[go: up one dir, main page]

JPS6126310A - Oscillator with stable amplitude - Google Patents

Oscillator with stable amplitude

Info

Publication number
JPS6126310A
JPS6126310A JP14795584A JP14795584A JPS6126310A JP S6126310 A JPS6126310 A JP S6126310A JP 14795584 A JP14795584 A JP 14795584A JP 14795584 A JP14795584 A JP 14795584A JP S6126310 A JPS6126310 A JP S6126310A
Authority
JP
Japan
Prior art keywords
vibrator
electrode
positive feedback
tuning fork
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14795584A
Other languages
Japanese (ja)
Other versions
JPH0220162B2 (en
Inventor
Takuya Hosoda
細田 卓谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Ando Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric Co Ltd filed Critical Ando Electric Co Ltd
Priority to JP14795584A priority Critical patent/JPS6126310A/en
Publication of JPS6126310A publication Critical patent/JPS6126310A/en
Publication of JPH0220162B2 publication Critical patent/JPH0220162B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oscillators With Electromechanical Resonators (AREA)

Abstract

PURPOSE:To decrease the effect to be exerted on a detection sensitivity by a converting element by providing a potential difference between a vibrator and an electrode arranged to the vibrating part of the vibrator in contactless state and extracting an electric signal proportional to the amplitude of the vibrator from the electrode. CONSTITUTION:The electrode 11 is arranged to the vibrating part of a tuning fork vibrator 1 in noncontact state. A potential difference is fed to the electrode 11 and the vibrator 1, and the static capacitance between the vibrator 1 and the electrode 11 is vibrated by the mechanical vibration of the tuning folk vibrator 1. In such a case, a positive feedback amplifier 12 applies a positive feedback to a loop consisting of piezoelectric element 13 vibrator electrode 11 amplifier 12 so that the mechanical vibration of the vibrator 11 continues. Since an air capacitor comprising the vibrator and the electrode is adopted for the detection of vibration in such as way, the effect of the converting element on the detection sensitivity is reduced.

Description

【発明の詳細な説明】 (a)  発明の技術分野 この発明は、正帰還ループに振動子を入れた発振器に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to an oscillator including a resonator in a positive feedback loop.

(b)  従来技術と問題点 最初に、振動子を利用した発振器の従来の回路図を第2
図に示す。
(b) Prior art and problems First, we will introduce a conventional circuit diagram of an oscillator using a resonator as a second example.
As shown in the figure.

第2図の1は音さ振動子、2は圧電素子、3は正帰還増
幅器、4は圧電素子である。
In FIG. 2, 1 is a tuning fork vibrator, 2 is a piezoelectric element, 3 is a positive feedback amplifier, and 4 is a piezoelectric element.

音さ振動子1は外形がU字形て、各音片の長さや形伏に
よって定まる固有の振動数をもっている。
The tuning fork vibrator 1 has a U-shaped outer shape and has a unique frequency determined by the length and shape of each sound piece.

圧電素子2と圧電索子4は、音さ振動子1の各音片にそ
れぞれ向い合うように取U付けられ、圧電索子2は振動
検出用、圧電素子4は駆動用である。
The piezoelectric element 2 and the piezoelectric cord 4 are attached to each sound piece of the tuning fork vibrator 1 so as to face each other, and the piezoelectric cord 2 is used for vibration detection, and the piezoelectric element 4 is used for driving.

正帰還増幅器3は、音さ振動子イの機械的振動が続くよ
うに、圧電索子4→音さ振動子1→圧電索子2→正帰還
増幅器3で構成するループに正帰還をかける。
The positive feedback amplifier 3 applies positive feedback to the loop constituted by the piezoelectric cable 4 → the tuning fork transducer 1 → the piezoelectric cable 2 → the positive feedback amplifier 3 so that the mechanical vibration of the tuning fork transducer A continues.

圧電素子2は音さ振動子1の機械的振幅を電圧に変換す
るものであるが、圧電素子2の電圧変換1!を性は周囲
の温度や湿度の影響を受けやすい。
The piezoelectric element 2 converts the mechanical amplitude of the tuning fork vibrator 1 into voltage, and the voltage conversion 1! of the piezoelectric element 2! The temperature is easily affected by the ambient temperature and humidity.

