JPS61261820A - Manufacturing method for magnetic disk media - Google Patents
Manufacturing method for magnetic disk mediaInfo
- Publication number
- JPS61261820A JPS61261820A JP10438385A JP10438385A JPS61261820A JP S61261820 A JPS61261820 A JP S61261820A JP 10438385 A JP10438385 A JP 10438385A JP 10438385 A JP10438385 A JP 10438385A JP S61261820 A JPS61261820 A JP S61261820A
- Authority
- JP
- Japan
- Prior art keywords
- tape
- magnetic disk
- polishing
- magnetic
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
本発明はコンタクト・スタート・ストップ(C3S)方
式の磁気ディスク装置に用いられる磁気ディスク媒体の
製造方法に関する。The present invention relates to a method of manufacturing a magnetic disk medium used in a contact start/stop (C3S) type magnetic disk device.
磁気ディスク媒体は磁気ディスク装置の記録媒体として
使用されるもので、その磁気ディスクを所定の回転数で
回転させ、磁気ヘッドをその磁気ディスクの回転により
生ずる空気流により所定間隔で浮」二させて磁気ディス
ク媒体に対して記録再生を行う。この欅な磁気ディスク
装置においては、先ず磁気ディスク媒体の回転の開始時
と停止時には磁気ヘッドが磁気ディスク媒体と接触する
というコンタクト・スタート・ストップ方式が多く、ま
た磁気ヘッドが浮上しても磁気ディスクと磁気ヘッドの
浮上間隔は1ミクロン以下と非常に狭いため、磁気ディ
スク媒体の磁性層表面に微小突起があると磁気ヘッドと
の接触による損傷が媒体表面に見られ、媒体表面の高精
度の平滑性と潤滑性が要求されている。
従来、磁気ディスク媒体表面の平滑性と潤滑性を良くす
るために種々の方法がとられている。平滑性に関しては
、磁気ディスク媒体トの微小突起を除去するために、サ
ファイア・ヘッドによるバニッシングが主に行われてい
るが、この方法では磁気ディスク全面を掃引し、微小突
起を除去するには時間がかかりすぎることと、ヘッドが
当たらない所では突起が除去できないこと、またへ、ド
が当たったとしても、磁性層表面に大きい突起や強固な
突起がある場合はヘッドが負けてしまい、除去できない
ことが多い。また潤滑性に関しては、バニッシングされ
た磁気ディスク媒体面に表面潤滑性の良い液体または固
体の潤滑剤を被覆するだけなので、下地の突起の存在が
なお大きく影響する場合が多い。
この様な方法で仕上げ加工した磁気ディスク媒体表面で
はCSS時に磁気ヘッドと突起との衝突により磁気ヘッ
ドに大きな損傷を与えたり、衝突時に生じた破片などが
磁気ディスク媒体自体に損傷を加えたりしてエラーの原
因となっており、磁気ディスク媒体表面のさらに良好な
平滑性および潤滑性を得る製造工程が望まれる。A magnetic disk medium is used as a recording medium in a magnetic disk device.The magnetic disk is rotated at a predetermined number of rotations, and the magnetic head is floated at predetermined intervals by the airflow generated by the rotation of the magnetic disk. Recording and reproduction are performed on a magnetic disk medium. Many of these popular magnetic disk drives use the contact start/stop method in which the magnetic head comes into contact with the magnetic disk medium when the rotation of the magnetic disk medium starts and stops, and even if the magnetic head floats, the magnetic disk Since the flying distance of the magnetic head is very narrow, less than 1 micron, if there are minute protrusions on the surface of the magnetic layer of the magnetic disk medium, damage will be seen on the medium surface due to contact with the magnetic head. Requires flexibility and lubricity. Conventionally, various methods have been used to improve the smoothness and lubricity of the surface of a magnetic disk medium. Regarding smoothness, burnishing using a sapphire head is mainly used to remove minute protrusions on magnetic disk media, but this method sweeps the entire surface of the magnetic disk, and it takes time to remove minute protrusions. If there are large or strong protrusions on the surface of the magnetic layer, the head will be defeated and the protrusions cannot be removed even if the head hits the magnetic layer. There are many things. Regarding lubricity, since the burnished magnetic disk medium surface is simply coated with a liquid or solid lubricant with good surface lubricity, the presence of protrusions on the underlying surface often has a significant effect. When the surface of a magnetic disk medium is finished using this method, collision between the magnetic head and protrusions during CSS may cause major damage to the magnetic head, and debris generated during the collision may cause damage to the magnetic disk medium itself. A manufacturing process that provides better smoothness and lubricity of the magnetic disk media surface is desired.
