JPS61121817A - Wire for wire saw - Google Patents
Wire for wire sawInfo
- Publication number
- JPS61121817A JPS61121817A JP24299084A JP24299084A JPS61121817A JP S61121817 A JPS61121817 A JP S61121817A JP 24299084 A JP24299084 A JP 24299084A JP 24299084 A JP24299084 A JP 24299084A JP S61121817 A JPS61121817 A JP S61121817A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- wire body
- abrasive grains
- workpiece
- crack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
- B23D61/185—Saw wires; Saw cables; Twisted saw strips
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体、セラミックス等硬質材料の切断に用い
るワイヤーソー用ワイヤーに関する0〔従来の技術〕
ワイヤーソーは、ピアノ線、タングステン線などの抗張
力が大きく硬い金属線を、張力を加えた状態で往復動さ
せつつ、被加工物に圧接し、金属線と被加工物との間に
カーポランダム粉等の硬い砥粒を流し込み金属線の移動
に伴なって運動する砥粒によって被加工物を研削し切断
するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a wire for a wire saw used for cutting hard materials such as semiconductors and ceramics. A large, hard metal wire is moved back and forth under tension and is pressed against the workpiece, and hard abrasive grains such as carporundum powder are poured between the metal wire and the workpiece to control the movement of the metal wire. The workpiece is ground and cut using abrasive grains that move accordingly.
現在使用されているソーワイヤーは表面が滑らかである
ため、砥粒を移動させる力が弱く切断速度を向上できな
い。ワイヤーと砥粒との相対変位を防ぐためにワイヤー
に、銅、ニッケル、半田λ真鍮のような比較的軟かい金
属のコーティングを施し、ワイヤーを被加工物へ押しつ
ける力で、砥粒をワイヤーのコーティング層に食い込ま
せ、ワイヤーと砥粒の相対変位を防ぎワイヤーの摩耗を
防ぐようにしたものが特公昭52−14873号公報に
て公知であるが、砥粒が容易に食い込むようなコーティ
ング層は、またコーティング層が短時間で摩耗してなく
なり、結局はコーティング層のない表面の滑らかなワイ
ヤーとなって切断速度が低下してしまう。The saw wires currently in use have a smooth surface, so the power to move the abrasive grains is weak and cutting speed cannot be improved. To prevent relative displacement between the wire and the abrasive grains, the wire is coated with a relatively soft metal such as copper, nickel, or solder lambda brass, and the abrasive grains are coated on the wire by the force of pressing the wire against the workpiece. A coating layer in which the abrasive particles bite into the layer to prevent relative displacement between the wire and the abrasive grains and prevent wire wear is known from Japanese Patent Publication No. 14873/1982. In addition, the coating layer wears away in a short period of time, resulting in a wire with a smooth surface without a coating layer, reducing the cutting speed.
本発明は上記した従来のワイヤーよりも砥粒をよく移動
させうると共に、この砥粒移動作用を長くもたせること
のできるワイヤーソー用ワイヤーを供せんとするもので
ある。The present invention aims to provide a wire for a wire saw that can move abrasive grains better than the above-mentioned conventional wires and can maintain this abrasive grain movement effect for a long time.
本発明は金属線の表面にクラック溝を有する金属の被覆
層を設けたことを特徴とするワイヤーソー用ワイヤーを
構成したものである。The present invention constitutes a wire for a wire saw, characterized in that a metal coating layer having crack grooves is provided on the surface of the metal wire.
本発明ワイヤーは、ピアノ線、タングステン線の表面に
、展延性に乏しいか又は加工硬化の大きい金属、例えば
ニッケル、コバルト、鉄、亜鉛合金等のメッキを施し、
冷間伸線することにより、メッキ層を加工硬化し、同時
にメッキ層にクラック溝を発生させたり、金属線の表面
に樹脂のマスキングを斑状にローラーで施して硬質メッ
キを施し、マスキング部を溶解して除去し、除去した跡
をクラック溝とする等して作ることができる。The wire of the present invention is made by plating the surface of piano wire or tungsten wire with a metal that has poor malleability or is highly work hardened, such as nickel, cobalt, iron, zinc alloy, etc.
