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JPS6116088A - Magnetic bubble memory element - Google Patents

Magnetic bubble memory element

Info

Publication number
JPS6116088A
JPS6116088A JP59135109A JP13510984A JPS6116088A JP S6116088 A JPS6116088 A JP S6116088A JP 59135109 A JP59135109 A JP 59135109A JP 13510984 A JP13510984 A JP 13510984A JP S6116088 A JPS6116088 A JP S6116088A
Authority
JP
Japan
Prior art keywords
magnetic field
magnetic
bubble memory
memory element
magnetic bubble
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59135109A
Other languages
Japanese (ja)
Inventor
Shinzo Matsumoto
信三 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59135109A priority Critical patent/JPS6116088A/en
Publication of JPS6116088A publication Critical patent/JPS6116088A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the margin of a bias magnetic field in a start-stop action mode by securing the coincidence between the direction of an intra-face holding magnetic field and the direction of the magnetization easy axis of a magnetic film for transfer and therefore decreasing the holding magnetic field. CONSTITUTION:Coincidence is secured between the direction of an intra-face holding magnetic field HDC that holds stably a magnetic bubble and the direction of an axis (a) easy for magnetization of a magnetic film of a soft magnetic pattern 3 for transfer of the magnetic bubble. As a result, the minimum holding magnetic field is minimized compared with other cases. This improves the margin of a bias magnetic field in a start-stop action mode.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は高密度化した場合に生ずるスタート・ストップ
動作特性を改善した磁気バブルメモリ素子に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a magnetic bubble memory element with improved start-stop operation characteristics that occur when the density is increased.

〔発明の背景〕[Background of the invention]

磁気バブルメモリ装置は、第1図に示すように磁気バブ
ルメモリ素子1の磁気バブルを安定に保持するため、永
久礎石2.2′によシバイアス磁界HBを印加させると
ともに、磁気バブルを駆動する回転磁界の起動または停
止時に磁気バブルを軟磁性体パターン内でスタート−ス
トップし易い位置に停止させるホールド磁界HDCが印
加されている。そして、このホールド磁界HDCは、例
えば同図に示すよりに磁気バブルメモリ素子1を傾斜配
置させたシあるいは他の永久磁石を用いて印加している
As shown in FIG. 1, in order to stably hold the magnetic bubbles of the magnetic bubble memory element 1, the magnetic bubble memory device applies a bias magnetic field HB to the permanent cornerstone 2, 2' and rotates the magnetic bubble to drive the magnetic bubble. A hold magnetic field HDC is applied to stop the magnetic bubble at a position where it is easy to start and stop within the soft magnetic material pattern when the magnetic field is started or stopped. The hold magnetic field HDC is applied using, for example, a permanent magnet in which the magnetic bubble memory element 1 is arranged obliquely as shown in the figure or another permanent magnet.

しかしながら、このホールド磁界HDCは、磁気バブル
を駆動する回転磁界の値に比べて約1/10程度となっ
ておシ、磁気バブルメモリ素子1の高密度化に伴ない、
磁性体パターンが微小化するにつれて磁気バブルを安定
に保持するにはこのホールド磁界HD c JfCよシ
生ずる軟磁性体パターン下に発生する磁気バブルトラッ
プウェルを深くする必要がある。
However, this hold magnetic field HDC is about 1/10 of the value of the rotating magnetic field that drives the magnetic bubbles, and as the density of the magnetic bubble memory element 1 increases,
As the magnetic material pattern becomes smaller, in order to stably hold the magnetic bubble, it is necessary to deepen the magnetic bubble trap well generated under the soft magnetic material pattern generated by this hold magnetic field HD c JfC.

〔発明の目的〕[Purpose of the invention]

したがって本発明は前述した問題に鑑みてなされたもの
であシ、その目的とするところは、ホールド磁界を小さ
くさ′せることによって、スタート・ストップ動作時の
バイアス磁界マージンヲ向上させた磁気バブルメモリ素
子を提供することにある。
Therefore, the present invention has been made in view of the above-mentioned problems, and its object is to provide a magnetic bubble memory element that improves the bias magnetic field margin during start/stop operations by reducing the hold magnetic field. Our goal is to provide the following.