本発明の目的は磁気ディスク媒体の磁性層表面に存在す
る微小突起を効率良く除去し、しかも被覆された表面保
護皮膜の膜厚を適正な値に調整しながら、平滑性、潤滑
性を有する表面を形成する磁気ディスクの製造方法を提
供することにある。The purpose of the present invention is to efficiently remove minute protrusions existing on the surface of the magnetic layer of a magnetic disk medium, and to create a surface that has smoothness and lubricity while adjusting the thickness of the surface protective film to an appropriate value. An object of the present invention is to provide a method for manufacturing a magnetic disk that forms a magnetic disk.
本発明は表面を保護潤滑層で被覆された磁気ディスク媒
体の製造工程において、その磁気ディスク媒体の基体上
に形成した磁性層表面に存在する微小突起のみをバニッ
シング用テープを用いて除去した後保護潤滑層を形成し
、次に必要によりポリシング用テープを用いて保護潤滑
層の所定の膜厚まで研磨して平滑性を得た後、1600
0より粗い砥粒を持つポリシング用テープでその最表面
に凹凸を付け、磁気ディスク媒体と磁気ヘッドとの接触
摺動面積を少なくさせて摩擦係数を小さく保つことによ
ってさらに良い潤滑性を得ようとするものである。In the manufacturing process of a magnetic disk medium whose surface is coated with a protective lubricant layer, the present invention provides protection after removing only the minute protrusions present on the surface of the magnetic layer formed on the base of the magnetic disk medium using a burnishing tape. After forming a lubricant layer and polishing the protective lubricant layer to a predetermined thickness using a polishing tape if necessary to obtain smoothness,
Using a polishing tape with abrasive grains coarser than 0, the outermost surface of the polishing tape is roughened to reduce the contact sliding area between the magnetic disk medium and the magnetic head, thereby keeping the coefficient of friction small, thereby obtaining even better lubricity. It is something to do.
以下、本発明の実施例を図面に基づいて詳細に説明する
。外径13ONφ、内径40鶴φのアルミニウム基板に
厚さ約20ミクロンのニッケルりんめっき皮膜を形成し
、この皮膜を表面研磨し、次に平均あらさ0.05ミク
ロン以下に鏡面研摩した。このニッケルリんめっき膜の
上に厚さ0.05ミクロンのCr#ヲ形成後、厚さ0.