By cold wire drawing, the plated layer is work-hardened, and at the same time crack grooves are generated in the plated layer, and resin masking is applied to the surface of the metal wire in spots with a roller to form a hard plating, and the masking part is melted. It is possible to create a crack groove by removing the crack by removing the crack.
上記のワイヤーを2本あるいは3本撚り合わせ撚線にし
て使用しても良い。Two or three of the above wires may be twisted to form a twisted wire.
本発明ワイヤーでは表面にクラック溝を設けたことによ
り、第2図に示すように、ワイヤーと被加工物Φとの間
に供給した低位5が、被覆層2に形成したクランク溝3
に入り込み、ワイヤーの往復運動に従って、砥粒5を強
制的に被加工物ヰの表面に対し摺動させるので、研削量
が増し、切断速度が向上する。そして被覆層2が硬質金
属で形成されている場合は被覆層2は容易に摩耗せず、
摩耗し易いクラック溝3の入口角部が摩耗してクラック
溝3が滑らかな四部となっても、砥粒5を強制的に移動
させる作用は残るので、切断速度は表面の滑らかなワイ
ヤーよりも優れ、表面に軟かい金属のコーティング層を
設けたものより長期に優れた切れ味を持続させうる。又
、比較的軟かい金属にてクランク溝のある被覆層を形成
した場合でも同様な効果を得られる。By providing the crack grooves on the surface of the wire of the present invention, as shown in FIG.
Since the abrasive grains 5 are forced to slide against the surface of the workpiece according to the reciprocating motion of the wire, the amount of grinding increases and the cutting speed increases. If the coating layer 2 is made of hard metal, the coating layer 2 will not be easily worn out.
Even if the entrance corners of the crack grooves 3, which are prone to wear, are worn out and the crack grooves 3 become smooth four parts, the effect of forcibly moving the abrasive grains 5 remains, so the cutting speed is faster than that of a wire with a smooth surface. It has excellent cutting ability and can maintain its sharpness for a longer period of time than those with a soft metal coating layer on the surface. Further, the same effect can be obtained even when the coating layer with crank grooves is formed of a relatively soft metal.
また、金属線を2本あるいは3本撚り合わせて撚線とし
たワイヤーを使用すると、第3図に示すように撚り合わ
せた面に砥粒5が抱えられ、ワイヤーの往復運、動に従
い砥粒を強制的に移動させるので、クラック溝3の作用
にこの作用が加わり切断速度を一層向上できる。In addition, when a twisted wire made by twisting two or three metal wires is used, the abrasive grains 5 are held on the twisted surface as shown in Fig. 3, and the abrasive grains follow the reciprocating movement and movement of the wire. Since it is forcibly moved, this action is added to the action of the crack groove 3, and the cutting speed can be further improved.
直径Q、5mまで伸線したピアノ線の表面に硬質ニッケ
ルメッキを5μmの厚さにメッキし、ダイスを通して直
径0.16fimまで伸線した。得られたワイヤーは、
第1図に示すように、ピアノ線1の表面に施したニッケ
ルメッキの被覆層2に多数のクラック溝3が形成されて
いた。The surface of a piano wire drawn to a diameter Q of 5 m was plated with hard nickel plating to a thickness of 5 μm, and the wire was drawn to a diameter of 0.16 fim through a die. The resulting wire is
As shown in FIG. 1, a large number of crack grooves 3 were formed in the nickel-plated coating layer 2 applied to the surface of the piano wire 1.
直径0.16 msのピアノ線、直径Q、14m5のピ
アノ線に10μmの厚さに銅メッキしたままの外径0.
16鴎の銅メツキ被覆ピアノ線と共に、一定条件下で切
断試験を行なった。Piano wire with a diameter of 0.16 ms, diameter Q, 14 m5 piano wire plated with copper to a thickness of 10 μm, an outer diameter of 0.
A cutting test was conducted under certain conditions with the copper-plated piano wire of No. 16.
