JPS61124424A - Conveying device - Google Patents

Abstract

PURPOSE:To reduce the size of the whole conveying device by vertically moving belts up and down in parallel in the change-direction conveying device combined with the first belts extending in one direction and the second belts recessed at the intersection area. CONSTITUTION:The first belts 1, 2 are suspended across pelleys 1a-1d and 2a-2d. Next, the second belts 3, 4 are suspended across pulleys 3a-3i, and 4a-4i and intersect the first belts 1, 2. A cross rod 9 is fitted to a motor 10 to connect a connecting rod 7, the first belts 1, 2, a connecting rod 8, and the second belts 4, 4. This device mainly conveys a thin-plate material, and when the thin-plate material is moved to the intersection, the motor 10 is rotated to incline the cross rod 9 and the connecting rods 7, 8. As a result of this action, the first belts 1, 2 are lowered or raised and the second belts 3, 4 are raised or lowered to shift the thin-plate material to the upper belt.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a transport device, and particularly to a transport device for transporting a thin plate object such as a wafer for manufacturing semiconductor circuit elements while changing the direction.

[Prior Art] Fig. 3 shows a conventional direction changing conveyance device. In the figure 1
1 is a thin plate to be conveyed, 12 is a fixing belt, 13a to 131
14 is a vertically movable belt, 14 to 22 are booms of the vertically movable belt, and in particular 14 is a fulcrum of the vertically movable belt which is supported like a cantilever and rotates.

Pulleys 15, 16, 17, 18 and 19 recess the vertically movable belt in the area directly below the fixed belt 12 and intersecting the fixed belt. In operation, when the thin plate 11 being conveyed on the fixed belt 12 comes to the intersection of the fixed belt 12 and the vertically moving belt, when the thin plate 11 is to be conveyed by changing its direction, the fulcrum point is The vertically movable belt is rotated around the pulley 14 to bring the free end pulley 20 to the same level as the fulcrum pulley 14. The vertically movable belt supports the thin plate 11 and moves to a higher position than the fixed belt 12, and conveys the thin plate 11 in a direction intersecting the fixed belt 12.

[Problems to be Solved by the Invention] In the structure of this conventional conveying device, the fulcrum is placed far away from the fixed belt in order to prevent the thin plate from colliding with the rotating fulcrum of the vertically movable belt or the inclined portion of the belt in the vicinity thereof. Moreover, since the height is changed by rotation, the entire device becomes large.

[Means for Solving the Problems and Their Effects] The object of the present invention is to solve the above-mentioned problems and to minimize the size of a device for changing the direction of a thin plate and conveying it.

This object is achieved according to the invention by providing a first belt extending in one direction, a second belt extending in a direction transverse to said one direction and being recessed in the area intersecting said first belt; and a belt lifting device that relatively moves both or one of the first belt and the second belt in parallel up and down to place one of the belts at a higher or lower position than the other belt. This is achieved by a conveying device equipped with.

That is, instead of the rotation in the conventional conveying device, the thin plate is transferred from one belt to the other by vertical vertical parallel movement to create a step in the area where the two belts intersect. This eliminates the need to extend the intersecting belt to avoid collision between the fulcrum of the conveying device and the thin plate, reducing the overall size of the conveying device.

[Embodiment] FIG. 1 and FIG. 2 show an embodiment of the present invention. In these figures, 1 and 2 are endless strings that constitute the first belt;
a-1d: 2a-2d Ham end strings 1 and 2 belt pulleys. Similarly, 3 and 4 are endless strings forming the second belt, 3a-3i; 4a-4i
are the belt pulleys of endless strings 3 and 4.

10 is a rotating force generator or motor, to which a cross rod 9 is attached. A connecting rod 7 connects one end of the cross rod to the first belt, and a connecting rod 8 connects the other end of the cross rod to the second belt.

As shown in the figure, the second belt is four-sided in the area where it intersects with the first belt. That is, the pulleys 3Q and 3e of the slit tongue 3 of the second belt.

3C and pulley 4 of string 4 (J, 4e, 4c are higher than pulleys 3f, 3d of string 3 of the second belt and pulleys 4f, 4d of string 4 of the second belt, which are directly below strings 1 and 2 of the first belt. The strings 3 and 4 of the second belt are located at a high position and hang over the boob arranged in this way.
is recessed just below strings 1 and 2 of the first belt.

In operation, when a thin plate conveyed by the first belt is transferred to the second belt, when the thin plate reaches the intersection of both belts, the motor 10 rotates and tilts the cross rod 9 to move the connecting rod. 7.8 by lowering the first belt and raising the second belt to transfer the sheet to the second belt, driving the second belt to transport the sheet in the cross direction.

In this embodiment, both the first belt and the second belt are moved up and down relatively at the same time to create a step at the intersection, but only one belt is moved up and down with respect to the other belt and crossed. It is also possible to create a step in the sag.

[Effects of the invention j As is clear from the description, according to the present invention, both or either of the first belt and the second belt can be moved in parallel up and down relatively to create a step in the area where both belts intersect. By configuring it so that it can be tightened, the size of the conveying device can be minimized.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a belt of an embodiment of the conveying device of the present invention. FIG. 2 is a side view of the conveying device of FIG. 1. FIG. 3 is a side view of a conventional conveyance device. In the figure: 1; 2: first belt, 1 a-1d: 2a-2d: belt pulley of the first belt, 3; 4: second belt, 3a-3i; 4a-4i: second bell 1- belt pulley, 5: driving direction of the first belt, 6: driving direction of the second belt, 7: connecting shaft of the first belt, 8; connecting shaft of the second belt, 9: cross rond , 10: Motor.

Claims (1)

[Claims] 1. A first belt that extends in one direction; A second belt that extends in a direction that intersects with the one direction and is recessed in an area where it intersects with the first belt. , and a belt lifting device that relatively moves both or either of the first belt and the second belt in parallel up and down to place one of the belts at a higher or lower position than the other belt. A conveying device characterized by comprising: 2. The conveying device according to claim 1, wherein the first belt and the second belt each comprise two endless strings extending in parallel.