JPS62106630A - processing equipment - Google Patents

Abstract

PURPOSE:To perform a low-cost and highly reliable processing when such processing as drying and cleaning is performed on a matter to be processed by a method wherein a refining means capable of reproducing the processing liquid in the collection part is connected to the main body of a processing device. CONSTITUTION:A lead-out port for crude isopropyl alcohol IPA is formed at a lower end part of a recovery tank 12 and the lead-out port is connected to a water content removal part 18. The removal part 18 is connected to a distillation part 20 beyond it and the distillation part 20 is connected to a storage tank 21. The crude IPA is transported with a pump 19 from the recovery tank 12 to the removal part 18 and a removal of the water content dissolved in the crude IPA is executed at the removal part 18. The IPA removed the water content is precisely distilled at the distillation part 20, is completely cleared of impurities other than the water content and is refined into pure IPA. The refined IPA is stored in the tank 21 and is replenished in a vapor generating part 3 through an introducing part 22 by opening and closing a valve 11a. In this way, a low-cost and highly reliable processing is performed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a technique that is effective when applied to processing such as drying and cleaning of precision products such as electronic parts.

[Background wave manete]

There is a so-called steam drying method as an S method that does not dry the processed object after washing with water.

The tea drying method has a high affinity with water, such as isopropyl alcohol (hereinafter also referred to as IPA),
It is carried out using a drying liquid consisting of an organic solvent with a low boiling point.

Specifically, for example, this can be carried out using an apparatus whose basic configuration includes a cooling section at the top and a heatable steam generating section at the bottom. When the object to be dried is placed in the space above the steam generating section, the IPA vapor evaporated from the heated steam generating section condenses on the surface of the object. Condensed IPA
Since the water flows down with the attached moisture, drying of the material to be dried is achieved by repeating the condensation and flow down.

If the IPA that has condensed on the surface of the object to be dried is dropped into the steam generation section, the concentration of water dissolved in the IPA in the generation section will immediately increase, and the moisture in the IPA vapor that will inevitably evaporate will increase. The concentration also increases. As a result, drying efficiency is reduced and a gap occurs.

Therefore, it is conceivable to discard all of the IPA that has condensed on the surface of the object to be dried, and to create a structure that prevents it from entering the steam generation section. In this way, it is possible to prevent moisture from directly entering the IPA in the steam generating section.

However, with the above structure, new IPAs are always created.
The need to continue replenishing IP leads to an increase in costs, and also creates the problem of disposing of used IP.

Furthermore, since evaporation is repeated in the tea generation area, the IPA in the generation area is gradually reduced by 7 degrees. Therefore, for example, a replenishing IP is applied to the brownish generation part.
If impurities such as small amounts of metal ions are introduced together with A, they will gradually accumulate, and it is thought that the impurities will have an effect on the material to be dried.

The inventors have found that the above problem is extremely important when the object to be dried is a semiconductor wafer that particularly requires precision.

Note that the technology related to so-called steam drying is explained in the specification of Japanese Patent Application No. 89664/1983.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a technique that enables inexpensive and highly reliable processing when drying, washing, etc. are performed on an object to be processed.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the invention]

A brief overview of typical inventions disclosed in this application is as follows.

That is, it is a processing apparatus in which the main body of the apparatus is provided with a steam generation section for processing liquid, a processing space, and a collection section for the processing liquid after processing, and the processing liquid in the collection section can be regenerated. The means is a device connected to the apparatus main body in such a manner that the treated liquid purified by the means can be introduced into the brownish generation section, whereby the condensed treated liquid with a high impurity concentration is selectively reused. At the same time, the processing liquid from the steam generating part that is concentrated from the stems can be extracted and used again after purification, and the processing liquid that is insufficient due to transpiration can be easily replenished as necessary, making it stable. It is possible to rationally achieve highly reliable processing conditions. Moreover, since the processing liquid is used repeatedly without being completely discarded, replenishment and disposal after processing are unnecessary, and a significant cost reduction can be achieved, thus achieving the above object.

〔Example〕

FIG. 1 is a schematic explanatory diagram showing a processing device as an embodiment of the present invention.