このため、月=電素子2の電圧振幅だけを一定に制御し
ても、音さ振動子1の振幅は必ずしも安定ではないとい
う問題がある。
Therefore, even if only the voltage amplitude of the electric element 2 is controlled to be constant, there is a problem that the amplitude of the tuning fork vibrator 1 is not necessarily stable.

次に、振動子を利用した発振器の従来の他の回路図を第
3図に示す。
Next, FIG. 3 shows another conventional circuit diagram of an oscillator using a vibrator.

第3図の5は磁石、6はコイル、7は正帰還増幅器、8
はコイル、9は磁石である。
In Figure 3, 5 is a magnet, 6 is a coil, 7 is a positive feedback amplifier, 8
is a coil, and 9 is a magnet.

磁石5と磁石9は磁気的結合はしないが、音さ振動子1
の振動部分に向い合うように取り付けられる。
Although the magnet 5 and the magnet 9 are not magnetically coupled, the tuning fork vibrator 1
It is installed so that it faces the vibrating part of the

コイル6とコイル8は、磁石5と磁石9を挾むような形
で音さ振動子1かられずかに離れた位置に固定される。
The coil 6 and the coil 8 are fixed at a position slightly apart from the tuning fork vibrator 1 so as to sandwich the magnet 5 and the magnet 9.

コイル6は振動検出用であり、コイル8は駆動用である
Coil 6 is for vibration detection, and coil 8 is for drive.

正帰還増幅器7は、音さ振動子1の機械的振動が続くよ
うに、コイル8→磁石9→音さ振動子1→磁石5→コイ
ル6→正帰還増幅器7で構成するループに正帰還をかけ
る。
The positive feedback amplifier 7 provides positive feedback to the loop composed of the coil 8 → magnet 9 → tuning fork vibrator 1 → magnet 5 → coil 6 → positive feedback amplifier 7 so that the mechanical vibration of the tuning fork transducer 1 continues. put on.

第3図の電磁駆動形音さ発振回路では、磁石5の磁力が
周囲温度の影響を受けるので、第2図の場合と同じよう
に、音さ振動子1の振幅は必ずしも安定ではないという
問題がある。
In the electromagnetically driven tuning fork oscillator circuit shown in FIG. 3, the magnetic force of the magnet 5 is affected by the ambient temperature, so the amplitude of the tuning fork vibrator 1 is not necessarily stable, as in the case of FIG. 2. There is.

なお、第2図、第3図のような従来回路を改良したもの
として、特開昭56−19207号公報、特開昭55−
149505号公報などがあるが、いずれも音さ振動子
の機械的振動を圧電素子やコイルなどの変換素子で電圧
に変換しているので、温度や湿度などで検出感度が変化
するという問題は解決されていない。
In addition, as improved versions of the conventional circuits shown in FIGS.
149505, etc., but all of them convert the mechanical vibration of the tuning fork vibrator into voltage using a conversion element such as a piezoelectric element or coil, which solves the problem of detection sensitivity changing due to temperature, humidity, etc. It has not been.

第2図や第31λIの発振器を表面電位計などに使用す
ることがある。
The oscillators shown in FIG. 2 and 31.lambda.I are sometimes used in surface electrometers and the like.

被測定物の表面電位を非接触の状態で測定する場合は、
被測定物と測定回路間の静電容量に機械的振動を与える
ことにより、被測定物の表面電位を振動容量に変換する
。このような技術については、例えば特公昭58−47
672号公報などにも記載されている。
When measuring the surface potential of the object to be measured without contact,
By applying mechanical vibration to the capacitance between the measured object and the measurement circuit, the surface potential of the measured object is converted into vibration capacitance. Regarding such technology, for example,
It is also described in Publication No. 672, etc.

振動子を用いる表面電位計では、振動子の振動振幅か一
定てないと測定誤差が生ずるという問題かある。
Surface electrometers that use a vibrator have a problem in that measurement errors occur if the vibration amplitude of the vibrator is not constant.

(C)  発明の目的 この発明は、振動子の機械的振動を電気信号に変換する
手段として、振動子の振動部分に非接触の状態で電極を
配置し、振動子とこの電極の間に電位差を設け、振動子
の機械的振動で静電容量を振動させ、振動子の振幅に比
例した電気信号を取り出ずようにし、振幅の安定な発振
器を提供することを目的とする。
(C) Purpose of the Invention This invention provides a means for converting the mechanical vibration of a vibrator into an electrical signal by disposing an electrode in a non-contact state on the vibrating part of the vibrator, and creating a potential difference between the vibrator and the electrode. It is an object of the present invention to provide an oscillator with stable amplitude by vibrating the capacitance with the mechanical vibration of the vibrator and preventing extracting an electric signal proportional to the amplitude of the vibrator.

