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JPS61180465A - Lead connecting method - Google Patents

Lead connecting method

Info

Publication number
JPS61180465A
JPS61180465A JP2032185A JP2032185A JPS61180465A JP S61180465 A JPS61180465 A JP S61180465A JP 2032185 A JP2032185 A JP 2032185A JP 2032185 A JP2032185 A JP 2032185A JP S61180465 A JPS61180465 A JP S61180465A
Authority
JP
Japan
Prior art keywords
electrode
lead
substrate
oil
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2032185A
Other languages
Japanese (ja)
Inventor
Kenzo Hatada
畑田 賢造
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2032185A priority Critical patent/JPS61180465A/en
Publication of JPS61180465A publication Critical patent/JPS61180465A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To prevent an electrode from oxidization and to perform connection of the electrode with a lead at low-cost by a method wherein oil is subjected to impose between a semiconductor element or an electrode of a display and the lead and is pressed down thereto. CONSTITUTION:An Si system's thermal resistant oil is applied to a lead 1 at least on a surface where a substrate is faced to an electrode 4. Positioning the lead 1 and the electrode 4 on the substrate 3 is performed and pressing down is performed thereon. Thereafter, a hardening resin 5 covers containing the electrode 4 of the substrate 3 and the lead 1, and they are cured and fixed. By means of curing the hardening resin 5, the electrode 4 of the substrate 3 and the lead 1 are fixed permanently at the state that oil is interposed between them at a part of the boundary.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は半導体素子等の高密度、薄型、小型の実装にお
けるリード接続および、ディスプレイパネルの電極と外
部リードの接続の方法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for connecting leads in high-density, thin, and compact packaging of semiconductor devices and the like, and a method for connecting electrodes of a display panel and external leads.

従来の技術 近年、1G、LSI等の半導体素子は各種の家庭電化製
品、産業用機器の分野へ導入されている。
2. Description of the Related Art In recent years, semiconductor devices such as 1G and LSI have been introduced into the fields of various home appliances and industrial equipment.

これら家庭電化製品、産業用機器は、省資源化。These home appliances and industrial equipment are resource-saving.

省電力化のためにあるいは利用範囲を拡大させるために
、多機能化、小型化、薄型化のいわゆるポータプル化が
促進されてきている。
In order to save power or expand the scope of use, so-called portable devices, which are multifunctional, smaller, and thinner, are being promoted.

半導体素子においてもポータプル化に対応するだめに、
パッケージングの小型化、薄型化が要求されてきている
。拡散工程、電極配線工程の終了したシリコンスライス
は半導体素子単位のチップに切断され、チップの周辺に
設けられたアルミ電極端子から外部端子へ電極リードを
取出して取扱いやすクシ、また機械的保護のためにパッ
ケージングされる。通常、これら半導体素子のパッケー
ジングには、DIL 、チップキャリヤ、フリップチ、
ノブ、フィルムキャリヤ方式等が用いられている。
In order to respond to the trend of portability in semiconductor devices,
There is a growing demand for smaller and thinner packaging. After the diffusion process and electrode wiring process have been completed, the silicon slice is cut into chips of semiconductor element units, and electrode leads are taken out from the aluminum electrode terminals provided around the chip to external terminals to make combs for easy handling and for mechanical protection. packaged in. Usually, the packaging of these semiconductor devices includes DIL, chip carrier, flip chip,
Knob, film carrier methods, etc. are used.

一方、液晶ディスプレイパネルや、ELディスプレイパ
ネルの電極は、一般にガラス板にSnO2゜ITO等の
導電膜で形成され、したがって駆動回路へ電極的に接続
するためには、駆動回路から延在したフレキシブル基板
を機械的に前記ディスプレイの電極に圧接するか、もし
くは前記電極上にN1・Au 、 Cr−Au等の金属
膜を形成しておき、これと前記フレキシブル基板とを半
田づけ固定する方法が用いられている。
On the other hand, the electrodes of liquid crystal display panels and EL display panels are generally formed on a glass plate using a conductive film such as SnO2゜ITO. is mechanically pressed against the electrode of the display, or a metal film of N1.Au, Cr-Au, etc. is formed on the electrode, and this and the flexible substrate are fixed by soldering. ing.

