JPS61180230A - Double-side exposer for conductive plate - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for double-sided exposure of a conductive plate by contact copying according to the generic concept of claim 1.

In order to create electronic circuits on printed circuit boards, it is known that the printed circuit board is provided with a photosensitive layer and that the exposure is transmitted onto the copying master (original or original) on which the circuit is placed and onto this layer. This combination, which corresponds to exposure, can be realized in different ways, and the conductor plates to be exposed are combined together with both master plates and a transparent cover into one pack (packaging), which pack is adapted for this purpose. Alternatively, one side of the printed circuit board together with the associated original can be transferred to a suitable copying device, either by traveling towards an exposure device which has been prepared. Naturally, it is a prerequisite that the master plate must be accurately aligned in position on the conductor plate, and this is achieved by means of suitable gauge elements.

In the first method, each conductor plate to be exposed comprises a master plate;
and is conveyed through the exposure apparatus in the form of a pack, which naturally means that in this way a series of conductor plates with identical circuits can simply be conveyed successively through the exposure apparatus. On the contrary, it is rather disadvantageous that a completely prepared pack for each printed circuit board is always also transported, so that a large number of blanks with the same circuit are consumed for each exposure of each printed circuit board.

A continuous working method, on the other hand, is represented by the second method, but requires a relatively large equipment outlay resulting from two exposure devices and the necessary deflection mechanism of the conductor plate reservoir.

Starting from a contact copying machine of the type mentioned at the outset, in which simultaneous exposure from above and below of the conductor plates is possible, the invention provides such an apparatus in such a way that the passage of the entire conductor plate row is carried out automatically and the apparatus The basis of the task is to improve the ability to quickly switch to another original under short idle times.

This object is achieved in a device of the type mentioned at the outset by the features according to the invention as set out in the characterizing part of patent claim 1. Advantageous configurations can be taken from the implementation section.

In the apparatus according to the present invention, the original plate and the conductor plate holder are formed as a double frame that can be opened parallel to the apparatus stand, and the double frame includes an exposure plate consisting of a transparent plate, an original plate, an original plate, and other transparent plates. The finished pack is used interchangeably and remains in the interlayer until all the conductor plate rows of the same circuit have passed.
7 There is one. For such passage, double frames are opened and closed at regular intervals. Keeping the principle of simultaneous double exposure on both sides, the premise is that the whole process can be automated, since a series of conductor plates can be stored in a double frame and exposed using relatively simple transport means. Since it is possible to withdraw it again later, this means that, depending on the operating costs, single-sided or double-sided exposure can be carried out on the mounting pedestal.

All devices, especially those relating to the insertable carrier plate section, are naturally equipped with positioning and vacuum suction elements.

The device according to the invention, its functioning and preferred and advantageous embodiments will be explained in more detail below with reference to the drawings, in which FIG.

As can be seen in FIG. 1, the holder is constructed from a double frame 1, the two frame parts 2, 2' being provided with parallel guides 3. A conductive plate 18 to be exposed on both sides is placed between two transparent plates 4 during an exposure process using a contact original plate 19 disposed on both sides, and each transparent plate is held in a suitable manner by one frame 5. ing. The upper frame 5 is shown in plan view in FIG. The "pack (packaging)" to be attached to the device consists of both frames 5 and transparent plates and a contact base plate 19 disposed between them, and when disposed in the frame parts 2 and 2', a conductor plate. 18 is a diagrammatically shown conductor plate carrier 16 (FIG. 2,
(Fig. 4), the two frame portions 2 of the double frame 1 move relative to each other.
2' and is dimensionally placed on the lower frame part 2'. For the mating insertion of the frame 5, the frame part 2. The ring is provided with a corresponding recess 20', into which a cover member 20 disposed on the frame 5 enters. Opposing surfaces 6 of transparent plate 4
In order to fix the original plate, the transparent plate is provided with a suction lower on its periphery, and the suction port communicates with the suction connection port 9'.

