JPS61107735A - Article carrying apparatus - Google Patents
Article carrying apparatusInfo
- Publication number
- JPS61107735A JPS61107735A JP59229403A JP22940384A JPS61107735A JP S61107735 A JPS61107735 A JP S61107735A JP 59229403 A JP59229403 A JP 59229403A JP 22940384 A JP22940384 A JP 22940384A JP S61107735 A JPS61107735 A JP S61107735A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- section
- free
- article
- conveyance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005096 rolling process Methods 0.000 claims abstract description 5
- 230000007704 transition Effects 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000000969 carrier Substances 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 10
- 230000003749 cleanliness Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Intermediate Stations On Conveyors (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は清浄度が要求される電子機器部品を、加工する
工程間を連結して搬送する物品搬送装置に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to an article conveying device that connects and conveys electronic equipment parts requiring cleanliness between processing steps.
従来例の構成とその問題点
従来のクリーントンネル内の物品搬送装置は、第１図に
その具体構成を示すように、四方が包囲されたトンネル
１の天井に配置されたフィルター２の中を給気ダクト３
を通って流入した空気が通過し、トンネルの下方に設け
られた排気ダクト４に流入する。トンネル内には部品５
を収納したキャリアー６が、トンネルの長手方向に平行
状態で取付けられた２本のガイドレール７．８に支持案
内されて搬送される。この搬送駆動は前記ガイドレール
７．８よシ通電されたキャプスタン９によって前記キャ
リアー６に駆動が伝達される。上記構成により清浄空気
が天井から流通するトンネル１内を２本のガイドレール
７．８で構成されたキャリアー６の一列の搬送軌道を連
続的に部品５をある工程から次の工程へ搬送する。Structure of the conventional example and its problems As shown in the concrete structure of the conventional clean tunnel article conveyance device in FIG. air duct 3
The air flowing in through it passes and flows into the exhaust duct 4 provided below the tunnel. Part 5 inside the tunnel
The carrier 6 containing the tunnel is supported and guided by two guide rails 7.8 installed in parallel in the longitudinal direction of the tunnel. This conveying drive is transmitted to the carrier 6 through the guide rail 7.8 and the energized capstan 9. With the above configuration, the parts 5 are continuously conveyed from one process to the next on a single line of conveyance track of the carrier 6, which is composed of two guide rails 7, 8, inside the tunnel 1 through which clean air flows from the ceiling.
しかしながら上記のような構成では、部品６をある工程
から次の工程へ搬送する場合に、ある工程で部品がキャ
リアー６よシ取出された後、空キャリアーを元の工程ま
で返送する方法として、搬送軌道と同一の軌道を逆行す
るかあるいは、上記トンネルの循環システムをループ状
にして同一軌道を搬送方向の一方向搬送とするかがとら
れる。However, in the above configuration, when transporting the part 6 from one process to the next process, after the part is taken out of the carrier 6 in a certain process, the transport method is used to return the empty carrier to the original process. Either the same trajectory as the trajectory is reversed, or the circulation system of the tunnel is formed into a loop so that the same trajectory is used for unidirectional transportation.
もし搬送軌道を逆行して返送する場合、搬送方向に進む
パレットの進行が制限されやすくなるし、またループ状
の循環システムで一方向のみの搬送とする場合、工程の
システムそのものをループ状に配置しなければならない
し、また返送のみを目的としてループ状にした場合は設
置スペースが大きくなるという欠点を有していた。If the transport path is reversed and returned, the progress of the pallet in the transport direction is likely to be restricted, and if a loop-shaped circulation system is used to transport in only one direction, the process system itself is arranged in a loop. Moreover, if it is made into a loop for the sole purpose of returning it, it has the disadvantage that it requires a large installation space.
さらに、ある工程の位置で部品が収納されたキャリアー
を停止させ部品のみをある加工装置にかける場合、キャ
リアーが搬送ライン上にあると、通過しようとするキャ
リアーの進行の妨げになるという欠点を有していた。Furthermore, when a carrier containing parts is stopped at a certain process position and only the parts are applied to a certain processing device, if the carrier is on the conveyance line, it has the disadvantage that it will obstruct the progress of the carrier trying to pass. Was.
発明の目的
本発明は上記欠点に鑑み、キャリアーの返送時における
省スペース化、及び円滑なキャリアーの循環、さらには
ある工程でキャリアーから部品を取出す際のキャリアー
搬送の円滑化を目的とするものである。Purpose of the Invention In view of the above-mentioned drawbacks, the present invention aims to save space when returning carriers, to ensure smooth circulation of carriers, and to facilitate transportation of carriers when taking out parts from carriers in a certain process. be.
