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JPS6191979A - Piezoelectric displacement element - Google Patents

Piezoelectric displacement element

Info

Publication number
JPS6191979A
JPS6191979A JP59213924A JP21392484A JPS6191979A JP S6191979 A JPS6191979 A JP S6191979A JP 59213924 A JP59213924 A JP 59213924A JP 21392484 A JP21392484 A JP 21392484A JP S6191979 A JPS6191979 A JP S6191979A
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric elements
displacement element
electrodes
supporting member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59213924A
Other languages
Japanese (ja)
Inventor
Yuji Shinguu
祐二 新宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59213924A priority Critical patent/JPS6191979A/en
Publication of JPS6191979A publication Critical patent/JPS6191979A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

PURPOSE:To prevent a mechanical failure in a piezoelectric displacement element by a method wherein the end surfaces of the second electrodes on the sides nearer the supporting member are placed at positions away from the sides of the points of the first electrodes at the prescribed distance from the supporting member and the effect of electric strain is given more to the sides of the points than to the supporting point. CONSTITUTION:Whole surface electrodes 6 are respectively provided on the laminating surfaces of two sheets of piezoelectric elements 5 and pattern electrodes 7 are respectively provided on the other exposing surfaces of the piezoelectric elements 5. This piezoelectric displacement element is made into one in the bimorph structure, wherein two sheets of the piezoelectric elements 5 are pasted together in a parallel type using a bonding agent for taking largely the displacement, a supporting member 8 consisting of a conductive metal and so forth is used as the cantilever beam and a video heat 9 is attached to the point of the piezoelectric displacement element. A lead electrode 7a of the width (w) of 1/2 of the width W of the piezoelectric elements or less than the 1/2 is integrally provided in one body with the pattern electrodes 7 on the piezoelectric elements 5 on the same conditions as those that the pattern electrodes 7 are provided on the piezoelectric elements 5 as the lead extending over from the pattern electrodes 7 to the supporting member 8.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、ビデオテープレコーダ(以下rVTR」と記
すのビデオヘッドの位置制御など、微小変位を得るため
に使用する圧電変位素子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a piezoelectric displacement element used to obtain minute displacements, such as in position control of a video head of a video tape recorder (hereinafter referred to as rVTR).

従来例の構成とその問題点 VTRのビデオヘッドを位置制御する場合は、圧電変位
素子を片持梁とし、先端にビデオヘッドを取付け、特殊
再生時に記録テープのスピードが変化した場合でも記録
部(アジマス)を忠実にビデオヘッドがトレースするよ
うに、圧電変位素子に印加する電圧を変えることにより
行なう。
Conventional configuration and its problems When controlling the position of the video head of a VTR, the piezoelectric displacement element is made into a cantilever beam, and the video head is attached to the tip.Even if the speed of the recording tape changes during special playback, the recording section ( This is done by changing the voltage applied to the piezoelectric displacement element so that the video head faithfully traces the azimuth.

従来のこの種の圧電変位素子について、第3図及び第4
図を用いて説明する。第3図は従来の圧電変位素子の斜
視図、第4図は電圧印加時の同圧電変位素子の側面図で
1は圧電素子であり、それぞれ両面の全面に電極2が形
成されている。変位を大きくとるため、二枚の圧電素子
1を並列型、に接着剤で貼り合せたバイモルフ構造の圧
電変位素子とし、導電性を有する金属等よりなる支持体
3で片持梁とし、先端にビデオヘッド4が設けである。
Regarding conventional piezoelectric displacement elements of this type, FIGS.
This will be explained using figures. FIG. 3 is a perspective view of a conventional piezoelectric displacement element, and FIG. 4 is a side view of the same piezoelectric displacement element when voltage is applied. Reference numeral 1 designates a piezoelectric element, and electrodes 2 are formed on the entire surfaces of both sides. In order to obtain a large displacement, a piezoelectric displacement element with a bimorph structure is used, in which two piezoelectric elements 1 are bonded together with adhesive in parallel, and a support 3 made of conductive metal or the like forms a cantilever beam. A video head 4 is provided.