発明が解決しようとする問題点 半導体素子のパッケージング方式については上述したよ
うに種々あるが、いずれの方式も、半導体素子に対し高
額な人U材料を用いるか、もしくは、蒸着、フォトエツ
チング、メッキ処理等の複雑な工程を用いるため、この
工程でのコストが高くなるものであった。更にまた。こ
れら処理を行なった半導体素子の電極と外部リードとを
接続させるために、高温・高圧下で合金を形成させる必
要があるから、高温・高圧を発生させる設備を必要とす
るばかりでなく、この高温・高圧のために前記半導体素
子も、熱および機械的応力を受け、特性を損傷すること
があった。
Problems to be Solved by the Invention As mentioned above, there are various packaging methods for semiconductor devices, but all of these methods require the use of expensive materials for semiconductor devices, or the use of vapor deposition, photoetching, or plating. Since complicated steps such as processing are used, the cost of this step is high. Yet again. In order to connect the electrodes and external leads of semiconductor elements that have undergone these treatments, it is necessary to form an alloy at high temperatures and high pressures, which not only requires equipment that generates high temperatures and high pressures, but also - Due to the high pressure, the semiconductor element is also subjected to thermal and mechanical stress, which may damage its properties.

またディスプレイの電極にフレキシブル基板を圧接する
方法においては、バネ材等の圧接手段が必要となシ、デ
ィスプレイの小型、薄型化を実現することができない。
Furthermore, the method of press-contacting the flexible substrate to the electrodes of the display requires a press-contact means such as a spring material, and it is not possible to make the display smaller and thinner.

まだ、ディスプレイの電極上に金属膜を形成する方法は
、前述した半導体素子の例と同じく、材料や、設備がお
おがかりとなり、この工程でのコスト高を招くものであ
る。
However, the method of forming a metal film on the electrodes of a display, as in the case of the semiconductor element described above, requires extensive materials and equipment, leading to high costs in this process.

本発明はこのような従来の問題に鑑み、半導体素子や、
ディスプレイパネルの電極とリードとの接続を、金属膜
の形成や圧接の方法によらず、よシ簡便な方法で安価な
リード接続方法を提供することを目的とする。
In view of such conventional problems, the present invention provides semiconductor devices,
It is an object of the present invention to provide a simple and inexpensive lead connection method for connecting electrodes and leads of a display panel without relying on metal film formation or pressure bonding.

問題点を解決するだめの手段 本発明は上記問題点を解決するため、半導体素子やディ
スプレイの電極とリードとの間に油を介在せしめ、圧接
し、これを硬化性樹脂で硬化させるものである。
Means to Solve the Problems In order to solve the above problems, the present invention interposes oil between the electrodes and leads of a semiconductor element or display, brings them into pressure contact, and hardens them with a curable resin. .

作用 これにより、電極の酸化を防止でさ、電極とリードとを
電気的に接続する安価なリード接続を可能とするもので
ある。
Effect: This prevents oxidation of the electrode and enables inexpensive lead connection for electrically connecting the electrode and the lead.

実施例 第1図を用いて本発明の第1の実施例を説明する。Example A first embodiment of the present invention will be described using FIG.

リード1には少なくとも基板3の電極4と対向する表面
に、例えばシリコーン系の耐熱性の油2が塗布されてい
る。前記リード1と基板3上の電極4とを位置合せしく
第1図(a))、圧接する(第1図(b))。しかるの
ち前記基板3上の電極4およびリード1を含めて硬化性
樹脂6で覆い、硬化。
At least the surface of the lead 1 facing the electrode 4 of the substrate 3 is coated with, for example, a silicone-based heat-resistant oil 2. The lead 1 and the electrode 4 on the substrate 3 are aligned and pressed together (FIG. 1(a)) and pressed together (FIG. 1(b)). Thereafter, the electrodes 4 and leads 1 on the substrate 3 are covered with a curable resin 6 and cured.