発明の構成
本発明は、キャリアーと、クリーントンネル内に配置さ
れたフリーフロー搬送部及びフリーフロー返送部と、移
行部とから構成されており、返送軌道を搬送軌道と同一
のトンネル内に設けることによシ、省スペース及び返送
キャリアーのクリーンの維持による部品のクリーン度の
向上、及び搬送軌道と返送軌道を同一トンネル内で分離
して設けたことによる搬送の円滑化がはかられる。さら
にキャリアーを搬送方向に対して直角方向に引き出す移
行部を設けることによシ、搬送軌道上のキャリアーの進
行を妨げないという特有の効果を有する。
、、１実施
例の説明
以下本発明の実施例について図面を参照しなから説明す
る。第２図は本発明の一実施例における正面断面図、第
３図は同じく平面断面図を示すものである。Structure of the Invention The present invention is composed of a carrier, a free-flow transport section and a free-flow return section arranged in a clean tunnel, and a transition section, and the return track is provided in the same tunnel as the transport track. This improves the cleanliness of parts by saving space and keeping the return carrier clean, and by separating the transport track and return track within the same tunnel, smoother transport is achieved. Furthermore, by providing a transition section that pulls out the carrier in a direction perpendicular to the transport direction, there is a unique effect that the progress of the carrier on the transport track is not obstructed.
,,Description of 1 Embodiment Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 2 is a front sectional view of one embodiment of the present invention, and FIG. 3 is a plan sectional view of the same.
第２図及び第３図において、１ｏは四方を包囲されたク
リーントンネル、１１は前記クリーントンネルの天井に
設けられ清浄空気を発生するフィルター、１２は前記フ
ィルターに空気を送シ込む給気ダクト、１３は前記トン
ネルの底にあって清浄空気を集めて排気する排気ダクト
、１４は搬送ラインを示し、部品１５が搭載されたキャ
リアー１６がころがシ手段１７を介して伝達手段１８に
よって搬送される６１９はフリー７０−搬送部、２０は
返送されてくるキャリアー、このキャリアーはころがり
手段２１を介して伝達手段２２によって搬送される。２
３はフリー７０−返送部、２４は移行装置２５によって
搬送ラインに対して直角方向に引き出された部品が収納
されたキャリアー、２６は本体フレームである。In FIGS. 2 and 3, 1o is a clean tunnel surrounded on all sides, 11 is a filter provided on the ceiling of the clean tunnel and generates clean air, 12 is an air supply duct that sends air to the filter, Reference numeral 13 indicates an exhaust duct located at the bottom of the tunnel to collect and exhaust clean air, and 14 indicates a conveyance line, in which a carrier 16 on which parts 15 are mounted is conveyed by a transmission means 18 via roller means 17. 619 is a free 70-conveying section, 20 is a returned carrier, and this carrier is conveyed by the transmission means 22 via the rolling means 21. 2
3 is a free 70-returning section, 24 is a carrier in which parts pulled out in a direction perpendicular to the conveyance line by the transfer device 25 are stored, and 26 is a main body frame.
以上のように構成されたクリーントンネル内の物品搬送
装置について、以下その動作を説明する。The operation of the article conveyance device in a clean tunnel configured as described above will be described below.
まず部品１６が搭載されたキャリアー１６が伝達手段１
８によってころがり手段１７を介して搬送ライン１９上
を搬送される。次に移行装置２５によってキャリアーが
搬送ラインからはずされて直角方向に移行され、キャリ
アー上の部品が工法装置へ運ばれる。このとき搬送ライ
ン１９には次々とキャリアーが搬送されていく。次に搬
送ライン１９上で終端まで達したキャリアーは、返送ラ
イン２３へ移されて返送されていく。First, the carrier 16 on which the parts 16 are mounted is the transmission means 1
8 and conveyed on the conveying line 19 via the rolling means 17. Next, the carrier is removed from the conveying line by the transfer device 25 and transferred in the right angle direction, and the parts on the carrier are transported to the construction method device. At this time, carriers are conveyed one after another to the conveyance line 19. Next, the carrier that has reached the end on the transport line 19 is transferred to the return line 23 and returned.