圧電変位素子をこのように構成し、電圧を印加すると、
第4図に示すように電圧に応じた変位を得ることができ
る。この時、支持点Aにおいて、圧電変位素子の曲げ応
力は最大となり、l!&電圧を印加した場合や、一定期
間の使用により劣化した場合に、支持点Aで破断すると
いう問題があった。
When the piezoelectric displacement element is configured in this way and a voltage is applied,
As shown in FIG. 4, displacement according to the voltage can be obtained. At this time, the bending stress of the piezoelectric displacement element becomes maximum at the support point A, and l! There was a problem that it would break at the support point A when a voltage was applied or when it deteriorated after being used for a certain period of time.

発明の目的 本発明は上記従来の欠点を解消するもので、高電圧の印
加や長期間の使用に対しても、機械的な破損が発生しな
い圧電変位素子を提供することを目的とする。
OBJECTS OF THE INVENTION The present invention solves the above-mentioned conventional drawbacks, and aims to provide a piezoelectric displacement element that does not suffer mechanical damage even when a high voltage is applied or when used for a long period of time.

発明の構成 上記目的を達成するため、本発明の圧電変位素子は、バ
イモルフ構造の複数の圧電素子と、これら圧電素子の一
端部を支持する支持体と、前記圧電素子の貼合せ面の全
面にそれぞれ形成された第1の電極と、前記圧電素子の
露出する二面にそれぞれ形成されかつ前記支持体に近い
側の端面が前記支持体から所定距離をあけて位置する第
2の電極とを備えた構成としたものである。
Structure of the Invention In order to achieve the above object, the piezoelectric displacement element of the present invention includes a plurality of piezoelectric elements having a bimorph structure, a support that supports one end of these piezoelectric elements, and a support that supports the entire surface of the bonding surface of the piezoelectric elements. a first electrode formed on each of the piezoelectric elements; and a second electrode formed on each of the two exposed surfaces of the piezoelectric element, the end surface of which is closer to the support, is located at a predetermined distance from the support. The structure is as follows.

かかる構成によれi、電圧を印加した時の電歪効果を支
持点よりも先端側でもたせることができるので、従来の
ように支持点に曲げ応力が集中することがなく、高電圧
の印加や長期間の使用により機械的な破損を生じるとい
うことがない。
With this configuration, the electrostrictive effect when voltage is applied can be produced closer to the tip than the support point, so bending stress does not concentrate at the support point as in the conventional case, and it is possible to apply high voltage or There is no chance of mechanical damage caused by long-term use.

実施例の説明 以下、本発明の一実施例について、図面に基づいて説明
する。
DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例における圧電変位素子の斜視
図、第2図は電圧印加時の同圧電変位素子の側面図で、
5は一2枚の圧電素子であり、それらの貼合せ面には全
面電極6が設けられている。
FIG. 1 is a perspective view of a piezoelectric displacement element according to an embodiment of the present invention, and FIG. 2 is a side view of the same piezoelectric displacement element when voltage is applied.
Reference numeral 5 indicates twelve piezoelectric elements, and electrodes 6 are provided on the entire surface of the bonded surfaces thereof.

他の露出する二面には、パターン電極7が設けられてい
る。変位を大きくとるため、二枚の圧電素子5を並列型
に接着剤で貼り合わせたバイモルフ構造の圧電変位素子
となされており、導電性の金属等よりなる支持体8で片
持梁とし、先端にビデオヘッド9が設けられている。パ
ターン電極7から支持体8までのリードとして、圧電変
位素子の幅Wの1/2以下の幅Wのリード電極7aが、
圧電素子5上にパターン電極7と一体に同一条件で設け
られている。
Patterned electrodes 7 are provided on the other two exposed surfaces. In order to obtain a large displacement, the piezoelectric displacement element has a bimorph structure in which two piezoelectric elements 5 are bonded together with adhesive in parallel. A video head 9 is provided. As a lead from the pattern electrode 7 to the support body 8, a lead electrode 7a having a width W of 1/2 or less of the width W of the piezoelectric displacement element,
It is provided on the piezoelectric element 5 integrally with the pattern electrode 7 under the same conditions.

