JPS61214969A - Method for polishing mirror face of yag laser rod - Google Patents

Abstract

PURPOSE:To obtain a high speed machining and efficient YAG laser rod without disturbance by supplying phosphoric acid machining liquid to a polish face of a tip of the YAG laser rod and radiating laser rays from the rear end of the rod. CONSTITUTION:A YAG laser rod 1 is contacted to an upper face of a surface plate 3 and fixed it vertically with a polish face by a jig 2. The jig 2 is rotated to the direction of an arrow mark B by driving from outside by a roller 5 fixed. Laser rays of wavelength of 1.06mum are radiated from a laser generating device fixed on an upper part of the YAG laser rod in the axial direction to rotate the surface plate 3, and phosphoric acid liquid is supplied from outside. As single crystal constituting the YAG laser rod 1 does not absorb rays of the same wavelength, a contacting portion of the polish face and the surface plate 3 is heated by laser rays 7. Then, phosphoric acid is also heated and reaction of the single crystal of YAG is chemically promoted.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is a method of polishing the end face of a rod by heating it with laser light irradiation.
(YAG) laser rod mirror polishing method.

[Conventional technology]

The end face of an IJ aluminum garnet (YAG) laser rod used to generate laser light is polished into a mirror finish to eliminate disturbances in the laser light.

Conventionally, this mirror polishing process has been performed using a mechanochemical polishing method using a tin surface plate and diamond.

[Problem that the invention seeks to solve]

However, conventional mechanical polishing methods have the drawbacks of residual processing distortion and slow processing speed due to mechanical processing. Further, in the conventional mechanochemical polishing method, a phosphoric acid solution at 180° C. is used as an etching solution, so the jig and container must be selected from those that will not be damaged by hot acid.

Another disadvantage is that processing accuracy deteriorates due to softening of the adhesive at the laser rod bonding part.

The following margin [Means for solving the problem] The present invention eliminates such drawbacks of the conventional method by bringing the polished surface of the tip of the YAG laser rod into contact with the top surface of a rotating surface plate, and applying a phosphoric acid processing liquid onto the surface plate from the outside. A YAG laser rod is mirror-polished by supplying a YAG laser rod with a laser beam having a wavelength of about 1.06 μm and irradiating it through the crystal from the rear end of the rod.

[Effect]

Mechanical polishing and chemical polishing are performed by heating only the polished portion to be processed by laser light passing through the YAG laser rod and using supplied phosphoric acid as a hot acid.

〔Example〕

An embodiment of the method for mirror polishing a YAG laser rod of the present invention is shown in FIG. 1, in which a surface plate 3 made of tin material is rotated in the direction of arrow A about an axis 4 by a motor (not shown). . The YAG laser rod 1 is fixed by a jig 2 in contact with the upper surface of the surface plate 3 perpendicularly to the υ polishing surface. The jig 2 is rotated in the direction of arrow B by an external drive by a fixed roller 5. A wavelength of 1.06 is emitted from the laser generator 6 fixed above the YAG laser rod in the axial direction.
When the laser beam 7 of approximately μm is irradiated, the surface plate 3 is rotated, and a phosphoric acid solution is supplied from the outside, the single crystal that makes up 1 ft of YAG laser rod does not absorb light of the same wavelength, so the laser beam 7 is transmitted to the YAG laser rod 1. Polished surface and surface plate 3
heats the contact area. Therefore, phosphoric acid is also heated and YA
The reaction of the G single crystal is chemically promoted.

The machining speed of the conventional mechanical polishing method using tin and diamond abrasive grains was 1 μm/hour, and latent scratches were produced when etching the machined surface, whereas the method of the present invention produced latent scratches at a machining speed of 5 μm/hour. It was possible to obtain a mirror finish without any disturbance.

〔Effect of the invention〕

As described above, according to the present invention, a high-quality YAG laser rod 1 can be obtained which is faster in processing speed than in conventional polishing methods, and is more efficient and free from disturbance.

[Brief explanation of the drawing]

FIG. 1 is an external perspective view for explaining a processing device used in an embodiment of the method for mirror polishing a YAG laser rod of the present invention. 1: Laser rod, 2: Jig, 3: Surface plate. 4: Rotating shaft, 5: Roller, 6: Laser generator. 7: Laser light.

Claims (1)

[Claims] 1. In polishing the tip of a YAG laser rod, irradiating laser light 7 from the rear end of the rod toward the polished surface while supplying a phosphoric acid-based processing liquid to the polished surface of the rod. A method for mirror polishing a YAG laser rod, which is characterized by: 2. The method for mirror polishing a YAG laser rod according to claim 1, wherein the wavelength of the laser beam is 1.06 μm.