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JPS61184419A - Magnetic rotary sensor - Google Patents

Magnetic rotary sensor

Info

Publication number
JPS61184419A
JPS61184419A JP2489985A JP2489985A JPS61184419A JP S61184419 A JPS61184419 A JP S61184419A JP 2489985 A JP2489985 A JP 2489985A JP 2489985 A JP2489985 A JP 2489985A JP S61184419 A JPS61184419 A JP S61184419A
Authority
JP
Japan
Prior art keywords
magnetic
rotating body
rotor
drum
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2489985A
Other languages
Japanese (ja)
Inventor
Masahiko Sakakibara
正彦 榊原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP2489985A priority Critical patent/JPS61184419A/en
Publication of JPS61184419A publication Critical patent/JPS61184419A/en
Pending legal-status Critical Current

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  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To reduce the change quantity of the gap between a rotor and a magnetic resistor element due to thermal expansion, by constituting a rotor from an austenite ductile cast iron material. CONSTITUTION:A drum 3 comprising an austenite ductile cast iron material (Ni-Resist material) is connected to a shaft 2 driven by a motor 1 as a rotor. A glass substrate 6 is fixed to the support table 5 fixed to the housing of the motor 1 and a magnetic resistor element 7 having patterns formed thereto is formed to the surface of the substrate 6 and opposed to the magnetic recording medium 4 arranged on the peripheral surface of the drum 3 so as to provide a gap 8 therebetween. By employing the Ni-Resist material as the material of the rotor, the change quantity of the gap 8 by thermal expansion can be reduced.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、磁気回転センサの構成に関するものであり、
特にNG工作機、ロボット用モータなどの用途に適した
高精度測定可能な磁気回転センサに関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to the configuration of a magnetic rotation sensor,
In particular, the present invention relates to a magnetic rotation sensor that can perform high-precision measurements and is suitable for applications such as NG machine tools and robot motors.

[従来の技術] 従来、例えばサーボモータの回転速度1回転位置決めな
どのためには、回転体の全周に配置した磁気記録媒体に
等間隔で着磁した磁気パターンから得られる磁気信号を
、近接して配置した磁気抵抗素子により電気信号として
読み取ることによって、回転体の回転角が検出可能な磁
気回転センサが用いられている。ところが、近年産業界
の要求により、より高°精度の測定が望まれている。一
般にこの種の磁気回転センサにおいては、回転体の1回
転当りの出力信号数が多いほど高精度の測定を行うこと
が可能であり、そのためには、磁気記録媒体に着磁する
磁気パターンのピッチを小さくすれば良い。しかし、こ
のように磁気パターンのピッチを小さくした場合には、
そこから得られる磁気信号も小さくなるため、これを検
出する磁気抵抗素子との間隔もより小さくする必要が生
じる。
[Prior Art] Conventionally, for example, in order to position a servo motor at a rotational speed of one revolution, magnetic signals obtained from magnetic patterns magnetized at equal intervals on a magnetic recording medium arranged around the entire circumference of a rotating body are used in close proximity. A magnetic rotation sensor is used that can detect the rotation angle of a rotating body by reading it as an electrical signal using a magnetoresistive element arranged in the same direction. However, in recent years, demands from industry have led to a desire for higher degree precision measurements. In general, in this type of magnetic rotation sensor, the higher the number of output signals per rotation of the rotating body, the more accurate measurement can be performed. All you have to do is make it smaller. However, when the pitch of the magnetic pattern is reduced in this way,
Since the magnetic signal obtained therefrom also becomes smaller, it becomes necessary to further reduce the distance from the magnetoresistive element that detects the magnetic signal.

一方、回転体としてのドラム、ディスク等には、非磁性
でかつ機械加工が容易なため、通常アルミニウム材が用
いられている。
On the other hand, aluminum is usually used for drums, disks, etc. as rotating bodies because it is non-magnetic and easy to machine.

