ面にはそれぞれ、形成すべき磁気ギャ
ップ12に対し傾斜した薄膜付着面13が1−下関係を
逆にして形成されており、この薄膜付着面13にスパッ
タリング、蒸着等の薄膜形成1段により、センダスト等
の金rtls磁性n膜14が伺1iされている。またハ
ーフコア11には、薄膜付着面13とほぼ直角をなす磁
気ギャップ深さ規制面15が形成されている。磁気ギヤ
ップ12は、薄膜付着面13に対し傾斜する一対の金属
磁性薄膜14の端面間に形成され、V字状をなす金属磁
性薄膜14と磁気ギャップ深さ規制面15の間の空間に
は、ガラス等の非磁性酸化物接合材ネ1 (以下中にガ
ラスという)16が充填されて一対のハーフコア11が
固定されている。17はコイル3線溝である。On the abutting surfaces of a pair of half cores 11 made of oxide magnetic material such as ferrite, a thin film adhesion surface 13 is formed, which is inclined with respect to the magnetic gap 12 to be formed, with the 1-lower relationship reversed. A gold rtls magnetic n film 14 such as Sendust is deposited on the adhesion surface 13 by one step of thin film formation such as sputtering or vapor deposition. Further, the half core 11 is formed with a magnetic gap depth regulating surface 15 that is substantially perpendicular to the thin film attachment surface 13 . The magnetic gap 12 is formed between the end faces of a pair of metal magnetic thin films 14 that are inclined with respect to the thin film adhesion surface 13, and in the space between the V-shaped metal magnetic thin film 14 and the magnetic gap depth regulating surface 15, A non-magnetic oxide bonding material 1 (hereinafter referred to as glass) 16 such as glass is filled and a pair of half cores 11 are fixed. 17 is a coil three-wire groove.
この磁気ヘッドは、疑似ギャップとなる可能性のあるハ
ーフコア11と薄膜付着面13の境界と、磁気ギャップ
12とが傾斜しているために、磁気ギャップ12による
記録再生にこの疑似ギャップが影響を与えることがなく
、また磁気ギャップ12の幅を小さくして高記録密度化
を図ることができる。またテープ摺接面の大部分をハー
フコア11およびガラス16で形成することができるた
め、耐摩耗性に優れる等の利点がある。In this magnetic head, since the boundary between the half core 11 and the thin film attachment surface 13, which may become a pseudo-gap, and the magnetic gap 12 are inclined, this pseudo-gap affects recording and reproduction by the magnetic gap 12. In addition, the width of the magnetic gap 12 can be made small to achieve high recording density. Further, since most of the tape sliding surface can be formed of the half core 11 and the glass 16, there are advantages such as excellent wear resistance.
ところでこの磁気ヘッドは左右の/\−フコア11.1
1の接合強度を主にガラス16によって得ているが、ガ
ラス16は酸化物であるため、酸化物磁性体からなるハ
ーフコア11とは強固に接合するが、金属磁性薄膜14
との接合では著しく接合強度が落ちるという問題があっ
た。つまり4二記構造の磁気ヘッドは、金属磁性薄膜1
4とガラス16との接合強度、つまり左右のハーフコア
11の接合強度を高めることが困難で、磁気ギヤ□ツブ
12として狭ギヤツプ間隔を必要とする映像用磁気ヘッ
ドとしての信頼性が損なわれていた。By the way, this magnetic head has left and right /\-Fucoa 11.1
The bonding strength of 1 is mainly obtained by the glass 16. Since the glass 16 is an oxide, it is strongly bonded to the half core 11 made of oxide magnetic material, but the metal magnetic thin film 14
There was a problem in that the bonding strength was significantly reduced when bonded with. In other words, the magnetic head with the structure No. 42 has a metal magnetic thin film 1
4 and the glass 16, that is, the bonding strength between the left and right half cores 11, it was difficult to increase the bonding strength between the half cores 11 and the left and right half cores 11, and the reliability of the image magnetic head, which required a narrow gap interval as the magnetic gear knob 12, was impaired. .
「発明の目的」
本発明は、従来品のこの問題点を解消し、1;記タイプ
の磁気ヘッドにおいて、金属磁性薄膜とガラスとの接合
強度を高め、ひいては左右の/\−フコアを強固に結合
できる磁気ヘッドコアを提供することを目的とする。``Object of the Invention'' The present invention solves the problems of the conventional products, and improves the bonding strength between the metal magnetic thin film and the glass in the magnetic head of the type described above, and further strengthens the left and right /\-fucores. The purpose is to provide a magnetic head core that can be coupled.