(d)  発明の実施例 まず、この発明による実施例の回路図を第1図に示す。(d) Examples of the invention First, a circuit diagram of an embodiment according to the present invention is shown in FIG.

第1図の11は電極、12は正帰還増幅器、13は圧電
素子である。
In FIG. 1, 11 is an electrode, 12 is a positive feedback amplifier, and 13 is a piezoelectric element.

電極11は、音さ振動子1の振動部分に非接触の状態で
配置される。
The electrode 11 is placed in a non-contact manner on the vibrating part of the tuning fork vibrator 1.

音さ振動子1と電極11には電位差を与え、音さ振動子
1の機械部振動により、音さ振動子1と電極11の間の
静電容量を振動させる。
A potential difference is applied between the tuning fork vibrator 1 and the electrode 11, and the mechanical part vibration of the tuning fork vibrator 1 causes the capacitance between the tuning fork vibrator 1 and the electrode 11 to vibrate.

圧電素子13は駆動用であり、振動駆動子として圧電素
子13の代りに第3図のコイル8、磁石9を使用するこ
ともできる。
The piezoelectric element 13 is for driving, and the coil 8 and magnet 9 shown in FIG. 3 may be used instead of the piezoelectric element 13 as a vibration driver.

正帰還増幅器12は、音さ振動子1の機械的振動が続く
ように、圧電索子13→音さ振動子1→電極11→正帰
還増幅器12で構成するループに正帰還をかける。
The positive feedback amplifier 12 applies positive feedback to the loop formed by the piezoelectric cable 13 → the tuning fork vibrator 1 → the electrode 11 → the positive feedback amplifier 12 so that the mechanical vibration of the tuning fork vibrator 1 continues.

第1図で音さ振動子1と電極11との対向面積をA(c
m2)、音さ振動子1と電極11との対向距離をL(c
m)とすれば、音さ振動子1と電極11間の静電容量C
oは次式で表される。
In Fig. 1, the facing area of the tuning fork vibrator 1 and the electrode 11 is A(c
m2), and the opposing distance between the tuning fork vibrator 1 and the electrode 11 is L(c
m), then the capacitance C between the tuning fork vibrator 1 and the electrode 11 is
o is expressed by the following formula.

Co =A/11.3L(pF)・・・・・・・・・・
・・・・(1)電極11には抵抗14を介してバイアス
電圧−Vを加えているので、音さ振動子1と電極11の
間には一■の電位差が与えられる。
Co=A/11.3L (pF)・・・・・・・・・
(1) Since the bias voltage -V is applied to the electrode 11 via the resistor 14, a potential difference of 1.5 mm is applied between the tuning fork vibrator 1 and the electrode 11.

したがって、静電容量Coには次の式(2)で示す静電
荷Qが蓄積される。
Therefore, an electrostatic charge Q expressed by the following equation (2) is accumulated in the capacitance Co.

Q”CoX(−V)・・・・・・・・・・・・・・・・
・・・・・・・・・・(2)圧電素子13に電圧を加え
ると、音さ振動子1は機械的変位を受け、固有の周期で
振動する。
Q”CoX(-V)・・・・・・・・・・・・・・・
(2) When a voltage is applied to the piezoelectric element 13, the tuning fork vibrator 1 undergoes mechanical displacement and vibrates at a specific period.

音さ振動子1の振幅をΔLとすれば、式(3)のように
電極11には振幅△Lに比例した電圧△Vが誘起される
If the amplitude of the tuning fork vibrator 1 is ΔL, a voltage ΔV proportional to the amplitude ΔL is induced in the electrode 11 as shown in equation (3).

△V=11.3QX△L/A・・・・・・・・・・・・
・・・・・・(3)第1図の回路は、△Vの電圧を正帰
還増幅器12で増幅して圧電素子13に加えるこXによ
り、発振を持続させるものである。
△V=11.3QX△L/A・・・・・・・・・・・・
(3) The circuit shown in FIG. 1 maintains oscillation by amplifying the voltage ΔV with the positive feedback amplifier 12 and applying it to the piezoelectric element 13.

