JPS6119430B2 - - Google Patents
Info
- Publication number
- JPS6119430B2 JPS6119430B2 JP10143481A JP10143481A JPS6119430B2 JP S6119430 B2 JPS6119430 B2 JP S6119430B2 JP 10143481 A JP10143481 A JP 10143481A JP 10143481 A JP10143481 A JP 10143481A JP S6119430 B2 JPS6119430 B2 JP S6119430B2
- Authority
- JP
- Japan
- Prior art keywords
- composite material
- expanded
- present
- vapor
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002131 composite material Substances 0.000 claims description 17
- 239000002923 metal particle Substances 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 4
- 229910001111 Fine metal Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000573 anti-seizure effect Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Sealing Material Composition (AREA)
- Gasket Seals (AREA)
Description
【発明の詳細な説明】
本発明は、密封部材として好適な複合材料に係
り、従来の膨張黒沿を基材料とした複合材料に関
するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a composite material suitable as a sealing member, and relates to a composite material based on a conventional expanded black material.
従来、パツキンやガスケツト等の密封部材とし
て適用される膨張黒沿は、天然黒沿やキツシユ黒
沿等の結晶子の大きい黒沿を硫酸のような酸によ
つて膨潤処理をし、これを水洗後、加熱膨張させ
て得たものであり、要すれば所望のテープやリボ
ン等のシート状になして用いられている。 Expanded Kuroori, which is conventionally used as sealing members for packings and gaskets, is made by swelling the Kuroori with large crystallites, such as natural Kuroori or Kitsushi Kuroori, with an acid such as sulfuric acid, and then washing it with water. After that, it is obtained by heating and expanding, and if necessary, it is used in the form of a sheet such as a desired tape or ribbon.
係る膨張黒沿は、純粋な黒沿であり、黒沿のも
つ耐熱、耐薬品、耐侯、小さな熱膨張、優れた固
体潤滑等の如く優れた諸得性を持つており、密封
部材として多いに利用されている。しかしなが
ら、このように優れた諸特性を持つ膨張黒沿にも
いくつかの弱点があり、例えば、雰囲気状態の悪
いときには、軸等の相手材料である金属を腐蝕さ
せたり、相手材料面に凝着し、次第に摩擦系数を
増大させ、このため、焼付を生じさせたりするこ
とが適用時の思慮不足と重なつて、しばしば問題
を引き起こすことがあり、その対策に若慮してい
るのが現状である。 Such expanded black wire is pure black wire, and has excellent properties such as heat resistance, chemical resistance, weather resistance, small thermal expansion, and excellent solid lubrication, and is often used as a sealing material. It's being used. However, even with such excellent properties, there are some weaknesses.For example, when the atmosphere is bad, it may corrode the metal material such as the shaft, or it may adhere to the surface of the material. However, the friction coefficient gradually increases, which causes seizure, which often causes problems due to lack of consideration at the time of application, and the current situation is that we are not giving enough thought to countermeasures. be.
このような場合の主たる原因を追究すれば、ほ
とんどが黒沿の持つ特性に起因している。 If we investigate the main cause of such cases, most of them are due to the characteristics of Kuroen.
本発明は、前述した事情に鑑みなされたもので
防蝕性と焼付防止との機能を備えたところの密封
部材として好適な膨張黒沿を基材料とする複合材
料を提供するものである。 The present invention has been developed in view of the above-mentioned circumstances, and provides a composite material based on an expanded black material, which is suitable as a sealing member and has corrosion-proofing and anti-seizure functions.
