JPS61239605A - Cylindrical magnetic field device for excitation of diametral orientation - Google Patents

Abstract

PURPOSE:To prevent the leakage of magnetic field to outside as well as to contrive miniaturization and light weight of a magnetic field device by a method wherein an outer yoke and an excitation coil are built-in in a pair of electromagnet semiconductors, and these electromagnet semiconductors are coupled on the surface of diameter. CONSTITUTION:End part yokes 3 and 4 are adhered to the upper and the lower parts of a pair of hollow semicylindrical outer barrel-shaped yokes 1 and 2, magnetic pole pieces 5 and 6 are incorporated on the inner surface of the yokes 1 and 2. Special shaped excitation coils 7 and 8 are fitted in said incorporated magnetic pole pieces 5 and 6, and they are placed in the inner space of the yokes 1 and 2 respectively. The rectilinear parts 7 and 8 with the length corresponding to the height of the yokes 1 and 2 and the circular parts 72 and 82 with the outer diameter corresponding to the inner diameter of the yokes 1 and 2 are formed. Then, a pair of electromagnetic semiconductors 101 and 102 are constituted, and they are coupled to the diameter surface respectively, thereby enabling to prevent the leakage of magnetic flux to outside and to obtain a small-sized and light-weighted magnetic field device.

Description

[Detailed description of the invention] LIJ2! The present invention relates to a magnetic field device for diametrical excitation having a cylindrical form.

Conventionally, for example, a magnetic field device installed on the outer periphery of a vacuum chamber containing a rotary circular furnace of a silicon single crystal pulling device for silicon wafers has been used to excite a defined spatial region with direct current. As shown in FIG. 5 of the accompanying drawings, an excitation coil 31 at one elbow, a pair of iron cores 3Z disposed around the excitation coil 31, and a yoke 33 interconnecting these iron cores 32. is formed from, which results in
The magnetic flux induced by the excitation coil 31 is guided to the iron core 32 by the yoke 33, and the defined space R is spread between the magnetic pole pieces 32.
．． a counter electrode electromagnet device 3o which is sandwiched and excited by 322;
As shown in FIG. 6, it is typified by a so-called air-core coil type electromagnet device 40 that excites the internal space R of the fill 41 itself using a solenoid coil 40.

However, each of these typical conventional methods or devices for DC excitation of a space has the following deficiencies. Namely, the former S In the counter electrode electromagnet device 30, compared to the excitation space R, the excitation coil 31 and the yoke section 32 arranged around the periphery are bulky, and the installation space area and weight of the device are also large. In the latter air-core coil type electromagnet device 4o, the excitation direction is limited to the winding axis direction of the coil 41, and a yoke for guiding and concentrating magnetic flux cannot be used as the counter electrode surface. The structure seals the excitation space 8 and the 1st 6, which limits its utility value.
The drawback is that it consumes a lot of power.

The present invention has a new and improved cylindrical form which overcomes the disadvantages of the conventional methods and apparatuses, as well as having the features and advantages of the conventional ones, and whose inner diameter is cylindrical. The object is to obtain a magnetic field device capable of exciting a space in the direction of the diameter of a cylinder.

In order to achieve this objective, the magnetic field HfM according to the invention for α and Cylindrical outer yoke 1, 2, each outer yoke], 2
A pair of magnetic pole pieces 5, 6 each assembled in one diameter space, and inside the inner diameter space of each outer cylinder yoke 1, 2,
1 each formed to receive therein a magnetic pole piece 5.6 housed therein and assembled on its inner diameter surface.
The present invention is characterized by a magnetic field device for diametrical excitation having a cylindrical shape, in which a pair of electromagnetic halves constituted by a pair of excitation coils 7.8 are joined to each other in their diametrical planes.

Since the device of the present invention has the above-described configuration, the outer cylindrical yokes 1 and 2 of each electromagnet half are diametrically opposed to each other and fixed together. A cylindrical space R extending in the axial direction is formed in the center of these outer cylinder yokes 1 and 2, and the excitation coil 7.8 installed inside this space R is exactly The magnetic pole pieces 5, 6 and the outer cylinder yokes 1, 2 work together to energize the excitation coils 7, 8 as if they were one coil. Magnetic flux is generated in a direction perpendicular to the central axis.

Hereinafter, the present invention will be explained in detail based on FIGS. 1 and 2 of the accompanying drawings showing an embodiment thereof, and FIG. 4 showing an example of its application.

As shown in FIG. 1, the device of the present invention first includes an outer cylindrical yoke 1.2 having a hollow semi-cylindrical shape, and the upper and lower ends of each outer cylindrical yoke 1, 2, respectively. The upper and lower yokes 3゜4 have a semicircular shape and are fixed to the inner surfaces of the outer cylinder yokes 1 and 2, respectively, and the 4f1i cross-sectional shapes are arcuate. , a pair of magnetic pole pieces 5.6 having a certain thickness and a certain height, each housed inside the inner diameter space of the outer yoke 1, 2.
It consists of a pair of excitation coils 7.8 which have a special shape so that they can be bent and fitted into the magnetic pole pieces 5 and 6 assembled on the inner diameter surfaces of these coils.

