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JPS6120823A - Electronic balance - Google Patents

Electronic balance

Info

Publication number
JPS6120823A
JPS6120823A JP14151184A JP14151184A JPS6120823A JP S6120823 A JPS6120823 A JP S6120823A JP 14151184 A JP14151184 A JP 14151184A JP 14151184 A JP14151184 A JP 14151184A JP S6120823 A JPS6120823 A JP S6120823A
Authority
JP
Japan
Prior art keywords
movable part
mass
frequency
transducer
electroacoustic transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14151184A
Other languages
Japanese (ja)
Other versions
JPS6334410B2 (en
Inventor
Masaji Okawa
大川 正次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Gijutsu Kaihatsu Co Ltd
Original Assignee
Kokusai Gijutsu Kaihatsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Gijutsu Kaihatsu Co Ltd filed Critical Kokusai Gijutsu Kaihatsu Co Ltd
Priority to JP14151184A priority Critical patent/JPS6120823A/en
Publication of JPS6120823A publication Critical patent/JPS6120823A/en
Publication of JPS6334410B2 publication Critical patent/JPS6334410B2/ja
Granted legal-status Critical Current

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  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

PURPOSE:To measure the absolute value of mass by supporting the movable part of the balance on a housing through two diaphragm, and constituting a dynamic type electro-acoustic transducer at one terminal of the movable part and an electrostatic type electro-acoustic transducer at the other terminal. CONSTITUTION:The movable part A is supported on the housing 6 through two diaphragms 7. The circular plane D of a movable part body 3 and the circular plane F of a fixed electrode 11 constitute a capacitor and the DC voltage of a battery B is applied to constitute the electrostatic type electr-optic transducer H. When a mechanical or electric shock is applied to the movable part A or electric circuit, the electric output of the transducer H is amplified 15. The circuit oscillates when the phase difference between the input and output of the amplifier 15 is selected properly. The mass (m) of a body 1 to be measured is calculated from m=M(f0<2>/fm<2>-1), where f0 is the resonance frequency of this oscillation system, fm is the oscillation frequency when the body 1 to be meas- ured is placed on a measuring pan 2, and M is the substantial mass of the movable part A. For the purpose, the mass M and frequency f0 are measured previously, and then the mass (m) is calculated by measuring the frequency fm.

Description

【発明の詳細な説明】 本発明は電子秤に関するものである。その特徴とすると
ころは秤の可動部を2枚のダイヤフラムで筐体に支持さ
せ可動部の一端に可動線輪を捲いて動電型電気音響変換
器を、他端に平面電極を設けて静電型電気音響変換器を
構成させ、該静電型電気音響変換器の電気的出力を増巾
して該動電型電気音響変換器の可動線輪に供給してなち
発振回路を構成させたことにある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electronic scale. The feature is that the movable part of the scale is supported by two diaphragms in the housing, a movable coil is wound around one end of the movable part to create an electrodynamic electroacoustic transducer, and a flat electrode is provided at the other end to create a static electrostatic transducer. configuring an electrostatic type electroacoustic transducer, and amplifying the electrical output of the electrostatic type electroacoustic transducer and supplying it to the movable wire of the electrodynamic type electroacoustic transducer, that is, configuring an oscillation circuit. That's true.

従来の秤、!lllは天秤を除いて、すべて被測定物体
に働く地球の引力を測定し、測定地の重力の加速度で除
してその質量を算出している。従って測定する場所が変
ると、異なる測定値となる。
Conventional scales,! With the exception of balances, all instruments measure the earth's gravitational pull on an object and calculate its mass by dividing it by the acceleration of gravity at the measurement location. Therefore, if the measurement location changes, the measured value will be different.

東京天文台編纂の理科年表によれば赤道における標準重
力は978.031845586a1、極におけるそれ
は98i21772792galで0.53%の相異が
ある。従って0.1%の精度がある秤りで測定しても同
程度の誤差があることを念頭に入れておく必要がある。
According to the Science Chronology compiled by the Tokyo Astronomical Observatory, the standard gravity at the equator is 978.031845586a1, and that at the poles is 98i21772792gal, a difference of 0.53%. Therefore, it must be kept in mind that even if a measurement is made using a scale with an accuracy of 0.1%, there will be a similar amount of error.

又被測定物体に働く空気による浮力も考慮しなければな
らない。今空気の密度’fK 0 、0012 g//
cm5とし比重1.2のプラスチックスの質量を測定す
る場合、0.1係の浮力を受けていることになる。又こ
のことは天秤で測定する場合にも、被測定物の比重と分
銅の比重が異なる場合には空気の浮力による補正をしな
ければならない。
Also, the buoyant force of the air acting on the object to be measured must be taken into consideration. Now the density of air 'fK 0, 0012 g//
When measuring the mass of plastic with a specific gravity of 1.2 cm5, it is subject to a buoyancy force of 0.1. Also, when measuring with a balance, if the specific gravity of the object to be measured and the specific gravity of the weight are different, correction must be made based on the buoyancy of air.