第1図では電極11を音さ振動子1の内側に配置してい
るが、電極11を音さ振動子1の外側に配置してもよい
。電極11を音さ振動子1の外側に配置した場合は、音
さ振動子1の振動方向か第1図と逆になるので、正帰還
増幅器1′2の出力が正帰還になるように位相合せに注
意する。
Although the electrode 11 is placed inside the tuning fork vibrator 1 in FIG. 1, the electrode 11 may be placed outside the tuning fork vibrator 1. If the electrode 11 is placed outside the tuning fork vibrator 1, the vibration direction of the tuning fork vibrator 1 will be opposite to that shown in Fig. 1, so the phase should be adjusted so that the output of the positive feedback amplifier 1'2 becomes positive feedback. Be careful when matching.

次に、この発明による他の実施例の回路図を第4図に示
す。
Next, a circuit diagram of another embodiment according to the present invention is shown in FIG.

第4図の15は片持棒振動子であり、片持棒振動子15
の一端は固定され、他端は自由端になっている。
15 in FIG. 4 is a cantilever rod vibrator, and the cantilever rod vibrator 15
One end is fixed and the other end is free.

電極11は片持棒振動子15の自由端に非接触の状態で
配置され、第1図と同じように抵抗14を介してバイア
ス電圧−■が加えられる。
The electrode 11 is placed in a non-contact manner on the free end of the cantilever rod vibrator 15, and a bias voltage -■ is applied through the resistor 14 in the same manner as in FIG.

振動駆動子として、第4図の圧電素子13の代りに、第
3図のコイル8、磁石9を使用することもできる。
As the vibration driver, the coil 8 and magnet 9 shown in FIG. 3 may be used instead of the piezoelectric element 13 shown in FIG. 4.

第1図と第4図に示したように、この発明は振動子の振
動部分に配置した電極と振動子との間に形成した空気コ
ンデンサの振動容量を利用して振動子の振動を検出する
ものである。
As shown in Figures 1 and 4, this invention detects the vibration of a vibrator by using the vibration capacity of an air capacitor formed between the vibrator and an electrode placed in the vibrating part of the vibrator. It is something.

したがって、第2図や第3図に示したような従来の発振
器に比べて温度や湿度の影響が少なく、正確で安定な振
動検出ができる。
Therefore, compared to conventional oscillators such as those shown in FIGS. 2 and 3, the influence of temperature and humidity is reduced, allowing accurate and stable vibration detection.

次に、この発明による他の実施例の回路図を第5図に示
す。
Next, a circuit diagram of another embodiment according to the present invention is shown in FIG.

第5図の16は正帰還増幅器、17は整流器、18は基
準電源、19は直流増幅器である。
In FIG. 5, 16 is a positive feedback amplifier, 17 is a rectifier, 18 is a reference power supply, and 19 is a DC amplifier.

第5図は第1図の正帰還増幅器12の代りに正帰還増幅
器16を用い、正帰還増幅器16の出力制御用に整流器
17、基準電源18および直流増幅器19を使用するも
のである。
In FIG. 5, a positive feedback amplifier 16 is used in place of the positive feedback amplifier 12 in FIG. 1, and a rectifier 17, a reference power supply 18 and a DC amplifier 19 are used to control the output of the positive feedback amplifier 16.

電極11の検出信号は音さ振動子1の振幅に比例する。The detection signal of the electrode 11 is proportional to the amplitude of the tuning fork vibrator 1.

したかって、との検出信号の振幅が一定になるように正
帰還増幅器16の出力レベルを制御できれば、音さ振動
子1の振幅を一定にすることかできる。第5図は、この
ような目的の回路図である。
Therefore, if the output level of the positive feedback amplifier 16 can be controlled so that the amplitude of the detection signal is constant, the amplitude of the tuning fork vibrator 1 can be kept constant. FIG. 5 is a circuit diagram for such purpose.

