JPS6182321A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS6182321A JPS6182321A JP59202964A JP20296484A JPS6182321A JP S6182321 A JPS6182321 A JP S6182321A JP 59202964 A JP59202964 A JP 59202964A JP 20296484 A JP20296484 A JP 20296484A JP S6182321 A JPS6182321 A JP S6182321A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- corrosion resistance
- magnetic
- thickness
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、磁気記録媒体に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to magnetic recording media.
近年、高密度記録の為に、例えばC01Co−Ni、C
o−’P又はCo−N1−P等の磁性材料を基体上に、
例、え、ばスパッタ、電気メッキ又は無電解メッキ等の
手段で形成した金属薄膜型磁気記録媒体が提案されてい
る。In recent years, for high-density recording, for example, C01Co-Ni, C
A magnetic material such as o-'P or Co-N1-P is placed on the substrate,
For example, metal thin film type magnetic recording media formed by means such as sputtering, electroplating, or electroless plating have been proposed.
しかし、この種の金属薄膜型磁気記録媒体は、磁性層の
摩耗がひどく、又、耐食性に乏しいといった欠点がある
。However, this type of metal thin film magnetic recording medium has drawbacks such as severe abrasion of the magnetic layer and poor corrosion resistance.
そこで、このような欠点を解決する為に、例えば5iO
=又はC等の層を設けることが提案されている。Therefore, in order to solve this drawback, for example, 5iO
It has been proposed to provide a layer such as = or C.
しかし、S r Os膜を設けたものは、耐食性に富ん
でいるものの、潤滑性に劣っておシ、又、カーボン膜を
設けたものは、潤滑性には優れているものの、耐食性に
劣っているといった欠点がある。However, those with an SrOs film have excellent corrosion resistance but have poor lubricity, and those with a carbon film have excellent lubricity but have poor corrosion resistance. There are drawbacks such as:
そこで、本発明者は、かかる知見を基にして磁性層上に
S t O2膜を設け、この8 t Ox膜上にカーボ
ン層を設けたものを試作してみたのである、が、この磁
気記録媒体はカーボンのストレスの問題からSiO□膜
層に亀裂が生じ、発錆現象が大きく、実用的には全く問
題のあるものであった。Therefore, based on this knowledge, the present inventor attempted to fabricate a prototype in which an S t O2 film was provided on the magnetic layer and a carbon layer was provided on this 8 t Ox film, but this magnetic recording The medium had cracks in the SiO□ film layer due to the stress of carbon, and the phenomenon of rusting was significant, so it was completely problematic for practical use.
本発明者は、金属薄膜型の磁性層上に、例えばクロム、
チタン、Fe−Cr合金、Ni−Cr 合金、Co−C
r 合金といった耐食性を有する第1の層を設け、こ
の第1の層上に、例えばカーボン、二硫化モリブデン、
窒化炭素、窒化ホウ素といった潤滑性を有する第2の層
を設け、この第2の層上に、例えばりoム、チタン、F
e−Cr 合金、Ni−Cr合金、Co −、Cr 合
金、モリブデン、TiC,TiN、 亜鉛、アルミニウ
ム、Fe−Ni 合金、Fe−Ni−Cr合金といっ
た耐食性を有する第3の層を設けた磁気記録媒体は、潤
滑性に富み、かつ耐食性に優れていることを見い出した
。The present inventor has discovered that, for example, chromium,
Titanium, Fe-Cr alloy, Ni-Cr alloy, Co-C
A first layer having corrosion resistance such as r alloy is provided, and on this first layer, for example, carbon, molybdenum disulfide,
A second layer having lubricating properties such as carbon nitride or boron nitride is provided, and on this second layer, for example, rim, titanium, F, etc.
Magnetic recording with a third layer having corrosion resistance such as e-Cr alloy, Ni-Cr alloy, Co -, Cr alloy, molybdenum, TiC, TiN, zinc, aluminum, Fe-Ni alloy, Fe-Ni-Cr alloy It was discovered that the medium has rich lubricity and excellent corrosion resistance.