以下に、本発明を添付した図面に基づき詳細に
説明する。第１図は、本発明に係る複合材料を得
るための製造装置であり、真空蒸着装置Ａを示す
ものである。１は、被着物である基材料であり、
膨張黒沿シートからなるものである。２は真空容
器、３は遮蔽板、４は坩堝であり、坩堝４には、
低融点金属またはその合金、或いは、イオン化傾
向の高い金属５を入れている。６は加熱器であ
り、７は印加電圧である。この真空容器２は、ア
ルゴン等の不活性ガス導入管８と排気管９を備え
ている。このような真空蒸着装置Ａにて、例えば
第２図に示す如き複合材料Ｂが得られる。この複
合材料Ｂは、膨張黒沿シートからなる基材料１０
の片表面に金属粒子１１が均一的に分散した蒸着
層１２を設けてなるものである。 The present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 shows a vacuum evaporation apparatus A, which is a manufacturing apparatus for obtaining a composite material according to the present invention. 1 is a base material that is an adherend;
It is made of expanded black sheet. 2 is a vacuum container, 3 is a shielding plate, 4 is a crucible, and crucible 4 includes:
A low melting point metal or its alloy, or a metal 5 with a high ionization tendency is contained. 6 is a heater, and 7 is an applied voltage. This vacuum container 2 is equipped with an inert gas introduction pipe 8 such as argon, and an exhaust pipe 9. With such a vacuum evaporation apparatus A, a composite material B as shown in FIG. 2, for example, can be obtained. This composite material B has a base material 10 made of an expanded black sheet.
A vapor deposition layer 12 in which metal particles 11 are uniformly dispersed is provided on one surface of the substrate.
なお本発明に係る複合材料は、第２図で示した
複合材料Ｂに限定されるものでなく、基材料とし
て、膨張黒沿の粒状物や前述したシート物等その
形状は如何なるものでもよい。また金属粒子が蒸
着される膨張黒沿の表面とは、表面全体ないし所
望する一部分の表面を意味するものである。金属
粒子とは、0.1〜5.0ミリミクロン程度の比較的微
細な粒子状を意味し、亜鉛、鉛、アンチモン、ア
ルミニウム、マグネシウム等の如く、低融点金属
またはその合金、或いはイオン化傾向の大きい単
体金属ないしこれらの合金を意味する。 Note that the composite material according to the present invention is not limited to the composite material B shown in FIG. 2, and the base material may be of any shape, such as expanded black grains or the above-mentioned sheet material. Further, the surface along the expanded surface on which metal particles are deposited means the entire surface or a desired portion of the surface. Metal particles mean relatively fine particles of about 0.1 to 5.0 millimicrons, and include low melting point metals or alloys thereof, or single metals with a large ionization tendency, such as zinc, lead, antimony, aluminum, magnesium, etc. These alloys are meant.
そして膨張黒沿の表面に設けたこれらの金属粒
子を分散した蒸着層とは、0.1〜10ミリミクロン
の厚さ程度に蒸着した層を意味し、蒸着時間によ
つて自由に層の厚さをコントロールでき、形成さ
れた層の厚さは比較的均一である。 The vapor-deposited layer in which these metal particles are dispersed, provided on the surface of the expanded black line, means a layer that is vapor-deposited to a thickness of about 0.1 to 10 millimicrons, and the thickness of the layer can be adjusted freely depending on the vapor deposition time. controllable and the thickness of the layer formed is relatively uniform.
次に本発明に係る複合材料の一実施例を示す。 Next, an example of the composite material according to the present invention will be shown.
第１図の真空蒸着装置Ａにおいて、真空容器２
内をアルゴン雰囲気にし、真空度を10-2torrに設
定し、坩堝４の中に金属５として鉛を選び、加熱
温度800℃に保ち、遮蔽板３を開放し、蒸着を10
分間した。その結果、基材料として選んだ膨張黒
沿シート（0.38mm厚さ、幅12.7mmのテープ状）の
片表面に、１μｍの鉛粒子が、厚さ５μｍにて均
一的に分散した蒸着層をもつた複合材料Ｃが得ら
れた。
In the vacuum evaporation apparatus A shown in FIG.
The interior was made into an argon atmosphere, the degree of vacuum was set to 10 -2 torr, lead was selected as the metal 5 in the crucible 4, the heating temperature was kept at 800°C, the shielding plate 3 was opened, and the evaporation was carried out at 10 -2 torr.
