JPS6052577A - Construction of heat resistant coating film - Google Patents
Construction of heat resistant coating filmInfo
- Publication number
- JPS6052577A JPS6052577A JP16155583A JP16155583A JPS6052577A JP S6052577 A JPS6052577 A JP S6052577A JP 16155583 A JP16155583 A JP 16155583A JP 16155583 A JP16155583 A JP 16155583A JP S6052577 A JPS6052577 A JP S6052577A
- Authority
- JP
- Japan
- Prior art keywords
- film
- resistant coating
- coating film
- heat resistant
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 22
- 238000000576 coating method Methods 0.000 title claims abstract description 22
- 238000010276 construction Methods 0.000 title abstract 3
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 11
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 238000002485 combustion reaction Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 abstract 12
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 abstract 2
- 239000011247 coating layer Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 239000011859 microparticle Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000000567 combustion gas Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は耐熱被覆膜の構造、特に燃焼ガスに直接さら
された状態で使用される耐熱被覆膜の構造に関するもの
である、。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] This invention relates to the structure of a heat-resistant coating, and particularly to the structure of a heat-resistant coating that is used in a state where it is directly exposed to combustion gas.
燃焼ガスに直接さらされた状態で使用される被覆対象物
、例えば熱電子発電素子などにあっては、その外表面に
耐熱被覆膜を施こす必要がある。しかして従来のこの種
の耐熱被覆膜としては、同被覆対象物の表面に化学蒸着
法、いわゆるＣＶＤ法によってシリコンカーバイト膜、
す危わちＳＩＣ膜を形成する手段があるが、適用される
燃焼雰囲気が例えば石炭燃焼炉とか油燃焼１力どのよう
に、未燃粒子とか灰粒子などの微小粒子を含む場合に唸
、これらの微小粒子の強力た燃焼流による擦過とか衝接
、その他浸蝕、腐蝕などによシ被覆膜に損耗を生じて、
その耐用寿命が短縮されてしまうという不都合がおった
。2. Description of the Related Art For objects to be coated that are used while being directly exposed to combustion gas, such as thermionic power generation elements, it is necessary to apply a heat-resistant coating film to the outer surface of the object. However, as a conventional heat-resistant coating film of this kind, silicon carbide film is coated on the surface of the object to be coated by chemical vapor deposition, so-called CVD method.
There are means to form a SIC film, but if the combustion atmosphere to be applied, such as a coal combustion furnace or an oil combustion furnace, contains minute particles such as unburned particles or ash particles, these problems may occur. Damage to the coating film may occur due to abrasion or impact caused by the powerful combustion flow of minute particles, or other erosion or corrosion.
There was an inconvenience that its useful life was shortened.
との発明は従来のこのような欠点に鑑み、被覆対象物の
表面に形成されるシリコンカーバイト膜を高温下で酸化
処理するととにより、その表面部に薄いアモルファス状
のシリコン酸化膜、すなわち８１０３膜を形成させて強
靭化し、その損耗を防止して耐用寿命の延長を図ったも
のである。In view of these conventional drawbacks, the invention of ``8103'' was developed by oxidizing the silicon carbide film formed on the surface of the object to be coated at high temperature, thereby forming a thin amorphous silicon oxide film on the surface of the object, that is, 8103. The purpose is to form a film to make it tougher, prevent wear and tear, and extend its useful life.
以下、この発明に係る耐熱被覆膜構造の一実施例につき
、添付図面を参照して詳細に説明する、。Hereinafter, one embodiment of the heat-resistant coating structure according to the present invention will be described in detail with reference to the accompanying drawings.
添付図面はとの実施例による耐熱被覆膜の概要構造を示
しておシ、この実施例では、被覆対象物１の平面あるい
は曲面など任意形状の表面に対して、例えば化学蒸着法
（ＣＶＤ法）などにより、シリコンカーバイト膜（Ｓｉ
Ｃ膜）２を形成させたのち、さらにこれを高温下で酸化
処理することによシ、同腹２の表面部に薄いアモルファ
ス状のシリコン酸化膜（５ｉ０２膜）３を形成させ、か
つこのシリコンカーバイト膜２とシリコン酸化膜３との
一層づつの工程を複数回に亘シ順次に繰シ返して多層の
耐熱被覆膜構造としたものである。The attached drawings show the general structure of the heat-resistant coating film according to the embodiment. ) etc., silicon carbide film (Si
After forming the C film) 2, this is further oxidized at high temperature to form a thin amorphous silicon oxide film (5i02 film) 3 on the surface of the same film 2. The process of forming one layer of the bite film 2 and one layer of the silicon oxide film 3 is sequentially repeated several times to obtain a multilayer heat-resistant coating structure.