上記構成の圧電変位素子に電圧を印加すると、第2図に
示すように電圧に応じた変位を得ることができる。この
とき、パターン電極7の端面位置Bを支持点Aよりも先
端側にすることにより、電歪効果を支持体8による支持
点Aよりも先端側にもたせてい゛る。従ってパターン電
極7の端面位置Bと支持点へとの間に能動点があり、支
持点へに曲げ応力が集中することはない。このため、高
電圧の印加や長期間の使用に対して機械的な破損を発生
することがない。
When a voltage is applied to the piezoelectric displacement element having the above configuration, a displacement corresponding to the voltage can be obtained as shown in FIG. At this time, by setting the end face position B of the pattern electrode 7 closer to the tip than the support point A, the electrostrictive effect is brought to the tip side of the support point A by the support 8. Therefore, there is an active point between the end face position B of the pattern electrode 7 and the support point, and bending stress is not concentrated on the support point. Therefore, mechanical damage does not occur due to application of high voltage or long-term use.

発明の詳細 な説明したように本発明によれば、第2の電極の支持体
に近い側の端面を、支持体から所定距離先端側へ離れた
位置に位置させたので、電歪効果を支持点より先端側に
もたせたことになり、曲げ応力が支持点に集中すること
がなく、したがって高電圧の印加や長期間の使用により
、機械的破損を発生するということがない。
DETAILED DESCRIPTION OF THE INVENTION According to the present invention, the end surface of the second electrode closer to the support is located a predetermined distance away from the support toward the distal end, thereby supporting the electrostrictive effect. Since it is placed on the tip side from the point, bending stress will not be concentrated on the support point, and therefore mechanical damage will not occur due to application of high voltage or long-term use.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例における圧電変位素子の斜視
図、第2図は電圧印加時の同圧電変位素子の側面図、第
3図は従来の圧電変位素子の斜視図、第4図は電圧印加
時の同圧電変位素子の側面図である。 5・・・圧電素子、6・・・全面電極、7・・・パター
ン電極、7a・・・リード電極、8・・・支持体代理人
   森  本  義  弘 第1図 第2図 第3図 第4図
Fig. 1 is a perspective view of a piezoelectric displacement element according to an embodiment of the present invention, Fig. 2 is a side view of the same piezoelectric displacement element when voltage is applied, Fig. 3 is a perspective view of a conventional piezoelectric displacement element, and Fig. 4. FIG. 2 is a side view of the same piezoelectric displacement element when voltage is applied. 5... Piezoelectric element, 6... Whole surface electrode, 7... Pattern electrode, 7a... Lead electrode, 8... Support agent Yoshihiro Morimoto Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

【特許請求の範囲】 1、バイモルフ構造の複数の圧電素子と、これら圧電素
子の一端部を支持する支持体と、前記圧電素子の貼合せ
面の全面にそれぞれ形成された第1の電極と、前記圧電
素子の露出する二面にそれぞれ形成されかつ前記支持体
に近い側の端面が前記支持体から所定距離をあけて位置
する第2の電極とを備えた圧電変位素子。 2、支持体は導電性材料からなり、第2の電極は、圧電
素子の幅の1/2以下の幅を有しかつ前記支持体に接触
するリード電極が一体に形成された構成とした特許請求
の範囲第1項記載の圧電変位素子。
[Scope of Claims] 1. A plurality of piezoelectric elements having a bimorph structure, a support that supports one end of these piezoelectric elements, and a first electrode formed on the entire surface of the bonding surface of the piezoelectric elements, respectively; a second electrode formed on each of the two exposed surfaces of the piezoelectric element, the end surface of which is closer to the support body being located at a predetermined distance from the support body. 2. A patent in which the support is made of a conductive material, the second electrode has a width of 1/2 or less of the width of the piezoelectric element, and a lead electrode that contacts the support is integrally formed. A piezoelectric displacement element according to claim 1.
JP59213924A 1984-10-11 1984-10-11 Piezoelectric displacement element Pending JPS6191979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59213924A JPS6191979A (en) 1984-10-11 1984-10-11 Piezoelectric displacement element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59213924A JPS6191979A (en) 1984-10-11 1984-10-11 Piezoelectric displacement element

Publications (1)

Publication Number Publication Date
JPS6191979A true JPS6191979A (en) 1986-05-10

Family

ID=16647296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59213924A Pending JPS6191979A (en) 1984-10-11 1984-10-11 Piezoelectric displacement element

Country Status (1)

Country Link
JP (1) JPS6191979A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6362542B1 (en) * 1997-08-15 2002-03-26 Seagate Technology Llc Piezoelectric microactuator for precise head positioning

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6362542B1 (en) * 1997-08-15 2002-03-26 Seagate Technology Llc Piezoelectric microactuator for precise head positioning

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