As is clear from FIG. 1, one or the other of the frames 5 can be provided with a ring-shaped sealing element 8, and one and/or the other frame can be provided with a corresponding suction connection 9 so that they can be overlapped if necessary. The entire combined pack can also be evacuated. During the exposure of all conductor rows with the same circuit, both transparent plates with the frame portion and the two master plates adsorbed remain in the exposure device, and the exposed conductor plates are transported through the device. Only during exchange with another series of circuits is a "pack" with two other master plates inserted into the device.

For parallel movement of the two frame parts 2, 2' in the device frame 10, the parallel guides of the two frame parts 2, 2' of the double frame 1 are mounted on the device frame 10 on the one hand so as to be axially movable. It is designed as a guide rod 11, with the frame part 2
is elastically supported with respect to the frame 1o, and for this purpose is provided with a compression spring 11', as can be seen in FIGS. 1 and 2. Four such guide rods 11 suspend the upper frame part 2 on the frame 10, for which purpose the upper ends of the guide rods 11 are naturally provided with suitable and, if necessary, adjustable stops 11''.

The lower frame group has four adjusting spindles movable synchronously therewith, which are likewise mounted in a suitable manner on the device frame 1o. spindle 1
2 has a chain brocket 12' at its end and maintains its synchronous operation via a chain transmission from a small drive motor 21. In place of the spindle, a pneumatic or hydraulic cylinder 12'' as shown in FIG. 6 can also be used.

In the separated position according to FIG. 2, the entire stack is inserted between the two frame parts 2, 2' and rests on part 2', after which the motor 21 is switched on. The motor rotates synchronously with the spindle 12, thereby rotating the lower frame portion 2'.
moves upwards to the other frame part 2 along with the pack placed on it.
The other frame parts can be deflected due to the elastic bearing until a suitable limit switch shuts off the motor 21. Taking into account the follow-up rotation of such a motor, the adjusting spindle 12 advantageously adjusts its respective thread groove 1.
3 is provided with a section 14 (FIG. 1) with a slope of 0°, which section is present for each turn of the screw, and a screw engaging pin (not shown) is provided in the lower frame section 2 with a section 14 (FIG. 1) having a slope of 0°. As soon as this occurs, no further stroke movements of the frame part 2' with the loaded board pack take place. This gradient 08 part 1
For example, a central angle of 600 as shown in FIG. 1 is sufficient. As mentioned above, since the conductor plate 18 is perforated at specific locations for electrical connection between the electric circuit on one side and the electric circuit on the other side, it is important to ensure that the dimensions of both original plates 19 relative to the conductor plate 18 are correct. Alignment is very important.

For this reason, both transparent plates 4 or their frames 5 are provided on at least one side with straightening elements 15 as shown in FIG. 1, which straightening elements are designed in the form of gauge holes and gauge pins.

This form of straightening element 15 is based on the premise that corresponding holes are provided in both conductor plate 18 and both original plates 19. However, it is also possible in this respect to use an optically effective straightening system, which is particularly advantageous when an automatic printed circuit board carrier 16 is used for loading or unloading printed circuit boards from a storage stack of printed circuit boards. Used when That is, for example, the edge of the conductor plate 18 gripped by the ripper of the carrier plate changer 16 must correspond exactly to the hole mask for the connection of the circuit from one side to the other from conductor plate to conductor plate. is not completely done.

However, by using an optical straightening device, the conductor plate carrier 16
It is readily possible to obtain and control the control pulses of the nozzle, and the printed circuit board carrier must of course be controllably designed and arranged in the device, for example in the form of a robot arm. A suitable light source 17 is arranged above the frame 2 and below the frame 2', by means of which a conductor plate 18 located within the device is exposed. After full exposure, frame 2,2
' are separated, the exposed conductor plate 18 is taken out by the exchange device 16, and the next exposed conductor plate 18 is brought to a specific position, after which the frames 2, 21 are brought closer together again. The light source 17 does not need to be a surface light source as shown in the figure, but rather can be provided with a single light source that can be used as a rain exposure mask and run.

The printed circuit board carrier 16 is correctly depicted in FIGS. 5 to 8, with the device frame being shown in a significantly simplified manner in FIGS. In the following description, slider 2
3 is two suction plates 23 (23" and double rod insertion opening 26
Reference is made to embodiments comprising: Furthermore, the exposure device 17, the suction connection ports for the roller and slider reservoirs are not shown.