すなわち、磁性層上に、例えばカーボンといった潤滑性
を有する層を設け、この層上にクロムといった耐食性を
有する層を設けたのみの金属薄膜型の磁気記録媒体でも
、走行性及び耐食性に著しい向上が認められるものの、
前記のように構成することによって、ストレスが緩和さ
れ、金属薄膜型の磁性層上の保護膜層の耐久性が著しく
良くなり、耐食性がさらに一層改善され、耐久性に一層
優れ、又、走行性も良いものであるととを見い出したの
である。In other words, even with a metal thin film type magnetic recording medium in which a lubricious layer such as carbon is provided on the magnetic layer, and a corrosion resistant layer such as chromium is provided on this layer, there is a significant improvement in runnability and corrosion resistance. Although it is recognized,
By configuring as described above, stress is alleviated, the durability of the protective film layer on the metal thin film type magnetic layer is significantly improved, corrosion resistance is further improved, durability is further improved, and runnability is improved. He discovered that it is also a good thing.
伺、クロムといった耐食性を有する第1の層は、その厚
さが約2 nm以上、望甘しくけ約2〜1100nであ
ることが好ましく、又、カーボンといった潤滑性を有す
る第2の層は、その厚さが約5nm以上、望ましくは約
5〜100 nmであることが好ましく、又、クロムと
いった耐食性を有する第3の層は、その厚さが約1〜7
nmであることが好ましく、そしてさらには第1の層
、第2の層及び第3の層の厚さの和が約200 nm以
下のものであることが好ましい。つまり、第1の層があ
まりにも薄すぎるとストレス緩和の効果が弱いからであ
り、例えば第1の層が0.5層mといったように薄すぎ
るとストレス緩和の効果が小さくなり、又、第?の層が
薄すぎると充分な潤滑効果が発揮されないからであり、
又、第3の層が薄すぎる場合には耐食性の点で問題があ
り、逆に厚すぎる場合には下層の第2の層による潤滑効
果が低下するからであわ、そして全体の厚さが厚すぎる
と磁性層と磁気ヘッドとの距離が遠くなシすぎ、記録再
生特性上好ましくないからである。The first layer having corrosion resistance such as carbon and chromium preferably has a thickness of about 2 nm or more, preferably about 2 to 1100 nm, and the second layer having lubricity such as carbon. Preferably, the thickness is about 5 nm or more, preferably about 5 to 100 nm, and the third layer having corrosion resistance, such as chromium, has a thickness of about 1 to 7 nm.
It is preferred that the thickness of the first layer, the second layer, and the third layer be less than or equal to about 200 nm. In other words, if the first layer is too thin, the stress relieving effect will be weak. If the first layer is too thin, for example, 0.5 m, the stress relieving effect will be small. ? This is because if the layer is too thin, it will not have sufficient lubricating effect.
Also, if the third layer is too thin, there will be a problem in terms of corrosion resistance, and if it is too thick, the lubricating effect of the underlying second layer will be reduced. If it is too long, the distance between the magnetic layer and the magnetic head will be too long, which is unfavorable in terms of recording and reproducing characteristics.
〔実施例1〕
図面は、本発明に係る磁気記録媒体の断面説明図である
。[Example 1] The drawing is an explanatory cross-sectional view of a magnetic recording medium according to the present invention.
同図中、1は、表面に例えば非磁性N1−Pメッキ層が
設けられたディスク形状のアルミニウムの基体である。In the figure, reference numeral 1 denotes a disk-shaped aluminum base body on which a non-magnetic N1-P plating layer is provided, for example.
2は、前記非磁性N1−Pメッキ層上に設けられた、例
えばCo−Pメッキ層といった金属薄膜型の磁性層であ
る。Reference numeral 2 denotes a metal thin film type magnetic layer, such as a Co--P plating layer, provided on the non-magnetic N1-P plating layer.
3は、磁性層2の形成された基体1を、例えばDCマグ
ネトロンスパッタ装置に入れ、例えば5 X 10
Torrのアルゴンガス中でスパッタエツチングし、そ
の後磁性層2上に形成された約2nm以上、例えば3Q
nm厚のCo o、s Cr O,2層といった耐食性
を有する第1の層である。3, the substrate 1 on which the magnetic layer 2 is formed is placed in, for example, a DC magnetron sputtering device, and is sputtered with a
Sputter etching is performed in argon gas at Torr, and then a layer of about 2 nm or more, for example 3Q, is formed on the magnetic layer 2.
The first layer has corrosion resistance, such as a nm-thick Co O, s Cr O, bilayer.
4は、耐食性を有する第1の層3上に形成された約5
nm以上、例えば3Qnm厚のカーボン層といった潤滑
性を有する第2の層である。4 is about 5 formed on the first layer 3 having corrosion resistance.