05ミクロンのコバルト・ニッケル磁性膜を形成した。
次に第1図に示す構造のテープ研磨機を用いて表面を加
工した。磁気ディスク媒体の円板1をターンテーブル2
に真空力によりチャックし回転させる。コンタクトゴム
ローラ3はローラアーム4を介してエアシリンダ5に直
結されており、このエアシリンダ5によってコンタクト
ゴムローラ3を介してポリシングテープ(またはバニ・
7シングテーブ)6と円板1との間に力を加え、実際に
は30M[のポリシングチ−16を円板1に加圧する。
またローラアーム4には圧力ゲージが貼付されており、
加圧力を常時検出しながら一定に保持する機構となって
いる。テープ6は制動リール7よりテンションローラ8
.ガイドローラ9を介してコンタクトゴムローラ3に接
し、さらにガイFC+−ラ9.テンションローラ8を介
してテープ走行ローラ10を経て巻き取りリール11に
巻き取られて、コンタクトゴムローラ3を通過する時に
円板1の表面を仕上げ加工する。テープの駆動はテープ
走行ローラ10によって行われ、このテープ走行ローラ
lOの回転数を変えることにより、走行スピードを変え
ることができる。加工時には流出管12がら研削液が加
工面に供給される。
円板1.ターンテーブル2を除いた機構部は一体になっ
ており、全体が上下でき、加圧力を解除したい時には、
この機構部が上へ移動すれば、コンタクトゴムローラ3
はフリー伏態になる。また、この機構部全体はポリシン
グ中、円板面に平行に移動(振動)でき、ポリシング中
にこの動作も加えることで媒体表面の微小突起を有効に
除去できる。
このようなポリシング装置を用いて−AI16000の
テープを使用しターンテーブルを30Orpmで回転し
て媒体の磁性膜表面の微小突起を除去するテープバニッ
シングを行った。テープバニッシング工程で、砥粒粗さ
をWAI6000より粗くすると媒体表面に大きい摺動
痕がつくため、116000以上でやることが望ましい
。しかし又あまり細がくすると、媒体表面の微小突起の
除去が効率的でなくなる。次にシリコン系固体潤滑材を
溶剤を用いて塗布、焼成して保護潤滑層を形成後、第1
図の装置を用いてWA16000〜8000のテープを
使用し、300rpmでテープポリシングを行い、保護
潤滑層表面の突起の除去と膜厚の調整を行った。この場
合はサブミクロンオーダの研摩のため、荷重をより軽く
すればテープバニッシングと同し砥粒粗さで十分調整で
きる。もちろん、保護潤滑層が塗布により所定の膜厚に
なっていればポリシングの必要はない。さらに最終仕上
げとして−AI4000のテープを使用し1100rp
でテープポリシングを行い、表面に凹凸を付与した。こ
れによって表面での摩擦係数や吸着力を低下させること
ができる。例えば凹凸を付ける前後で摩擦係数が0.3
〜0.4から0.15〜0.25へ低下した。
ポリシング時の効果をヘッドに取り付けたAE(アコー
スチック・エミッション)センサの出力によって評価し
た結果を第2図、第3図に示す。
第2図は保護潤滑層形成後、第3図は最終仕上げ後のA
Eセンサ出力を示し、浮上が十分でないときには表面の
突起とヘッドの衝突により出力が生ずる。この結果から
、最終仕上げにより回転速度が遅くとも浮上性が良いこ
とがわかる。しかしこのような最終仕上げの効果は、磁
気ディスク媒体表面の微小突起の除去をテープバニッシ
ング以外の方法、例えばサファイア・ヘッドによるバニ
ッシングで行った場合には見られなかった。Embodiments of the present invention will be described in detail below with reference to the drawings. A nickel phosphorus plating film with a thickness of about 20 microns was formed on an aluminum substrate having an outer diameter of 13 ON φ and an inner diameter of 40 φ, the surface of this film was polished, and then mirror-polished to an average roughness of 0.05 μm or less. After forming 0.05 micron thick Cr# on this nickel phosphorus plating film, 0.05 micron thick Cr# was formed.
A cobalt-nickel magnetic film of 0.05 micron was formed. Next, the surface was processed using a tape polisher having the structure shown in FIG. A magnetic disk medium disc 1 is placed on a turntable 2.
It is chucked and rotated by vacuum force. The contact rubber roller 3 is directly connected to an air cylinder 5 via a roller arm 4, and the air cylinder 5 applies a polishing tape (or a vane tape) via the contact rubber roller 3.
A force is applied between the polishing table (7) 6 and the disc 1, and in reality, a polishing chip 16 of 30M is pressed against the disc 1. In addition, a pressure gauge is attached to the roller arm 4.
It has a mechanism that constantly detects the pressurizing force and maintains it at a constant level. The tape 6 is passed from the brake reel 7 to the tension roller 8.