As can be seen from FIGS. 5 and 6, a guide rail 22 is provided on the device pedestal 10 in parallel with both frame portions 2 and 21 and below the first frame portion 2, and the guide rails are connected to the pedestal on both sides. 10
protrude beyond. A feed and discharge slide 23 is slidably mounted on the guide rail 22 and is designed in the form of a downwardly directed suction plate. On the supply side, in front of the double frame 1 and between the guide rails 22, a conductor plate transfer and straightening device 25, which can be supplied by a supply means 24, is arranged. In the preferred and illustrated embodiment, slider 2
3 is equipped with two suction plates 2aj 23'', and the suction plates have a central double bar insertion opening 26. A conductor plate unloading device 24 is provided at the other end 22' of the device.

In the position shown in FIG.
A conductive plate (not shown) conveyed by the suction plate 23
' and pushed towards the right into the area of the double frame 1, the frame parts 2, 2 being spaced apart by the descent of the lower frame part, so that the suction plate 23' attracts both the frame parts 2, 2
' and the conductor plate can be lowered onto the lower frame part. The suction plate 23'' picks up the already exposed conductor plate, and then the conductor plate is lowered onto the conductor plate unloading device 32 and ejected.The slider is then returned to the left again to the position shown, so that Double frame insertion opening 2
6 is again placed on the double frame 1 and the double frame can be brought closer. 'At the same time the slider is again in the supply position,
The conductor plate at the exposure position can then be exposed on both sides. After exposure, the double frame 1 opens again, the slider 23 moves to the left again, and the amount of movement is such that the suction plate 23'' is on the lower frame part 2' and the exposed conductor is This is the extent to which the plate can be sucked by the suction plate 23''. The other suction plate 23' then suctions the new conductor plate to be exposed. Thereafter, a process similar to that described above is performed.

In the illustrated example, the circuit board transfer and straightening device 25 is designed in the form of a grid and as a lever that can be lifted relative to the slide adjustment plane 28 (see FIG. 7). This device is located on a somewhat lower plane and is necessary because the conductor plate to be exposed can be raised from below towards the suction plate 23' and brought into contact with the suction plate 23' by suction action. be. The supply means 24 are then in the form of an endless belt 23;
It is arranged so as to fit between the bars of the lever 25', which is at least partially formed in a lattice shape. Conveying device 32
is also provided with a corresponding endless chain, so that the exposed printed circuit board placed thereon can be transported in the direction of the arrow.

Naturally, the conductor plate to be exposed must be carried in in the correct position relative to the exposure original plate in the double frame 1 or its frame parts 2, 2. According to FIG. 7, for this purpose a lever 25' designed in the form of a grid is provided with a conductor plate stop 29, 29' which is stationary on one side and movable on the other side;
The stops are provided so that the inserted conductor plate (not shown) assumes the correct lateral position. If the circuit board is not yet to rest its left side edge against the circuit board stop, the circuit board stop 29' appears synchronously and presses the circuit board elastically against the other circuit board stop 29. do.

For correct longitudinal alignment, the conductor plate is provided with, for example, a small hole in its front insertion region and a gauge bin 3 with a conical end, which is retractable at the end of the conductor plate transfer and straightening device 25.
1, when the gauge pin is supplied and the conductor plate has already been aligned with respect to the conductor plate stopper 29, the longitudinal position of the conductor plate is regulated by the protrusion and retraction of the gauge pin. Stops 29'', in the form of fingers or crosspieces, with adjustable feed strokes, are provided to allow for coarse adjustment when the conductor plate runs onto the feed and straightening device 25, so that the gauge bin can be finely adjusted. After feeding the plate, its hole lies directly or almost concentrically under the gauge pin 31. Before the movement of the slider to the right, the gauge pin 31 and the stop 29" As a result, the conductor plate, which has been correctly attracted to the suction plate 23', can be moved to the exposure position and lowered onto the lower frame portion 2', and the lower frame portion is adjusted to maintain the positional accuracy at this position during transportation. A corresponding gauge pin 15 is provided to regulate the