The processing apparatus of this embodiment is a so-called steam drying apparatus used for drying semi-quadruple wafers after washing with water.The main body l consists of a substantially cylindrical container, and the upper end is closed by a shutter 2 that can be opened and closed in the center. Closed. The bottom of the container contains isopropyl alcohol (I), which is a drying liquid (processing liquid).
A steam generating section 3 in which PA) is stored is formed. The IPA is heated by a heater block 4 attached below the bottom surface of the steam generating section 3, and is forcibly evaporated into the processing space 1a above the steam generating section 3.

Above the steam generation section located at the bottom of the processing space 1a, IPA condenses on the material to be dried (material to be processed) and falls.
A receiving tray (collection section) 5 is installed. Here, the object to be dried is a semiconductor wafer 7 housed in a cartridge 6 positioned above the saucer 5. Note that the cartridge 6 is held in a predetermined position by a holder 8. At that time, the handle 8a of the holder 8 is inserted into a hole (not shown) in the center of the holder 2, and the transport jig (
(not shown).

Further, a spiral cooling corrugated tube (cooling section) 9 is provided above the processing space 1a along the inner wall of the main container, and a spiral cooling corrugated tube (cooling section) 9 is provided below the cooling corrugated tube 9, projecting slightly upward from the container inner wall. A collar-shaped collection section 10 is provided.

The steam generating section 3 is communicated with a recovery tank 12 via a valve 11, and the receiving tray 5 and the collecting section 10 are also communicated with the same recovery tank 12. The above valve 11
The opening/closing of the IPA liquid level sensor 1 in the steam generating section 3 is controlled via the control section 13 connected to the valve.
4 and purity monitor 15.

A canister (replenishment means) 16 for replenishing new IPA is connected to the recovery tank 12. To replenish the gas, the gas valve I7 is opened in conjunction with the liquid level sensor 14a of IPA (hereinafter referred to as crude IPA) mixed with impurities such as condensed water accumulated in the recovery tank 12.
Nitrogen gas (N2) is introduced into the canister 16, and the liquid level to II' in the canister 116 is pressurized using a siphon method.

In addition, the bottom end of the recovery tank 12 has a crude IPA outlet (
(not shown) is formed, and the rancidity outlet is connected to a water removal section (purification means) 18, and a pump 19 for transporting the crude IPA is installed in the middle thereof.

The water removal section 18 is connected to a distillation section (purification means) 2
0, and the distillation section 20 is further connected to a storage tank 21 for storing purified IPA. Then, this storage tank 21 is connected to the IP via valve Ila.
The valve Ila is connected to the introduction section 22 of A, and the valve Ila is opened and closed via the control section 13 in the same way as the valve 11 described above.

Next, the operation of this embodiment will be explained.

The processing space 1a of the drying apparatus of this embodiment is filled with IPA vapor evaporated from the vapor generating section 3 heated by the heater block 4. When the wafer 7 is placed in the processing space 1a, PA vapor condenses on its surface. The highly hydrophilic condensed TPA flows down, taking with it moisture and impurities adhering to the surface of the wafer 7. By repeating this condensation and flowing down, drying of the wafer 7 is achieved. In addition, if foreign matter such as metal ions outside the water plate adheres to the surface of the wafer 7 at this time,
The surface of the wafer 7 is also cleaned at the same time.

In this embodiment, as described above, the tray 5 is installed at a position where the condensed IPA containing dissolved impurities such as water flowing down the surface of the wafer 7 falls, and the condensed IPA never directly flows into the steam generating section 3. There will be no contamination. Therefore,
The IPA in the stink generation section 3 is not contaminated by crude IP containing impurities condensed on the surfaces of the wafer 7, cartridge 6, etc.

The condensed IPA collected in the receiving tray 5 is directly led to a recovery tank 12 installed outside the main container.

Moreover, a cooling corrugated pipe is installed at the upper part of the processing space 1a. This corrugated pipe condenses excess IPA vapor and prevents the vapor from leaking outside. The IPA condensed in the above-mentioned snake pipe is that! '1Ii4i It falls into the section 10 and is led directly to the recovery tank I2.

