JPS6058981U - vacuum valve device - Google Patents
vacuum valve deviceInfo
- Publication number
- JPS6058981U JPS6058981U JP14992083U JP14992083U JPS6058981U JP S6058981 U JPS6058981 U JP S6058981U JP 14992083 U JP14992083 U JP 14992083U JP 14992083 U JP14992083 U JP 14992083U JP S6058981 U JPS6058981 U JP S6058981U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- valve device
- vacuum valve
- recess
- air cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000903 blocking effect Effects 0.000 claims 1
Landscapes
- Details Of Valves (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の真空バルブ装置の縦断側面図、第２図は
本考案に係る真空バルブ装置の縦断側面図である。
・
１・・・ケース本体、２・・・カバー、３・・・エアー
シリンダ、４・・・ロッド、１０・・・吸込み孔、１１
・・・凹部、１３・・・閉塞板。FIG. 1 is a vertical side view of a conventional vacuum valve device, and FIG. 2 is a vertical side view of a vacuum valve device according to the present invention.
・ 1...Case body, 2...Cover, 3...Air cylinder, 4...Rod, 10...Suction hole, 11
... recess, 13... occlusion plate.
Claims (1)
バーと、このカバーの外面に固着され該カバーを貫通し
て前記ケース本体内で伸縮するロッドを備えたエアーシ
リンダとを有し、前記ロッドの先端に設け７られた閉塞
板によりケース本体の他側面に設けられた吸込み孔を遮
断するようにした真空バルブ装置において、前記カバー
の中央部分を内面側に凹陥させて凹部を形成し、この凹
部の外面部分を前記ケース本体に内挿するとともにこの
凹部の内底部にエアーシリンダを固着し、前記凹部の内
底部は前記エアーシリンダのストロークに支障のない距
離まで他側面に近接させるよう構成したことを特徴とす
る真空バルブ装置。 ゛It has a case main body, a cover provided on one side of the case main body, and an air cylinder provided with a rod fixed to the outer surface of the cover and extending and contracting within the case main body passing through the cover. In a vacuum valve device in which a suction hole provided on the other side of the case body is shut off by a blocking plate 7 provided at the tip of the cover, the center portion of the cover is recessed inward to form a recessed portion, and this The outer surface portion of the recess is inserted into the case body, and an air cylinder is fixed to the inner bottom of the recess, and the inner bottom of the recess is configured to be close to the other side to a distance that does not interfere with the stroke of the air cylinder. A vacuum valve device characterized by:゛
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14992083U JPS6058981U (en) | 1983-09-28 | 1983-09-28 | vacuum valve device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14992083U JPS6058981U (en) | 1983-09-28 | 1983-09-28 | vacuum valve device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6058981U true JPS6058981U (en) | 1985-04-24 |
Family
ID=30332657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14992083U Pending JPS6058981U (en) | 1983-09-28 | 1983-09-28 | vacuum valve device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6058981U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0292179U (en) * | 1989-01-07 | 1990-07-23 | ||
| JP2001108130A (en) * | 1999-05-25 | 2001-04-20 | Applied Materials Inc | Cluster valve for semiconductor wafer processor |
| JP2011133005A (en) * | 2009-12-24 | 2011-07-07 | Murata Mfg Co Ltd | Opening and closing valve |
| JP2013228109A (en) * | 2013-07-31 | 2013-11-07 | Murata Mfg Co Ltd | Opening/closing valve |
-
1983
- 1983-09-28 JP JP14992083U patent/JPS6058981U/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0292179U (en) * | 1989-01-07 | 1990-07-23 | ||
| JP2001108130A (en) * | 1999-05-25 | 2001-04-20 | Applied Materials Inc | Cluster valve for semiconductor wafer processor |
| JP2011133005A (en) * | 2009-12-24 | 2011-07-07 | Murata Mfg Co Ltd | Opening and closing valve |
| JP2013228109A (en) * | 2013-07-31 | 2013-11-07 | Murata Mfg Co Ltd | Opening/closing valve |
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