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JPS6145013Y2 - - Google Patents

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Publication number
JPS6145013Y2
JPS6145013Y2 JP12312881U JP12312881U JPS6145013Y2 JP S6145013 Y2 JPS6145013 Y2 JP S6145013Y2 JP 12312881 U JP12312881 U JP 12312881U JP 12312881 U JP12312881 U JP 12312881U JP S6145013 Y2 JPS6145013 Y2 JP S6145013Y2
Authority
JP
Japan
Prior art keywords
storage container
wafer storage
wafer
tab
foamed urethane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12312881U
Other languages
Japanese (ja)
Other versions
JPS5829970U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12312881U priority Critical patent/JPS5829970U/en
Publication of JPS5829970U publication Critical patent/JPS5829970U/en
Application granted granted Critical
Publication of JPS6145013Y2 publication Critical patent/JPS6145013Y2/ja
Granted legal-status Critical Current

Links

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  • Buffer Packaging (AREA)
  • Packaging Frangible Articles (AREA)

Description

【考案の詳細な説明】 本考案はIC基板となるシリコンウエハーを収
納したケース体を段ボール箱詰めして運搬する
際、ウエハーの破損を防ぐ如くしたウエハー収納
容器の包装体に関し、詳しくはウエハーを収納し
たケース体と外装となる段ボール外箱間に介在す
る包装体に係わるものである。
[Detailed description of the invention] This invention relates to a packaging body for a wafer storage container that prevents damage to the wafers when the case body containing silicon wafers, which will become IC substrates, is packed in a cardboard box and transported. This relates to the packaging body interposed between the case body and the cardboard outer box serving as the exterior.

IC基板用のシリコンウエハーは、非常に高価
で且つ非常に薄いため破損し易いものである。こ
のため、取扱いには注意を払わねばならず、特に
運搬に要注意となつている。従つて、この種の搬
送に当つては、普通は人間が持ち運ぶ搬送方式を
採つている。即ち、一般に円盤型(例えばφ40〜
φ100程度)を呈すウエハーにあつては、該ウエ
ハーの周縁4点を容器の支持部にて挟持状とし何
枚かを一諸に運ぶものである。このために円盤型
ウエハーの周縁方向(縦配列にあつて、左右、上
下方向)では比較的に衝撃に強いが、前後となる
面方向にあつては弱いものであり、簡単、確実な
緩衝部材の開発が望まれている。
Silicon wafers for IC substrates are very expensive and very thin, so they are easily damaged. Therefore, care must be taken when handling it, especially when transporting it. Therefore, for this type of transportation, a transportation method in which the device is carried by humans is usually adopted. That is, generally disc-shaped (for example, φ40 ~
In the case of wafers having a diameter of about 100 mm, the wafers are held at four points on the periphery by the supporting portion of the container and several wafers are transported at one time. For this reason, the disk-shaped wafer is relatively resistant to impact in the peripheral direction (left, right, top and bottom directions when vertically arranged), but weak in the front and back plane directions, making it difficult to use a simple and reliable shock absorbing member. development is desired.

本考案は上記実情に鑑みなされたものである。
即ち、本考案は発泡ウレタン帯付き段ボール胴板
を2枚、ウエハー正面が位置するウエハー収納容
器のツマ部を中心として上下方向と左右方向へと
十字状クロス巻付けとする組合わせにより、ウエ
ハー正面に対し衝撃の少ない包装体としたもので
ある。
The present invention has been made in consideration of the above-mentioned circumstances.
In other words, this device is a packaging body that reduces the impact on the front of the wafer by combining two cardboard body panels with a urethane foam band and wrapping them crisscross in the vertical and horizontal directions around the handle of the wafer storage container where the front of the wafer is located.

以下、本考案を実施例の図面について説明すれ
ば次の通りである。
Hereinafter, the present invention will be described with reference to drawings of embodiments.