1. Unlike the IPA collected in the saucer 5, the IPA condensed in the cooling spiral tube 9 is not directly contaminated with impurities such as moisture. However, in the processing space la, a small amount of water from the water droplets attached to the wafer 7 exists together with the IPA vapor.

Therefore, the IPA condensed in the flexible tube 9 also has a slight amount of water dissolved in it.

Therefore, with the above structure, since IPA does not flow back into the steam generating section 3, if W
The purity of IPA in the air generating section 3 will be maintained stably.

As explained above, in the drying apparatus of this embodiment, all of the condensed IPA is led out of the main container, so that the IPA in the stem air generation part 3 gradually becomes phlegm and decreases. Therefore, it becomes necessary to replenish IPA to the steam generating section 3, and this replenishment is performed using the condensed IPA led to the recovery tank 12.

That is, the crude IPA is pumped from the recovery tank 12 to the pump 1.
9, the crude I is transported to the moisture removal section 18, and the
Removes water dissolved in PA. The crude IPA from which this water has been removed is further processed in the Fujidome section 20.
Impurities other than water are completely removed and purified to pure IPA. This purified IPA is stored in a storage tank 21, and is replenished into the steam generating section 3 through the introduction section 22 by opening and closing the valve lla as needed.

The opening and closing of the valve lla is performed via the control section 13 in conjunction with both the liquid level position of the IPA in the steam generating section 3 and the purity of the 3g IPA itself. That is, when the liquid level of IPA falls, it is sensed by the liquid level sensor 14, and when the purity of IPA falls, it is sensed by the purity monitor 15, and the valve lla is opened. PA is replenished.

Note that when opening the valve 1ta in conjunction with the purity monitor 15, before opening the valve 1ta, all or part of the low-purity IPA in the steam generation section 3 is removed by the control section 1.
This is done by opening the valve 11 via 3. Thereafter, the extracted IPA is replenished as described above.

The extracted IPA is led to the same recovery tank 12 as for the condensed IPA, purified in the same way, and reused. Therefore, none of the IPA is discarded, and all of it is recycled. Therefore, [PA can be used effectively, and various benefits such as low acid cost and prevention of pollution can be obtained.

Note that a canister (replenishment means) 16 is connected to the drying apparatus of this embodiment for replenishing new IPA.
IPA is introduced into the recovery tank 12 from the canister 16 . In this way, by guiding new IPA to the recovery tank 12 instead of directly supplying it to the steam generation section 3,
Since fresh IPA can also be supplied after water removal and precise distillation, IPA replenishment can always be achieved in a stable and highly pure state. Therefore, in IPAO for replenishment, for example, IPAO containing several tens of percent water is used.
Even if IPA contains a lot of water or contains foreign matter, such as in A, the present apparatus can use IPA with no water content and from which foreign matter has been removed as a processing liquid. This makes it possible to perform stable and highly reliable drying processing.

In addition to the advantages described above, the drying apparatus of this embodiment achieves the following efficiency improvements.

In other words, the condensed IPA with reduced purity is collected in the tray 5 below the material to be dried and in the collection section IO in the cooling corrugated pipe 9.
Since it can be selectively purified and circulated, it can be efficiently reused.

〔effect〕

(1) The main body of the apparatus is equipped with a steam generation part for the processing liquid, a processing space, and an rA air cooling section in a part of the processing space, and a predetermined part of the processing space is provided at the lower part of the processing space. Regarding a processing device that is provided with a collection section for the condensed processing liquid that condenses and falls on the object to be processed when the object is placed, the processing liquid in the steam generation section and the condensed processing liquid in the collection section are By connecting a refining means capable of regenerating and regenerating the purified processing liquid to the apparatus main body in a state in which the purified processing liquid can be introduced into the aeration generating section, and connecting a processing liquid replenishment means to a predetermined position, It is possible to selectively reuse the condensed liquid with high impurity level 4, and at the same time, it is possible to extract and reuse the processed liquid from the steam generating section that has been distilled/condensed, and to reuse it after purification. By easily replenishing the treated processing liquid, stable and highly reliable processing conditions can be rationally realized.

