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JPS6031636B2 - Flat type electronic component transfer and characteristic sorting device - Google Patents

Flat type electronic component transfer and characteristic sorting device

Info

Publication number
JPS6031636B2
JPS6031636B2 JP55010375A JP1037580A JPS6031636B2 JP S6031636 B2 JPS6031636 B2 JP S6031636B2 JP 55010375 A JP55010375 A JP 55010375A JP 1037580 A JP1037580 A JP 1037580A JP S6031636 B2 JPS6031636 B2 JP S6031636B2
Authority
JP
Japan
Prior art keywords
electronic component
vacuum chuck
type electronic
package
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55010375A
Other languages
Japanese (ja)
Other versions
JPS56115963A (en
Inventor
健治 高塚
精一 岩崎
京平 玉木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55010375A priority Critical patent/JPS6031636B2/en
Publication of JPS56115963A publication Critical patent/JPS56115963A/en
Publication of JPS6031636B2 publication Critical patent/JPS6031636B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Manipulator (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【発明の詳細な説明】 本発明は真空チャックを使用した電子部品移送装置に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electronic component transfer device using a vacuum chuck.

従来、第5図に示す矩形形状の電子部品であるデュアル
型ICパッケージの特性試験を行う場合、デュアル型の
ICパッケージでは端子をガイドにしてセラミック層或
は樹脂層の下の部分ですべらせて特性試験装置のソケッ
トに移行させ、ICパッケージの端子を特性試験装置の
ソケットに差し込み特性試験を行い、次いでソケットか
ら抜き取ったICパッケージを特性試験結果に基づいて
端子をガィド‘こしてセラミック層或は樹脂層の下の部
分ですべらせて、所定の収納箱にふるい分けて収納する
ことが行われていた。
Conventionally, when testing the characteristics of a dual-type IC package, which is a rectangular electronic component shown in Figure 5, the terminals of the dual-type IC package are used as guides to slide them under the ceramic layer or resin layer. The terminals of the IC package are transferred to the socket of the characteristic testing device, and a characteristic test is performed by inserting the terminals of the IC package into the socket of the characteristic testing device.Then, the IC package is removed from the socket, and the terminals are guided and strained based on the characteristic test results. Traditionally, the materials were slid under the resin layer and then sorted and stored in designated storage boxes.

しかるに、第5図bに示すICパッケージはフラット型
で四方に端子が出ているため上述の方法で特性試験をす
ることができず、ヱヤピンセツトでICパッケージを吸
い付けて特性試験装置のソケット部に1つづつ手で運び
ソケットの溝部にICパッケージの端子がはいるように
セットした後、ICパツケージの上からクランブでおさ
えつけて特性試験を行い、クランプのはずし再びェャピ
ンセットでICパッケージを吸い付けて、特性試験結果
に基づいて所定の収納箱にふるい分けて収納することが
行われていた。このため特性試験装置にICパッケージ
をセットするのに時間を要すると云う欠点があった。本
発明は上述の欠点を除去するもので、これは矩形形状の
電子部品の外側面に当援するV字形に凹となった内壁面
をもつ一組のツールを有し、且つ該ツールがそのV字形
内壁面を対向させて弾性部材により接続されたチャック
を設け、該チャックに前記ツールを前記弾性部材の弾性
力に抗して拡充させるシリンダを併設すると共に、該チ
ャックをハンドリング・アームに固定したことを特徴と
する電子部品移送装置の提供により達成できる。
However, since the IC package shown in Figure 5b is a flat type with terminals protruding on all sides, it was not possible to perform a characteristic test using the method described above, and the IC package was sucked into the socket of a characteristic testing device using a pair of tweezers. After carrying one by one by hand and setting the IC packages so that their terminals fit into the grooves of the sockets, I held the IC packages down with a clamp to test their characteristics, then removed the clamps, and sucked up the IC packages again with tweezers. In the past, materials were sorted and stored in predetermined storage boxes based on the results of characteristic tests. Therefore, there is a drawback that it takes time to set the IC package in the characteristic testing device. The present invention obviates the above-mentioned drawbacks, it comprises a set of tools with a V-shaped concave inner wall surface that bears against the outer surface of a rectangular shaped electronic component, and the tool is A chuck is provided with V-shaped inner wall surfaces facing each other and connected by an elastic member, and the chuck is provided with a cylinder that expands the tool against the elastic force of the elastic member, and the chuck is fixed to a handling arm. This can be achieved by providing an electronic component transfer device characterized by the following.