It took a minute. As a result, on one surface of the expanded Kuroori sheet (0.38 mm thick, 12.7 mm wide tape) selected as the base material, a vapor deposited layer with 1 μm lead particles uniformly dispersed at a thickness of 5 μm was found. A composite material C was obtained.
そしてこの得られた複合材料Ｃを走査型電子顕
微鏡にて2000倍に拡大した写真を第３図に示す。 FIG. 3 shows a photograph of the obtained composite material C magnified 2000 times using a scanning electron microscope.
この第３図を観察すれば、よくわかるように鉛
粒子が均一に分散されている。このことは通常の
金属メツキ膜に比較して、比表面積が比較出来な
い程大きくなつており、効果的な防蝕効果を発揮
出来る。 If you observe this Figure 3, you will clearly see that the lead particles are uniformly dispersed. This means that the specific surface area is incomparably larger than that of ordinary metal plating films, and it can exhibit an effective corrosion prevention effect.
以上詳述した構成となす本発明は、以下に述べ
る効果を奏するものである。 The present invention having the configuration described in detail above has the following effects.
従来の膨張黒沿を回転軸パツキンとして用いた
場合、軸の回転による摺動に伴つて軸表面に膨張
黒鉛粒子が転移付着して軸表面に膨張黒鉛が皮膜
状に成長してしまい、これと接する膨張黒鉛表面
にアプレシブな摩耗を強いると共に急激な摩擦力
の増大へとつながる現象が見られることがある
が、本発明に係る複合材料は、この現象を完全に
抑制するものである。本発明では、膨張黒鉛の表
面に蒸着された金属粒子が、前述した軸の摺動面
への膨張黒鉛の転移や固着を完全に防ぎ、清浄な
表面を保つことにより、摩擦係数を安定させる。
また過度な負荷条件下において、摩擦表面温度が
極端に上昇するような場合でも、本発明では、蒸
着された金属で保護され、或いは蒸着された金属
が溶融しても、これが摺動面間に流体膜を形成す
るので、これまでの焼付現象を完全に一掃するこ
とができる。 When conventional expanded graphite is used as a rotating shaft packing, expanded graphite particles transfer and adhere to the shaft surface as the shaft rotates and slides, and the expanded graphite grows like a film on the shaft surface. A phenomenon that forces the contacting expanded graphite surface to undergo abrasive wear and leads to a sudden increase in frictional force may be observed, but the composite material according to the present invention completely suppresses this phenomenon. In the present invention, the metal particles deposited on the surface of the expanded graphite completely prevent the expanded graphite from transferring or adhering to the sliding surface of the shaft, and maintain a clean surface, thereby stabilizing the coefficient of friction.
In addition, even if the friction surface temperature rises extremely under excessive load conditions, the present invention protects the sliding surface with a vapor-deposited metal, or even if the vapor-deposited metal melts, it will not leak between the sliding surfaces. Since a fluid film is formed, the conventional seizure phenomenon can be completely wiped out.
第１図は、本発明に係る複合材料を得るための
真空蒸着装置の概念図、第２図は、本発明に係る
複合材料の部分斜視図、第３図は、本発明に係る
複合材料の蒸着表面を2000倍に拡大した電子顕微
鏡写真である。
Ａ…真空蒸着装置、Ｂ，Ｃ…複合材料、１，１
０…基材料（膨張黒鉛シート）、１１…金属粒
子、１２…蒸着層。
FIG. 1 is a conceptual diagram of a vacuum evaporation apparatus for obtaining a composite material according to the present invention, FIG. 2 is a partial perspective view of a composite material according to the present invention, and FIG. 3 is a conceptual diagram of a vacuum deposition apparatus for obtaining a composite material according to the present invention. This is an electron micrograph showing the evaporated surface magnified 2000 times. A... Vacuum deposition device, B, C... Composite material, 1,1
0... Base material (expanded graphite sheet), 11... Metal particles, 12... Vapor deposited layer.