.. The contact rubber roller 3 is contacted via the guide roller 9, and the guy FC+-ra 9. The tape is wound onto a take-up reel 11 via a tension roller 8, a tape running roller 10, and the surface of the disk 1 is finished when it passes a contact rubber roller 3. The tape is driven by a tape running roller 10, and the running speed can be changed by changing the number of rotations of this tape running roller 10. During machining, grinding fluid is supplied to the machining surface through the outflow pipe 12. Disc 1. The mechanical parts except the turntable 2 are integrated, and the whole can be moved up and down, and when you want to release the pressure,
If this mechanism moves upward, contact rubber roller 3
becomes free prone. Furthermore, this entire mechanism can move (vibrate) parallel to the disk surface during polishing, and by adding this movement during polishing, it is possible to effectively remove minute protrusions on the surface of the medium. Tape burnishing was performed using such a polishing apparatus to remove minute protrusions on the surface of the magnetic film of the medium by using a tape of -AI 16000 and rotating the turntable at 30 rpm. In the tape burnishing process, if the abrasive grain roughness is made rougher than WAI6000, large sliding marks will be created on the surface of the medium, so it is desirable to set the abrasive grain roughness to 116000 or more. However, if the medium is made too thin, the removal of minute protrusions on the surface of the medium becomes inefficient. Next, a silicon-based solid lubricant is applied using a solvent and fired to form a protective lubricant layer.
Tape polishing was performed at 300 rpm using the apparatus shown in the figure, using a tape of WA 16,000 to 8,000, to remove protrusions on the surface of the protective lubricant layer and adjust the film thickness. In this case, since the polishing is on the submicron order, if the load is made lighter, the abrasive grain roughness can be adjusted to the same level as tape burnishing. Of course, polishing is not necessary if the protective lubricant layer has a predetermined thickness by coating. Furthermore, as a final finish - using AI4000 tape, 1100rp
Tape polishing was performed to give the surface an uneven surface. This makes it possible to reduce the coefficient of friction and adsorption force on the surface. For example, the coefficient of friction is 0.3 before and after adding unevenness.
It decreased from ~0.4 to 0.15-0.25. FIGS. 2 and 3 show the results of evaluating the effectiveness of polishing using the output of an AE (acoustic emission) sensor attached to the head. Figure 2 shows A after forming the protective lubricant layer, and Figure 3 shows A after final finishing.
It shows the E sensor output, and when the flying height is insufficient, an output is generated due to the collision between the head and the protrusion on the surface. From this result, it can be seen that the final finish provides good flying performance even at low rotational speeds. However, such a final finishing effect was not observed when microprotrusions on the surface of a magnetic disk medium were removed by a method other than tape burnishing, such as burnishing using a sapphire head.
本発明によれば、磁気ディスク媒体の磁性層表面の微小
突起の除去、媒体表面を被覆する保護潤滑皮膜の必要に
より行う膜厚の調整、さらに摩擦係数低減のための最表
面凹凸の形成をすべてテープポリシング装置によって行
うもので、媒体表面の微小突起の確実な除去、保護潤滑
層の厚さの微妙な調整、細かい凹凸を有する最表面の形
成が可能になり、表面の平滑性および潤滑性の優れた磁
気ディスク媒体を得ることができる。According to the present invention, the removal of minute protrusions on the surface of the magnetic layer of a magnetic disk medium, the adjustment of the film thickness according to the necessity of a protective lubricating film covering the surface of the medium, and the formation of irregularities on the outermost surface to reduce the coefficient of friction can all be performed. This is done using a tape polishing device, which makes it possible to reliably remove minute protrusions on the media surface, finely adjust the thickness of the protective lubricant layer, and form an outermost surface with fine irregularities, improving surface smoothness and lubricity. An excellent magnetic disk medium can be obtained.