本発明は上記欠点を除去したもので、以下図面について
詳細に説明する。第1図は本発明の動作原理を説明する
ための横断面図である。図において/は被測定物、2は
受皿、3は可動部本体、グはボビン、!は可動線輪で、
2.3.4を及び夕は一体となって可動する。2,3.
4を及び夕が一体になったものを可動部Aと呼ぶ。乙は
筐体、7はダイヤフラムで図に示すように2枚で可動部
Aが筐体にに支持されている。tは永久磁石でN、 E
tばその磁極である。り及び/θは軟磁性材料で出来た
ボール及びヨークで笥体乙に固着される。!。
The present invention eliminates the above drawbacks and will be described in detail below with reference to the drawings. FIG. 1 is a cross-sectional view for explaining the operating principle of the present invention. In the figure, / is the object to be measured, 2 is the saucer, 3 is the main body of the movable part, and g is the bobbin. is a movable ring,
2.3.4 and Yu can move as one. 2, 3.
The part in which 4 and 4 are integrated is called the movable part A. B is a housing, and 7 is a diaphragm.As shown in the figure, the movable part A is supported by the housing. t is a permanent magnet, N, E
t is the magnetic pole. The holes and /θ are fixed to the enclosure with a ball and yoke made of soft magnetic material. ! .

?、9及び/θで動電型電気音響変換器Cが構成される
。//は固定電極、/コは絶縁ガラスで固定電極//ヲ
固着する。可動部本体3と固定電極//の対向面は共に
円形平面り及びFになっていてその空隙長G&iスペー
サ/3の厚さを調整して所要の値にすることが出来る。
? , 9 and /θ constitute an electrodynamic electroacoustic transducer C. // is a fixed electrode, /ko is a fixed electrode that is fixed with insulating glass. The facing surfaces of the movable part main body 3 and the fixed electrode // are both circular planes and F, and the thickness of the gap length G&i spacer /3 can be adjusted to a desired value.

/4tは台である。/4t is the platform.

第2図は本発明電子秤の電気的接続を示す回路図の一実
施例でBは電池、Rは高抵抗、/!は増巾器で其の他の
記号は第1図と同様である。
Figure 2 is an example of a circuit diagram showing the electrical connections of the electronic scale of the present invention, where B is a battery, R is a high resistance, /! is an amplifier, and the other symbols are the same as in FIG.

第1図で可動部Aは2枚のダイヤフラム2によって筐体
乙に図に示すように支持きれているので図面で上下方向
には可動の自由度を持っているが横振れは起らない。可
動部Aからみたダイヤフラム7のステイフネスを6、可
動部Aの実効質量をMとすると、この振動系の共振周波
数foは71:ヲ円周率として(1)式の通りである。
In FIG. 1, the movable part A is fully supported by the two diaphragms 2 on the housing B as shown in the figure, so it has a degree of freedom of movement in the vertical direction in the drawing, but no lateral vibration occurs. If the stiffness of the diaphragm 7 seen from the movable part A is 6, and the effective mass of the movable part A is M, then the resonance frequency fo of this vibration system is as shown in equation (1), where 71:o is a pi.

第1図に示す電子秤を第2図のように接続すると可動部
本体3の円形平面りと固定電極の円形平面Fは蓄電器を
構成し、電池Bの直流電圧を印加することにより静電型
電気音響変換器、いわゆるコンデンサマイクロホンHi
構成する。
When the electronic scale shown in FIG. 1 is connected as shown in FIG. Electroacoustic transducer, so-called condenser microphone Hi
Configure.

ここで可動部Aか第2図の電気回路に何らかの形で機械
的又は電気的衝撃が与えられるとコンデンサマイクロホ
ンHの電気的出力が増巾器/!によって増巾される。増
巾器/!の入出力の位相差全適当に選ぶと第2図の回路
は発振し、その発振周波数は(1)式で示したfoであ
る。
If some form of mechanical or electrical shock is applied to the movable part A or the electrical circuit shown in FIG. 2, the electrical output of the condenser microphone H will be changed to the amplifier/! The width is increased by Amplifier/! If the input/output phase difference is appropriately selected, the circuit shown in FIG. 2 will oscillate, and the oscillation frequency will be fo as shown in equation (1).

ここで被測定物/の質量がmだったとして受凹コにのせ
れば上記発振周波数は(2)式に示すようにfmに変化
する。
Here, assuming that the mass of the object to be measured is m, if the object is placed on the receptacle, the oscillation frequency changes to fm as shown in equation (2).

(1)(2)式より (3)式の結果を得る。From equations (1) and (2) Obtain the result of equation (3).