以下本発明の実施例を詳述する。Examples of the present invention will be described in detail below.

第1図は本発明の真空チャックを使用した電子部品移送
装置の概略図である。コンベア18上のICパッケージ
8を真空チャックで取りに行く場合、x,y,z方向に
移動、微調整できるステージによりコンベア18上のI
Cパッケージの真上に真空チャックが来るようにマイコ
ンで制御している。ステージ16をェャシリンダ−13
xでx方向に、ステージ17をェヤシリンダー13yで
y方向に移動させる。次にシャフト15に取付けたア−
ム12をェャシリンダー13zでz方向に移動させる。
なおICパッケージは常にコンベア上の所定位置に定つ
た方向となるように設定されている。次に電磁弁をオン
にしてチューブzから高圧空気をェャシリンダー1に送
り、ピストンでストッパー3を押すことによりチャック
6を開ける。次に電磁弁をオンにしてチューブ11から
吸引することにより、吸引用チューブ7でICパッケー
ジ8を吸い上げしかる後、電磁弁をオフにしてェャシリ
ンダー1をオフにすると、コイルバネ4によりチャック
6が引き戻され、チャック6の内側でICが位置決めさ
れた状態となる。第2図は電子部品を移送する真空チャ
ックを移動させるステージの平面概略図である。
FIG. 1 is a schematic diagram of an electronic component transfer device using the vacuum chuck of the present invention. When picking up the IC package 8 on the conveyor 18 using a vacuum chuck, a stage that can be moved and finely adjusted in the x, y, and z directions is used to remove the IC package 8 on the conveyor 18.
A microcomputer controls the vacuum chuck so that it is positioned directly above the C package. Move stage 16 to cylinder 13
The stage 17 is moved in the x direction by x, and the stage 17 is moved in the y direction by the air cylinder 13y. Next, the arm attached to the shaft 15
The arm 12 is moved in the z direction using a motion cylinder 13z.
Note that the IC package is always set at a predetermined position on the conveyor in a fixed direction. Next, the solenoid valve is turned on, high pressure air is sent from the tube z to the air cylinder 1, and the chuck 6 is opened by pushing the stopper 3 with the piston. Next, by turning on the solenoid valve and suctioning from the tube 11, the suction tube 7 sucks up the IC package 8. Then, when the solenoid valve is turned off and the air cylinder 1 is turned off, the chuck 6 is pulled back by the coil spring 4. , the IC is positioned inside the chuck 6. FIG. 2 is a schematic plan view of a stage for moving a vacuum chuck for transferring electronic components.

17はェャシリンダー13yでy方向に移動するステー
ジ、16はエヤシリンダ−13×でステージ17上をx
方向に移動するステージである。
17 is an air cylinder 13y, a stage that moves in the y direction, and 16 is an air cylinder 13x, which moves on the stage 17 in the x direction.
It is a stage that moves in the direction.

9は真空チャックのヘッド部である。9 is the head portion of the vacuum chuck.