従ってこの実施例構造の場合には、被覆対象物１の表面
をシリコンカーバイト膜２によって被覆させ、かつ同腹
２の表面部に薄いアモルファス状のシリコン酸化膜３に
形成させたから、シリコンカーバイト膜２による耐熱性
と共に、その表面部の薄いシリコン酸化膜３による強靭
性とが与えられて、たとえとの被覆対象物１を微小粒子
を含む燃焼雰囲気で使用したとしても、その耐熱被覆膜
が損耗されるようかことはなく、しかもこの耐熱被覆膜
を多層に形成させることによシ、さらに一層この効果を
助長し得るのである。Therefore, in the case of the structure of this embodiment, the surface of the object to be coated 1 is covered with the silicon carbide film 2, and a thin amorphous silicon oxide film 3 is formed on the surface of the object 1, so that the silicon carbide film In addition to the heat resistance provided by 2, the toughness is provided by the thin silicon oxide film 3 on the surface. There is no risk of wear and tear, and by forming this heat-resistant coating film in multiple layers, this effect can be further enhanced.
表お、前記実施例においては、シリコンカーバイト膜と
その表面部のシリコン酸化膜とによる耐熱被覆膜を多層
に亘り形成する場合について述べたが、同耐熱被覆膜が
一層だけであってもそれなシの効果を得られるととは勿
論である。In the above embodiment, a case was described in which a heat-resistant coating film made of a silicon carbide film and a silicon oxide film on its surface was formed in multiple layers. Of course, you can also get the same effect.
以上詳述したように、この発明によるときは、被覆対象
物の表面にシリコンカーバイト膜を形成したのち、これ
を高温酸化処理して同様の表面部に薄いアモルファス状
のシリコン酸化膜を形成して耐熱被覆膜としたので、燃
焼ガスに直接さらされる被覆対象物に対して、従来と同
様の耐熱性と共に併せて表面強靭性を与えることができ
、これによって同耐熱被覆膜の損耗を効果的に防止し、
その耐用寿命を十分に向上させ得るなどの特長を有する
ものである。As detailed above, according to the present invention, a silicon carbide film is formed on the surface of the object to be coated, and then a thin amorphous silicon oxide film is formed on the same surface by high-temperature oxidation treatment. As a heat-resistant coating film, it is possible to provide the same heat resistance and surface toughness to objects that are directly exposed to combustion gases, thereby reducing wear and tear on the heat-resistant coating film. effectively prevent,
It has features such as being able to sufficiently improve its service life.
一３＝13=
図面はこの発明に係る耐熱被覆膜の一実施例による構造
断面図である。
１・・・・被覆対象物、２・・・・シリコンカーバイト
膜、３・・・・シリコン酸化膜。
特許出願人 三井造船株式会社
代 理 人 山 川 政 樹（ほか１名）−４＝The drawing is a structural sectional view of one embodiment of the heat-resistant coating film according to the present invention. 1...Object to be coated, 2...Silicon carbide film, 3...Silicon oxide film. Patent applicant Mitsui Engineering & Shipbuilding Co., Ltd. Agent Masaki Yamakawa (and 1 other person) -4=
Claims (2)
学蒸着法によシ形成させると共に、このシリコンカーバ
イト膜を高温酸化処理して、同腹の表面部に薄いアモル
ファス状のシリコン酸化膜を形成してなることを特徴と
する耐熱被覆膜の構造。(1) A silicon carbide film is formed on the surface of the object to be coated by chemical vapor deposition, and this silicon carbide film is oxidized at high temperature to form a thin amorphous silicon oxide film on the same surface. A structure of a heat-resistant coating film characterized by forming.
覆われたシリコンカーバイト膜を順次多層に亘シ形成し
てなることを特徴とする特許請求の範囲第１項記載の耐
熱被覆膜の構造。(2) The heat-resistant coating film according to claim 1, wherein the heat-resistant coating film is formed by successively forming multiple layers of silicon carbide films whose surface portions are covered with a thin amorphous silicon oxide film. structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16155583A JPS6052577A (en) | 1983-09-02 | 1983-09-02 | Construction of heat resistant coating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16155583A JPS6052577A (en) | 1983-09-02 | 1983-09-02 | Construction of heat resistant coating film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6052577A true JPS6052577A (en) | 1985-03-25 |
Family
ID=15737331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16155583A Pending JPS6052577A (en) | 1983-09-02 | 1983-09-02 | Construction of heat resistant coating film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6052577A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62104779A (en) * | 1985-10-31 | 1987-05-15 | Toshiba Corp | Rail shaft |
| DE19740610C2 (en) * | 1997-09-12 | 2003-05-08 | Fraunhofer Ges Forschung | Silicon carbide coating on a substrate and method for producing a silicon carbide coating on a substrate and use of the silicon carbide coating |
-
1983
- 1983-09-02 JP JP16155583A patent/JPS6052577A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62104779A (en) * | 1985-10-31 | 1987-05-15 | Toshiba Corp | Rail shaft |
| DE19740610C2 (en) * | 1997-09-12 | 2003-05-08 | Fraunhofer Ges Forschung | Silicon carbide coating on a substrate and method for producing a silicon carbide coating on a substrate and use of the silicon carbide coating |
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