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JPS61105324U - - Google Patents

Info

Publication number
JPS61105324U
JPS61105324U JP19004884U JP19004884U JPS61105324U JP S61105324 U JPS61105324 U JP S61105324U JP 19004884 U JP19004884 U JP 19004884U JP 19004884 U JP19004884 U JP 19004884U JP S61105324 U JPS61105324 U JP S61105324U
Authority
JP
Japan
Prior art keywords
casing
air passage
air
guide member
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19004884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19004884U priority Critical patent/JPS61105324U/ja
Publication of JPS61105324U publication Critical patent/JPS61105324U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP19004884U 1984-12-17 1984-12-17 Pending JPS61105324U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19004884U JPS61105324U (zh) 1984-12-17 1984-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19004884U JPS61105324U (zh) 1984-12-17 1984-12-17

Publications (1)

Publication Number Publication Date
JPS61105324U true JPS61105324U (zh) 1986-07-04

Family

ID=30747495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19004884U Pending JPS61105324U (zh) 1984-12-17 1984-12-17

Country Status (1)

Country Link
JP (1) JPS61105324U (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus

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