(2) By purifying and circulating and reusing all of the processing liquids, the amount of IPA used can be significantly reduced, and thus costs can be significantly reduced.

(3) For the same reason as in (2) above, it is not necessary to dispose of the used processing liquid, and therefore the cost required for the disposal process is unnecessary.

(4) In (11) above, by forming a collection part for the condensed treatment liquid in the steam cooling part and connecting the collection part to the purification means, the above condensation treatment can also be selectively purified and recycled. Therefore, more reliable processing conditions can be stably maintained.

(5) By connecting the processing liquid replenishment means to the refining means and supplying the replenishment processing liquid to the generation section after refining it, stable processing conditions can be maintained regardless of the quality of the replenishment processing liquid. Can be maintained.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, the structure of the steam drying apparatus is not limited to that of the embodiment described above, and any structure may be used as long as the above objectives can be achieved. Also,
The drying liquid is not limited to IPA.

In addition, we have shown a structure in which all of the IPA in the stem air generation part, the condensed IPA in the collecting tray and lower collecting part of the cooling spiral pipe, and the replenishment IPA from the canister are led to the same collection tank, but this is not limited to this. It's not something. It may be equipped with a plurality of recovery tanks, or it may be directly connected to the purification means without passing through the recovery tanks, depending on the case.

The purification means is also not limited to the water removal section and the distillation section.

Furthermore, although an apparatus for storing purified IPA in a storage tank has been shown, the present invention is not limited to this, and may be of a type in which the purified IPA is directly introduced into the main body container.

[Application field]

The above explanation has mainly been about the application of the invention made by the present inventor to a tea drying device, which is the background field of application, but the invention is not limited thereto. This technology is useful even when applied to cleaning surfaces.

[Brief explanation of drawings]

FIG. 1 shows a process '2i'll which is an embodiment of the present invention.
It is a simple explanation of the schematic explanatory drawing showing. DESCRIPTION OF SYMBOLS 1... Main body, 1a... Processing space, 2... Shutter, 3... Stem air generation part, 4... Heater block,
5... saucer (collection part), 6... cartridge, 7...
...Semiconductor wafer, 8...Holder, 8a...Handle,
9... Cooling corrugated tube (cooling section), 10... Collection section, 11
．． 11a...Valve, 12...Recovery tank, 13.
...Controller wholesale department, 14.14a...7 Night surface sensor, 15
...Purity monitor, 16...Canister (supply means)
, 17... Gas valve, 18... Moisture removal section (purification means), 19... Pump, 20... Retention section (purification means), 21... Storage tank, 22... Introduction section.

Claims (1)

[Scope of Claims] 1. A processing device comprising a steam generation section for a processing liquid, a processing space, and a collection section for the processing liquid after processing, wherein the processing liquid is collected in the collection section. A processing device in which a regenerating purification means is connected in a state in which a purified treatment liquid can be introduced into the steam generation section. 2. The processing apparatus according to claim 1, wherein the purification means comprises a water removal section and a distillation section. 3. The processing apparatus according to claim 1, wherein the processing apparatus is a steam dryer. 4. A steam generating section for the processing liquid, a processing space, and a steam cooling section in a part of the processing space, and the object to be processed is positioned in a predetermined part of the processing space at the lower part of the processing space. In case,
A processing apparatus is provided with a collecting section for the condensed processing liquid that condenses and falls onto the object to be processed, and a purification means for regenerating the processing liquid in the steam generating section and the condensed processing liquid in the collecting section, A processing device, which is connected to the steam generating section in a state in which a purified processing liquid can be introduced thereto, and is connected to a processing liquid replenishment means. 5. The process according to claim 4, wherein the vapor cooling section is provided with a collecting section for the condensed processing liquid in the vapor cooling section, and the collecting section is connected to a purification means. Device. 6. The processing apparatus according to claim 4, wherein the processing liquid replenishment means is connected to the purification means, and the replenishment processing liquid is supplied to the steam generation section through the purification means. 7. The processing apparatus according to claim 4, wherein the purification means comprises a water removal section and a distillation section. 8. The processing apparatus according to claim 4, wherein the processing apparatus is a steam dryer.