先づステージ16をA位簿に移動させる。ステージ16
をA位置に移動させた場合、ステージ16上のシャフト
15にアーム12で取付けられた真空チャック9はA′
位置に釆る。A′位置の真空チャック9の真下にはIC
パッケージがコンベア18上に置かれてある。従って真
空チャックを第1図のようにシャフト16に取付けられ
たアーム12をェャシリンダー13zで下方向に移行さ
せ、前述のICパッケージを掴む方法により、真空チャ
ック内にICパッケージを位置決めする。次に真空系に
取付けた感圧センサーによりICパッケージ8がチャッ
ク内に確実に掴まれていることを確認した後ェャシリン
ダー13zをオフすることによりアーム12はスプリン
グ14により上方に持ち上げられる。次いで第2図のよ
うにステージ16をェャシリンダー13×でAの位置か
らBの位置に移動させる。ステージ16をB位置に移動
させた場合真空チャック9はB′位置に来る。B′位置
の真空チャックの真下には特性試験装置が置かれてあり
ので、シャフト15に取付けたアーム12をェャシリン
ダー13zで下方に移行させ、特性試験装置端子(ソケ
ット)上にICパッケージの端子を乗せ押えつけた状態
で特性試験を行う。特性試験終了後ェヤシリンダ−13
zをオフにすることにより、アーム12はスプリング1
4により上方に持ち上げられる。次に特性試験結果に基
づいてICパッケージを良品、不良品用のコンベア上に
置く、もしICパッケージが良品であるならば、ェャシ
リンダー13×でステージ16をA位置に移動する。次
いでェャシリンダー13zで真空チャックを下げ、前述
のICパッケージを掴む工程と逆の工程でICパッケー
ジを良品のコソベア18上に置く。もしICパッケージ
が不良品であるならば、第2図に示すようにェャシリン
ダー13yでステージ17を点線のE位置から実線のF
位置に移動させる。次にェャシリンダー13×でステー
ジ16をC位置からD位置に移動させる。ステージ16
をD位置に移動させると真空チャックは〇位置に来る。
D′位置の真空チャックの真下には不良品用のコソベア
19が有るので、ェヤシリンダー13zで真空チャック
を下げ不良品のICパッケージを不良品用コンベア19
上に置く。次いで真空チャックを上方に移行させた後ェ
ャシリンダー13yでステージ17を実線のF位置から
点線のE位置に移動させる。次いで次の特性試験用IC
パッケージがA′の真下に来るようにコンベア18を1
ステップ移動させる。しかる後前述の工程を繰り返し、
次のICパッケージの特性試験を行う。なお本実施例で
は真空チャック系が1個の場合をあげたが、複数の真空
チャック系で、ICパッケージの特性試験時間を短縮し
たり或いは能率化はかることを可能である。第3図は本
発明の真空チャックの断面図であり、第4図はチャック
でICパッケージを掴む動作を示す概略図である。
First, stage 16 is moved to the A list. stage 16
When the vacuum chuck 9 attached to the shaft 15 on the stage 16 by the arm 12 moves to the A' position, the vacuum chuck 9 is moved to the A' position.
Get into position. There is an IC directly under the vacuum chuck 9 at position A'.
A package is placed on conveyor 18. Therefore, as shown in FIG. 1, the arm 12 attached to the shaft 16 of the vacuum chuck is moved downward by the gear cylinder 13z, and the IC package is positioned within the vacuum chuck by the above-described method of gripping the IC package. Next, after confirming that the IC package 8 is securely gripped in the chuck by a pressure sensor attached to the vacuum system, the arm 12 is lifted upward by the spring 14 by turning off the air cylinder 13z. Next, as shown in FIG. 2, the stage 16 is moved from the position A to the position B using the movement cylinder 13x. When the stage 16 is moved to the B position, the vacuum chuck 9 comes to the B' position. Since a characteristic testing device is placed directly below the vacuum chuck at position B', the arm 12 attached to the shaft 15 is moved downward by the gear cylinder 13z, and the terminal of the IC package is placed on the characteristic testing device terminal (socket). Perform a characteristic test with the product placed and pressed down. Air cylinder 13 after characteristic test
By turning off z, arm 12
4 lifts it upward. Next, based on the characteristic test results, the IC package is placed on the conveyor for good and defective products. If the IC package is good, the stage 16 is moved to position A using the moving cylinder 13x. Next, the vacuum chuck is lowered using the gear cylinder 13z, and the IC package is placed on the non-defective Kosobair 18 in the reverse process to the process of gripping the IC package described above. If the IC package is defective, as shown in FIG.
move to position. Next, the stage 16 is moved from the C position to the D position using the mover cylinder 13x. stage 16
When moved to position D, the vacuum chuck will come to position 〇.
There is a conveyor 19 for defective products directly below the vacuum chuck at position D', so lower the vacuum chuck with the air cylinder 13z and transfer the defective IC package to the conveyor 19 for defective products.
put on top. Next, after moving the vacuum chuck upward, the stage 17 is moved from the solid line F position to the dotted line E position using the mover cylinder 13y. Then the next characteristic test IC
Move the conveyor 18 so that the package is directly under A'.
Move by step. Then repeat the above process,
Perform the following IC package characteristic test. Although this embodiment deals with the case where there is only one vacuum chuck system, it is possible to use a plurality of vacuum chuck systems to shorten the time required to test the characteristics of an IC package or to improve efficiency. FIG. 3 is a sectional view of the vacuum chuck of the present invention, and FIG. 4 is a schematic diagram showing the operation of gripping an IC package with the chuck.

