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JPS6185146U - - Google Patents

Info

Publication number
JPS6185146U
JPS6185146U JP17068584U JP17068584U JPS6185146U JP S6185146 U JPS6185146 U JP S6185146U JP 17068584 U JP17068584 U JP 17068584U JP 17068584 U JP17068584 U JP 17068584U JP S6185146 U JPS6185146 U JP S6185146U
Authority
JP
Japan
Prior art keywords
chemical liquid
storage tank
storage device
supply pipe
opened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17068584U
Other languages
Japanese (ja)
Other versions
JPH029894Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17068584U priority Critical patent/JPH029894Y2/ja
Publication of JPS6185146U publication Critical patent/JPS6185146U/ja
Application granted granted Critical
Publication of JPH029894Y2 publication Critical patent/JPH029894Y2/ja
Expired legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Weting (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案に係る薬液貯溜装置の第1の実
施例を示す概要図、第2図は同じく第2の実施例
を示す概要図、第3図は同じく第3の実施例を示
す概要図、第4図および第5図は従来例の概要図
を示す。 1…薬液、2…タンク、3…薬液供給管、8′
…ガス供給管、10…排気配管、12…蓋、13
…排気チヤンバー、16…仕切板。
FIG. 1 is a schematic diagram showing a first embodiment of a drug storage device according to the present invention, FIG. 2 is a schematic diagram showing a second embodiment, and FIG. 3 is a schematic diagram showing a third embodiment. 4 and 5 show schematic diagrams of conventional examples. 1...Medical solution, 2...Tank, 3...Medical solution supply pipe, 8'
...Gas supply pipe, 10...Exhaust pipe, 12...Lid, 13
...exhaust chamber, 16...partition plate.

Claims (1)

【実用新案登録請求の範囲】 (1) 内部に薬液が貯溜された貯溜槽と、該貯溜
槽の内側面上部に一端が接続開口した不活性ガス
供給配管と、該貯溜槽の内側面上部に一端が接続
開口した排気用配管と、該貯溜槽の内側面に、該
貯溜槽内の薬液を所要部に供給すべく一端が接続
開口した薬液供給配管からなる薬液貯溜装置にお
いて、貯溜槽内の薬液表面と、不活性ガス供給配
管および排気配管の各開口端との間に、連通孔を
有する仕切板を付設した薬液貯溜装置。 (2) 排気用配管の他端開口を、強制排気手段を
有する排気チヤンバ内に臨設した、実用新案登録
請求の範囲第(1)項に記載の薬液貯溜装置。 (3) 貯溜槽内における排気用配管の開口位置を
、不活性ガス供給配管の開口位置より高くすると
ともに、両開口位置の間に第2の仕切板を付設し
た、実用新案登録請求の範囲第(1)項に記載の薬
液貯溜装置。
[Scope of Claim for Utility Model Registration] (1) A storage tank in which a chemical solution is stored, an inert gas supply pipe whose one end is connected and opened at the upper part of the inner surface of the storage tank, and In a chemical liquid storage device consisting of an exhaust pipe with one end connected and opened, and a chemical liquid supply pipe with one end connected and opened on the inner surface of the storage tank to supply the chemical liquid in the storage tank to a required part, A chemical liquid storage device in which a partition plate having a communication hole is attached between a chemical liquid surface and each open end of an inert gas supply pipe and an exhaust pipe. (2) The chemical liquid storage device according to claim (1), wherein the other end opening of the exhaust pipe is provided in an exhaust chamber having a forced exhaust means. (3) Utility model registration claim No. 1, in which the opening position of the exhaust pipe in the storage tank is set higher than the opening position of the inert gas supply pipe, and a second partition plate is attached between both opening positions. The chemical solution storage device described in (1).
JP17068584U 1984-11-09 1984-11-09 Expired JPH029894Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17068584U JPH029894Y2 (en) 1984-11-09 1984-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17068584U JPH029894Y2 (en) 1984-11-09 1984-11-09

Publications (2)

Publication Number Publication Date
JPS6185146U true JPS6185146U (en) 1986-06-04
JPH029894Y2 JPH029894Y2 (en) 1990-03-12

Family

ID=30728395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17068584U Expired JPH029894Y2 (en) 1984-11-09 1984-11-09

Country Status (1)

Country Link
JP (1) JPH029894Y2 (en)

Also Published As

Publication number Publication date
JPH029894Y2 (en) 1990-03-12

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