第5図では、電極11の検出信号を正帰還増幅器16の
入力に加えるとともに、その一部を整流器17で整流し
、直流増幅器19の一方の入力に加えている。直流増幅
器19の他の入力には基準電源18の電圧を加えており
、直流増幅器19はこの2つの入力電圧の差を増幅する
。そして、整流器17の出力が基準電源18の電圧より
も大きいときは直流増幅器19の出力が小さくなるよう
に、逆の場合は直流増幅器19の出ツノが大きくなるよ
うに直流増幅器19の出力を設定する。
In FIG. 5, the detection signal of the electrode 11 is applied to the input of the positive feedback amplifier 16, and a part of it is rectified by the rectifier 17 and applied to one input of the DC amplifier 19. The voltage of the reference power supply 18 is applied to the other input of the DC amplifier 19, and the DC amplifier 19 amplifies the difference between these two input voltages. Then, the output of the DC amplifier 19 is set so that when the output of the rectifier 17 is higher than the voltage of the reference power supply 18, the output of the DC amplifier 19 becomes smaller, and in the opposite case, the output horn of the DC amplifier 19 becomes larger. do.

正帰還増幅器16には、供給される電源電圧の変化によ
り出力レベルが増減する増幅器を使用する。
As the positive feedback amplifier 16, an amplifier whose output level increases or decreases depending on changes in the supplied power supply voltage is used.

第5図では、直流増幅器19の出力が正帰還増幅器16
の電源電圧として供給されている。したがって、電極1
1の検出信号が大きくなると直流増幅器19の出力は小
さくなるので正帰還増幅器16の出力レベルは小になる
。反対に、電極11の検出信号が小さくなると直流増幅
器19の出力は大きくなるので正帰還増幅器16の出力
レベルは大になり、電極11の検出信号が一定になるよ
うに働く。すなわち、正帰還増幅器16は振動継続用の
正帰還ループに負帰還をかけ、音さ振動子1の振幅が一
定になるようにするものである。
In FIG. 5, the output of the DC amplifier 19 is transferred to the positive feedback amplifier 16.
It is supplied as the power supply voltage. Therefore, electrode 1
When the detection signal of 1 becomes large, the output of the DC amplifier 19 becomes small, and therefore the output level of the positive feedback amplifier 16 becomes small. On the other hand, when the detection signal of the electrode 11 becomes smaller, the output of the DC amplifier 19 becomes larger, so the output level of the positive feedback amplifier 16 increases, and the detection signal of the electrode 11 becomes constant. That is, the positive feedback amplifier 16 applies negative feedback to the positive feedback loop for continuing vibration so that the amplitude of the tuning fork vibrator 1 becomes constant.

(e)  発明の効果 この発明によれば、正帰還ループに振動子を入れた発振
器にわいて、振動検出用に振動子と電極とで構成する空
気コンデンサを採用したので、変換素子による検出感度
への影響か少ない発振器が得られる。
(e) Effects of the Invention According to the present invention, an air capacitor composed of a vibrator and an electrode is used for vibration detection in an oscillator that includes a vibrator in the positive feedback loop, so that the detection sensitivity by the conversion element is improved. This results in an oscillator with less influence on the oscillator.

したかって、この発明による発振器を表面電位計に使用
すれば、測定誤差の少ない表面電位計を提供するεとか
てきる。
Therefore, if the oscillator according to the present invention is used in a surface electrometer, it is possible to obtain ε, which provides a surface electrometer with less measurement error.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明による実施例の回路図、第2図と第3
図は従来の回路図、 第4図と第5図はこの発明による他の実施例の回路図。 1・・・・・音さ振動子、2・・・・・圧電素子、3・
・・・正帰還増幅器、4・・・・・・圧電素子、5・・
・・・磁石、6・・・・・・コイル、7 ・・・・正帰
還増幅器、8・・・・・コイル、9・・・・・・磁石、
11・・・・電極、12・・・・・・正帰還増幅器、1
3・・・・・・圧電素子、14・・・・・・抵抗、15
・・・・・・片持棒振動子、16・・・・・・正帰還増
幅器、17・・・・・・整流器、18;・・・・・基準
電源、19・・・・・直流増幅器。 代理人  弁理士  小 俣 欽 同 第2図
FIG. 1 is a circuit diagram of an embodiment according to the present invention, FIGS.
The figure is a conventional circuit diagram, and FIGS. 4 and 5 are circuit diagrams of other embodiments according to the present invention. 1...Tune fork vibrator, 2...Piezoelectric element, 3...
...Positive feedback amplifier, 4...Piezoelectric element, 5...
... Magnet, 6 ... Coil, 7 ... Positive feedback amplifier, 8 ... Coil, 9 ... Magnet,
11... Electrode, 12... Positive feedback amplifier, 1
3... Piezoelectric element, 14... Resistor, 15
...Cantilever bar vibrator, 16...Positive feedback amplifier, 17...Rectifier, 18;...Reference power supply, 19...DC amplifier . Agent Patent Attorney Kin Omata Figure 2