The second layer has lubricity, such as a carbon layer with a thickness of nm or more, for example, 3Q nm.
5は、潤滑性を有する第2の層4上に形成された約1〜
70m、例えば2層m厚のC008Cr02層といった
耐食性を有する第3の層である。5 is approximately 1 to 5 formed on the second layer 4 having lubricity.
70 m, a third layer with corrosion resistance, for example a 2 m thick C008Cr02 layer.
上記実施例の磁気ディスクを、浮上量0.25μm、ギ
ャップ長1.4μmのIBM製3350タイプのノ・−
ドディスク用ヘッドディスクを用いてC8Sテストを行
なった所、2万回のパス後においてもヘッド及び磁気デ
ィスクに損傷はなく、又再生出力の低下も認められなか
った。The magnetic disk of the above embodiment was mounted on an IBM 3350 type nozzle with a flying height of 0.25 μm and a gap length of 1.4 μm.
When a C8S test was conducted using a head disk for a magnetic disk, there was no damage to the head or magnetic disk even after 20,000 passes, and no decrease in reproduction output was observed.
又、上記磁気ディスクを、60℃で結露の雰囲気下に2
50時間放置しエラーレートを調べたが、エラーレート
の増加はほとんど認められず、耐食性に極めて優れてい
るものであった。In addition, the above magnetic disk was placed in a dew-condensing atmosphere at 60°C for 2 hours.
When the error rate was examined after being left for 50 hours, almost no increase in the error rate was observed, indicating extremely excellent corrosion resistance.
〔実施例2〕
実施例1において、潤滑性を有する第2の層4の厚みを
約100 nm以上、例えば300 nmとする以外は
全く同様に行ない、磁気ディスクを構成した。[Example 2] A magnetic disk was constructed in exactly the same manner as in Example 1 except that the thickness of the second layer 4 having lubricity was set to approximately 100 nm or more, for example, 300 nm.
本実施例の磁気ディスクを、60℃で結露の雰囲気下に
250時間放置しエラーレートを調べたが、エラーレー
トの増加はほとんど認められず、耐食性に優れたもので
あり、又、浮上量0.25μm、ギャツブ長1.4μm
のIBM製3350タイプのハードディスク用ヘッドを
用いてC8Sテストを行なった所、2万回のパス後にお
いてもヘッド及び磁気ディスクに損傷はないものであっ
た。The magnetic disk of this example was left in a dew-condensing atmosphere at 60°C for 250 hours and the error rate was examined. There was almost no increase in the error rate, and the disk had excellent corrosion resistance, and the flying height was 0. .25μm, gap length 1.4μm
A C8S test was conducted using an IBM 3350 type hard disk head, and there was no damage to the head or magnetic disk even after 20,000 passes.
但し、実施例1のものに比べると、再生出力の低下が認
められ、実施例1の磁気ディスクよシは劣るものではあ
った。However, compared to that of Example 1, a decrease in reproduction output was observed, and the magnetic disk of Example 1 was inferior.
〔実施例3〕
実施例1において、潤滑性を有する第2の層4の厚みを
5 nm以下、例えば2 nm とする以外は全く同様
に行ない、磁気ディスクを構成した。[Example 3] A magnetic disk was constructed in exactly the same manner as in Example 1 except that the thickness of the second layer 4 having lubricity was set to 5 nm or less, for example, 2 nm.
本実施例の磁気ディスクを、60℃で結露の雰囲気下に
250時間放置して耐食性テストを行なった所、耐食性
には優れたものであったが、C8Sテストでは6000
回目にヘッドクラッシュが起きたことより、走行性の面
で実施例1のものより劣るものではあった。A corrosion resistance test was performed on the magnetic disk of this example by leaving it in an atmosphere of condensation at 60°C for 250 hours, and it was found to have excellent corrosion resistance.
Since a head crash occurred in the second run, the running performance was inferior to that of Example 1.
〔実施例4〕
実施例1において、耐食性を有する第3の層5の厚みを
8 nm以上、例えばlQnmとする以外は全く同様に
行ない、磁気ディスクを構成した。[Example 4] A magnetic disk was constructed in exactly the same manner as in Example 1 except that the thickness of the third layer 5 having corrosion resistance was set to 8 nm or more, for example, 1Q nm.