1は折線2,2′,2″をもつて連設した四面の
段ボール製胴板部1a,1b,1c,1dの各表
面に、表面に波形3を形成してなる発泡ウレタン
帯条材4を、この折線に平行するよう複数本を
夫々ホツトメルト等の接着剤aをもつて貼着した
内枠緩衝部材で、5は折線6,6′,6″をもつて
連設した四面の段ボール製胴板部5a,5b,5
c,5dの各表面に、波形3′を形成した発泡ウ
レタン帯条材4′を、この折線に直交するよう複
数本を夫々接着剤aをもつて貼着した前記内枠緩
衝部材1の外側へ巻付ける外枠緩衝部材で、該外
枠緩衝部材5と内枠緩衝部材1の2枚の組合わせ
でウエハー収納容器の包装体6となるものであ
る。7は複数枚の円盤型ウエハーAを縦配列に収
容したウエハー容器7′を、適宜個数段重ね(図
示にあつては、上下、前後位置となる12個並べ)
に配設する箱型ウエハー収納容器で、該ウエハー
収納容器7の前面ツマ部7a面に各ウエハー容器
7′内のウエハーAの正面A′が対向するように収
納される。
1 is a foamed urethane strip material 4 formed by forming corrugations 3 on each surface of four corrugated cardboard body plates 1a, 1b, 1c, and 1d connected with fold lines 2, 2', and 2''. 5 is an inner frame cushioning member made of four-sided corrugated cardboard which is connected with a plurality of pieces parallel to this fold line with adhesive a such as hot melt. Body plate parts 5a, 5b, 5
The outer side of the inner frame cushioning member 1, in which a plurality of foamed urethane strips 4' each having a corrugated shape 3' are pasted on each surface of c and 5d with adhesive a so as to be perpendicular to the fold line. The outer frame buffer member 5 and the inner frame buffer member 1 are combined to form a package 6 for a wafer storage container. 7 is a wafer container 7' in which a plurality of disk-shaped wafers A are housed in a vertical arrangement, stacked appropriately in several stages (in the figure, 12 wafer containers are arranged in vertical and front-back positions).
The wafers A in each wafer container 7' are stored so that the front surface A' of the wafer A in each wafer container 7' faces the front surface of the front tab 7a of the wafer container 7.

次に、このウエハー収納容器7を外装となる段
ボール箱8への収容に際し、先ずウエハー収納容
器7の前面ツマ部7a面に内枠緩衝部材1の一辺
となる胴板部1aを、該胴板部1aの表面の発泡
ウレタン帯条材4を表として宛がい、この状態で
該胴板部1aに連設の残る胴板部1b,1c,1
dを、ウエハー収納容器7の上部7b、後面ツマ
部7a′、下部7cへ添うよう折線2,2′,2″部
を折曲げて巻付け一重緩衝とする(第2図A参
照)。
Next, when storing this wafer storage container 7 in a cardboard box 8 serving as an exterior, first, the body plate portion 1a, which is one side of the inner frame buffer member 1, is attached to the front tab portion 7a of the wafer storage container 7. The foamed urethane strip material 4 on the surface of the portion 1a is placed as the front side, and in this state, the remaining body plate portions 1b, 1c, 1 connected to the body plate portion 1a are attached.
d is wrapped around the folding lines 2, 2', and 2'' so as to be along the upper part 7b, rear tab 7a', and lower part 7c of the wafer storage container 7 to form a single-layer buffer (see FIG. 2A).

