JPS62100715A - Optical device and its manufacturing method - Google Patents

Abstract

PURPOSE:To attain highly accurate optical demultiplexing or the like by heating and melting fusible glass powder stored in a fitting recessed part formed on a photosensitive glass base to fix a lens and an optical member. CONSTITUTION:The fixing recessed part 111 is formed on a prescribed position of the photosensitive glass base 113 by optical etching processing and the required quantity of fusible glass power 115 is injected into the recessed part 111 and heated so as to be melted and then solidified to fix the lens 117 and the optical member 119. On the other hand, a block 123 with a film is fixed on the base 113 so that the optical film 121 of the block 123 is optically coupled with the lens 117 and the optical member 119. In said arrangement of the block 123, light through the optical member 119 is made incident upon the optical film 121 through the lens 117. Consequently, a highly accurate demultiplexing function can be displayed.

Description

[Detailed Description of the Invention] [Summary] An optical device such as an optical multiplexer/demultiplexer, in which a lens and an optical member are fixed by heating and melting meltable glass powder placed in a mounting recess formed on a photosensitive glass substrate. For example, by fixing an optical film and a block to a glass substrate, and creating a structure in which the optical film and optical member are optically coupled to each other with a lens sandwiched between them, highly accurate optical spectroscopy can be achieved. You can do waves etc.

[Industrial application field]

The present invention relates to an optical device that performs, for example, combining optical signals or wavelength separation of optical signals, and a method of manufacturing the same.

In optical communication systems, it is necessary to perform branching and combining of optical signals, wavelength separation of wavelength-multiplexed optical signals, and the like.

(Prior Art) Conventional optical multiplexers/demultiplexers to meet this need usually use dielectric multilayer films to reflect or transmit only optical signals of a desired wavelength. Separation 1 synthesis was performed. Optical coupling was performed between the dielectric multilayer film and the optical fiber by interposing a lens or the like.

By the way, the specific configuration of such an optical multiplexer/demultiplexer is that an optical signal from an input optical fiber is input to a dielectric multilayer film via a lens, and the reflected light is converted to an output light via another lens. Each optical fiber and lens are aligned and fixed on a substrate so that the light is input to the fiber.

[Problem that the invention seeks to solve]

However, in such a conventional example, it was necessary to align the optical fiber, lens, etc. on the substrate on a desired optical axis. In addition, since their diameters are small, their alignment requires skill, and when they are fixed, they must be fixed so that the alignment does not change, so manufacturing is not easy. There was such a problem.

The present invention was created in view of these points, and aims to provide an optical device that does not require alignment and is easy to assemble and manufacture, and a method for manufacturing the same.

[Means for solving problems]

FIG. 1 shows a diagram of the construction principle of the present invention.

In the figure, a photosensitive glass substrate 113 has a plurality of fixing recesses 1 formed in a predetermined pattern by optical etching.
11 is formed.

The lens 117 and the optical member (optical element) 119 are fixed in the fixing recess 111 by melting and solidifying the meltable glass powder 115.

The film-equipped block 123 is an example of an element constituting an optical device, and has an optical film 121 having a demultiplexing function.
The photosensitive glass substrate 113 is fixed to the photosensitive glass substrate 113 so as to face the photosensitive glass substrate 113 .

Therefore, the entire configuration allows the optical member 119° lens 1
17 and the optical film 121 are optically coupled to constitute an optical device.

[Effect]

A fixing recess 111 is formed at a predetermined position of the photosensitive glass substrate 113 by optical etching, and a required amount of meltable glass powder 115 is inserted into the fixing recess 111 and then heated to melt and solidify, thereby forming the lens 117 and the optical Member 119
to be fixed.

Further, the film-coated block 123 is fixed to the photosensitive glass substrate 113. In this fixing, the optical film 1 of the film-attached block 123 is
21. The lens 117 and the optical member 119 are arranged so as to be optically coupled.

In the case of such arrangement of the film-coated block 123, the light from the optical member 119 passes through the lens 117 to the optical film 12.
1, so the demultiplexing function is demonstrated.

In the present invention, since the lens 117 and the optical member 119 are fixed to the photosensitive glass substrate 113 by melting and solidifying the meltable glass powder, the fixing process can be carried out precisely and in a predetermined position with ease. .

〔Example〕

FIG. 2 shows an embodiment of the present invention. In the figure, 1 is a photosensitive glass substrate, 10 is a block with a film, 11 is a dielectric multilayer film having a demultiplexing function, 12 is a total reflection film, 13 to 15 are optical fibers, 16 to 18 are fiber holders, 19. 21
2 is a ball lens, and 20 is a drum lens, and these components constitute an optical multiplexer/demultiplexer.

