JPS6165743U - - Google Patents
Info
- Publication number
- JPS6165743U JPS6165743U JP14951784U JP14951784U JPS6165743U JP S6165743 U JPS6165743 U JP S6165743U JP 14951784 U JP14951784 U JP 14951784U JP 14951784 U JP14951784 U JP 14951784U JP S6165743 U JPS6165743 U JP S6165743U
- Authority
- JP
- Japan
- Prior art keywords
- circular
- pattern
- mask
- item
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14951784U JPS6165743U (pt) | 1984-10-04 | 1984-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14951784U JPS6165743U (pt) | 1984-10-04 | 1984-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6165743U true JPS6165743U (pt) | 1986-05-06 |
Family
ID=30707693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14951784U Pending JPS6165743U (pt) | 1984-10-04 | 1984-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6165743U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02260518A (ja) * | 1989-03-31 | 1990-10-23 | Nec Corp | アライメントパターン |
-
1984
- 1984-10-04 JP JP14951784U patent/JPS6165743U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02260518A (ja) * | 1989-03-31 | 1990-10-23 | Nec Corp | アライメントパターン |