Claims (1)

【特許請求の範囲】 1、固有の振動数をもつ振動子と、 前記振動子を駆動する振動駆動子と、 前記振動子の振動部と静電結合する電極と、前記電極と
前記振動駆動子の間に接続する正帰還増幅器とを備え、 前記振動子の機械的振動を前記振動子と前記電極の間の
静電容量の変化として取り出すことを特徴とする振幅の
安定な発振器。
[Claims] 1. A vibrator having a unique frequency, a vibration driver for driving the vibrator, an electrode electrostatically coupled to a vibrating portion of the vibrator, and the electrode and the vibration driver and a positive feedback amplifier connected between the oscillator and the oscillator, the oscillator having a stable amplitude, characterized in that the mechanical vibration of the oscillator is extracted as a change in capacitance between the oscillator and the electrode.
JP14795584A 1984-07-17 1984-07-17 Oscillator with stable amplitude Granted JPS6126310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14795584A JPS6126310A (en) 1984-07-17 1984-07-17 Oscillator with stable amplitude

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14795584A JPS6126310A (en) 1984-07-17 1984-07-17 Oscillator with stable amplitude

Publications (2)

Publication Number Publication Date
JPS6126310A true JPS6126310A (en) 1986-02-05
JPH0220162B2 JPH0220162B2 (en) 1990-05-08

Family

ID=15441860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14795584A Granted JPS6126310A (en) 1984-07-17 1984-07-17 Oscillator with stable amplitude

Country Status (1)

Country Link
JP (1) JPS6126310A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006121477A (en) * 2004-10-22 2006-05-11 Ricoh Co Ltd Oscillation device and electronic equipment using the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4419716Y1 (en) * 1965-10-08 1969-08-23
JPS4899176U (en) * 1972-02-22 1973-11-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4419716Y1 (en) * 1965-10-08 1969-08-23
JPS4899176U (en) * 1972-02-22 1973-11-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006121477A (en) * 2004-10-22 2006-05-11 Ricoh Co Ltd Oscillation device and electronic equipment using the same

Also Published As

Publication number Publication date
JPH0220162B2 (en) 1990-05-08

Similar Documents

Publication Publication Date Title
JP3694028B2 (en) Integrated resonant microbeam sensor and transistor oscillator
KR900008300B1 (en) Angular velocity sensor
US6668627B2 (en) Sensor apparatus with magnetically deflected cantilever
JP2501096Y2 (en) A force transducer for a compound vibration beam that is electrostatically excited.
US5212451A (en) Single balanced beam electrostatic voltmeter modulator
US6600323B2 (en) Sensor for non-contacting electrostatic detector
JPH08307199A (en) Capacitive component reduction circuit for electrostatic conversion means and driver and detector for electrostatic conversion means
US5391001A (en) Thermometer for remote temperature measurements
JPS6067866A (en) Electrostatic probe
US6573725B2 (en) Sensor for non-contacting electrostatic detector
US7696749B2 (en) Resonator-based magnetic field sensor
KR100254114B1 (en) Piezoelectric Rotation Sensor for Simultaneous 2-axis Measurement and Its Measuring Circuit
JPWO2004070408A1 (en) Magnetic sensor
US12000909B2 (en) Measuring device for weak and slowly changing magnetic fields, in particular for biomagnetic fields
JPS6126310A (en) Oscillator with stable amplitude
US6006595A (en) Device for vibrating cantilever
JPH0752105B2 (en) Angular velocity sensor
US6316942B1 (en) Electrical potential sensor
JP4129060B2 (en) Method and apparatus for measuring physical quantity
JP3194234B2 (en) Piezoelectric ceramic rectangular plate, method of manufacturing the same, piezoelectric transformer using the piezoelectric ceramic, and oscillation circuit using the piezoelectric transformer
JPH0643929B2 (en) Vibration type force detector
JP2000065877A (en) Electric potential sensor
JPS631547B2 (en)
JPH07104019A (en) Method and device for measuring surface potential
JPH09222328A (en) Angular velocity sensor