In this optical multiplexer/demultiplexer, the wavelength λ from the optical fiber 13
1. The optical signal of wavelength λ2 is incident on the total reflection film 12 of the film-coated block 10 via the ball lens 19, and the reflected light is incident on the dielectric multilayer film 11, the light of wavelength λ2 is transmitted, and the light of wavelength λ1 is transmitted. is reflected. The transmitted light with a wavelength λ2 is collected by the drum lens 20 and enters the optical fiber 14, the reflected light with a wavelength λ1 is reflected again by the total reflection film 12, and the reflected light is collected by the ball lens 21. and enters the optical fiber 15. Therefore, the wavelength λ.

The optical signal of wavelength λ2 is separated from the optical signal of wavelength λ2.

By the way, all the lenses can be spherical lenses, but the reason why the drum lens 20 is used here is because a wavelength-selective or non-reflective film is formed on the input end face and output end face of the optical signal. It is for the purpose of

FIG. 3 shows a specific example of the pattern of grooves or holes 2 to 7 formed in the photosensitive glass substrate 1 shown in FIG. This photosensitive glass substrate 1 is, for example, silicate glass in which metal ions are added and dissolved together with a sensitizer, and when exposed to ultraviolet light, a metal colloid is generated by heat development treatment, which becomes a nucleus and crystals grow. However, since these crystals are very fine and easily soluble in acid, they can be etched with hydrofluoric acid or the like.

The expansion coefficient of this can be changed to 80 depending on the heat treatment conditions, etc.
It can be set to any value between 130 and 130 (10'/"c), and can be adjusted to the thermal expansion coefficient of the optical fiber, fiber holder, lens, etc.

Therefore, when configuring the optical multiplexer/demultiplexer shown in FIG. 2, grooves or holes 2 to 7 as shown in FIG. 3 are formed on the photosensitive glass substrate 1.
In order to form fixing recesses, ultraviolet light is exposed through a mask with a desired pattern, and after a heating process, an etching process is performed using hydrofluoric acid or the like. The depth of the etched groove can be adjusted by changing the etching time. Therefore, holes can be formed by increasing the etching time. After this etching is completed, a heat treatment is performed to crystallize the glass, thereby eliminating photosensitivity and making the glass physically and chemically stable. Note that as a pretreatment for this crystallization, the front surface is irradiated with ultraviolet rays after heat development treatment.

Moreover, the photosensitive glass substrate 1 is a large photosensitive glass plate that is exposed to a plurality of patterns on each substrate 1 at the same time.

It is also possible to form a photosensitive glass substrate 1 as shown in FIG. 3 by carrying out a process such as photolithography, etching, etc., and then separating and etching each substrate 1 using the etching process. Similarly, regarding the block 10 with a film, a dielectric multilayer film Il having a demultiplexing function and a total reflection film 1 are formed on a large glass plate.
A block 10 with a film as shown in FIG. 4 can also be formed by forming the film 2 by vapor deposition or the like and separating it into predetermined sizes.

FIG. 4 shows the membrane-attached block 10 shown in FIG. This membrane-equipped film 7-ri 10 has a dielectric multilayer film 1 at a predetermined position.
A total reflection film 12 made of a metal or dielectric multilayer film is formed on the opposite surface by vapor deposition, etc., and fixed at right angles to the end surface 1a of the photosensitive glass substrate 1 by metal fixing, welding, etc. It is something to do.

FIG. 5 is a schematic cross-sectional view in FIG. 2.

Here, as an example, a case is shown in which a drum lens 20 is fixed above the hole 6 facing the dielectric multilayer film 11, and a fiber holder 17 is fixed above the hole 3 on the optical axis of this lens 20. . To fix these, first, the holes 3 and 6 are filled with low melting point glass powder 31. Thereafter, the fiber holder 17 is placed over the hole 3, and the drum lens 20 is placed over the hole 6 as shown. Next, the whole thing is 400~
Heat at 500°C. Then, the low melting point glass powder 31 is melted, and the molten glass is smoothly adsorbed onto the glass substrate 1, fiber holder 17, and lens 20. When cooled after a predetermined time, the molten glass solidifies, and the fiber holder F and drum lens 20 are fixed on the glass substrate 1. The same holds true for fixing other lenses and fiber holders.

FIG. 6 shows the relationship between the ball lens 25 or the optical fiber or the fiber holder and the groove 26. The width W or diameter of the groove 26 formed in the photosensitive glass substrate 1 is all the same, and the ball lens 25. If the diameters of the optical fibers and fiber holders are all the same, the centers will be at the same height due to the relationship W<D, so the optical axis in the horizontal plane will vary depending on the pattern accuracy and in the vertical plane. The optical axes of the grooves 2G and the accuracy of the ball lenses 25 and the like are automatically positioned. The same relationship holds true even when the groove 26 is passed through to the lower surface to form a hole.