本チャック6は図示の如くV字形の凹部からなる電子部
品の外側面に当援する内壁面6a,6bを有する一組の
ツール6c,6dを備えている。
As shown in the figure, the chuck 6 includes a set of tools 6c and 6d having inner wall surfaces 6a and 6b that support the outer surface of the electronic component, which is a V-shaped recess.

そしてチューブ2から高圧空気がェャシリンダーーに導
入されるとピストン1′がストッパー3を押すことによ
り第4図bの如くチャック6がバネ4の弾性力に抗して
開く。またェャシリンダー1をオフにすると、第4図a
のようにバネ4によりチャック6は閉じる。なおチャッ
ク6はボルト5′がガイド用造5″を左右に移動するこ
とにより開閉が行われる。ICパッケージ8の真空チャ
ックへの吸引は第3図に示すように、チューブ11から
吸引することにより、チャック内の吸引用チューブ7で
ICパッケージ8を吸い上げる。真空系に取り付けられ
た感圧センサーでICパッケージ8が吸引用チューブ7
に吸い上げられていることを確認した後ェャシリンダ−
1をオフにして、チャック6でICパッケージをはさみ
約0.1〜0.2側程度の精度で位置合せする。なお吸
引用チューブ7は若干上下できる構造となったいる。真
空チャックの位置制御、チャック開閉のための電磁弁の
オンオフ、ICパッケージの吸引のための真空系の電磁
弁のオン・オフ等上記動作全てはコンビュ一外こより制
御して行なう。以上の説明から明らかなように、本発明
の真空チャックを使用した電子部品移送装置を用いるこ
とによりICパッケージの特性試験が従来に比べ短時間
で行えるようになった。
When high pressure air is introduced into the air cylinder from the tube 2, the piston 1' pushes against the stopper 3, causing the chuck 6 to open against the elastic force of the spring 4, as shown in FIG. 4b. Also, when the air cylinder 1 is turned off, the
The chuck 6 is closed by the spring 4 as shown in FIG. The chuck 6 is opened and closed by the bolt 5' moving the guide structure 5'' from side to side.The IC package 8 is sucked into the vacuum chuck by suctioning from the tube 11 as shown in FIG. , the IC package 8 is sucked up by the suction tube 7 inside the chuck.The IC package 8 is sucked up by the suction tube 7 using a pressure-sensitive sensor attached to the vacuum system.
After confirming that the air is being sucked up into the air cylinder,
1 is turned off, the IC package is held between chucks 6 and aligned with an accuracy of about 0.1 to 0.2. Note that the suction tube 7 has a structure that allows it to be moved up and down slightly. All of the above-mentioned operations, such as controlling the position of the vacuum chuck, turning on and off the solenoid valve for opening and closing the chuck, and turning on and off the solenoid valve of the vacuum system for suctioning the IC package, are controlled by Combu-I. As is clear from the above description, by using the electronic component transfer device using the vacuum chuck of the present invention, it has become possible to perform characteristic tests on IC packages in a shorter time than in the past.