ピアノ線のままのものを1とすると、銅メツキ被覆ビア
/線は1.2倍、上記本発明ワイヤーでは2.3倍の速
度で切断できた。If the raw piano wire was set as 1, the copper plating coated via/wire could be cut at a speed of 1.2 times, and the wire of the present invention could be cut at a speed of 2.3 times.
また耐久性も、本発明ワイヤーはピアノ線、銅メツキ被
覆ピアノ線の1.5倍であった。Furthermore, the durability of the wire of the present invention was 1.5 times that of piano wire and copper-plated piano wire.
本発明によれば、切断速度、耐久性共に従来より優れた
ワイヤーソー用ワイヤーを提供できる。According to the present invention, it is possible to provide a wire for a wire saw that is superior in cutting speed and durability to conventional wire saws.
第1図は本発明によるワイヤーソー用ワイヤーの一実施
例の一部側面図、第2図は本発明ワイヤーの作用説明図
、第3図は本発明ワイヤーの他の実施例の作用説明図で
ある。Fig. 1 is a partial side view of one embodiment of the wire for a wire saw according to the present invention, Fig. 2 is an explanatory diagram of the action of the wire of the invention, and Fig. 3 is an explanatory diagram of the action of another embodiment of the wire of the invention. be.
Claims (2)
を有することを特徴とするワイヤーソー用ワイヤー。(1) A wire for a wire saw, characterized by having a metal coating layer having crack grooves on the surface of the metal wire.
記載のワイヤーソー用ワイヤー。(2) The wire for a wire saw according to claim (1), wherein the metal wire is a stranded wire.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24299084A JPS61121817A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24299084A JPS61121817A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61121817A true JPS61121817A (en) | 1986-06-09 |
JPS6347583B2 JPS6347583B2 (en) | 1988-09-22 |
Family
ID=17097252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24299084A Granted JPS61121817A (en) | 1984-11-16 | 1984-11-16 | Wire for wire saw |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61121817A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4856490A (en) * | 1987-09-09 | 1989-08-15 | Osaka Diamond Industrial Co., Ltd. | Wire saw |
JP2001198790A (en) * | 2000-01-18 | 2001-07-24 | Seiko Epson Corp | Wire and wire saw |
CN101823240A (en) * | 2009-03-02 | 2010-09-08 | 住友电气工业株式会社 | Diamond wire saw and manufacturing method of diamond wire saw |
CN102152416A (en) * | 2011-01-27 | 2011-08-17 | 王楚雯 | Diamond fretsaw and manufacture method thereof |
CN102166792A (en) * | 2011-01-27 | 2011-08-31 | 王楚雯 | Diamond fret saw and manufacture method thereof |
CN102172995A (en) * | 2011-01-27 | 2011-09-07 | 王楚雯 | Metal composite wire and preparation method thereof |
CN102172994A (en) * | 2011-01-27 | 2011-09-07 | 王楚雯 | Metal composite wire, preparation method thereof and metal wire |
-
1984
- 1984-11-16 JP JP24299084A patent/JPS61121817A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4856490A (en) * | 1987-09-09 | 1989-08-15 | Osaka Diamond Industrial Co., Ltd. | Wire saw |
JP2001198790A (en) * | 2000-01-18 | 2001-07-24 | Seiko Epson Corp | Wire and wire saw |
CN101823240A (en) * | 2009-03-02 | 2010-09-08 | 住友电气工业株式会社 | Diamond wire saw and manufacturing method of diamond wire saw |
CN102152416A (en) * | 2011-01-27 | 2011-08-17 | 王楚雯 | Diamond fretsaw and manufacture method thereof |
CN102166792A (en) * | 2011-01-27 | 2011-08-31 | 王楚雯 | Diamond fret saw and manufacture method thereof |
CN102172995A (en) * | 2011-01-27 | 2011-09-07 | 王楚雯 | Metal composite wire and preparation method thereof |
CN102172994A (en) * | 2011-01-27 | 2011-09-07 | 王楚雯 | Metal composite wire, preparation method thereof and metal wire |
Also Published As
Publication number | Publication date |
---|---|
JPS6347583B2 (en) | 1988-09-22 |
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