JPS618850U - Valve leak detection device - Google Patents
Valve leak detection deviceInfo
- Publication number
- JPS618850U JPS618850U JP9314484U JP9314484U JPS618850U JP S618850 U JPS618850 U JP S618850U JP 9314484 U JP9314484 U JP 9314484U JP 9314484 U JP9314484 U JP 9314484U JP S618850 U JPS618850 U JP S618850U
- Authority
- JP
- Japan
- Prior art keywords
- detection device
- leak detection
- storage device
- vibration
- spectrum distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の系統図、第２図は弁の断面
図、第３図は振動スペクトル分布のグラフである。
１は弁ボデイ、４は弁シート部、６は振動ピックアップ
、１２は振動スペクトル分布、１３は比較・判断ロジッ
ク、１４は記憶装置、１５は弁正常時振動スペクトル分
布を示す。FIG. 1 is a system diagram of an embodiment of the present invention, FIG. 2 is a sectional view of the valve, and FIG. 3 is a graph of vibration spectrum distribution. 1 is a valve body, 4 is a valve seat portion, 6 is a vibration pickup, 12 is a vibration spectrum distribution, 13 is a comparison/judgment logic, 14 is a storage device, and 15 is a vibration spectrum distribution when the valve is normal.
Claims (1)
ための弁ボデイに取付けた振動ピックアップと、弁シー
ト部における流体の漏洩がない状態の振動スペクトル分
布を記録した記憶装置と、前記振動ピックアップで検出
した振動スペクトル分布と前記記憶装置に記録した振動
スペクトル分布とを比較する回路と、を備えたことを特
徴とする弁の漏洩検出装置。A vibration pickup attached to the valve body for detecting vibrations caused by fluid leakage in the valve seat, a storage device that records the vibration spectrum distribution in a state where there is no fluid leakage in the valve seat, and detection by the vibration pickup. A valve leakage detection device comprising: a circuit for comparing the vibration spectrum distribution recorded in the storage device with the vibration spectrum distribution recorded in the storage device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9314484U JPS618850U (en) | 1984-06-21 | 1984-06-21 | Valve leak detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9314484U JPS618850U (en) | 1984-06-21 | 1984-06-21 | Valve leak detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS618850U true JPS618850U (en) | 1986-01-20 |
Family
ID=30650557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9314484U Pending JPS618850U (en) | 1984-06-21 | 1984-06-21 | Valve leak detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS618850U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008032619A (en) * | 2006-07-31 | 2008-02-14 | Tsurumi Seiki:Kk | Water leakage determination device, and water leakage determination method |
| KR20150013878A (en) | 2012-07-23 | 2015-02-05 | 가부시키가이샤 후지킨 | Leak detection device, and fluid controller having same |
| CN112629769A (en) * | 2019-10-08 | 2021-04-09 | 东京毅力科创株式会社 | Leak measurement system, semiconductor manufacturing system, and leak measurement method |
-
1984
- 1984-06-21 JP JP9314484U patent/JPS618850U/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008032619A (en) * | 2006-07-31 | 2008-02-14 | Tsurumi Seiki:Kk | Water leakage determination device, and water leakage determination method |
| KR20150013878A (en) | 2012-07-23 | 2015-02-05 | 가부시키가이샤 후지킨 | Leak detection device, and fluid controller having same |
| US9702781B2 (en) | 2012-07-23 | 2017-07-11 | Fujikin Incorporated | Leakage detection device and fluid controller including same |
| CN112629769A (en) * | 2019-10-08 | 2021-04-09 | 东京毅力科创株式会社 | Leak measurement system, semiconductor manufacturing system, and leak measurement method |
| JP2021060322A (en) * | 2019-10-08 | 2021-04-15 | 東京エレクトロン株式会社 | Leakage measuring system, semiconductor manufacturing system, and method for measuring leakage |
| KR20210042016A (en) * | 2019-10-08 | 2021-04-16 | 도쿄엘렉트론가부시키가이샤 | Leak measurement system, semiconductor manufacturing system, and leak measurement method |
| US12014942B2 (en) | 2019-10-08 | 2024-06-18 | Tokyo Electron Limited | Leak measurement system, semiconductor manufacturing system, and leak measurement method |
| TWI853100B (en) * | 2019-10-08 | 2024-08-21 | 日商東京威力科創股份有限公司 | Leakage measurement system, semiconductor manufacturing system and leakage measurement method |
| CN112629769B (en) * | 2019-10-08 | 2024-09-13 | 东京毅力科创株式会社 | Leakage measurement system, semiconductor manufacturing system, and leakage measurement method |
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