以上のように本実施例によれば、搬送ラインと返送ライ
ンと移行部とを設けることにより、返送キャリアーのク
リーン度の維持が可能でしかも省スペースとなり、さら
にキャリアーの搬送が円滑となるという効果がある。As described above, according to this embodiment, by providing a transport line, a return line, and a transition section, the cleanliness of the return carrier can be maintained, space is saved, and the carrier can be transported smoothly. There is.
発明の効果
以上のように本発明は、クリーントンネル内にキャリア
ー、７リーフロー搬送部、フリーフロー返送部及び移行
部を設けることによシ、キャリアーの返送時における省
スペース化、及び円滑なキャリアーの循環、さらにはあ
る工程でキャリアーから部品を取出す際に搬送ライン上
を津から流れてくるキャリアーの搬送を妨げないという
効果が得られるものであり、その実用的価値は大なるも
のがある。Effects of the Invention As described above, the present invention provides a carrier, a seven-leaf flow conveyance section, a free flow return section, and a transition section in the clean tunnel, thereby saving space when returning the carrier and allowing smooth carrier transfer. It has the effect of not interfering with circulation and, furthermore, with not interfering with the transport of the carrier flowing from the top on the transport line when parts are removed from the carrier in a certain process, and has great practical value.
第１図は従来のクリーントンネル内の物品搬送装置の正
面断面図、第２図は本発明の一実施例における物品搬送
装置の正面断面図、第３図は同平面断面図である。
１４・・・・・・クリーントンネル、１６・・・・・・
キャリアー、１９・・・・・・フリー７０−搬送部、２
３・・・・・・フリー７０−返送部、２５・・・・・・
移行部、１８・・・・・・伝達手段、２２・・・・・・
伝達手段。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
第２図
第３図FIG. 1 is a front sectional view of a conventional article conveying device in a clean tunnel, FIG. 2 is a front sectional view of an article conveying device according to an embodiment of the present invention, and FIG. 3 is a plan sectional view thereof. 14...Clean tunnel, 16...
Carrier, 19...Free 70-transport section, 2
3...Free 70-return section, 25...
Transition part, 18...Transmission means, 22...
means of communication. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 Figure 3
Claims (1)
浄空気を底面に向って流通させるクリーントンネル内に
設けられた物品搬送装置であって、物品を搭載したキャ
リアーと、前記キャリアーところがり接触を保つ伝達手
段によって前記キャリアーを前記クリーントンネルの長
手方向に連続的に運ぶフリーフロー搬送部と、前記フリ
ーフロー搬送部に平行に隣接し、前記フリーフロー搬送
部とは逆方向に、物品が取出されたキャリアーをこのキ
ャリアーところがり接触を保つ伝達手段によって連続的
に運ぶフリーフロー返送部と、前記フリーフロー搬送部
の所定の位置から搬送方向に対して直角方向にキャリア
ーを引き出す移行部とを備えた物品搬送装置。An article conveyance device installed in a clean tunnel that is surrounded on all sides and circulates clean air from a filter placed on the ceiling toward the bottom surface, and is a conveyor that maintains rolling contact between a carrier carrying articles and the carrier. a free flow conveyance section that continuously conveys the carrier in the longitudinal direction of the clean tunnel by a means; and a carrier from which the article is taken out, parallel to and adjacent to the free flow conveyance section and in the opposite direction to the free flow conveyance section. an article conveyor comprising: a free-flow return section that continuously conveys the carrier by means of a transmission means that maintains rolling contact with the carrier; and a transition section that pulls out the carrier from a predetermined position of the free-flow conveyor section in a direction perpendicular to the conveyance direction. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59229403A JPS61107735A (en) | 1984-10-31 | 1984-10-31 | Article carrying apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59229403A JPS61107735A (en) | 1984-10-31 | 1984-10-31 | Article carrying apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61107735A true JPS61107735A (en) | 1986-05-26 |
Family
ID=16891660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59229403A Pending JPS61107735A (en) | 1984-10-31 | 1984-10-31 | Article carrying apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61107735A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198659A (en) * | 1992-01-22 | 1993-08-06 | Tokyo Ohka Kogyo Co Ltd | Plasma processor |
| JPH07235580A (en) * | 1994-02-22 | 1995-09-05 | Tdk Corp | Clean transfer method and equipment therefor |
-
1984
- 1984-10-31 JP JP59229403A patent/JPS61107735A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198659A (en) * | 1992-01-22 | 1993-08-06 | Tokyo Ohka Kogyo Co Ltd | Plasma processor |
| JPH07235580A (en) * | 1994-02-22 | 1995-09-05 | Tdk Corp | Clean transfer method and equipment therefor |
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