すなわちパッケージ厚みが1〜数側程度で薄く、足が四
方に広がったICパッケージをピンセットではさんで試
験装置にセットするのに従来では約十数秒要したが本発
明では約0.5秒でできるようになった。また本発明の
真空チャックを使用した電子部品移送装置は、チャック
部の形状をICパッケージに合うように加工すれば形状
の異なるICパッケージ或は他の電子部品等に対しても
適用することができる。また本発明の電子部品移送装置
はICパッケージの入れ換え作業、オートハンドラー、
その他の人間の手で扱い得る物はほとんどハンドリング
可能であり広範囲に利用できる。なお本実施例ではェャ
シリンダ−2本でチャックを開閉する例をあげたが1本
のェャシリンダーでチャックを開閉する構造としてもよ
い。
In other words, conventionally it took about 10-odd seconds to sandwich an IC package with tweezers and set it in a testing device, but with the present invention it can be done in about 0.5 seconds. It became so. Furthermore, the electronic component transfer device using the vacuum chuck of the present invention can be applied to IC packages of different shapes or other electronic components, etc. by processing the shape of the chuck part to match the IC package. . In addition, the electronic component transfer device of the present invention can be used for IC package replacement work, auto handler,
Most other objects that can be handled by humans can be handled and can be used in a wide range of ways. In this embodiment, an example is given in which the chuck is opened and closed using two air cylinders, but a structure in which the chuck is opened and closed using one air cylinder may also be used.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の真空チャックを使用した電子部品移送
装置の概略図、第2図は真空チャックを移動させるステ
ージの平面概略図、第3図は本発明の真空チャックの断
面図、第4図はチャックでICパッケージを掴む動作を
示す概略図、第5図はICパッケージの概略図である。 1:エヤシリンダ−、3:ストッパー、4:バネ、5,
5′:ボルト、5″:ボルト5′のガイド用溝、6:チ
ャック、7:吸引用チューブ、8:ICパッケージ、9
:真空チャックのヘッド部、12:アーム、13×,1
3y,13z:エヤシリンダ−、14:バネ、15:シ
ヤフト、16:x方向ステージ、17:y方向ステージ
、18:コンベア、19:不良品用コンベア。第4図 第、図 第2図 第3図 第5図
FIG. 1 is a schematic diagram of an electronic component transfer device using the vacuum chuck of the present invention, FIG. 2 is a schematic plan view of a stage for moving the vacuum chuck, FIG. 3 is a sectional view of the vacuum chuck of the present invention, and FIG. The figure is a schematic diagram showing the operation of gripping an IC package with a chuck, and FIG. 5 is a schematic diagram of the IC package. 1: Air cylinder, 3: Stopper, 4: Spring, 5,
5': Bolt, 5'': Guide groove for bolt 5', 6: Chuck, 7: Suction tube, 8: IC package, 9
: Head of vacuum chuck, 12: Arm, 13×, 1
3y, 13z: air cylinder, 14: spring, 15: shaft, 16: x direction stage, 17: y direction stage, 18: conveyor, 19: defective product conveyor. Figure 4, Figure 2, Figure 3, Figure 5

Claims (1)