M及びfoe予め測定して既知量としておけば発振周波
数fmを測定することによシ被測定物/の質量mを(3
)式から算出することが出来る。
If M and foe are measured in advance and used as known quantities, then by measuring the oscillation frequency fm, the mass m of the object to be measured can be calculated as (3
) can be calculated from the formula.

以上図面について詳細例説間したように本発明の電子秤
は、(1)、 (2)及び(5)式の関係が地球の引力
及び空気による浮力による影響全台まないので、測定さ
れた被測定物の質量は、真空中における絶対値である。
As explained above in detail with respect to the drawings, the electronic scale of the present invention is not affected by the earth's gravitational force and the buoyant force of the air, so the relationships in equations (1), (2), and (5) are not affected by the buoyant force of the air. The mass of the object to be measured is an absolute value in vacuum.

又、本発明の電子秤により秤量するものは発振回路の発
振周波数fmである。これはディジタル量でアク、以後
の各種データを得るための計算器の構成が容易になるば
かジでなく檀々な雑音に対しても影響の少ない精度のよ
い電子秤を提供するこ、とが出来る。
Moreover, what is weighed by the electronic scale of the present invention is the oscillation frequency fm of the oscillation circuit. The purpose of this is to provide a highly accurate electronic scale that is not only simple but also less affected by various noises, which makes it easier to configure the calculator for obtaining various data in digital quantities. I can do it.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明電子秤の動作原理を説明するための横断
面図、第2図は本発明電子秤の電気的接続の一実施例を
示す回路図である。 だ・・・被測定物、λ・・・・・・受皿、3・・・・・
・可動部本体、り・・・・ボビン、!・・・・可動線輪
、g・・・・筐体、2・・・・ダイヤフラム、?・旧・
・永Δ磁石、2及び/θ・・・・・ポール及びヨーク、
//・・・・固定電極、/2・・・・・絶縁ガラス、/
!・・・・・・増巾器、A・・・・・可動部、B・・・
・・電池、C・・・・・動電型電気音響変換器、H・・
・・静電型電気音響変換器。 特許出願人   国際技術開発株式会社DFG    
    /4t
FIG. 1 is a cross-sectional view for explaining the operating principle of the electronic scale of the present invention, and FIG. 2 is a circuit diagram showing one embodiment of the electrical connection of the electronic scale of the present invention. D...Object to be measured, λ...Saucer, 3...
・Movable body, bobbin,! ...Movable wire ring, g...Casing, 2...Diaphragm,?・Old・
・Permanent Δ magnet, 2 and /θ...pole and yoke,
//... Fixed electrode, /2... Insulated glass, /
! ......Amplifier, A...Movable part, B...
・・Battery, C・・Electrodynamic electroacoustic transducer, H・・
...An electrostatic electroacoustic transducer. Patent applicant: International Technology Development Co., Ltd. DFG
/4t

Claims (1)

【特許請求の範囲】[Claims] 秤の可動部を2枚のダイヤフラムで筐体に支持させ、可
動部の一端に可動線輪を捲いて動電型電気音響変換器を
、他端に平面電極を設けて静電型電気音響変換器を構成
させ、該静電型電気音響変換器の電気的出力を増巾して
該動電型電気音響変換器の可動線輪に供給してなる発振
回路を構成させたことを特徴とする質量の絶対値が秤れ
る電子秤。
The movable part of the scale is supported by the housing with two diaphragms, and a movable coil is wound around one end of the movable part to create an electrodynamic electroacoustic transducer, and a flat electrode is provided at the other end to create an electrostatic electroacoustic transducer. The invention is characterized in that an oscillation circuit is constructed by amplifying the electrical output of the electrostatic electroacoustic transducer and supplying it to the movable wire of the electrodynamic electroacoustic transducer. An electronic scale that measures the absolute value of mass.
JP14151184A 1984-07-10 1984-07-10 Electronic balance Granted JPS6120823A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14151184A JPS6120823A (en) 1984-07-10 1984-07-10 Electronic balance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14151184A JPS6120823A (en) 1984-07-10 1984-07-10 Electronic balance

Publications (2)

Publication Number Publication Date
JPS6120823A true JPS6120823A (en) 1986-01-29
JPS6334410B2 JPS6334410B2 (en) 1988-07-11

Family

ID=15293657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14151184A Granted JPS6120823A (en) 1984-07-10 1984-07-10 Electronic balance

Country Status (1)

Country Link
JP (1) JPS6120823A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011514006A (en) * 2008-03-11 2011-04-28 メトリックス・リミテッド Semiconductor wafer monitoring apparatus and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011514006A (en) * 2008-03-11 2011-04-28 メトリックス・リミテッド Semiconductor wafer monitoring apparatus and method
US9349624B2 (en) 2008-03-11 2016-05-24 Metryx Limited Semiconductor wafer monitoring apparatus and method

Also Published As

Publication number Publication date
JPS6334410B2 (en) 1988-07-11

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