JPS6057995B2 - Shape processing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a shape processing method that can be applied to the creation or modification of the shape of workpieces such as substrates and lenses mainly in the semiconductor and optical industries.

Conventionally, in this type of shape machining method, the depth of cut of a tool into a workpiece is given in accordance with the shape to be obtained.
An example of a device that uses this is a copy grinder, and recently, an optical projection device has been used to directly view the workpiece and change the depth of cut each time to machine the workpiece into a predetermined shape. As a result, the equipment becomes complicated and expensive;
A more simplified shape processing method was desired. The present invention solves these inconveniences and provides a shape machining method that can process a predetermined shape with high precision and high reproducibility by changing the feed rate of the workpiece or the rotation speed of the tool in combination and controlling them. DESCRIPTION OF THE PREFERRED EMBODIMENTS The shape processing method according to the present invention will be explained below with reference to the embodiment shown in the drawings. In dead weight grinding, tool rotation speed N) for removal amount M by grinding
When examining the effects of the workpiece feed rate (V), which is related to the trajectory density of the tool, and the removal amount M of the dead weight W, it is found that M is approximately proportional to N and W, and inversely proportional to V. By applying this relationship, it is possible to create a cross-sectional shape that is tapered, convex, concave, etc.
The device used in the shape processing method according to the present invention may be any device that has the motion function of a commonly used face grinder and can apply a dead weight. In other words, as shown in FIG.
It is sufficient to have a mechanism for rotating the rotary table 2 and reciprocating it on the bed 4 on which the rotary table 2 is installed. The rotary table 2 is rotated by a motor 3 fixed on the bed 4 via a belt 5. The rotary table is provided with, for example, a thrust bearing 6 to receive rotation from the motor 3. With such a device, 1)
When the feed speed V of pet 4 is constant...Tool 1
(number of revolutions N) (2) When the number of revolutions N of the tool 1 is constant... If the feed rate of the bed 4 is controlled by changing the combination necessary to obtain the desired shape, etc., Can be processed into shapes such as convex, concave, and wedge shapes.

(Example 1) FIG. 2 shows an example in which the wedge shape was processed.

The thickness of the workpiece is 40w:1n(7)S, the substrate is not rotated, and the rotating tool is a cup-shaped grindstone at approximately 1000 rpm.
The relationship between the feed speed of the workpiece and the position of the workpiece is 1.2T at the initial stage, as shown in Figure a.
Ir! Nlminl final stage is 6.6m! 'Min.
The machining removal amount M became smaller as the feed rate (2) increased, and a workpiece with a wedge-shaped cross section was obtained, as shown in the cross-sectional view of the workpiece after machining shown in FIG. (Example 2
) The workpiece is rotated at approximately 1 Rpm using a 2"φ S plate, a cup-shaped grindstone is used as the rotary tool, and rotation is approximately 2000r'Pm, and the feed rate of the workpiece is The relationship between and the position of the workpiece is V at the periphery of the workpiece.
was made larger, and V was made smaller in the center.

As a result, as shown in FIG. 3, a substrate with a concave cross-section was obtained. (Example 3) The machining conditions were different from Example 2, and the feed rate (V) of the workpiece was made smaller in the peripheral area and larger in the central area.

As a result, contrary to Example 2, a convex cross-sectional shape was obtained as shown in FIG. The wedge-shaped concave and convex shapes in the above embodiments. The size of the shape was determined by changing the rate of change in the feed rate (2) of the workpiece, but the same effect was confirmed by changing the rotational speed (N) of the tool.

In addition, in the above example, the removal amount M is the number of revolutions N1, and the feed speed ■
This was done in a region proportional to 11V, but if we assume that it is a proportional region. This processing method has relatively good reproducibility even if the control factor is not within the range, so if you decide the control factors in advance and understand the basic processing characteristics, you can change the amount of the factors based on that and obtain the desired shape. can be obtained. Furthermore, as already described in detail of the present invention, it goes without saying that processing into a predetermined shape can also be achieved by controlling the dead weight W. As explained above in detail based on the drawings, it is possible to machine any shape by changing the rotational speed N of the tool or the feed rate V of the workpiece in combination. It can be applied as a correction processing method. In this example, free abrasive processing methods such as lapping and polishing have the same processing characteristics M = α・N・w−↓, so the substrate correction processing method can be used not only for grinding processing but also for lapping, polishing, etc. Needless to say, it can be applied as a wedge shape, a convex shape, and a concave shape as typical examples in the above embodiments, but by changing the combination of the rotation speed N and the feed rate V, it can be processed into any shape.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view showing an embodiment of a device capable of carrying out the present invention, and Fig. 2 shows a case in which the processing method of the present invention is performed by changing only the feed rate without giving rotation to the workpiece. The relationship between the machining removal amount and feed rate at the position of the workpiece (Figure a), and the cross-sectional view of the workpiece after machining (Figure b)
, 3 and 4 are cross-sectional views of the workpiece after processing in the processing method of the present invention, in which the workpiece is given autorotation and the feed rate is varied at the outer or inner circumference of the substrate. be.

Claims (1)

[Claims] 1 Utilizing the relationship that the amount removed by grinding is proportional to the tool rotation speed and dead weight and inversely proportional to the feed speed of the workpiece, the combination of the tool rotation speed or the feed speed of the workpiece relative to the workpiece is changed. A shape processing method characterized by processing into an arbitrary cross-sectional shape.