Claims (1)
た蒸着層を設けてなる密封部材として好適な複合
材料。1. A composite material suitable for use as a sealing member, comprising a vapor-deposited layer in which fine metal particles are dispersed on the surface of the expanded black surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10143481A JPS581552A (en) | 1981-06-29 | 1981-06-29 | Composite material proper as sealing member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10143481A JPS581552A (en) | 1981-06-29 | 1981-06-29 | Composite material proper as sealing member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS581552A JPS581552A (en) | 1983-01-06 |
| JPS6119430B2 true JPS6119430B2 (en) | 1986-05-17 |
Family
ID=14300583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10143481A Granted JPS581552A (en) | 1981-06-29 | 1981-06-29 | Composite material proper as sealing member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS581552A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200051043A (en) | 2018-08-30 | 2020-05-12 | 스미토모 오사카 세멘토 가부시키가이샤 | Electrostatic chuck device and manufacturing method of electrostatic chuck device |
| WO2020170514A1 (en) * | 2019-02-20 | 2020-08-27 | 住友大阪セメント株式会社 | Electrostatic chuck device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6483974A (en) * | 1987-09-24 | 1989-03-29 | Ibiden Co Ltd | Composite graphite sheet material |
-
1981
- 1981-06-29 JP JP10143481A patent/JPS581552A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200051043A (en) | 2018-08-30 | 2020-05-12 | 스미토모 오사카 세멘토 가부시키가이샤 | Electrostatic chuck device and manufacturing method of electrostatic chuck device |
| WO2020170514A1 (en) * | 2019-02-20 | 2020-08-27 | 住友大阪セメント株式会社 | Electrostatic chuck device |
| US11012008B2 (en) | 2019-02-20 | 2021-05-18 | Sumitomo Osaka Cement Co., Ltd. | Electrostatic chuck device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS581552A (en) | 1983-01-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6183887B1 (en) | Heat protection element consisting of a quasicrystalline aluminum alloy | |
| US3540863A (en) | Art of protectively metal coating columbium and columbium - alloy structures | |
| JP7471663B2 (en) | Microcapsules for latent heat storage material and manufacturing method thereof, powder containing microcapsules for latent heat storage material, and heat storage device containing said powder | |
| Alam et al. | Microstructure and high temperature oxidation performance of silicide coating on Nb-based alloy C-103 | |
| US2665998A (en) | Method of preparing highly refractory bodies | |
| JPS6119430B2 (en) | ||
| US3573190A (en) | Apparatus for depositing semiconductor material and forming semiconductor junctions | |
| NO792744L (en) | MAGNETIC MATERIAL IN THE FORM OF A THIN FILM | |
| US4490264A (en) | Device incorporating a bearing | |
| JPH10245285A (en) | Carbon composite material for reducing atmosphere furnace, and its production | |
| Townsend et al. | Breakdown of oxide films on steel exposed to chloride solutions | |
| Dobson et al. | Preferred orientation in metal films deposited on glass | |
| GB2027454A (en) | Porous bodies | |
| US3365327A (en) | Vapor diffusion coating containing aluminum-chromium-silicon | |
| Yase et al. | Aggregation mechanism of triphenyldiamine | |
| Man et al. | Grain size and hillock growth of vacuum‐evaporated SnO2 thin films | |
| Nogi et al. | Characteristic wettability of SiC by liquid pure Cu | |
| US3343982A (en) | Coating of cobalt alloys | |
| JPS58124863A (en) | Packing | |
| Ichinokawa et al. | Behaviors of small molten metal islands on several substrates | |
| Özenbaş | Growth of selenium thin films | |
| JPS62189726A (en) | Susceptor for vapor growth of semiconductor | |
| Çiçek et al. | Effect of thermal oxidation on structural and tribological properties of MoS2 films | |
| Boichot | The structure and growth of thin films of lead telluride and lead selenide condensed in vacuum on to amorphous substrates | |
| Shi et al. | Preparation and characterization of Ni-C composite films |