〔発明の概要〕[Summary of the invention]

このような目的を達成するために本発明は、磁気バブル
を駆動させる軟磁性体パターンに蒸着後あるいはスパッ
タリング後に生ずる面内異方性磁化容易軸の方向と、軟
磁性体パターン形成後に磁気バブルメモリ素子に印加す
るホールド磁界方向とを一致させたものである。
In order to achieve such an object, the present invention aims to determine the direction of the easy axis of in-plane anisotropy magnetization that occurs after vapor deposition or sputtering on a soft magnetic material pattern that drives magnetic bubbles, and the direction of the easy axis of magnetization in a magnetic bubble memory after forming the soft magnetic material pattern. The direction of the hold magnetic field applied to the element is made to match.

すなわち、第2図は一例としてG−G−G基板上に軟磁
性体膜をスパッタリングした後に矢印a方向およびb方
向における磁化量Mと外部磁界Hとの関係を示したもの
である。同図において、このMHループの形状はスパッ
タリングの基板バイアスの値や製作する軟磁性体膜の膜
厚等の条件で変化し、また蒸着では蒸着時の基板温度で
変化することが知られている。さらに磁化容易軸の方向
(a方向)、困難軸の方向(b方向)もスパッタリング
、蒸着条件で制御できることがIEEE MAG−15
,N06.P1821〜P1823(1979年)に論
じられている。なお、Hcは保持力、&は異方性磁界を
示し、−例としてHcTho、4δe+ Hz”5δe
となる。また、軟磁性体パターン形成後は、パターン形
状から生ずる異方性のため、前述したMKループは回転
磁界の方向、パターン形状等に影響されて大幅に変化す
るが、軟磁性体膜作成時に生じた面内異方性の影響は保
存される。このため、同一形状パターンを使用すると、
a方向に磁化した場合がb方向よシも大きい磁化量を得
ることができる。すなわち、このa方向をスタート−ス
トップ動作のホールド磁界と一致させることで動作特性
を改善させることができる。
That is, FIG. 2 shows, as an example, the relationship between the amount of magnetization M and the external magnetic field H in the directions of arrows a and b after sputtering a soft magnetic film on a G-G-G substrate. In the figure, it is known that the shape of this MH loop changes depending on conditions such as the value of the substrate bias during sputtering and the thickness of the soft magnetic film to be produced, and it is also known that it changes depending on the substrate temperature during evaporation. . Furthermore, IEEE MAG-15 shows that the direction of the easy axis of magnetization (a direction) and the direction of the hard axis (b direction) can also be controlled by sputtering and vapor deposition conditions.
, N06. P1821-P1823 (1979). In addition, Hc is a coercive force, & is an anisotropic magnetic field, and - for example, HcTho, 4δe+ Hz”5δe
becomes. In addition, after the soft magnetic material pattern is formed, due to the anisotropy caused by the pattern shape, the MK loop described above changes significantly due to the influence of the direction of the rotating magnetic field, the pattern shape, etc. The effect of in-plane anisotropy is preserved. Therefore, if you use the same shape pattern,
When magnetized in the a direction, a larger amount of magnetization can be obtained than in the b direction. That is, by making this direction a coincide with the hold magnetic field of the start-stop operation, the operating characteristics can be improved.

〔発明の実施例〕[Embodiments of the invention]

次に図面を用いて本発明の実施例を詳細に説明する。 Next, embodiments of the present invention will be described in detail using the drawings.

第3図は本発明による磁気バブルメモリ素子の一例を説
明するための磁気バブル転送路の要部拡大平面図である
。同図において、3は磁気バブル転送路を構成するシェ
ブロンと称される軟磁性体パターン、aは軟磁性体パタ
ーン3の形成前の軟磁性体膜の磁化容易軸方向、bはそ
の困難軸方向、)IDCはホールド磁界を示し、同図で
はホールド磁界HDC方向と磁化容易軸方向aとを一致
させる場合と、ホールド磁界HDC方向と磁化困難軸方
向すとを一致させる場合とをそれぞれ示している。
FIG. 3 is an enlarged plan view of a main part of a magnetic bubble transfer path for explaining an example of a magnetic bubble memory element according to the present invention. In the figure, 3 is a soft magnetic material pattern called a chevron that constitutes a magnetic bubble transfer path, a is the easy axis direction of magnetization of the soft magnetic material film before forming the soft magnetic material pattern 3, and b is its hard axis direction. , ) IDC indicates the hold magnetic field, and the figure shows the case where the hold magnetic field HDC direction and the easy magnetization axis direction a match, and the case where the hold magnetic field HDC direction and the hard magnetization axis direction a match, respectively. .

