JPS61121234A - Manufacture of anode - Google Patents
Manufacture of anodeInfo
- Publication number
- JPS61121234A JPS61121234A JP24280784A JP24280784A JPS61121234A JP S61121234 A JPS61121234 A JP S61121234A JP 24280784 A JP24280784 A JP 24280784A JP 24280784 A JP24280784 A JP 24280784A JP S61121234 A JPS61121234 A JP S61121234A
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- glass plate
- anode
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/18—Luminescent screens
- H01J29/30—Luminescent screens with luminescent material discontinuously arranged, e.g. in dots, in lines
- H01J29/32—Luminescent screens with luminescent material discontinuously arranged, e.g. in dots, in lines with adjacent dots or lines of different luminescent material, e.g. for colour television
- H01J29/327—Black matrix materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/18—Luminescent screens
- H01J29/28—Luminescent screens with protective, conductive or reflective layers
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、映像情報機器分野の平板型画像表示装置に使
用するアノードの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing an anode used in a flat panel image display device in the field of video information equipment.
従来例の構成とその問題点
従来の画像表示装置のアノードの製造方法は、第1図に
その具体構成を示すように、アノードガラス板1面上に
螢光面2が形成されている。この前記螢光面2に当たる
電子ビームは、数10KVの高圧下であるため、結晶性
フリット3によって450″C×1h焼成し、固定しで
あるアノード端子4に、途中で放電せず全て流れ込ませ
るためには、前記螢光面2からはずしてアノードガラス
板1面上にL字形の銀ペースト6を塗布し、前記アノー
ド端子4に接続させた後、450″C×1h焼成して、
前記螢光面2に当たる全電子ビーム流tアノード端子4
から画像表示装置の外部へ逃がす必要があり、アノード
の製造工程上手作業で銀ペーストを塗布・焼成するため
、工数1多く要する問題があった。また、螢光面2は、
数10Kvの高圧で加速された電子ビーム流が全て当た
るため温度が極めて高くなり、前述の放電防止のために
塗布・焼成したL字形の銀ペースト5から、メタン、−
酸化炭素、二酸化炭素等のガス放出が発生し、画像表示
装置中のカソードのエミ/ヨ/性能全大巾低下させ、表
示装置の寿命を短かくさせる問題があった。尚、第2図
は、第1図のアノードガラスの具体構成を示すものであ
り、アノードガラス板1面上に、露光法によシブラック
スドライブ2&、螢光体Rストライプ2b、螢光体Gス
トライプ2C,螢光体Bストライプ2al交互に形成し
た後、ラッカー液2eを噴射塗布・乾燥し、更に、アル
ミを蒸着してメタルバック面2f全、前記のアノードガ
ラス板1面上に形成して製造されている。Conventional Structure and Its Problems In the conventional method of manufacturing an anode for an image display device, as shown in FIG. 1, a fluorescent surface 2 is formed on an anode glass plate 1. Since the electron beam hitting the fluorescent surface 2 is under high pressure of several tens of KV, it is fired for 450"C x 1 hour by the crystalline frit 3 and completely flows into the fixed anode terminal 4 without discharging in the middle. In order to do this, apply an L-shaped silver paste 6 on the anode glass plate 1 after removing it from the fluorescent surface 2, connect it to the anode terminal 4, and then bake it at 450"C x 1h.
The total electron beam current hitting the fluorescent surface 2 t anode terminal 4
It is necessary to release the silver paste to the outside of the image display device, and since the silver paste is coated and fired during the anode manufacturing process, there is a problem in that it requires one more man-hour. In addition, the fluorescent surface 2 is
The temperature becomes extremely high as the entire electron beam flow accelerated at a high pressure of several tens of Kv hits, and methane, -
There is a problem in that gases such as carbon oxide and carbon dioxide are released, which reduces the overall emission/reduction/performance of the cathode in the image display device and shortens the life of the display device. FIG. 2 shows the specific structure of the anode glass shown in FIG. 1. On one surface of the anode glass plate, a Sibrax drive 2&, a phosphor R stripe 2b, and a phosphor G are formed by an exposure method. After forming stripes 2C and phosphor B stripes 2al alternately, lacquer liquid 2e is applied by spraying and dried, and aluminum is further vapor-deposited to form the entire metal back surface 2f and the anode glass plate 1 surface. Manufactured.
発明の目的
本発明は、上記従来の欠点全解消するものであり、製造
方法を簡素化すると同時に、寿命の長い画像表示装置を
提供するものである。OBJECTS OF THE INVENTION The present invention eliminates all of the above-mentioned conventional drawbacks, simplifies the manufacturing method, and at the same time provides an image display device with a long life.