According to FIG. 8, the slider can also be designed in such a way that on the supply side the suction plate of the slider 23 remains in its plane of arrangement and is controlled to be movable within this plane. In this embodiment, a corresponding sensor is arranged in the area of the exposure position, ie in the double frame 1, which scans the corresponding hole markings in the printed circuit board and is controllably arranged on the straightening element 27.
．． 27' (servo motor) brings the suction plate 23'' and the conductive plate attracted therein to the correct exposure position by means of a suitable electronic device, so that the lower frame portion of the double frame is not exposed at this time. =18- It is ensured that the transfer of the conductor plate to be carried out and therefore also the transfer relative to the original plate takes place in the correct position.A possible adjustment stroke of ±5 mm is sufficient for this.The movable stop and the gauge pin are used for the transfer and alignment of the conductor plate. It is also unnecessary in the range of the direct device and inside the exposure device; in this case, in the case of a slider arrangement with two suction plates, it is only necessary that only the suction plate on the supply side be formed in such a controllable manner.

Referring to FIGS. 9 to 11, preferred embodiments of the frame will now be described. In this case, the transparent plate itself serves as the original plate (so-called "glass mask").

This type of "glass master" naturally has the advantage of high exposure accuracy in close copying due to its morphological stability and low heat sensitivity compared to originals made of film materials, which is important in conductor plate exposure. be.

9 to 11, in the case of the present invention the term "light-transmissive cover" does not refer to a flat structure, but rather two, having webs 31 oriented in opposite directions and adjustable with respect to each other without play. This frame means 88.88
' has a correspondingly large light-transmitting aperture 34, and a vacuum suction port 36 is formed in an edge area 35 delimiting the light-transmitting aperture 34.
It is equipped with Both original plates 3 formed as flat glass plates
7 (glass mask) has a frame 33 inside the web 31.
．． A pair of gauge pins 39 are arranged in the edge area of 88' so as to be movable parallel to the plane, outside the range of original movement and inward of the web 31, on a plane free from the guide 38. has been done. The plane glass plate forming the original of the exposure surface reservoir can thereby be moved within the web 31 within a limited range, but sufficiently for the adjustment according to the present invention.

Seals 36' running parallel to each other at small distances
The vacuum port 36 in which it is arranged preferably has a central vacuum connection 41 with a closing valve 40. Since no other device for retaining the vacuum with respect to the flat glass plate or the original 37 is provided, the vacuum conduit 42 can be communicated with the vacuum without interruption by the frame 83, 83' or its vacuum connection 41. can.

Guides 38, which serve for precise and positional approximation of the two frames 83, 38', are preferably arranged in the form of holes 43 in the two gauge pin-free faces of one frame 33 and in the form of holes 43 in the other frame 33.
Here, concentrically with respect to the hole 43, the guide 38 is designed in the form of a ball 44 which is passed through the hole 43. Both frames 88.
83' is similarly fixed by a fixing device 45 to the frames 2, 2' of the exposure device, which can be opened relative to each other;
, 2' should have some clearance, so that the two other frames 3, 3 can be accurately aligned with each other due to the guide 38 during close driving. . The fixing device 45 of each frame 88, 83' is provided with an internal thread and is formed in the form of a hole 47 leading into the frame surrounding surface 46 on the side opposite the original plate. According to FIG. 9, if the entire pack is aligned towards the mask conductor plates for all the conductor plate rows, the pack or its frame 83, 83' entering the exposure device in a flat manner is the frame 2.
．． It can be easily fixed by a fixing screw 43 seated at 2'. Hole 47 of frame 88, 83' and frame 2
, 2' are naturally arranged concentrically. However, this has no bearing on the exact adjustment of the frame 3.3' when the frames 2, 2' approach each other; the frames 3, 3' are only responsible for the coarse adjustment of the bar 38, 83';.88' are precisely adjusted relative to each other for the guide 38, so that there is some play in the guides or bearings of the frames 2, 2'.