第1図は本発明の実施例に用いるテープポリシング装置
の正面図、第2図、第3図は回転磁気ディスク媒体上に
配置されたヘッドに取り付けたAEセンサの出力と回転
速度の関係線図で、第2図は本発明の実施例の保護潤滑
層形成後、第3図は最終仕上げ後の測定結果を示す。
1:媒体円板、2:ターンテーブル、3:コンタクトゴ
ムローラ、5:エアシリンダ、6:ポリシングテープ(
バニッシングテープ)。
手続補正曹自鋤
昭和60年 8月13日
1、事件の表示 特願昭、<0 10k、、rδe
3、補正をする者
事件との関係 出願人
4、代 理 人
住 所 川崎市川崎区田辺新田1番1号7・補正の
対象 明細どの発明の詳細な説明の項補正の内容
■、明細書第4頁第19行目にIO,05Jとあるを[
゛。
0.25Jと訂正する。FIG. 1 is a front view of a tape polishing apparatus used in an embodiment of the present invention, and FIGS. 2 and 3 are relationship diagrams between the output of an AE sensor attached to a head placed on a rotating magnetic disk medium and rotational speed. FIG. 2 shows the measurement results after the protective lubricant layer was formed in the example of the present invention, and FIG. 3 shows the measurement results after the final finishing. 1: Media disk, 2: Turntable, 3: Contact rubber roller, 5: Air cylinder, 6: Polishing tape (
Vanishing tape). Procedural Amendment Sozi Paku August 13, 1985 1, Case Indication Tokugan Sho, <0 10k,, rδe
3. Relationship with the case of the person making the amendment Applicant 4. Agent Address: 1-1-7 Tanabeshinden, Kawasaki-ku, Kawasaki City Subject of amendment: Detailed explanation of the invention in the specification Contents of the amendment■, Specification On page 4, line 19 of the book, it says IO, 05J [
゛. Correct it to 0.25J.
Claims (1)
突起のみをバニッシング用テープを用いて除去したのち
、保護潤滑層を形成し、次に必要によりポリシング用テ
ープで保護潤滑層の所定の厚さまで研摩し、次いで60
00より粗い砥粒を持つポリシング用テープで最表面に
凹凸を付けることを特徴とする磁気ディスク媒体の製造
方法。1) After removing only the minute protrusions existing on the surface of the magnetic layer formed on the non-magnetic substrate using a vanishing tape, a protective lubricant layer is formed, and then, if necessary, polishing tape is used to remove the predetermined portions of the protective lubricant layer. Sand to thickness, then 60
1. A method for manufacturing a magnetic disk medium, characterized in that the outermost surface is made uneven with a polishing tape having abrasive grains coarser than 0.00.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10438385A JPS61261820A (en) | 1985-05-16 | 1985-05-16 | Manufacturing method for magnetic disk media |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10438385A JPS61261820A (en) | 1985-05-16 | 1985-05-16 | Manufacturing method for magnetic disk media |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61261820A true JPS61261820A (en) | 1986-11-19 |
Family
ID=14379235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10438385A Pending JPS61261820A (en) | 1985-05-16 | 1985-05-16 | Manufacturing method for magnetic disk media |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61261820A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02236820A (en) * | 1989-03-09 | 1990-09-19 | Fuji Electric Co Ltd | Production of magnetic recording medium |
JPH03160618A (en) * | 1989-11-20 | 1991-07-10 | Fuji Electric Co Ltd | Method for manufacturing magnetic recording media |
US5070425A (en) * | 1988-04-25 | 1991-12-03 | Mitsubishi Denki Kabushiki Kaisha | Surface structure of a magnetic disk |
US7276262B2 (en) | 2003-09-30 | 2007-10-02 | Hitachi Global Storage Technologies Netherlands B.V. | Control of process timing during manufacturing of magnetic thin film disks |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS581835A (en) * | 1981-06-26 | 1983-01-07 | Fujitsu Ltd | Control tool for surface lubricant of magnetic disk |
-
1985
- 1985-05-16 JP JP10438385A patent/JPS61261820A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS581835A (en) * | 1981-06-26 | 1983-01-07 | Fujitsu Ltd | Control tool for surface lubricant of magnetic disk |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5070425A (en) * | 1988-04-25 | 1991-12-03 | Mitsubishi Denki Kabushiki Kaisha | Surface structure of a magnetic disk |
JPH02236820A (en) * | 1989-03-09 | 1990-09-19 | Fuji Electric Co Ltd | Production of magnetic recording medium |
JPH03160618A (en) * | 1989-11-20 | 1991-07-10 | Fuji Electric Co Ltd | Method for manufacturing magnetic recording media |
US7276262B2 (en) | 2003-09-30 | 2007-10-02 | Hitachi Global Storage Technologies Netherlands B.V. | Control of process timing during manufacturing of magnetic thin film disks |
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