次に、ウエハー収納容器7の前面ツマ部7a位
置の前記内枠緩衝部材1の胴板部1aの表面部
に、外枠緩衝部材5の胴板部5aを、該胴板部5
aの表面の発泡ウレタン帯条材4′を表として宛
がい、この状態で該胴板部5aに連設の残る胴板
部5b,5c,5dを、ウエハー収納容器7の側
部7b、後面ツマ部7a′側部7dへと折線6,
6′,6″の折曲をもつて巻付け二重緩衝を構成す
るものである。
Next, the body plate 5a of the outer frame buffer member 5 is attached to the surface of the body plate 1a of the inner frame buffer member 1 at the front tab 7a of the wafer storage container 7.
Lay out the foamed urethane strip material 4' on the surface of a, and in this state, attach the remaining body plate parts 5b, 5c, and 5d connected to the body plate part 5a to the side part 7b and the rear face of the wafer storage container 7. Folding line 6 to tab 7a' side 7d,
It is wound with 6' and 6'' bends to form a double buffer.

この様に、ウエハー収納容器7に対し、内・外
枠緩衝部材1,5を全体として十字状となるクロ
ス巻付けとした状態で段ボール箱8へ収容すれ
ば、ウエハー収納容器7の前後面のツマ部7a,
7a′に対向するウエハーAの正面(又は背面)
は、該ツマ部7a,7a′において夫々発泡ウレタ
ン帯条材4,4′付きの胴板部1a,5a,1
c,5cが重なる二重緩衝部9が構成されるた
め、横方向から外圧が加わつても適宜緩衝し、そ
の衝撃をウエハーA面へ伝達しないものである。
図中、7″はウエハー容器7′の枠内四方に突設し
た円盤型ウエハー支持用の突条である。
In this way, if the inner and outer frame buffer members 1 and 5 are wound cross-wound around the wafer storage container 7 and stored in the cardboard box 8, the front and rear surfaces of the wafer storage container 7 can be Knob portion 7a,
Front (or back) of wafer A facing 7a'
The body plate parts 1a, 5a, 1 are provided with foamed urethane strips 4, 4' at the claw parts 7a, 7a', respectively.
Since the double buffer portion 9 is constructed in which the portions c and 5c overlap, even if external pressure is applied from the lateral direction, it is appropriately buffered and the impact is not transmitted to the wafer A surface.
In the figure, reference numeral 7'' indicates a disc-shaped wafer supporting protrusion protruding from all sides within the frame of the wafer container 7'.