「発明の概要」
本発明は、金属磁性薄膜とガラスとの間に、両者に対す
る接合性に優れた中間層を介在させるという着想のrに
、接合性に優れた中間層を種々研究の結果、金属磁性薄
膜自体を酸化させて形成した酸化膜が有効であることを
見出して完成されたものである。この酸化膜は、加熱酸
化、プラズマ醇化、化学酸化のいずれによっても形成す
ることがiTr能である。ところが加熱処理の場合、金
属磁性薄膜だけを酸化することができれば問題はないが
、実際の加熱操作では、ハーフコアの全体、つまり酸化
物磁性体の全体を加熱する結果となりやすく、ハーフコ
ア全体を加熱すると、その組成が変化してしまい、所期
の性能が得られなくなってしまう。そこで本発明では、
酸化膜を得るためのf段を、加熱処理以外の酸化処理、
つまり化学酸化あるいはプラズマ酸化に限っている。"Summary of the Invention" The present invention is based on the idea of interposing an intermediate layer with excellent bonding properties between a metal magnetic thin film and glass, and as a result of various research into an intermediate layer with excellent bonding properties to both. This was completed after discovering that an oxide film formed by oxidizing the metal magnetic thin film itself was effective. This oxide film can be formed by thermal oxidation, plasma oxidation, or chemical oxidation. However, in the case of heat treatment, there is no problem if only the metal magnetic thin film can be oxidized, but in actual heating operations, the entire half core, that is, the entire oxide magnetic material, tends to be heated; , its composition changes, making it impossible to obtain the desired performance. Therefore, in the present invention,
The f stage for obtaining an oxide film is performed by oxidation treatment other than heat treatment,
In other words, it is limited to chemical oxidation or plasma oxidation.
このように金属磁性薄膜表面に酸化膜を形成すると、こ
の酸化膜と、このLに積層するガラスとの間で酸素拡散
が起こり、その結果、ガラスと酸化膜、つまりハーフコ
アが強固に結合される。When an oxide film is formed on the surface of the metal magnetic thin film in this way, oxygen diffusion occurs between this oxide film and the glass laminated on this L, and as a result, the glass and the oxide film, that is, the half core, are firmly bonded. .
「発明の実施例」
以ド図示実施例について本発明を説明する。第1図は本
発明による磁気ヘッド構造の模式図で、左右のハーフコ
ア11の金属磁性薄膜14とガラス16の間にそれぞれ
、金属磁性薄llI214を酸化して形成した酸化膜層
20が介在している。この他の構造は、第3図の従来品
と同一であり、同一部分には同一の符号を付している。``Embodiments of the Invention'' The present invention will now be described with reference to illustrated embodiments. FIG. 1 is a schematic diagram of a magnetic head structure according to the present invention, in which an oxide film layer 20 formed by oxidizing a thin metal magnetic film 214 is interposed between the metal magnetic thin film 14 and the glass 16 of the left and right half cores 11. There is. The other structure is the same as that of the conventional product shown in FIG. 3, and the same parts are given the same reference numerals.
この酸化1112層20は、加熱処理以外のプラズマ酸
化、あるいは化学酸化によって形成するのがよい。This oxidized 1112 layer 20 is preferably formed by plasma oxidation or chemical oxidation other than heat treatment.
プラズマ酸化は、ハーフコア11の薄膜付着面131−
に金属磁性薄膜14を形成した後、プラズマを金属磁性
薄膜14表面に照射してこれを酸化するもので、結晶粒
界にある不純物を除去するため、なるべく高パワー(例
えば800〜2000W)で60分程度酸化処理を行な
うことが望ましい。Plasma oxidation is performed on the thin film attachment surface 131- of the half core 11.
After the metal magnetic thin film 14 is formed, plasma is irradiated onto the surface of the metal magnetic thin film 14 to oxidize it. In order to remove impurities at the grain boundaries, the metal magnetic thin film 14 is heated at 60 kW at as high a power as possible (for example, 800 to 2000 W). It is desirable to carry out the oxidation treatment for about a minute.
この酸化膜層20の膜厚は50〜100人程度とする。The thickness of this oxide film layer 20 is approximately 50 to 100.
そしてこの酸化膜層20と、他方のノ\−フコア11の
磁気ギャップ深さ規制面15との間にガラス16を溶融
させて充填し、左右のハーフコア11を接合すると、酸
化11り層20とガラス16との間で酸素拡散が起こる
ため、両者が強固に結合される。他方ガラス16とハー
フコア11とは。Then, glass 16 is melted and filled between this oxide film layer 20 and the magnetic gap depth regulating surface 15 of the other nof core 11, and when the left and right half cores 11 are joined, the oxide film layer 20 is formed. Since oxygen diffusion occurs between the glass 16 and the glass 16, the two are firmly bonded. On the other hand, what is the glass 16 and the half core 11?