Holding the glass mask plates forming both master plates 37 increases the vacuum. At least in the upper frame 33', a holder 49 is provided in case the vacuum is sufficient and late but completely absent, and the holder prevents the glass mask forming the upper original plate 37 from falling out of the frame 33' if there is insufficient vacuum. ensure that

This holder 49 must of course be formed in such a way that the glass mask does not protrude, which prevents the conductor surface in question from coming into direct contact with it, or the conductor plate 18 to be exposed of the frame 33 or the glass master plate coming into contact with it. Therefore, it must be placed in a place where it would not be possible to do so. According to FIG. 9, such a pack reservoir adjustment device consists of a trough-shaped case 51 equipped with a light source 30, which case is provided with a frame shape of an abutment 53 corresponding to the opening edge 52, the abutment being It is advantageously designed in the form of a retractable bar 54 which can be moved towards one side. The housing 51 can expediently be equipped with running rollers 55 or a movable support, and the housing 51 itself can also be equipped with a vacuum connection or vacuum line 42 .

The embodiment of the frame according to FIG. 10 is treated as follows in conjunction with the adjusting device according to FIG.

First, the lower frame 33 with the case 39 is placed on the support 53 of the case 51, and then the glass mask serving as the original plate 37 for the lower side of the conductor plate 18 is fitted into this frame. Thereafter, the gauge holes of the mask conductor plate are fitted into the gauge pin pairs 39 or placed on a glass master plate forming the original plate 37. As is clear from FIG. 11, the original plate 37 protrudes the mask conductor plate 18', and as a result, the original plate 37 is directed toward the current reservoir hole 36 in the X and Y directions, so that the circuit of the original plate correctly matches the predetermined through hole 56. It will be moved as follows. This clearly and problematically occurs when the light source 50 of the regulating device is switched on. As soon as the lower master plate 87 is adjusted onto the hole 56, the vacuum is applied,
Thereby, the original plate 87 is fixed to the lower frame 33. The same straightening process is then carried out for the original plate 37 and the mask conductor plate 18', after which the upper frame 33' is placed and a vacuum is also created there. At this time, the mask conductor plate 18'
The adjustment of both master plates 37 relative to the mask conductor plate 18' is carried out without stress on the cage pin pair 39, where only the mask conductor plate 18' is adjusted.

This entire process is carried out, for example, by an exposure device during the passage of the conductor strip array. At the end of the passage, the frame 38, 38' with the glass mask is released, and the case 51, which is designed to be able to travel in an entirely advantageous manner with a new pack placed and adjusted, is exposed from the side of the passage direction. It is carried into the exposure apparatus by means of a telescopic crosspiece 54 and transferred to the corresponding frame 2, 2' of the exposure apparatus, and is secured to the frame 2 by means of a fixing device 45. It is concentric with the fixing screw 43 of the After fixing the frames 88, 38' to the frames 2, 2', they are separated and the mask conductor plates 18' are separated. As a result, the entire exposure device for the passage of the next conductor plate row is prepared, so that the conductor plates 18 of this conductor plate row to be exposed are exposed with periodic supply and correspondingly periodically exposed. If it is carried out to the other side of the device, it will form a hole. Mask conductor plate 18'
In contrast, the conductor plates, which are introduced in each case and are to be exposed, with the resist that can be exposed to light have gauge holes corresponding to the mask conductor plates 18' of the two dipin pairs 89, so that each of the conductor plates belonging to the conductor plate row Correct positioning of the conductor plate 18 with respect to both master plates 37 is ensured.

[Brief explanation of drawings]

Fig. 1 is a partial sectional view of a double frame equipped with a parallel guide device, Fig. 2 is a side view of the entire device, and Fig. 3 is a plan view of the double frame. 4 is a plan view of the transparent plate frame with the transparent plate attached, FIG. 5 is a preferential embodiment of the device, FIG. 6 is a side view of the device according to FIG. 5, =25~FIG. FIG. 8 is a plan view of a further embodiment; FIG. 9 is a cross-section of a preferred embodiment of a part of the device in a support on a further adjustment device; FIG. 10 is an enlarged sectional view of the embodiment according to FIG. 9 in the arrangement of the housing frames of the exposure apparatus, and FIG. 11 is a plan view of the frame portion on which the conductor plate is placed. Reference numeral 1 in the figure: Snake overlay frame 2.2 Shell portion 4 Transparent plate 5 Frame 6 side 7 Suction port 15 Straightening element