上述の様に本考案は、ウエハーを縦配列したウ
エハー容器を収容するウエハー収納容器のウエハ
ー正面が向くツマ部を中心とし、上下方向へ巻付
ける発泡ウレタン帯条材付き胴板部よりなる内枠
緩衝部材と、前記ツマ部を中心として左右方向へ
巻付ける発泡ウレタン帯条材付き胴板部よりなる
外枠緩衝部材の2枚組合わせとすることにより、
外部からの衝撃に対して弱い、ウエハーの正面及
び背面が対向する前後面のツマ部にあつては2枚
の胴板部が重なり、各発泡ウレタン帯条材が夫々
緩衝(二重緩衝)するため、衝撃はウエハー面に
伝達されず、該ウエハーの破損を阻止するものと
なる。
As mentioned above, the present invention consists of an inner frame consisting of a body plate section with foamed urethane strips that are wound vertically around the tab section of the wafer storage container that houses the wafer container in which the wafers are arranged vertically, and the front surface of the wafers faces. By combining two pieces of a shock absorbing member and an outer frame shock absorbing member consisting of a body plate portion with a foamed urethane strip material wrapped in the left and right direction around the knob portion,
At the front and rear tabs where the front and back sides of the wafer face each other, which are vulnerable to external shocks, two body plates overlap, and each foamed urethane strip provides a buffer (double buffer). Therefore, the impact is not transmitted to the wafer surface, thereby preventing damage to the wafer.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案の実施例を示すもので、第1図
A,Bは内・外枠緩衝部材の平面図、第2図A,
Bは同枠組み状態を示す斜面図、第3図は要部縦
断側面図、第4図はウエハー容器部の斜面図、第
5図は段ボール箱詰めとする内・外枠緩衝部材の
使用状態の平面図である。 1……内枠緩衝部材、2,2′,2″……折線、
3,3′……波形、4,4′……発泡ウレタン帯条
材、5……外枠緩衝部材、7……ウエハー収納容
器、7a……ツマ部、7′……ウエハー容器、A
……円盤型ウエハー。
The drawings show an embodiment of the present invention, and FIGS. 1A and 1B are plan views of the inner and outer frame cushioning members, and FIGS.
B is a perspective view showing the same frame state, FIG. 3 is a vertical cross-sectional side view of the main part, FIG. 4 is a perspective view of the wafer container section, and FIG. It is a diagram. 1... Inner frame buffer member, 2, 2', 2''... Broken line,
3, 3'... Waveform, 4, 4'... Foamed urethane strip material, 5... Outer frame buffer member, 7... Wafer storage container, 7a... Knob portion, 7'... Wafer container, A
...A disc-shaped wafer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハーの正面が容器のツマ部に向くよう収容
された複数個のウエハー容器を段重ねに並べた箱
型ウエハー収容容器の外表面に、ウエハーの正面
が対向するウエハー収納容器の前面ツマ部を中心
として上下方向へ連接する4面胴板部の表面に波
形表面を形成した発泡ウレタン帯条材を折線に平
行して複数本夫々貼着した内枠緩衝部材を、表面
の発泡ウレタン帯条材が表となるよう折線に沿つ
て夫々巻き付けると共に、前記ウエハー収納容器
の前面ツマ部を中心として左右方向へ連設する4
面胴板部の表面に波形表面を形成した発泡ウレタ
ン帯条材を折線に直交して複数本貼着した外枠緩
衝部材を、前記内枠緩衝部材に対してウエハー収
納容器の前面ツマ部及び後面ツマ部にて夫々重な
り合うよう、折線に沿つて、且つ表面の発泡ウレ
タン帯条材が表となるように巻付けることを特徴
としたウエハー収納容器の包装体。
The outer surface of a box-shaped wafer storage container is made up of a plurality of wafer containers arranged in stacks so that the front of the wafers face the container's tab, and the front tab of the wafer storage container, where the front of the wafers face, is centered on the outer surface of the box-shaped wafer storage container. The inner frame cushioning member is made by pasting a plurality of foamed urethane strips with corrugated surfaces parallel to the fold lines on the surface of the four-sided body plate that connects in the vertical direction, and the foamed urethane strips on the surface are The four wafer storage containers are wound around each other along the folded lines so as to form the front surface, and are arranged in a row in the left and right direction centering on the front tab of the wafer storage container.
An outer frame buffer member in which a plurality of foamed urethane strips having a corrugated surface are pasted on the surface of the face body plate part perpendicularly to the fold line is attached to the inner frame buffer member at the front tab of the wafer storage container and A package for a wafer storage container, characterized in that the wafer storage container is wound along the fold line so that the urethane foam strips on the surface face out so that they overlap at the rear tabs.
JP12312881U 1981-08-20 1981-08-20 Wafer storage container packaging Granted JPS5829970U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12312881U JPS5829970U (en) 1981-08-20 1981-08-20 Wafer storage container packaging

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12312881U JPS5829970U (en) 1981-08-20 1981-08-20 Wafer storage container packaging

Publications (2)

Publication Number Publication Date
JPS5829970U JPS5829970U (en) 1983-02-26
JPS6145013Y2 true JPS6145013Y2 (en) 1986-12-18

Family

ID=29917032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12312881U Granted JPS5829970U (en) 1981-08-20 1981-08-20 Wafer storage container packaging

Country Status (1)

Country Link
JP (1) JPS5829970U (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0522111Y2 (en) * 1987-02-02 1993-06-07
JPS6375248U (en) * 1987-09-18 1988-05-19
JP4693582B2 (en) * 2005-10-12 2011-06-01 株式会社TanaーX Wafer storage paper container

Also Published As

Publication number Publication date
JPS5829970U (en) 1983-02-26

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