し発明が解決しようとする問題点] しかし、アルミニウム材は熱膨張係数が23X 10/
℃と大きいために、使用時の温度変化によっては、回転
体が取り付けられている鉄系材料シャフトとの偏心や撮
動および回転体自体の径方向の増大などにより磁気抵抗
素子との間隔の変動が大きくなり、所定の間隔幅が維持
できないために、高精度かつ安定な測定が出来ない欠点
があった。またかかる欠点を解消するために、上記回転
体をセラミック材で構成したものも提案されている(特
開昭59−192915号公報)が、セラミックは機械
加工が必ずしも容易でないために、より機械加工性が良
く、かつ所定の間隔幅を高精度に維持できる回転体を用
いた磁気回転センサの出現が望まれている。
[Problems to be Solved by the Invention] However, the coefficient of thermal expansion of aluminum material is 23X 10/
℃, so depending on the temperature change during use, the distance between the magnetoresistive element and the magnetoresistive element may change due to eccentricity with the iron-based material shaft to which the rotating body is attached, or an increase in the radial direction of the rotating body itself. becomes large and a predetermined interval width cannot be maintained, resulting in the drawback that highly accurate and stable measurement cannot be performed. In order to eliminate such drawbacks, it has been proposed that the rotating body is made of a ceramic material (Japanese Patent Application Laid-Open No. 192915/1982), but since ceramic is not necessarily easy to machine, it is difficult to machine it. There is a desire for a magnetic rotation sensor using a rotating body that has good performance and can maintain a predetermined interval width with high precision.

本発明は、以上のような状況に鑑みてなされたものであ
り、その目的とするところは、回転体と磁気抵抗素子と
の間隔を所定幅に高精度に維持可能な磁気回転センサを
提供することにある。
The present invention has been made in view of the above circumstances, and its purpose is to provide a magnetic rotation sensor that can maintain the interval between a rotating body and a magnetic resistance element at a predetermined width with high precision. There is a particular thing.

[問題点を解決するための手段] 上記目的を達成するために本発明は、回転体自体をシャ
フト材と類似の鉄系材料で構成したことを特徴とするも
のである。本発明において、上記鉄系材料としては、熱
膨張係数が8〜13×10/℃で、非磁性でかつ加工性
の優れたオーステナイト系ダクタイル鋳鉄材(通称ニレ
ジスト材)が最も適している。
[Means for Solving the Problems] In order to achieve the above object, the present invention is characterized in that the rotating body itself is made of an iron-based material similar to the shaft material. In the present invention, the most suitable iron-based material is an austenitic ductile cast iron material (commonly known as Niresist material), which has a coefficient of thermal expansion of 8 to 13 x 10/°C, is non-magnetic, and has excellent workability.

[実施例] 以下、本発明の一実施例を図面を参照して詳細に説明す
る。第1図は本発明による磁気回転センサの一例を示す
要部断面構成図である。図において、モータ1によって
駆動されるシャフト2に回転体としてニレジスト材から
なる直径50mm、長さ15mmのドラム3が結合され
ている。そして、このドラム3の外周面には周面全周に
わたって一定のピッチで着磁された磁気パターンを有す
る磁気記録媒体4が塗布法によって配設されている。ま
たモータ1のハウジングに固定された支持台5の上には
、ガラス基板6が固定され、この基板6の表面には蒸着
法によって得たパーマロイ薄膜からパターン形成された
磁気抵抗素子7が形成され、前記ドラム3の周面上に配
設された磁気記録媒体4と約100μmの間隔8を隔て
て対向している。この磁気回転センサを一40〜100
℃の温度範囲で使用したところ、熱膨張による間隔8の
変化量は、最大的45μmであった。また比較のためア
ルミニウムにより同一寸法形状のドラムを作製し、同一
条件で実験したところその変化量は、約80μmであっ
た。なお、加工性の面において、従来のアルミニウム材
と何ら変ることなく容易に精密加工が出来た。
[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings. FIG. 1 is a cross-sectional configuration diagram of essential parts showing an example of a magnetic rotation sensor according to the present invention. In the figure, a drum 3 made of Niresist material and having a diameter of 50 mm and a length of 15 mm is coupled as a rotating body to a shaft 2 driven by a motor 1. A magnetic recording medium 4 having a magnetic pattern magnetized at a constant pitch over the entire circumference of the drum 3 is disposed on the outer peripheral surface of the drum 3 by a coating method. Further, a glass substrate 6 is fixed on the support stand 5 fixed to the housing of the motor 1, and a magnetoresistive element 7 patterned from a permalloy thin film obtained by vapor deposition is formed on the surface of this substrate 6. , and are opposed to the magnetic recording medium 4 disposed on the circumferential surface of the drum 3 with an interval 8 of about 100 μm therebetween. This magnetic rotation sensor is 40 to 100
When used in a temperature range of .degree. C., the maximum change in distance 8 due to thermal expansion was 45 .mu.m. For comparison, a drum of the same size and shape was made from aluminum and an experiment was conducted under the same conditions, and the amount of change was about 80 μm. In addition, in terms of workability, precision processing could be easily performed without any difference from conventional aluminum materials.