Claims (12)

[Claims] (1) A double-sided exposure device for conductor plates by contact copying, in which the original plate and the conductor plate are guided in parallel between two light sources on a stand equipped with a conveying element, and a portion of the original plate is placed above and below the exposure plane. In the case of a holder, the holder is formed of a double frame (1), and both frame parts (2, 2') are located in parallel positions and are movable toward each other and away from each other. The frame portions (2, 2') of the double frame (1) are fitted with a frame (5) having a straightening element (15) on at least one side,
Each one transparent plate (4) with suction openings (7) is arranged along its periphery in oppositely oriented surfaces (6), and these frames (5) have dimensions A double-sided exposure device for a conductor plate, characterized in that it is formed so as to be able to fit properly into a frame portion (2, 2'). (2) The parallel guides (3) of both frame parts (2, 2') of the double frame (1) are arranged, on the one hand, as guide rods (11) movably supported in the axial direction on the device frame (10); The associated frame part (2) is supported elastically with respect to the frame (10), and the other frame part (2') is equipped with an adjustment spindle (12), an adjustment cylinder (12'') etc. on the frame (10). supported by synchronously positionable adjustment elements,
An apparatus according to claim 1. (3) In a plane position with respect to the double frame (1) and on at least one side, the device frame (10) is placed next to the double frame.
Conductor plate carrier (16) capable of entering and exiting 0)
Claim 1, in which the conveying element is formed in the form of
The device according to paragraph 2 or paragraph 2. (4) Conductor plate carrier (16) in the equipment stand (10)
is formed by a guide rail (22) arranged parallel to both frame parts (2, 2') and below the upper frame part (2), and the guide rail has loading and unloading slides ( 23) is movably supported, this slide is designed in the form of a suction plate directed downwards, and on the inlet side is mounted in front of the double frame (1) and between the guide rails (22). 4. Device according to claim 3, characterized in that a conductor plate transport and straightening device (25) operable together with the feed conveying means (24) is arranged. (5) The slider (23) has two suction plates (23, '23
''), and a double frame insertion opening (26'') between both suction plates.
) and a conductor plate transport device (32) is arranged at the other end (22') of the guide rail (22). (6) at least one suction plate is in the slider (23);
an adjustment drive (27') held in its mechanical plane;
6. The device according to claim 4, wherein the device is formed in the plane so as to be adjustable in the X-Y direction under the control of the (7) The frame has webs (31) of opposite orientation and two frames (33
, 33'), in which both frames (33, 33') are formed.
33') is the edge area (3) that defines the light transmission aperture (34).
5) is provided with a vacuum suction port (36), and the glass master plate forming the original plate (37) is parallel to the edge area of the frame (33, 33') inside the web (32). The guide (3) is disposed movably in the web (31) and is guided (3) outside the original movement range but inwardly of the web (31)
8) A device according to claim 1, in which a pair of gauge pins (39) is arranged on a surface free from the pin. 8. Device according to claim 7, characterized in that the vacuum suction opening (36) of each frame (33, 33') is provided with a central vacuum connection (41) with a closing valve (40). (9) The guide (38) is in the form of a hole (43) on the two sides without gauge pins in the frame (33'), and in the form of a hole (43) in the other frame (33').
8. The device according to claim 7, wherein at 33) it is formed in the form of a spherical head (44) concentric with the hole (43) and inserted into the hole (43). (10) The device according to claim 7, wherein at least the upper frame (33) is provided with a holder (49) for a glass master plate. (11) The adjustment device is formed from a trough-shaped box (51) equipped with a light source (50), and the box has an opening edge (52).
8. The device according to claim 7, further comprising an abutment (53) corresponding to the shape of the frame (33, 33'). (12) The abutment (53) of the adjustment device is formed in the shape of a telescoping member (54) that can be extended toward one side;
An apparatus according to claim 11.