両者が酸化物であることから強固に接合されるため、左
右のハーフコア11は全体として強固に結合され、?J
Jい安定性で磁気ギャップ12を狭ギヤ、プとして維持
することができる。Since both are oxides, they are strongly bonded, so the left and right half cores 11 are firmly bonded as a whole. J
The magnetic gap 12 can be maintained as a narrow gear with high stability.
この磁気へ、ドコアにはその巻線溝17にコイル巻線が
施され、磁気テープ摺接面を研磨した後、ケース内に収
納固定して磁気ヘッドとして完成する。To this magnetic field, a coil is wound in the winding groove 17 of the core, and after polishing the sliding contact surface of the magnetic tape, the core is housed and fixed in a case to complete the magnetic head.
次に第1図の磁気ヘッドコアの製造工程の例を第2図に
ついて説明する。この製造工程は基本的にはl二足特開
昭60−32107号で提案されている製造[二程と同
じで、中間に酸化処理工程が含まれる点が異なっている
。まずモ板状の一対の/\−フコアブロック21の突き
合わせ面22に一定間隔でV)1■23を形成する。こ
のV溝23は、薄膜付着面13を構成する(同図(a)
)、この突き合わせ面22およびV溝23の表面全体に
、薄膜形成手段によって、金属磁性薄膜14を付着形成
し、次に、この金属磁性薄膜14の表面全体に、酸化処
理を施して酸化膜層20を形成する(同(b))、酸化
処理は、前述のようにプラズマ酸化または化学酸化によ
る。Next, an example of the manufacturing process of the magnetic head core shown in FIG. 1 will be explained with reference to FIG. 2. This manufacturing process is basically the same as the manufacturing process proposed in JP-A No. 60-32107, except that an oxidation treatment step is included in the middle. First, V)123 are formed at regular intervals on the abutting surfaces 22 of a pair of plate-shaped /\-fucoa blocks 21. This V-groove 23 constitutes the thin film adhesion surface 13 (see Figure (a)).
), the metal magnetic thin film 14 is deposited and formed on the entire surface of the abutting surface 22 and the V-groove 23 by a thin film forming means, and then the entire surface of the metal magnetic thin film 14 is subjected to oxidation treatment to form an oxide film layer. The oxidation treatment for forming 20 ((b)) is performed by plasma oxidation or chemical oxidation as described above.
この酸化処理の終了したハーフコアブロック21の突き
合わせ面22を研磨してV溝23以外の部分の金属磁性
線v14および酸化膜層20を除去しく同(C))、次
に隣り合うV溝23の間に別のV1+■24を形成する
(回(d))、そしてこのV溝23および24内にガラ
ス16を充填し、その後突き合わせ面22をilfび研
磨する(同(e))。■溝24は、磁気ギャップ深さ規
制溝15を構成する。After this oxidation treatment, the abutting surface 22 of the half core block 21 is polished to remove the metal magnetic wire v14 and the oxide film layer 20 in the portion other than the V-groove 23 ((C)), and then the adjacent V-groove 23 is removed. In the meantime, another V1+24 is formed (step (d)), and the glass 16 is filled in the V grooves 23 and 24, and then the abutting surface 22 is polished (step (e)). (2) The groove 24 constitutes the magnetic gap depth regulating groove 15.
以1.の加丁の終了した一対のハーフコアブロック21
を、その表面にギャップ形成材料を介在させた状態で同
(f)のように、その金属磁性薄膜14の端面どうじを
突き合わせ、ガラス16が溶融軟化する温度迄加熱して
両者を接合する。その後切断線A−A’で示すように切
断すると1幅tの第1図の磁気ヘッドコアが得られる。Below 1. A pair of half core blocks 21 that have been cut
With a gap-forming material interposed on the surface, the end surfaces of the metal magnetic thin film 14 are butted together as shown in FIG. 3(f), and the two are bonded by heating to a temperature at which the glass 16 melts and softens. Thereafter, it is cut as shown by cutting line AA' to obtain the magnetic head core of FIG. 1 having one width t.
Sは切断代である。S is the cutting allowance.
