JPS61186475A - Production of thin metallic film - Google Patents

Abstract

PURPOSE:To prevent the generation of wrinkles and to form stably a thin metallic film on a long-sized high-polymer substrate by separating the long-sized high-polymer substrate traveling on a can to multiple lengths and forming the thin metallic film over the entire width of a part of such lengths. CONSTITUTION:The long-sized high-polymer substrate 7 travels along the can 8. The substrate 7 contacts tightly with the can 8 at the same instant when the thin metallic film begins to be formed on the substrate 7 by the impression of the voltage to a bias roller 11. The thermal damage of the substrate 7 is thus prevented. Shearing blades 12 are provided in the mid-way from an unwinding system 6 toward the can 8 to cut the substrate 7 plural lengths such as three lengths; one length for the main part for vapor deposition and two lengths for the part including margins. The generation of the wrinkles is eliminated from the difference in thermal load between the main part for vapor deposition and the margin parts. The film deposited by evaporation is thus formed on the main part for vapor deposition without the wrinkles.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a device for forming a thin metal film on a long polymer substrate.

2. Description of the Related Art Vacuum deposition methods (including ion blating methods) are widely used as means for forming metal thin films at high speed and with high precision. In the case of continuously forming a metal thin film on a long polymer substrate, as shown in FIG. Generally, a metal thin film is formed by vapor deposition while the polymer substrate 7 is traveling along the line 8, and then wound onto the winding system 14.

In order to prevent thermal damage to the substrate due to thermal load during vapor deposition, a voltage of 0.5 mm is applied between the substrate and the can (by the ear roller 11) to improve the degree of adhesion between the two.

Problems to be Solved by the Invention However, when a thin polymer substrate is used, the problem of wrinkles occurs. That is, as shown in FIG. 5, the thermal load applied to the polymer substrate differs between the vapor deposited portion 115 and the margin portion 16 (non-vapor deposited portion), resulting in a difference in thermal deformation. If the substrate is forcibly fixed using a bias voltage in such a state, the fifth
Wrinkles appear as shown in the figure. 18 is the substrate traveling direction. When such wrinkles occur in one place, distortion occurs in other places on the substrate, resulting in large wrinkles extending to the main deposited area 17.

Therefore, the present invention prevents the occurrence of wrinkles even when using a thin polymer substrate, and enables stable formation of a metal thin film.

Means for Solving the Problems In order to solve the above problems, the present invention makes the polymer substrate running on the can multi-striped, and forms a thin metal film on some of the strips, and in some cases, over the entire width thereof. It is something.

In other words, by making the polymer substrate on the can multi-functional, the area where the margin area and the vapor deposition area are mixed is separated from the main vapor deposition area in a separate strip. As a result, the wrinkles that conventionally originate near the boundary between the margin portion and the vapor deposition portion and reach near the center of the wide substrate are separated from the main vapor deposition portion. Therefore, a long metal thin film can be formed stably and without wrinkles on the main vapor deposition parts.

Embodiments Hereinafter, embodiments of the present invention will be described based on the accompanying drawings. In FIG. 1, reference numeral 1 denotes a vacuum chamber evacuated to a high vacuum by an exhaust system 2, and an evaporation source 6 for evaporating NiFe alloy into which an electron beam 4 is incident from an electron gun 3 into the vacuum chamber 1. and a substrate transport system.

The substrate transport system unwinds the long polymer substrate from the unwinding system 6 along the rotational direction 13, has the thin metal film deposited on it while traveling along the can 8, and then winds up the main deposition part. Series 9
It has a structure in which the part winding system including the margin is wound up to 1°. The circumferential side of the can 8 is coated with an insulating material. Further, reference numeral 11 denotes a bias roller, and at the same time a metal thin film starts to be formed on the polymer substrate by the applied voltage of this bias roller 211, the polymer substrate 7 and the can 8
Due to the close contact between the two, the heat load during vapor deposition can be quickly released to the can 8, and thermal damage to the polymer substrate 7 can be prevented.

12 is a cutting blade, which is provided on the unwinding system 6 or on the way from the unwinding system 6 to the can 8.
2, the polymer substrate 7 is cut into a total of three strips, the main vapor deposition strip and two margin-containing strips. The blade is made of a hard thin blade material, and the structure of the cutting blade may be of any type, such as a single-edged type as shown in FIG. 2a, or a double-edged type as shown in the figure. In Figure 2 a, 12 is the cutting blade, and 1 is already in the same figure.
9 is a cutting blade, and 20 is a lower cutting blade.

In this way, a NiFe thin film with a thickness of 1,500 wafers was formed on a polyethylene terephthalate substrate with a thickness of 8 μm. Note that this NiFe thin film is to be used as an underlayer of a perpendicular magnetic recording medium. As a result, as shown in FIG.
A deposited film was formed without wrinkles.

In the above embodiment, the winding system is divided into a main vapor deposition partial winding system 9 and a margin-containing partial winding system 10. The winding system may be a single winding system, but if the winding system is divided, the main vapor deposition portion 17 can be wound stably without winding deviation.

Further, the polymer substrate may be cut in multiple strips of three or more strips, if necessary.

In the above embodiment, cutting is performed in a vacuum chamber, but the unwinding system may be divided into a main vapor deposition partial unwinding system and a margin-containing partial unwinding system, for example, using pre-cut polymer substrates.

In that case, unless the edges of the substrate in the main evaporation area and the edge of the substrate in the margin area are brought together and run on the can, a lot of evaporation material will adhere to the can, so it is necessary to provide an adjustment mechanism in the transport system. This is more complicated than the previous embodiment.

Effects of the Invention In the present invention, a long polymer substrate on which a thin metal film is to be formed is made into multiple strips and is run on a vapor deposition can, so that it can be applied without wrinkles even on a thin polymer substrate. A thin metal film can be formed.

That is, in the present invention, large wrinkles caused by the difference in heat load between the evaporation area and the margin area can be eliminated, and the main evaporation area can be evaporated without wrinkles.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of a method for manufacturing a metal thin film according to an embodiment of the present invention, FIGS. 2a and 2b are perspective views showing an example of a blade for cutting a polymer substrate used in the present invention, and FIG. FIG. 4 is an explanatory diagram of a conventional method for manufacturing a metal thin film, and FIG. 5 is a diagram showing wrinkles caused by the conventional method. 1... Vacuum chamber, 2... Exhaust system, 3...
...Electron gun, 4...Electron beam, 5...
...Evaporation source, 6...Unwinding system, 7...Polymer substrate, 8...Can, 9...Main evaporation partial winding system, 1o ...Margin partial winding system, 11...Bias roller, 12...
Cutting blade, 13...Rotation direction, 14...
- Winding system, 15... Vapor deposition part, 16...
・Margin part, 17...Main vapor deposition part, 18
. . . Board traveling direction, 19 . . . Upper blade for cutting, 20 . . . Lower blade for cutting. -μ's name Patent attorney Toshio Nakao and 1 other person f.
-・Jll Sky No. 2-Suriban 1 5・-System Central Source No. 3 (!l Fig. 4 7jKs Fig.

Claims (2)

[Claims] (1) When forming a metal thin film by vacuum evaporation or ion plating on a long polymer substrate running along the circumferential surface of a cylindrical can, three or more long strips are separated on the can. A molecular substrate is run, and a voltage is applied between the metal thin film formed on the long polymer substrate and the can in one or more of the strips, and a metal thin film is formed over the entire width thereof. Method for producing metal thin film. (2) The method for producing a metal thin film according to claim 1, wherein the long polymer substrate is separated in a vacuum chamber during vapor deposition.