発明の構成
本発明は平面ガラス板の面上に、露光法によるブラック
ストライプと螢光体R,G、Bの各ストライプを形成す
る工程の前に、酸化インジウムと酸化スズの混合物iL
L字形蒸着し透明導電膜を形成する工程を設けたことに
より、後工程として′の銀ペーストの塗布・乾燥工程が
削減でき製造工程を簡素化できる。また、アノード面の
ガス放出源である銀ペーストが削減できるので、画像表
示装置の寿命上、きわめて有利である。Structure of the Invention The present invention is characterized in that a mixture of indium oxide and tin oxide iL is applied to the surface of a flat glass plate before the step of forming a black stripe and each stripe of phosphors R, G, and B by an exposure method.
By providing the step of forming a transparent conductive film by L-shaped vapor deposition, the subsequent step of applying and drying the silver paste can be omitted and the manufacturing process can be simplified. Furthermore, since the amount of silver paste, which is a source of gas emission on the anode surface, can be reduced, this is extremely advantageous in terms of the life of the image display device.
、 実施例の説明
以下に、本発明の一実施例を第3〜6図にもとづいて説
明する。第3図は、本発明の実施例における透明導電膜
を形成した状態を示すものである。, Description of Embodiment An embodiment of the present invention will be described below with reference to FIGS. 3 to 6. FIG. 3 shows a state in which a transparent conductive film is formed in an example of the present invention.
第3図において、1は、超音波洗浄により洗浄した平面
ガラス板であり、6は、酸化インジウムと酸化スズの混
合物iLL字形蒸□着して形成した透明導電膜を示すも
のである。次に、第4図にもとづいて、前記のL字形の
透明導電膜の形成工程を説明する。In FIG. 3, 1 is a flat glass plate cleaned by ultrasonic cleaning, and 6 is a transparent conductive film formed by depositing a mixture of indium oxide and tin oxide in an iLL shape. Next, the process of forming the L-shaped transparent conductive film will be explained based on FIG.
第4図において、7はローターポンプ8と拡散ポンプ9
により排気され、真空度が3X10 torrに達し
ている蒸着槽、平面ガラス板1は、マスキング金具1o
と固定治具11によって設定されており、前記平面ガラ
ス板1ばその背面側からヒーター12によって、300
〜360℃に加熱されている。一方、銅製のルツボ13
中には、酸化インジウムと酸化スズの混合物e6らかじ
め熱プレス法により圧縮成形した錠剤14が入っており
、酸素ガスボンベ1Sから酸素ガスを蒸着槽T中に供給
し、真空度がI X 10 torrへ低下したこと
を真空計16にて確認した後、電子ビーム発生装置17
から電子ビームを発生させ、前記酸化物錠剤に電子ビー
ム’lて、対向する前記ガラス板1上に蒸着して、L字
形の透明導電膜を形成している。その後、前記蒸着した
以外のガラス板の面上に、露光法によりブラックストラ
イプと螢光体R,G、Hの各ストライプを、交互に形成
し、更に、前記ストライプ面上にラッカー液を噴射塗布
乾燥してラッカー膜を形成する。前記ラッカー膜面上に
アルミニウムを蒸着させメタルバック膜を形成する。そ
して、第5図に示すように、前記り字形の透明導電膜6
の交差部のメタルバンク膜2ff除去した後、アノード
端子4を結晶性フリット3により450’CX1h焼成
して固定すると同時に、アノード自身の焼成もしてアノ
ードが製造される。この製造方法により、手作業が大巾
になくなり、また、信頼性も著しく高くすることができ
るものである。In FIG. 4, 7 is a rotor pump 8 and a diffusion pump 9.
The vapor deposition tank is evacuated to a degree of vacuum of 3×10 torr, and the flat glass plate 1 is placed in a masking metal fitting 1o.
is set by the fixing jig 11, and the heater 12 is used to heat the flat glass plate 1 from the back side.
Heated to ~360°C. On the other hand, copper crucible 13
Inside, there is a tablet 14 which has been compression-molded in advance by a hot press method, which is a mixture of indium oxide and tin oxide. After confirming with the vacuum gauge 16 that the torr has decreased, the electron beam generator 17
An electron beam is generated from the oxide tablet, and the oxide tablet is evaporated onto the glass plate 1 facing the oxide tablet to form an L-shaped transparent conductive film. Thereafter, black stripes and stripes of phosphor R, G, and H are alternately formed by an exposure method on the surface of the glass plate other than the one on which the vapor deposition was performed, and then a lacquer liquid is sprayed onto the stripe surface. Dry to form a lacquer film. Aluminum is deposited on the surface of the lacquer film to form a metal back film. Then, as shown in FIG.