「発明の効果」
以1−のように本発明の磁気ヘッドコアは、磁気ギャッ
プを形成する金属磁性薄膜と、この金属磁rl: i:
し膜の付着面とが傾斜している磁気ヘッドコアにおいて
、金属磁性薄膜と、一対のハーフコアを接合するための
非磁性酸化物接合材料との間に、金属磁性薄膜を酸化処
理して形成した酸化膜を介イl二させたから、この酸化
膜とガラス等の非磁性酸化物接合材料との酸素拡散現象
により、両者を強固に接合することができる。よって一
対のハーフコアの接合強度を高めて磁気ギャップ幅を狭
く維持することができ、映像用磁気ヘッドとして信頼性
が高い高性能の磁気ヘッドを111ることができる。"Effects of the Invention" As described in 1- below, the magnetic head core of the present invention includes a metal magnetic thin film forming a magnetic gap, and this metal magnetic rl: i:
In a magnetic head core where the surface to which the thin film is attached is inclined, an oxide film formed by oxidizing the metal magnetic thin film and a non-magnetic oxide bonding material for bonding the pair of half cores is used. Since the film is interposed, the oxide film and the non-magnetic oxide bonding material such as glass can be firmly bonded together by the oxygen diffusion phenomenon. Therefore, the bonding strength between the pair of half cores can be increased and the magnetic gap width can be kept narrow, making it possible to provide a highly reliable and high performance magnetic head 111 as an image magnetic head.
第1図は本発明の磁気ヘッドコアの実施例を示す模式斜
視図、第2図(a)ないしくf)は第1図の磁気ヘッド
コアを製造するための製造〕−程の一例を示す模式図、
第3ri!Jは本発明の対象とする従来の磁気へ、ドの
模式斜視図である。
11・・・ハーフコア、12・・・磁気ギャップ、13
・・・薄膜付着面、14・・・金属磁性薄1模、15・
・・磁気ギャップ深さ規制面、16・・・ガラス(非磁
性酸化物接合材料)、20・・・酸化膜層、21・・・
ハーフコアブロック、22・・・突き合わせ面、23・
・・■溝、24・・・V溝。
特許出願人 アルプス電気株式会社
回代理人 三 浦 邦 夫
回 松 井 茂第1図
第3因
第2図FIG. 1 is a schematic perspective view showing an embodiment of the magnetic head core of the present invention, and FIGS. 2(a) to f) are schematic views showing an example of manufacturing the magnetic head core of FIG. 1. ,
3rd ri! J is a schematic perspective view of a conventional magnetism to which the present invention is applied. 11... Half core, 12... Magnetic gap, 13
... Thin film adhesion surface, 14... Metal magnetic thin 1 model, 15.
...Magnetic gap depth regulating surface, 16...Glass (non-magnetic oxide bonding material), 20...Oxide film layer, 21...
Half core block, 22... butting surface, 23.
...■Groove, 24...V groove. Patent applicant Alps Electric Co., Ltd. Agent Kunio Miura Shigeru Matsui Figure 1 Figure 3 Cause 2
Claims (1)
わせ面にそれぞれ、両ハーフコア間に形成すべき磁気ギ
ャップに対し傾斜した薄膜付着面を形成し、この薄膜付
着面に金属磁性薄膜を付着させるとともに、一対のハー
フコアのこの金属磁性薄膜の端面を突き合わせて磁気ギ
ャップとなし、かつこの一対のハーフコアを、一方のハ
ーフコアの金属磁性薄膜と他方のハーフコア端面との間
に充填したガラス等の非磁性酸化物接合材料で接合した
磁気ヘッドコアにおいて、上記金属磁性材料と非磁性酸
化物接合材料の境界面に、加熱処理以外の酸化処理によ
り該金属磁性材料を酸化させて形成した酸化膜層を介在
させたことを特徴とする磁気ヘッドコア。(1) On the abutting surfaces of a pair of half cores made of oxide magnetic material, a thin film adhesion surface is formed that is inclined with respect to the magnetic gap to be formed between both half cores, and a metal magnetic thin film is adhered to this thin film adhesion surface. , the end faces of the metal magnetic thin film of a pair of half cores are butted against each other to form a magnetic gap, and the pair of half cores are made of non-magnetic oxide such as glass filled between the metal magnetic thin film of one half core and the end face of the other half core. In the magnetic head core bonded with a magnetic bonding material, an oxide film layer formed by oxidizing the metal magnetic material by an oxidation treatment other than heat treatment is interposed at the interface between the metal magnetic material and the non-magnetic oxide bonding material. A magnetic head core characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24542485A JPS62107408A (en) | 1985-11-01 | 1985-11-01 | Magnetic head core |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24542485A JPS62107408A (en) | 1985-11-01 | 1985-11-01 | Magnetic head core |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62107408A true JPS62107408A (en) | 1987-05-18 |
Family
ID=17133448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24542485A Pending JPS62107408A (en) | 1985-11-01 | 1985-11-01 | Magnetic head core |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62107408A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6432412A (en) * | 1987-07-28 | 1989-02-02 | Sony Corp | Production of composite magnetic head |
-
1985
- 1985-11-01 JP JP24542485A patent/JPS62107408A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6432412A (en) * | 1987-07-28 | 1989-02-02 | Sony Corp | Production of composite magnetic head |
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