固定せしめる(第1図(C))。前記硬化性樹脂5の硬
化により、基板3の電極4とリード1とは、その境界の
一部分に油(油膜)を介在した状態で、少なくとも永久
的に固定される。また電極4とリード1の接触点におい
ては圧接により部分的に油膜が取去られ、電気的に接続
が行なわれるものである。前記油(油膜)は、前記リー
ド1および基板電極の酸化を防止するとともに、硬化性
樹脂を浸透してきた外部水分と前記リードおよび基板電
極との接触を防ぐ、電蝕等を防止するものである。
Fix it (Fig. 1(C)). By curing the curable resin 5, the electrode 4 of the substrate 3 and the lead 1 are fixed at least permanently, with oil (oil film) interposed at a part of the boundary. Further, at the contact point between the electrode 4 and the lead 1, the oil film is partially removed by pressure contact, and an electrical connection is established. The oil (oil film) prevents oxidation of the lead 1 and the substrate electrode, and also prevents contact between external moisture that has permeated the curable resin and the lead and the substrate electrode, and prevents electrolytic corrosion, etc. .

本実施例の構成では単にリードと基板の電極との間に油
を介在させ、圧接し、硬化性樹脂で硬化せしめるだけで
良いから、著しるしく簡単に、しかも大がかりな設備を
必要としない。
In the configuration of this embodiment, it is sufficient to simply interpose oil between the leads and the electrodes of the substrate, press them together, and harden them with a curable resin, which is extremely simple and does not require large-scale equipment.

基板3上の電極4は、基板3が半導体素子の場合0.5
〜1μmの厚さのアルミニウムや人Uで構成され、電極
の寸法は30μm〜150μmである。
The electrode 4 on the substrate 3 is 0.5 when the substrate 3 is a semiconductor element.
It is made of aluminum or aluminum with a thickness of ~1 μm, and the electrode dimensions are 30 μm to 150 μm.

また、リード1は、例えばフィルムキャリヤの如くのC
u箔をエツチング加工し、Snメッキや人Uメッキ処理
したリード群を用いればよい。
Further, the lead 1 is, for example, a C such as a film carrier.
It is sufficient to use a lead group that is etched with U foil and subjected to Sn plating or human U plating.

基板3がELや液晶ディスプレイパネルの場合。When the board 3 is an EL or liquid crystal display panel.

電極4はSnO□、ITO等の導電膜で形成され、リー
ド1は、ポリイミドフィルム、ガラス人υエポキシフィ
ルムに電極4のパターンと相対応する様にCu箔による
パターンが形成されている。
The electrode 4 is formed of a conductive film such as SnO□ or ITO, and the lead 1 is formed of a polyimide film or glass epoxy film with a Cu foil pattern formed thereon so as to correspond to the pattern of the electrode 4.

油(油膜)の形成は、第1図の如くリード1側に設けて
も良いが第2図の如く基板3の電極4上にあらかじめ設
けても良い。第2図において、基板3の電極4上に油(
油膜)2?Lを形成し、リード1と位置合せしく第2図
(a))、圧接する(第2図(b))。しかるのち、硬
化性樹脂6で硬化、固定(第2図(C))することもで
きる。
The oil (oil film) may be formed on the lead 1 side as shown in FIG. 1, or may be formed in advance on the electrode 4 of the substrate 3 as shown in FIG. In FIG. 2, oil (
Oil slick) 2? L is formed, aligned with the lead 1 (FIG. 2(a)), and pressed into contact (FIG. 2(b)). Thereafter, it can be cured and fixed with a curable resin 6 (FIG. 2(C)).

また前記硬化性樹脂は、リードと基板の電極とを圧接後
、樹脂を塗布、硬化せしめた工程であったが、これに限
定するものではなく、第3図の如くリード1(もしくは
基板3の電極4)に油(油膜)2を形成し、硬化性樹脂
5?Lはあらかじめ基板3の電極4(もしくはリード1
)上に設けておき(第3図(a))、そのまま圧接、硬
化せしめても良い(第3図(b))。
Furthermore, the above-mentioned curable resin was applied in a process in which the lead and the electrode of the board were pressed together, and then the resin was applied and hardened. However, the process is not limited to this, and as shown in FIG. Oil (oil film) 2 is formed on the electrode 4), and hardening resin 5? L is the electrode 4 (or lead 1) of the substrate 3 in advance.
) (FIG. 3(a)), and may be pressed and hardened as is (FIG. 3(b)).