【特許請求の範囲】 1 フラツト型電子部品の外側面に当接するV字形に凹
となつた内壁面をもつ一組のツール部分と、該ツール部
分を弾性挾持せしめる弾性部材と、該ツール部分をガイ
ド用溝でガイド摺動させ該弾性部材の弾性力に抗して拡
充させるエヤシリンダーを含むチヤツキング機構と、該
フラツト型電子部品を吸引保持する上下動可能な吸引用
チユーブを含む吸引系とを有する真空チヤツクと、該真
空チヤツクを3次元方向に移動せしめる駆動機構と、該
吸引系と、該チヤツキング機構と、該駆動機構とを制御
する制御系とを有することを特徴とするフラツト型電子
部品移送装置。 2 フラツト型電子部品を載置移送する第1の移送系と
、該フラツト型電子部品を吸引保持する吸引系と該吸引
系に吸引保持された該フラツト型電子部品を所定精度に
位置合せするチヤツキング機構とを有する真空チヤツク
と、該真空チヤツクを3次元方向に移動せしめるx,y
,zステージ系と該ステージ系の駆動機構と、該真空チ
ヤツクに吸引保持された該フラツト型電子部品の端子を
端子上に載置し、押圧状態で特性試験を行う特性試験装
置系と、該特性試験結果に基き選別移送する第2の移送
系と、該移送系と、該吸引系と、該チヤツキング機構と
、該ステージ系の駆動機構と、該特性試験装置系とを制
御する制御系とを有することを特徴とするフラツト型電
子部品の特性選別装置。
[Claims] 1. A set of tool parts having a V-shaped concave inner wall surface that comes into contact with the outer surface of a flat electronic component, an elastic member that elastically clamps the tool parts, and A chucking mechanism that includes an air cylinder that slides as a guide in a guide groove and expands against the elastic force of the elastic member, and a suction system that includes a vertically movable suction tube that sucks and holds the flat electronic component. A flat electronic component comprising: a vacuum chuck; a drive mechanism for moving the vacuum chuck in a three-dimensional direction; a control system for controlling the suction system; the chucking mechanism; and the drive mechanism. Transfer device. 2. A first transfer system for placing and transferring a flat type electronic component, a suction system for suctioning and holding the flat type electronic component, and a chuck for aligning the flat type electronic component suctioned and held by the suction system with a predetermined accuracy. a vacuum chuck having a mechanism, and an x, y mechanism for moving the vacuum chuck in three-dimensional directions.
, a z stage system, a drive mechanism for the stage system, a characteristic testing device system for placing the terminal of the flat type electronic component suctioned and held by the vacuum chuck on the terminal and performing a characteristic test in a pressed state; a second transfer system that performs selective transfer based on the characteristic test results; a control system that controls the transfer system; the suction system; the chucking mechanism; the drive mechanism of the stage system; and the characteristic testing device system. What is claimed is: 1. A characteristic sorting device for flat type electronic components, characterized by having the following characteristics.
JP55010375A 1980-01-31 1980-01-31 Flat type electronic component transfer and characteristic sorting device Expired JPS6031636B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55010375A JPS6031636B2 (en) 1980-01-31 1980-01-31 Flat type electronic component transfer and characteristic sorting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55010375A JPS6031636B2 (en) 1980-01-31 1980-01-31 Flat type electronic component transfer and characteristic sorting device

Publications (2)

Publication Number Publication Date
JPS56115963A JPS56115963A (en) 1981-09-11
JPS6031636B2 true JPS6031636B2 (en) 1985-07-23

Family

ID=11748381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55010375A Expired JPS6031636B2 (en) 1980-01-31 1980-01-31 Flat type electronic component transfer and characteristic sorting device

Country Status (1)

Country Link
JP (1) JPS6031636B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0216034U (en) * 1988-07-19 1990-02-01

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100444701B1 (en) * 1997-09-13 2004-10-14 삼성전자주식회사 Socket opening apparatus for preventing damage of socket in package inserting/drawing process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0216034U (en) * 1988-07-19 1990-02-01

Also Published As

Publication number Publication date
JPS56115963A (en) 1981-09-11

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