このよりにして2種類の磁気バブルメモリ素子を製作し
てその素子の特性を測定した結果、第4図に示すような
データが得られた。すなわち、第4図は縦軸にバイアス
磁界マージンΔMuを、横軸にホールド磁界HDCをそ
れぞれ示したものである。同図において、前述したよう
に磁化容易軸方向aとホールド磁界HDC方向とを一致
式せた場合には曲線A、A’が得られ、また磁化困難軸
方向すとホールド磁界HDC方向とを一致させた場合に
は曲線B、B’が得られた。したがって、同図から明ら
かなように磁化容易軸方向aとホールディング磁界Hp
c方向が一致するように磁気バブルメモリ素子を構成す
ることによシ、最小ホールド磁界HDCを最も小さくす
ることができる。
Two types of magnetic bubble memory devices were fabricated in this manner and the characteristics of the devices were measured, and as a result, data as shown in FIG. 4 was obtained. That is, in FIG. 4, the vertical axis shows the bias magnetic field margin ΔMu, and the horizontal axis shows the hold magnetic field HDC. In the same figure, when the easy axis direction a of magnetization and the HDC direction of the hold magnetic field are matched as described above, curves A and A' are obtained, and the direction of the hard axis of magnetization and the HDC direction of the hold magnetic field are matched. In this case, curves B and B' were obtained. Therefore, as is clear from the figure, the easy magnetization axis direction a and the holding magnetic field Hp
By configuring the magnetic bubble memory elements so that the c directions coincide with each other, the minimum hold magnetic field HDC can be made the smallest.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、最小ホールド磁界
を最も小さくすることができるので、スタート・ストッ
プ動作時のバイアス磁界マージンを向上させ、磁気バブ
ルメモリ素子の駆動マージンの増加に寄与できるという
極めて優れた効果が得られる。
As explained above, according to the present invention, since the minimum hold magnetic field can be made the smallest, it is possible to improve the bias magnetic field margin during start/stop operation, and contribute to an increase in the drive margin of the magnetic bubble memory element. Excellent effects can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は磁気バブルメモリ素子のホールド磁界の印加方
法を説明するための磁気バブルメモリ装置の要部断面、
構成図、第2図はパターン形成前の軟磁性体#MHルー
プを示す図、第3図は本発明による磁気バブルメモリ素
子の一実施例を説明するための磁気バブル転送路の要部
平面図、第4図は磁気バブルメモリ素子のホールド磁界
特性を示す図である。 IIII+−・磁気バブルメモリ素子、2.2’・代理
人  弁理士高橋門人゛・・−ソ 第1図 第4図 ホーL )、44i Hoc(oe) 第2図
FIG. 1 is a cross section of a main part of a magnetic bubble memory device for explaining a method of applying a hold magnetic field to a magnetic bubble memory element.
2 is a diagram showing the soft magnetic material #MH loop before pattern formation, and FIG. 3 is a plan view of a main part of a magnetic bubble transfer path for explaining an embodiment of the magnetic bubble memory element according to the present invention. , FIG. 4 is a diagram showing the hold magnetic field characteristics of the magnetic bubble memory element. III+-・Magnetic bubble memory element, 2.2'・Representative: Patent attorney Monto Takahashi...-So Fig. 1 Fig. 4 Ho L), 44i Hoc (oe) Fig. 2

Claims (1)

【特許請求の範囲】[Claims] 磁気バブルを安定に保持させる面内ホールド磁界方向と
、前記磁気バブルを転送させる磁性体膜の該膜形成後に
発生する磁化容易軸方向とを一致させたことを特徴とす
る磁気バブルメモリ素子。
A magnetic bubble memory element characterized in that the direction of an in-plane holding magnetic field for stably holding magnetic bubbles and the direction of the easy axis of magnetization generated after formation of the magnetic film for transferring the magnetic bubbles are made to coincide.
JP59135109A 1984-07-02 1984-07-02 Magnetic bubble memory element Pending JPS6116088A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59135109A JPS6116088A (en) 1984-07-02 1984-07-02 Magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59135109A JPS6116088A (en) 1984-07-02 1984-07-02 Magnetic bubble memory element

Publications (1)

Publication Number Publication Date
JPS6116088A true JPS6116088A (en) 1986-01-24

Family

ID=15144043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59135109A Pending JPS6116088A (en) 1984-07-02 1984-07-02 Magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPS6116088A (en)

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