これまでのべてきた硬化性樹脂は、温度や時間によって
硬化するタイプのものでも良いし、光によって硬化する
タイプのものでも良い。
The curable resins described above may be of a type that is cured by temperature or time, or may be of a type that is cured by light.

発明の詳細 な説明したように本発明によれば、次のような効果を得
ることができる。
As described in detail, according to the present invention, the following effects can be obtained.

(1)電気的接続を得るためのリードと基板の電極との
接触境界に油(油膜)を介在させて、圧接するために、
接触境界でのリード材および基板の電極材の酸化による
接触抵抗の増大による電気的接続不良の発生を防止でき
、信頼性の高い接続を得ることができる。
(1) In order to create an electrical connection by interposing oil (oil film) at the contact boundary between the lead and the electrode of the substrate,
It is possible to prevent electrical connection failure due to an increase in contact resistance due to oxidation of the lead material and the electrode material of the substrate at the contact boundary, and to obtain a highly reliable connection.

(2)また、仮に硬化性樹脂を通して水分の浸入があっ
たとしても、前記接触境界は油膜で覆われているから接
触界面の水分による電解腐蝕や酸化を防止できるから、
電気的接続不良の発生を防ぎ、信頼性の高い接続を得る
ことができる。
(2) Furthermore, even if moisture intrudes through the curable resin, the contact boundary is covered with an oil film, so electrolytic corrosion and oxidation due to moisture at the contact interface can be prevented.
It is possible to prevent electrical connection failures and obtain highly reliable connections.

(3)さらに、従来必要であった。半導体素子の電極や
ディスプレイパネルの電極への金属膜の形成工程および
、これらを形成するだめの高額の設備が不要であるから
、リード接続のだめのコストが安価になるばかりか、半
導体素子やディスプレイパネルの製造歩留りも向上する
(3) Furthermore, this was necessary in the past. Since the process of forming metal films on semiconductor element electrodes and display panel electrodes and the expensive equipment needed to form them are not required, the cost of lead connections is not only reduced, but also the cost of semiconductor elements and display panels is reduced. The manufacturing yield will also improve.

(4)リードと基板上の電極とを圧接し、これら表面を
硬化性樹脂で覆い固定させる一方、前記硬化性樹脂が前
記リードと基板上の電極および基板表面の保護膜樹脂と
しての機能を有するから、従来のリードと電極とを接続
する工程、保護樹脂を塗布する工程とが同時に形成でき
、設備や、工程数が削減できる。したがって、接続のコ
ストが著しるしく安価になる。
(4) The lead and the electrode on the substrate are brought into pressure contact and their surfaces are covered and fixed with a curable resin, while the curable resin functions as the lead and the electrode on the substrate and as a protective film resin for the substrate surface. Therefore, the conventional process of connecting leads and electrodes and the process of applying protective resin can be performed at the same time, reducing equipment and the number of processes. The cost of the connection is therefore significantly lower.

(5)従来、必要であった接続工程での加熱治具(ボン
ディングツール)が不用であるから、半導体素子の基板
やディスプレイパネルのガラス板に対し、熱ストレスや
過剰な圧力が印加されないから、熱・圧力の応力が加わ
らず、半導体素子やディスプレイパネルを損傷すること
がない。
(5) Since a heating jig (bonding tool), which was conventionally required in the connection process, is not required, no thermal stress or excessive pressure is applied to the substrate of the semiconductor element or the glass plate of the display panel. No heat or pressure stress is applied, so semiconductor elements and display panels will not be damaged.

(6)従来方式であると基板上の電極の金属膜とリード
とを接続する際、合金化を促進するために。
(6) To promote alloying when connecting the metal film of the electrode on the substrate and the lead in the conventional method.