Here, the shape of each excitation coil 7.8 will be explained in more detail as follows. That is, as shown in Figure 1,
Each excitation coil 7.8 is arranged axially at its end in the diametrical plane of each yoke 1,2, at the height of the cylindrical yoke 1.2. The straight part 7□81 of the IN having a corresponding length and the outer cylinder yoke 1, 2 which connects each end thereof, respectively, have an outer diameter corresponding to the inner diameter. It consists of a pair of semicircular annular portions 7□I8□, and these straight portions 7. ．． 8. The magnetic pole piece 5 is placed in the space surrounded by the semicircular annular portions 7□ and 82.
．． 6 can be fitted into each. In addition, each excitation coil 7.8 is connected to the
It is designed to be energized via i9, and each 1-dore M
9 is an open IT II drilled at the bottom of each outer cylinder yoke 1 and 2.
,,2. It is designed to be taken outside.

In this way, each tube yoke 1.2 consists of an outer cylindrical yoke 1.2, in which a magnetic pole piece 5.6 is assembled on the inner diameter surface, and an excitation coil 7.8 is accommodated in the inner diameter space. Electromagnet half body 10. , 102 are joined to each other in the diameter plane of each outer cylinder yoke 1 and 2 as shown in FIG. The excitation coils 7.8 installed inside each of the excitation coils 7.8 are closely attached to each other as if they were one coil, and each excitation coil 7.8 has a cylindrical shape with a columnar space R. When the coil 7.8 is energized (the direction of the current is indicated by the arrow C), the axis of the coil 7.8 generates magnetic flux in a direction that coincides with the diameter direction of the cylindrical excitation space R. become.

The device of the present invention having such a configuration can be used, for example, as a magnetic field device used in the single crystal production process for silicon wafers. From the beginning, we provide a small and lightweight device for DC excitation of the internal core (NCZ method *),
Furthermore, the magnetic flux leaking around the device of the present invention can be suppressed to a minimum, thereby reducing the impact on adjacent equipment (Note 2).
c Field Applied Czochrals
ki method).

Furthermore, the device of the present invention itself consists of two electromagnetic halves 10. .

Since it can be divided into 102 parts, as shown in FIG.
The device of the present invention can be installed extremely easily.

Since the present invention has the above-described structure and operation, it is clear that the present invention is outstanding because it exhibits the following excellent effects.

That is, 1. In the excitation coil in the device of the present invention, two excitation coils can be brought into close contact with each other as if they were just one coil, similar to the air-core coil magnetic field device, and the excitation space can be arranged coaxially. 2.4 It has a cylindrical excitation space whose orientation is changed by 90" with respect to the axial direction of the magnetic coil. 3. The shape of the outer cylinder yoke and the excitation coil are arranged without waste in the cylindrical excitation space, The overall size and weight can be reduced. 4. The outer cylinder yoke has internal magnetic pole pieces on its inner surface, and can effectively converge the magnetic flux induced by the excitation coil. It is lightweight by preventing leakage of magnetic flux to the outside, and since both the outer cylinder yoke and the excitation coil are divided into two in the diameter direction, assembly and disassembly are extremely easy.

[Brief explanation of drawings]

FIG. 1 is an exploded perspective view showing one embodiment of the present invention, and FIG. 2 is a perspective view showing the assembled state.
II′! J3[11"$i"1i"y/jK'!ei
t[#1flffl, Figure 14 is a partially longitudinal front view showing an example in which the apparatus of the present invention shown in Figures 1 and 2 is installed in a single crystal pulling apparatus, and Figures 5 and 6 are respectively FIG. 2 is a vertical cross-sectional view showing two examples of electromagnetic devices for direct current excitation. 1.2... Outer cylinder yoke, 3.4... End yoke, 5, 6
...Magnetic pole piece, 7°8...Exciting coil, 7+ +8+
...Straight portion, 72,8□...Circular portion, 10...
・Electromagnetic device, 10. ．． 102...half electromagnet. Patent applicant Mitsubishi Steel Magnetic Materials Co., Ltd. Figure 3 Figure 4

Claims (1)

[Scope of Claims] 1. A magnetic field device for diametrical excitation having a cylindrical form with two poles facing each other, including a pair of semi-cylindrical outer yoke and an inner diameter surface of each outer yoke. a pair of magnetic pole pieces configured to be assembled into the respective outer cylinder yokes, and a pair of excitation coils respectively housed within the inner diameter surface space of each outer cylinder yoke and formed so as to fit the magnetic pole pieces therein. Each outer cylinder yoke forms an electromagnet half together with the magnetic pole piece and excitation coil built inside them, and these electromagnet halves are joined to each other diametrically to become an integral body. A magnetic field device for diametrical excitation having a cylindrical shape, characterized in that: 2. A magnetic field device for diametrical excitation having a cylindrical form as claimed in claim 1, wherein semicircular yokes are fixed to the upper and lower ends of each outer cylinder yoke. 3. Each excitation coil has a linear portion extending in the axial direction at each end within the diameter plane of the outer tube yoke and having a length approximately corresponding to the height of the outer tube yoke, and this linear portion. and a pair of semicircular annular portions each having an outer diameter approximately corresponding to the inner diameter of the outer cylinder yoke, the ends of which are connected to each other, and the outer cylinder yoke has an outer diameter substantially corresponding to the inner diameter of the outer cylinder yoke. A magnetic field device for diametrical excitation having a cylindrical form.