JPS6044194A - Laser marking device - Google Patents

Abstract

PURPOSE:To decrease the number of masks to be prepared and to reduce cost by using a mask having apertures of the pattern including all the elements of plural kinds of marking patterns and using the same by shielding the apertures unnecessary for the marking pattern. CONSTITUTION:Light shielding plates 7 shield a part of apertures 4 of a mask 3a and are provided by as much as the number of the apertures required to be shielded. Linear motion mechanism 8 is provided for each of the plates 7 in order to move in and out the plates 7. The apertures 4 unnecessary for marking of the mask 3a are shielded by the plates 7 by driving adequately the mechanisms 8 to allow passage of the laser light only through the necessary apertures 4, by which the surface of an object 5 is subjected to desired marking. The number of the masks to be prepared is thus decreased and the automatic change of the mask pattern is made extremely easy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a laser marking device for marking an object such as a semiconductor device using a laser beam transmitted through a die-cut mask.

[Prior art]

Figure 1 is a perspective view showing the basic configuration of a conventional laser marking device, in which (1) shows the laser beam emitting port of the laser oscillation device, and (2) the laser beam emitted from the dovetail laser beam emitting port (1). Light, (3a) is the opening corresponding to the mark to be engraved (4)
(5) is the object to be marked, and (6) is the mark engraved on its surface.

The conventional laser marking device is configured as described above, and the laser beam (2) is emitted from the laser beam emitting port (1).
passes through the aperture (4) formed in the mask (3a) and marks (6) on the object (5) corresponding to the aperture (4).
) is engraved.

However, in this conventional device, in order to change the pattern of the mark (6), it is necessary to prepare and replace a mask for each mark pattern as shown as (3b) in FIG. If there are many masks, the manufacturing cost of the mask increases, and if the number of masks increases, it becomes difficult to automatically replace the masks.

[Summary of the invention]

This invention was developed in view of the above points. In order to engrave one of the mark patterns, use a mask that has apertures with a pattern that includes all the elements of multiple types of mark patterns. By doing so, it is possible to reduce the number of masks to be prepared, save mask manufacturing costs 4, and provide a laser marking device capable of automating mark pattern changes.

[Embodiments of the invention]

FIG. 3 is a perspective view showing the structure of an embodiment of the present invention, in which the same reference numerals as in the conventional example of FIG. 1 indicate equivalent parts. (7) is a light shielding plate that blocks a part of the opening (4) of the mask (3a);
The number of openings that need to be shielded from light is the same as the number of openings. (8) is a linear movement mechanism provided for each light shielding plate (7) to take in and out the light shielding plate (7). The linear motion mechanism (8) is appropriately driven so that the mask (3a
) The holes (4) that are not needed for marking are blocked by the light shielding plate (7), and only the necessary holes (4) are allowed to pass through the laser beam, thereby making it possible to mark the desired surface of the object (5). can.

〔Effect of the invention〕

As explained above, the laser marking device according to the present invention uses a mask having apertures with a pattern including all of the elements of multiple types of mark patterns, and one of them
When engraving one mark pattern, we used a light-shielding plate to cover unnecessary holes in the mark pattern.
The number of masks to be prepared can be reduced, and it is extremely easy to automate changing mark patterns.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the basic structure of a conventional laser marking device, and FIG. 2 is a perspective view showing the structure of an embodiment of the present invention. In the figure, (1) is a laser beam emission aperture, (2) is a laser beam, (3a) is a mask, (4) is an opening, (5) is an object, (6) is a mark, and (7) is a light shield. The plate (8) is a linear motion device for driving the light-shielding plate.In addition, the same reference numerals in the drawings indicate the same or corresponding parts. Agent Masuo Oiwa

Claims (1)

[Claims] (1) A laser beam is transmitted through an aperture formed in a mask and irradiated onto an object, and a mark corresponding to the aperture pattern is imprinted on the surface of the object, in which multiple types of marks are formed on one mask. Using a patterned aperture that includes all of the pattern elements, a light-shielding plate capable of selectively blocking all of the apertures is used to cover the apertures that are unnecessary for the desired mark pattern, and then the target object is A laser marking device characterized in that the desired mark can be engraved on the surface of the laser marking device.