前記基板上の電極の金属膜の巾はリードの巾よりも太き
く形成されなければならない。このために、電極間隔を
狭くすることに対し、制約が発生し、−走塁上の狭ピッ
チに対し、対応できないものであった。しかしながら本
発明では、電極とリードとを一対一の巾で構成し、圧接
するのみで良いから、上記問題となった狭ピッチへの対
応が著しるしく容易となるものである。
The width of the metal film of the electrode on the substrate must be larger than the width of the lead. For this reason, there are restrictions on narrowing the electrode spacing, and it is not possible to deal with narrow pitches on base running. However, in the present invention, the electrodes and the leads only need to be constructed with a one-to-one width and are pressed into contact with each other, so that it is significantly easier to deal with the narrow pitch that has become the problem described above.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(&)〜(C)は本発明の一実施例におけるリー
ド接続方法を説明するための断面図、第2図(a)〜(
C)、第3図(&) 、 (b)は本発明の他の実施例
におけるリード接続方法を説明するだめの断面図である
。 1・・・・・リード、2・・・・・・油(油膜)、3・
・・・・・基板、4・・・・・・電極、5・・・・・・
硬化性樹脂。 代理人の氏名 弁理士 中 尾 敏 男 はが1名第 
1 図                 /−m−す
−F2−m−う由 3−m=基板 第2図 2’L −−−ラ由
FIGS. 1(&) to (C) are cross-sectional views for explaining the lead connection method in one embodiment of the present invention, and FIGS. 2(a) to (C)
C), FIGS. 3(&), and (b) are sectional views for explaining a lead connection method in another embodiment of the present invention. 1...Lead, 2...Oil (oil film), 3...
...Substrate, 4...Electrode, 5...
Hardening resin. Name of agent: Patent attorney Toshio Nakao Haga 1st person
1 Figure /-m-su-F2-m-way 3-m=Board Fig. 2 2'L ---Layout

Claims (4)

【特許請求の範囲】[Claims] (1)リードと基板上の電極間に、油を介在させて圧接
し、硬化性樹脂で前記リードと基板上の電極とを固定す
るようにしたことを特徴とするリード接続方法。
(1) A lead connection method characterized in that the leads and the electrodes on the substrate are brought into pressure contact with oil interposed between them, and the leads and the electrodes on the substrate are fixed with a curable resin.
(2)リードと基板上の電極の少なくとも一方に油膜を
形成し、リードと基板上の電極間に硬化性樹脂を形成し
た後、前記リードと基板上の電極とを圧接し、硬化性樹
脂を硬化せしめることを特徴とする特許請求の範囲第1
項記載のリード接続方法。
(2) After forming an oil film on at least one of the leads and the electrodes on the substrate and forming a curable resin between the leads and the electrodes on the substrate, the leads and the electrodes on the substrate are pressed together and the curable resin is applied. Claim 1 characterized in that it is hardened.
Lead connection method described in section.
(3)硬化性樹脂が光硬化性の樹脂であることを特徴と
する特許請求の範囲第1項記載のリード接接方法。
(3) The lead joining method according to claim 1, wherein the curable resin is a photocurable resin.
(4)油が耐熱性を有することを特徴とする特許請求の
範囲第1項記載のリード接続方法。
(4) The lead connection method according to claim 1, wherein the oil has heat resistance.
JP2032185A 1985-02-05 1985-02-05 Lead connecting method Pending JPS61180465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2032185A JPS61180465A (en) 1985-02-05 1985-02-05 Lead connecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2032185A JPS61180465A (en) 1985-02-05 1985-02-05 Lead connecting method

Publications (1)

Publication Number Publication Date
JPS61180465A true JPS61180465A (en) 1986-08-13

Family

ID=12023862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2032185A Pending JPS61180465A (en) 1985-02-05 1985-02-05 Lead connecting method

Country Status (1)

Country Link
JP (1) JPS61180465A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5160274A (en) * 1990-01-16 1992-11-03 Yazaki Branch junction box and busbars for branch connection
US5207591A (en) * 1990-01-16 1993-05-04 Yazaki Corporation Branch junction box and busbars for branch connection
US5322445A (en) * 1990-01-16 1994-06-21 Yazaki Corporation Branch junction box and busbars for branch connection

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5160274A (en) * 1990-01-16 1992-11-03 Yazaki Branch junction box and busbars for branch connection
US5207591A (en) * 1990-01-16 1993-05-04 Yazaki Corporation Branch junction box and busbars for branch connection
US5322445A (en) * 1990-01-16 1994-06-21 Yazaki Corporation Branch junction box and busbars for branch connection

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