For example, if the diameter of the optical fiber is 0.9 mm and the diameter of the ball lens 19.21 is 51 mm, then the fiber holder 1
If the diameters of holes 6 to 18 are 5 mm, the optical axis positions in the vertical direction can be made the same by making the widths of grooves or holes 2 to 7 the same, for example 4 mm, as described above. In this case, the size of the photosensitive glass substrate 1 can be about 20 x 40 mm. Also, the diameter of the ball lens 19.21 is set to, for example, 0.
9fi, the width of the grooves or holes 2 to 7 can be set to 0°4n+ correspondingly, and the optical fibers 13 to 15 can be directly connected to the grooves or holes 2 to 7 without using the fiber holders 16 to 18. It can be placed on top and fixed.

Further, it is also possible to adopt a configuration in which optical signals from a larger number of optical fibers are combined or demultiplexed, and in that case, the optical axis relationship can also be maintained and pattern formation can be easily performed.

In this way, a plurality of grooves or holes 2 to 7 in a predetermined pattern are formed.
A photosensitive glass substrate 1 formed with , lenses such as ball lenses 19 and 21 or drum lenses 20 placed and fixed on the grooves or holes 2 to 7, and optical fibers 13 optically coupled to each lens. ~15 or fiber holder 16
18 and a film-coated block 10 having an optical film such as a dielectric multilayer film 11, and a photosensitive glass substrate 1.
A predetermined pattern is formed by UV exposure and heat development.

Since it can be easily formed by etching etc. and has sufficient accuracy, it is possible to heat the low melting point glass by placing lenses, fiber holders, etc. on the grooves or holes 2 to 7 formed in the photosensitive glass substrate 1. The optical axis can be aligned simply by melting and fixing it by solidifying it. Furthermore, the film-equipped block 10 formed with an optical film having a demultiplexing function can be easily mass-produced, and
Since it is easy to fix to the end surface a of the photosensitive glass substrate l, manufacturing and assembly becomes easy.

In the above embodiment, a low melting point glass powder was used, but if the antireflection coating of the drum lens 20 has a high melting point, or if there is no antireflection coating, a high melting point glass material may be used to prevent the lens, etc. from sticking. You may do so.

Further, the meltable glass material may be melted by partial heating instead of the entire heating, and in short, it is sufficient that the glass material concerned is melted.

In addition, it is not always necessary to use a fiber holder, and the optical fiber may be directly attached to the glass substrate 1.

〔Effect of the invention〕

As described in detail above, according to the present invention, a glass substrate such as a lens is fixed to an optically etched recess by melting and solidifying a meltable glass powder, so that an optical path can be precisely formed without adjustment. , it is possible to realize an optical device with high precision and ease of manufacture, which is extremely useful in practice.

[Brief explanation of drawings]

Fig. 1 is a diagram of the principle configuration of the present invention, Fig. 2 is a plan view of an optical multiplexer/demultiplexer according to an embodiment of the present invention, and Fig. 3 is an explanatory diagram of a pattern formed on the photosensitive glass substrate shown in Fig. 2. , FIG. 4 is a perspective view of the membrane-coated block shown in FIG. 2, FIG. 5 is a schematic side sectional view of FIG. 2, and FIG. 6 is an explanatory diagram of the state in which the groove and the ball lens are fixed. In FIG. 1, 111 is a fixing recess, 113 is a photosensitive glass substrate, 115 is a meltable glass material, 117 is a lens, 119 is an optical member, 121 is an optical film, and 123 is a block with a film. 2 to 6, 1 is a photosensitive glass substrate, 2 to 7 are grooves or holes, 10 is a block with a film, 11 is a dielectric multilayer film, 12 is a total reflection film, 13 to 15 are optical fibers. 19 to 21 are lenses, and 31 is a low melting point glass powder. 4-Structure diagram of the starting side Figure 1 1 屹・Hikarasu 1 sum] (In the Moe Shiq 薯υ, the column a) To the accent gate 2. Figure 3: The beginning of the M-sized block; Figure 4: cross-section B of a row of parked silkworms;

Claims (3)

[Claims] (1) An optical device in which an optical element is fixed to a fixing recess formed at a predetermined position of a photosensitive glass substrate, characterized in that the optical element is fixed to the photosensitive glass substrate by melting and solidifying the glass material. optical device. (2) A method for manufacturing an optical device in which a fixing recess is formed in a predetermined position of a photosensitive glass substrate by optical etching treatment, and an optical element is fixed in the fixing recess, in which a required amount of meltable powder is applied to the fixing recess. A method for manufacturing an optical device, comprising: inserting the optical element into the photosensitive glass substrate, placing an optical element thereon, melting and solidifying a meltable powder, and fixing the optical element to a photosensitive glass substrate. (3) The method for manufacturing an optical device according to claim 2, wherein the meltable powder is a low-melting point glass powder.