本実施例の磁気ディスクを、60℃で結露の雰囲気下に
250時間放置して耐食性テストを行なった所、耐食性
には優れたものであったが、C8Sテストでは6000
回目にヘッドクラッシュが起きたことより、走行性の面
で実施例1のものより劣るものではあった。A corrosion resistance test was performed on the magnetic disk of this example by leaving it in an atmosphere of condensation at 60°C for 250 hours, and it was found to have excellent corrosion resistance.
Since a head crash occurred in the second run, the running performance was inferior to that of Example 1.
実施例1において、耐食性を有する層を全く設けず、そ
の他は同様にして磁気ディスクを構成した。In Example 1, a magnetic disk was constructed in the same manner as in Example 1, except that no layer having corrosion resistance was provided.
この磁気ディスクを、60℃で結露の雰囲気下に24時
間放置して耐食性テストを行なった所、磁気ディスク表
面は全面腐食が起きていて磁化は全く低下しておシ、全
く耐久性に乏しいものであった。When we conducted a corrosion resistance test by leaving this magnetic disk in an atmosphere of condensation at 60°C for 24 hours, we found that the surface of the magnetic disk was completely corroded and the magnetization was completely reduced, indicating that it had no durability at all. Met.
走行性及び耐食性に良いものであり、耐久性に富んでい
る。It has good running properties and corrosion resistance, and is highly durable.
図面は、本発明に係る磁気記録媒体の1実施例の断面説
明図である。
1・・・基体、2・・・磁性層、3・・・耐食性を有す
る第1の層、4・・・潤滑性を有する第2の層、5・・
・耐食性を有する第3の層。
手続補正書
昭和60年3月g日The drawing is an explanatory cross-sectional view of one embodiment of a magnetic recording medium according to the present invention. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Magnetic layer, 3... First layer having corrosion resistance, 4... Second layer having lubricity, 5...
- Third layer with corrosion resistance. Procedural amendment March g, 1985
Claims (2)
の層上に潤滑性を有する第2の層を、この第2の層上に
耐食性を有する第3の層を設けたことを特徴とする磁気
記録媒体。(1) A first layer having corrosion resistance is placed on the magnetic layer.
1. A magnetic recording medium comprising: a second layer having lubricity on the layer; and a third layer having corrosion resistance on the second layer.
て、第1の層の厚さが約2nm以上であり、第2の層が
約5nm以上であり、第3の層が約1〜7nmであるも
の。(2) In the magnetic recording medium according to claim 1, the first layer has a thickness of about 2 nm or more, the second layer has a thickness of about 5 nm or more, and the third layer has a thickness of about 1 to 1 nm. 7nm.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59202964A JPS6182321A (en) | 1984-09-29 | 1984-09-29 | Magnetic recording medium |
KR1019850006782A KR890004256B1 (en) | 1984-09-29 | 1985-09-17 | Magnetic recording media |
US06/779,160 US4680218A (en) | 1984-09-29 | 1985-09-23 | Magnetic recording medium |
DE19853534481 DE3534481A1 (en) | 1984-09-29 | 1985-09-27 | MAGNETIC RECORDING MEDIUM |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59202964A JPS6182321A (en) | 1984-09-29 | 1984-09-29 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6182321A true JPS6182321A (en) | 1986-04-25 |
Family
ID=16466077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59202964A Pending JPS6182321A (en) | 1984-09-29 | 1984-09-29 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6182321A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS647317A (en) * | 1986-05-09 | 1989-01-11 | Tdk Corp | Magnetic recording medium |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641524A (en) * | 1979-07-23 | 1981-04-18 | Datapoint Corp | Magentic recording disk and forming same |
JPS57198542A (en) * | 1981-05-29 | 1982-12-06 | Sekisui Chem Co Ltd | Magnetic recording medium |
JPS59119531A (en) * | 1982-12-25 | 1984-07-10 | Tdk Corp | Magnetic recording medium |
-
1984
- 1984-09-29 JP JP59202964A patent/JPS6182321A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641524A (en) * | 1979-07-23 | 1981-04-18 | Datapoint Corp | Magentic recording disk and forming same |
JPS57198542A (en) * | 1981-05-29 | 1982-12-06 | Sekisui Chem Co Ltd | Magnetic recording medium |
JPS59119531A (en) * | 1982-12-25 | 1984-07-10 | Tdk Corp | Magnetic recording medium |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS647317A (en) * | 1986-05-09 | 1989-01-11 | Tdk Corp | Magnetic recording medium |
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