JPS6132503A - trimming device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a trimming device for trimming a resistor, etc. of an IC circuit.

[Background of the invention]

In conventional trimming equipment, in order to measure the resistance value on a circuit board, a probe is fixed to a probe support board called a probe card, the workpiece is transported and positioned, and then the workpiece is raised. Alternatively, the pull-up card is lowered to bring it into mechanical contact with the workpiece as a probe, electrically connected to an external circuit, the resistance value is measured, and trimming is performed to a target value. This method requires time to raise the workpiece or lower the probe, which reduces throughput, and requires maintenance of the probe tip to obtain stable contact conditions, and since it is a consumable item, there is no running time. This had the disadvantage of increasing costs.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to correct the above-mentioned drawbacks, and to provide a trimming device that can electrically connect a workpiece and a probe at high speed and extend the life of the probe.

[Summary of the invention]

In order to achieve the above object, a trimming device according to the present invention serves as a positioning device for a workpiece.

- In a trimming device consisting of a laser beam generator, a laser beam scanning device, a measuring device, and a processing device, a pair of resistors for each resistor is electrically connected near the resistor to be trimmed on the workpiece. Measure the AC voltage across a capacitively coupled non-contact glove, a circuit that applies an AC voltage to the resistor through one of the gloves, and a load resistor connected to the outside from the other probe. The gist is to have a circuit that performs the following steps. That is, in the present invention, K, which determines the resistance value of the resistor on the workpiece, is electrically capacitively coupled by keeping the distance between the probe of the measurement system terminal and the resistor small and constant. This was done based on the knowledge of the present inventors that the connection can be made. By capacitively coupling the probe and the resistor, if you set the distance to the probe to be constant when transporting and positioning the workpiece, it is possible to make contact between the probe and the resistor on the workpiece. You can save the time you would otherwise have spent.

The present invention will be described in more detail below using examples with reference to the drawings, but these are merely illustrative, and it goes without saying that various modifications and improvements may be made without going beyond the scope of the present invention. It is.

Example of invention C] FIG. 1 is a block diagram showing the overall configuration.

A device 1 for transporting and positioning a workpiece W to be trimmed (hereinafter simply referred to as a workpiece);
A non-contact probe unit 2 for electrically connecting to the resistor on the workpiece W, a test voltage generator 5 for applying a test voltage, a measuring device 4 for measuring characteristic values, and a laser beam generator for outputting a laser beam. 5, a laser beam scanning device 6 that scans a laser beam, and a processing device 7 that controls these devices. The operation of each part will be described below. The transport positioning device 1 moves the workpiece W...
- Transport and position from the attachment/detachment position to the trimming position.

At this time, the plurality of pairs of probes provided in the non-contact probe unit 2 and the plurality of trimming targets on the workpiece W and the electrodes of the resistor are arranged in the probe unit 2 so that they face each other with a certain minute distance between them. Set in advance. This situation is shown in FIG. An AC test voltage is generated from the test voltage generator 5, and the resistor 11 to be trimmed on the workpiece W is
A test voltage is applied to the resistor 11 from the probe 14 on one side of a pair of probes set opposite to a pair of electrodes 12.15 provided on both sides of the resistor 11. The applied signal is connected from one electrode 12 of the resistor through the resistor 11 by capacitive coupling, and from the other electrode 15 to the other probe 15 of the pair of probes by capacitive coupling. Ru. A load resistor 16 is connected to the probe 15, and the other end of the load resistor 16 is grounded. Now the voltage across the load resistor 160.

The laser beam scanning device 6 scans the resistor 11 with a laser beam while emitting a laser beam from the laser beam generator 5 so that the resistance value of the resistor 11 becomes the target value while being read by the measuring device 4. Adjust the resistance value.

The method for determining the resistance value is as follows. An equivalent circuit of the above circuit is shown in FIG. Here, "l *C@Fb is known or can be obtained by measuring 5, and by measuring - using the above method, the value of the resistor to be trimmed R1 is νt y'6, R , , tCsω, and is obtained by the processing device 7.

Here, ω is the angular frequency of the output signal of the test voltage generator 5. vJ! is calculated using the following formula.

As described above, in the trimming device, signals are supplied using a non-contact probe instead of the conventional contact type probe. , the detection can eliminate the time required for contact, and is also non-contact, allowing for the use of gloves and probe supports.

The rigidity can be reduced and the probe card can be made smaller and lighter, so its shape and structure are different from conventional probe cards.

For example, it is possible to realize a high-density globe unit in which probe electrodes are provided on a printed wiring board and the resistor portion to be trimmed is left as a void.

Furthermore, since there are no parts that wear out mechanically, it is easy to maintain the characteristics, and the probe has a semi-permanent lifespan.

〔Effect of the invention〕

As described above, according to the present invention, there is provided a measurement system for a resistor to be trimmed and a trimming device.

It is possible to electrically connect mechanically and without contact, which improves the flow rate by reducing the time required to make contact, and reduces running costs by extending the life of the probe unit. The cost performance of the device can be significantly improved by 1°.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing the configuration of a trimming device according to the present invention, FIG. 2 is a front view of the non-contact probe and workpiece surroundings of the trimming device according to the present invention, and FIG. 5 is an equivalent circuit diagram of the device shown in FIG. 2. It is. W...Workpiece...Transportation and positioning device 2...Non-contact printing≧knit 5...Test voltage generator 4...Measuring device 5...Beam generator 6...Laser beam scanning Device 7... Processing device 11... Resistor to be trimmed 12.15... Electrode 14.15... Probe 16... Load resistance

Claims (1)

[Claims] In a trimming device consisting of a positioning device for a workpiece, a laser beam generator, a laser beam scanning device, a measuring device, and a processing device, there is also a pair of resistors for each resistor on the workpiece near the resistor to be trimmed. A non-contact probe electrically capacitively coupled to the resistor, a circuit that applies an AC voltage to the resistor through one of the probes, and an AC voltage across the load resistor connected to the outside from the other probe. A trimming device comprising: a circuit for measuring voltage.