JPS61284037A - Sample board for ion milling - Google Patents

Abstract

PURPOSE:To prevent spattering yield, by preparing a sample board made of carbon and a sample consisting of a composite of a metal whose outer surface is covered by carbon. CONSTITUTION:An upper plate 1 and a lower plate 2 of a sample board are combined by supports 3, a sample S is installed in a recessed hole 5 of the upper plate, and the whole surfaces of them are covered with carbon 6. Although carbon is attached on the sample by using carbon as the covering material, absorption of electron-rays is little and troubles of observation by a permeable electron microscope are few, since carbon is a lighter element than heavy metals such as molybdenum. Also, for the problem of electron-ray diffraction by the electron microscope or for the analysis problem such as the fluorescent X-ray analyzing, the presence of carbon can be ignored. furthermore, when the sample of an insulator is observed and analyzed, a preliminary process such as the vacuum evaporation of carbon or the like to prevent a charge up of electron- rays is unnecessary, since a thin carbon coating is already placed over the sample.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an ion milling sample stand (hereinafter abbreviated as sample stand) used in an ion milling device as a sample preparation device for a transmission electron microscope. It is.

[Prior Art] Ion milling is a method of ionizing argon gas or other gas, injecting it into a sample, and thinning the sample by sputtering. The sample stage that holds the sample is made of a material that is difficult to produce sputtering yield, such as molybdenum.

[Problems to be Solved by the Invention] Even if the sample stage is made of heavy metals such as molybdenum as described above, some sputtering yield will occur and be scattered, adhering to the surface of the sample being processed and causing electron Obstructs microscopic observation and analysis.

The purpose of the present invention is to reduce the occurrence of sputtering yield,
Another object of the present invention is to provide a sample stage that does not hinder observation or analysis.

[Means for Solving the Problems] The present invention provides a sample stand made of carbon, and a sample stand for ion milling made of a composite material in which the outer surface of metal is coated with carbon.

In the present invention, by using carbon as a material, it is possible to reduce the sputtering yield compared to conventional metals. That is, at an acceleration voltage of 400 ev for Ar ions, the sputtering yield of carbon is about 115 to 1/7 smaller than that of molybdenum. This means that
The consumption of the sample stage by the ion beam is less than that of molybdenum, and the lifespan is approximately 5 to 7 times longer than that of conventional materials.

Next, when carbon is used as a material, even if carbon adheres to the sample surface, since it is a lighter element than heavy metals such as molybdenum, it absorbs less electron beams and causes fewer problems in transmission electron microscopy. In addition, electron diffraction using an electron microscope and fluorescence
The presence of carbon can also be ignored when it comes to analytical problems such as beam analysis.Furthermore, when observing and analyzing insulator samples, the thin carbon coating on the sample prevents the charge of the electron beam. There is no need to perform pre-treatment such as vacuum deposition of carbon or the like to prevent build-up.

When manufacturing a sample stage, carbon has good workability and there are no problems in manufacturing. However, in order to prevent the sample stand from being damaged during handling, the entire surface of the metal sample stand may be coated with carbon by a method such as vacuum evaporation, thereby making the sample stand a composite of carbon and metal.

[Example] FIG. 1 shows a cross-sectional view of a sample stage made of carbon. The upper plate 1 and the lower plate 2 are connected by a support 3. The sample S is mounted in the groove 5 of the upper plate.

FIG. 2 shows a cross-sectional view of the metal sample stand of the sample stand structure shown in FIG. 1, the entire surface of which is coated with carbon 6,
The sample S is attached to the groove 5 of the upper plate.

The sample stage shown in Figures 1 and 2 was attached to an ion milling device, and the sample, which had been ion milled using argon gas, was subjected to transmission observation and fluorescence X-ray analysis using an electron microscope. There was no heavy metal contamination and it could be used for elemental analysis without any problems.

[Effects of the Invention] According to the present invention, the sputtered particles of the conventional sample stage made of heavy metals do not adhere to the sample surface, and there is no interference from the sputtered particles during analysis, making it easier to observe with an electron microscope. Analysis can be performed easily and efficiently.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the sample stand made of carbon according to the present invention, and FIG. 2 is a sample stand made of metal according to the present invention coated with carbon. FIG. 3 is a cross-sectional view showing one embodiment. 1; Upper plate 2: Lower plate 3: Strut 4: Bolt 5; Groove hole 6; Carbon coating layer S; Sample Gina Patent attorney Tachibana Takaishi

Claims (1)

[Claims] 1. A sample stage for ion milling, characterized in that at least a portion thereof is made of a carbon material. 2. A sample stand for ion milling, characterized in that it is made of a composite material in which the outer surface of a metal material is coated with carbon.