[発明の効果] 以上説明したように、熱膨張による間隔8の変化量を従
来の約半分に減少させることが回転体にニレジスト材を
採用することで達成し、同時に加工性も従来のアルミニ
ウム材と変らぬ効率、精度で加工できることにより、公
知のセラミック材は熱膨張係数が小さいことにより間隔
8の変化mは改善出来るが、加工性の面で問題があった
が、この面も改善されたものと判断される。なお、本発
明はドラム3に限定されることなくディスクに適用して
も全く同様の効果が得られることは勿論である。
[Effects of the Invention] As explained above, by using Niresist material for the rotating body, it is possible to reduce the amount of change in the interval 8 due to thermal expansion to approximately half that of the conventional one, and at the same time, the workability is also lower than that of the conventional aluminum material. By being able to process with the same efficiency and precision as the conventional ceramic materials, the change in spacing 8 (m) can be improved due to the small coefficient of thermal expansion of known ceramic materials, but there was a problem in terms of processability, but this aspect has also been improved. It is judged as a thing. It goes without saying that the present invention is not limited to the drum 3, but can also be applied to a disk to obtain exactly the same effect.

以上より、回転体にニレジスト材を使用することにより
、信頼性1品質の面で優れた磁気センサを低コストで得
られるという極めて優れた効果を有する。
As described above, by using the Niresist material for the rotating body, there is an extremely excellent effect that a magnetic sensor excellent in terms of reliability and quality can be obtained at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る磁気回転センサの一例を示す要部
断面構成図である。 1:モータ、2:シャフト、3ニドラム、4:磁気記録
媒体、5:支持台、6:ガラス基板、7:磁気抵抗素子
FIG. 1 is a cross-sectional configuration diagram of essential parts showing an example of a magnetic rotation sensor according to the present invention. 1: Motor, 2: Shaft, 3 Drum, 4: Magnetic recording medium, 5: Support stand, 6: Glass substrate, 7: Magnetoresistive element.

Claims (1)

【特許請求の範囲】[Claims]  一定のピッチで着磁された複数の磁気パターンからな
る磁気記録媒体を全周に有する回転体と、前記磁気記録
媒体に対向するように前記回転体の近傍に配置された磁
気抵抗素子を有し、前記磁気パターンによる周期的な電
気抵抗変化として検出する磁気回転センサにおいて、前
記回転体をオーステナイト系ダクタイル鋳鉄材で構成し
たことを特徴とする磁気回転センサ。
A rotating body having a magnetic recording medium formed of a plurality of magnetic patterns magnetized at a constant pitch around the entire circumference, and a magnetoresistive element disposed near the rotating body so as to face the magnetic recording medium. . A magnetic rotation sensor that detects periodic electrical resistance changes due to the magnetic pattern, wherein the rotating body is made of an austenitic ductile cast iron material.
JP2489985A 1985-02-12 1985-02-12 Magnetic rotary sensor Pending JPS61184419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2489985A JPS61184419A (en) 1985-02-12 1985-02-12 Magnetic rotary sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2489985A JPS61184419A (en) 1985-02-12 1985-02-12 Magnetic rotary sensor

Publications (1)

Publication Number Publication Date
JPS61184419A true JPS61184419A (en) 1986-08-18

Family

ID=12151026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2489985A Pending JPS61184419A (en) 1985-02-12 1985-02-12 Magnetic rotary sensor

Country Status (1)

Country Link
JP (1) JPS61184419A (en)

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