After removing the metal bank film 2ff at the intersection, the anode terminal 4 is fired and fixed by a crystalline frit 3 for 450'CX1h, and at the same time, the anode itself is fired to produce an anode. This manufacturing method eliminates a large amount of manual labor and also significantly increases reliability.
発明の効果
このように本発明では、あらかじめ電子ビーム蒸着法に
より、アノードの螢光面に当る電子ビームiL字形の透
明導電膜で全て集め、アノード端子へ導き、最終的に画
像表示装置の外部へ逃がし、画像表示装置中での数10
KVの印加時に発生する放電を解消することができる。Effects of the Invention As described above, in the present invention, by using the electron beam evaporation method, the electron beams hitting the fluorescent surface of the anode are all collected by the iL-shaped transparent conductive film, guided to the anode terminal, and finally sent to the outside of the image display device. Escape, the number 10 in the image display device
Discharge that occurs when KV is applied can be eliminated.
同時に、ガス放出源である銀ペーストをなくすことがで
きるため、画像表示装置のカソードエミッションの低下
を大巾に防止でき、長寿命化を図ることができる。At the same time, since the silver paste, which is a source of gas emission, can be eliminated, a decrease in cathode emission of the image display device can be largely prevented, and the life of the image display device can be extended.
第1図は、従来のアノードの正面図、第2図はアノード
の螢光面の断面図、第3図は本発明におけるL字形の透
明導電膜形成後の正面図、第4図は本発明におけるL字
形の透明導電膜の形成装置の説明図、第5図は本発明の
一実施例方法によって得たアノードの 面図である。
1 ・・平面ガラス板、4・・・アノード端子、5銀ペ
ースト、6・・・・・・透明導電膜。
代り9人の氏名 弁理士 中 尾 敏 男 ほか1名第
1図
第2図
?4 262c ?ct
第3図
第4図FIG. 1 is a front view of a conventional anode, FIG. 2 is a cross-sectional view of the fluorescent surface of the anode, FIG. 3 is a front view after forming an L-shaped transparent conductive film in the present invention, and FIG. 4 is a front view of the present invention. FIG. 5 is an explanatory diagram of an apparatus for forming an L-shaped transparent conductive film in FIG. 1... Flat glass plate, 4... Anode terminal, 5 Silver paste, 6... Transparent conductive film. Names of 9 substitutes Patent attorney Toshio Nakao and 1 other person Figure 1 Figure 2? 4 262c? ct Figure 3 Figure 4
Claims (1)
合物をL字形に蒸着し透明導電膜を形成する第1の工程
と、前記蒸着した以外のガラス板の面上に、露光法によ
りブラックストライプと螢光体R、G、Bの各ストライ
プを形成する第2の工程と、前記ストライプ面上にラッ
カー液を塗布乾燥する第3の工程と、前記ラッカー膜面
上にアルミニウムを蒸着しメタルバック膜を形成する第
4の工程と、前記L字形の透明導電膜の交差部の前記メ
タルバック膜を除去した後、結晶性フリットでアノード
端子を前記L字形の透明導電膜に接続した第5の工程と
からなるアノードの製造方法。A first step of vapor depositing a mixture of indium oxide and tin oxide in an L shape on the surface of a flat glass plate to form a transparent conductive film, and forming a black stripe by an exposure method on the surface of the glass plate other than the one on which the vapor deposition was performed. a second step of forming each stripe of phosphors R, G, and B, a third step of applying and drying a lacquer liquid on the stripe surface, and depositing aluminum on the lacquer film surface to form a metal back. A fourth step of forming a film, and after removing the metal back film at the intersection of the L-shaped transparent conductive film, a fifth step in which the anode terminal is connected to the L-shaped transparent conductive film with a crystalline frit. A method for producing an anode, which comprises the steps of:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24280784A JPS61121234A (en) | 1984-11-16 | 1984-11-16 | Manufacture of anode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24280784A JPS61121234A (en) | 1984-11-16 | 1984-11-16 | Manufacture of anode |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61121234A true JPS61121234A (en) | 1986-06-09 |
JPH0558206B2 JPH0558206B2 (en) | 1993-08-26 |
Family
ID=17094575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24280784A Granted JPS61121234A (en) | 1984-11-16 | 1984-11-16 | Manufacture of anode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61121234A (en) |
-
1984
- 1984-11-16 JP JP24280784A patent/JPS61121234A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0558206B2 (en) | 1993-08-26 |
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